一种高精度光学位移传感器的设计分析

利用晶体双折射和由散射偏振引起的光学干涉技术,设计出一种高精度光学位移传感器.该传感器采用同轴光学系统,测量精度约为4 μm,测量范围不小于28 mm,且测量时不需要使用相干光源,故结构紧凑、性能稳定.     

Measurement of three-dimensional rigid body motion by multiple exposure speckle photography: use of uncollimated beam illumination in free space geometry

A theoretical and experimental analysis is carried out showing the effect of multiple exposures on fringes in the case of three-dimensional motion of a diffuse object illuminated by a diverging beam from a laser point source. Experimental conditions are such that the speckle patterns remain fully correlated in spite of the object moving in three-dimensional space in a direction that makes an angle with the optical axis. Owing to the in-plane component of the three-dimensional displacement the point of null-speckle displacement shifts either in the direction of the in-plane component of the motion or in the opposite direction depending upon the direction of the out-of-plane displacement component. This modifies the fringe profile as compared with the case of pure out-of-plane motion. The intensity distribution at the Fresnel plane of a specklegram is investigated after filtering by a converging beam for double exposure and multiple exposures. Good agreement is found between the theoretical and experimental results.     

Quadrature demodulation technique for self-mixing interferometry displacement sensor

A new, to the best of our knowledge, signal processing method based on quadrature demodulation technique is presented for laser diode self-mixing interferometry(LDSMI) displacement sensor. Phase modulation of the laser beam is obtained by an electro-optic modulator (EOM) in the external cavity. Detection of the target's displacement can be easily achieved by sampling the interference signal at those times which satisfied certain conditions. The major advantage of the technique is that it does not involve any complicated calculation and insensitive to the sampling error. Experimental results show that the proposed method can effectively improve the displacement measurement resolution of the laser diode self-mixing displacement sensor to a few nanometers.     

Non-destructive collimation technique for measuring glass constants using a Ronchi grating shearing interferometer

A non-destructive liquid immersion collimation technique in combination with a Ronchi grating shearing interferometer has been used for determining the constants of a transparent glass material, especially when it is in the form of a lens. Due to its simplicity and the fact that it will work equally well at any wavelength, the technique is superior to existing methods for determining the various glass constants (refractive index, Abbe number or v-value, partial dispersion factor etc).The shearing fringes appearing inside a Ronchi-gram are adequate to locate the exact position of the point source which has been treated as the target in the present communication. The fringe-free space in the overlapping region between the two laterally displaced spherical wavefronts indicates the sharply focused position of the target which corresponds to zero defocusing. In this way the target displacements with different liquids are determined.     

基于Radon变换的横向剪切干涉图的自动检测技术

在分析测试原理的基础上,指出了现有方法的横向剪切量获得的不足,根据剪切图和Radon变换在边缘处具有突变的特点,提出了一种基于Radon变换的横向剪切干涉图的剪切量的自动检测方法,首先根据二维图像的Radon变换结果,得到剪切图的横向移动方向,对图形进行方向校正。然后利用干涉图形的特点对图形在X和Y方向上进行Radon变换,得到剪切量。利用MATLAB进行编程,实验结果表明该方法具有很好的性能和较高的实用价值。     

Multi-frequency lateral shear interferometer system for simultaneous measurement of thickness and three-dimensional shape

This Letter demonstrates a novel lateral shear interferometer system for simultaneous measurement of three-dimensional(3D) shape and thickness of transparent objects. Multi-frequency fringe patterns can be created by tilting mirrors at different inclination angles. With a single camera, the multi-frequency fringes are recorded in one image. The phase-shift of the fringes can be generated synchronously only by moving a plane-parallel plate along an in-plane parallel direction. According to the feature of transparent materials, the thickness and 3D shape can be reconstructed simultaneously based on the relationship between the in-plane displacement and their characteristics. The experiment was conducted on a thin transparent film subjected to a shearing force,which verifies the feasibility of the proposed system.     

Shape and slope measurement by source displacement in shearography

Shearography is a full field non-contact optical technique usually used to measure the gradient of the displacement of a surface subjected to thermal or mechanical loading. This paper describes the use of shearography for surface slope and shape measurement. Interferometric speckle patterns obtained before and after displacement of the optical source are correlated to yield correlation fringes which are, in general, a mixture of slope fringes and carrier fringes. This paper contains a full treatment of the sensitivity of slope fringes to the parameters; the illumination and the imaging geometry and the magnitude and the direction of the source displacement. The slope fringes are corrected for distortion, which is due to the necessary off-axis illumination, and are scaled using parameters calculated using a mathematical model. Experimentally generated phase-stepped slope fringes are unwrapped and integrated to recover the object shape.     

Phase Imaging with a Phase-Shifting X-ray Shearing Interferometer Using an X-ray Line Source

An X-ray shearing interferometer with a line source is presented. The line source broadens X-ray beams and enables us to obtain a phase image with an X-ray image sensor without mechanical scanning. It can reduce the measuring time compared with image acquisition by mechanical scanning. Small phase difference is measured with the phase shift method using acrylic wedges. Although the output beam is overlapped with the non-interfering beams, we can obtain interference fringes with reasonable contrast. With this system we can obtain a projected phase image of an acrylic plate with cellophane tape.     

Speckle interferometry methods for displacement and strain measurements using photorefractive crystal

Photorefractive crystals offer several attractive features such as high resolution and in situ processing. As the images are erasable, these crystals are suitable for read–write applications and hence find potential use in speckle photography, image processing and holography. The barium titanate (BaTiO₃) crystal as recording medium has been extensively used as a novelty filter for real-time in-plane displacement measurements employing two-beam coupling configuration. This paper presents new optical configurations in speckle shear photography to measure in-plan displacement and the strain in real time using BaTiO₃ crystal as recording medium. Speckle photography studies are made using a simple two-beam coupling configuration. In speckle shear photography, a diffused object illuminated with two parallel narrow laser beams is imaged inside the crystal, and a pump beam is added at this plane. The speckle patterns due to each beam and the pump beam produce index gratings. When the object is deformed, the speckle patterns shift consequently. We now have four speckle fields: two generated from the interaction of pump beam with the index gratings and two pertaining to deformed states directly transmitted through the crystal. Thus, the fields from respective points on the object interfere after passage through the crystal and produce the Young's fringe patterns. Due to strain, the fringes in each pattern are of different width and orientation, resulting in the generation of a Moiré pattern. The strain is obtained from the width and orientation of the fringes in the Moiré pattern. The experiments are conducted on a specimen with a notch, which is subjected to tensile loading. The in-plane displacement is measured separately in another experiment. The above studies are carried out at Nd–Yag laser.     

High-accuracy surface position sensor based on a two-lens system

Two optical lenses are used to compose a surface position measuring system. A measurand is positioned near the front focal point of the first lens. At the output end of the other lens, a beam splitter is used to split the beam into two paths. One photodetector is positioned before the focal point of the lens in one path and another after the focal point in the other so that the intensities falling onto the two detectors can be adjusted to be equal when the first lens is in focus. This device provides a compact and high-accuracy surface sensor. In this paper, the design and experimental study of the sensor system is described. It is shown that such a sensor embodiment can lead to a resolution of 1 μm.     

光学综合孔径成像中的傅里叶相位研究

傅里叶相位是光学综合孔径成像的重要信息,观测目标的傅里叶相位包含于干涉条纹中。从像平面干涉条纹形成原理出发,推导出大气扰动、星光方向与基线方向不垂直和望远镜系统机械误差等因素是影响干涉条纹初始相位的主要因素。利用条纹原点值和峰值位移从条纹中提取初始相位,采用闭合相位法从条纹初始相位中去除其它因素的影响,从而最终获取目标傅里叶相位：结合计算机模拟对噪声给条纹峰值位置的影响进行分析,模拟结果表明在频域中对条纹能量谱进行阈值处理有较好的去噪效果。最后结合目标重构迭代法阐述了闭合相位在像重构中的作用。     

The separation of out-of-plane displacement from in-plane components by fringe carrier method based on large image-shearing ESPI

A fringe carrier method for separating out-of-plane displacement from in-plane components based on large image-shearing electronic speckle pattern interferometry (ESPI) is presented. If the test object is respectively illuminated by two expanded symmetric illuminations in large image-shearing ESPI, two interferometers are formed. Carrier fringe patterns can be introduced by tilting reference surface a small angle. The carrier fringe patterns are demodulated after deformation of the object. Two phase maps, which include out-of-plane and in-plane displacement, can be obtained by using Fourier transform. Then out-of-plane displacement can be easily separated from in-plane displacement by simple operation between two unwrapped phase distributions. The principle of spatial carrier frequency modulation in large image-shearing ESPI is discussed. A typical three-point-bending experiment is completed. Experimental results are offered. The results show that the method offers high visibility of carrier fringes. And the system presented does not need a special beam as a reference light and has simple optical setup.     

采用剪切干涉和虚拟光栅的三维形貌检测

本文提出一种新型三维形貌测量方法,该方法通过投影装置将剪切干涉条纹投射到物体表面,以获取调制光栅图。采用相位法,由计算机生成虚拟接收光栅,从一幅调制光栅图重建物体形貌。文中给出了实验结果和性能分析。     

剪切散斑干涉术的统计分析

本文用统计光学方法分析了剪切散斑图的成象过程;散斑图的频谱分布以及全场滤波干涉条纹的形成.发现剪切散斑干涉条纹不仅与三维位移微分有关,而且与面内位移量有关.在此基础上又讨论了影响干涉条纹质量的有关因素,并作了实验验证.     

A microprism array as shearing device for speckle shearing interferometry

In most speckle shearing interferometers image shearing is performed by means of a Michelson interferometer or by means of a wedge prism covering half of the aperture of the camera objective. We present a speckle shearing interferometer which utilizes a microprism array for this purpose. It is placed between the test specimen and the camera. In comparision with a wedge prism it exhibits some advantages: it needs no exact alignment, it works with any camera lens, the shearing distance and direction of shearing can be easily changed by changing position (resp. angular orientation) of the element. Phase stepping for computer evaluation of the speckle shearing interferograms is performed by the translation of the shearing element. A special translation stage was developed. Experimental results are presented. The interferometer is suited for microcomponent and microsystem testing.     

基于无衍射光莫尔条纹的轴锥透镜锥角测量方法

为了准确地测量轴锥透镜锥角值,根据无衍射光同心圆环间距不随距离改变的特点和莫尔条纹放大的特性,提出了一种基于无衍射光莫尔条纹的轴锥透镜锥角的测量方法。当无衍射光束经分束器分光合束后形成莫尔条纹,平移其中一束光在图像传感器上的位置,实现莫尔条纹数量的变化,通过记录不同莫尔条纹下的中心距离计算出轴锥透镜锥角。实验以锥角为0.5°的轴锥透镜作为被测对象,与CMM测量结果进行比较,该文提出的方法相对测量误差近似为0.54%,重复性为0.86″,验证了该文方法测量轴锥透镜锥角的可行性。     

An alternative technique for extraction of in-plane displacement from an image plane hologram

The combination of image plane holography and speckle photography for measurement of 3-D displacements has been reported earlier. It has been observed that when we interrogate such a hologram by an unexpanded laser beam, in addition to the formation of Young's fringes in the direct diffracted beam, very bright side lobes are also generated. If the specimen has undergone any in-plane displacement, high contrast fringes appear in the side lobes. We have demonstrated that these fringes can be used to obtain a precise quantitative in-plane displacement of the object.     

横向剪切干涉中剪切量的选取及分析

横向剪切干涉技术是一种直接测量波面相位分布的光学测量方法,由于其不需要高精度的参考平面,并且能够测量偏离量较大的表面面形偏差,因此得到了更为广泛的应用。但是,通常情况下剪切量大小的选择凭工作经验来确定。为了给出一种定量的剪切量判定方法,论文提出了一种基于Zernike多项式拟合的剪切量判定方法,通过计算机仿真和实验给出了剪切量与测量误差的关系,发现剪切量为测量口径1/10时即可达到良好的测量结果。     

Multi-directional lateral shearing interferometer based on rotatable prism pairs

The common camera lens usually includes the spherical glass/plastic lens and aspheric glass/plastic lens. However, spherical/aspheric shape measurement is still a key problem in the process of optical lens fabrication. At present, the in-process measurement of spherical/aspheric shape is conducted mainly by the probe-contacting method. But after a long time, its probe could be scratched severely and cause some big errors. Laser shearing interferometry is a good substitute to some degree. Nevertheless, it is not convenient for general shearing interferometer to carry out the in-process measurement because it is only suitable for certain kind of spherical/aspheric with respect to aperture or asperity. Here a new lateral shearing interferometer is proposed to solve the described problems. It is based on two Jamin plates and rotatable prism pairs which are used not only for shearing displacement and direction, but also for fringe period and tilt degree, in order to meet requirements of various spherical/aspheric shapes or asperities. The new interferometer features a simple optical structure and two symmetric light paths, which makes its system with minimal error. The relation between shearing displacement, fringe period and prism angle of rotation is given in this paper. And the error source is primarily from the manufacture errors of prisms and plates. The final experiments show that one can achieve good-quality fringe patterns according to the requirement of measurement, concerning the shearing direction, shearing displacement, fringe period, tilt degree, etc.     

粒子成像测速法中询问域大小的选择与粒子位移量的关系

通过分析询问域大小对底片乳剂颗粒产生的散斑噪声及其散斑噪声对干涉条纹识别的影响,推导出了询问域大小的选择与被测粒子位移量之间的关系,并详细讨论和分析了询问域的大小对所能探测的粒子位移量最大值的限止,以及合理选择询问域大小的依据.