Designing high k dielectric films with LiPON—Al2O3 hybrid structure by atomic layer deposition

A large amount of ultra-low-power consumption electronic devices are urgently needed in the new era of the internet of things, which demand relatively low frequency response. Here, atomic layer deposition has been utilized to fabricate the ion polarization dielectric of the LiPON-Al₂O₃ hybrid structure. The LiPON thin film is periodically stacked in the Al₂O₃ matrix. This hybrid structure presents a frequency-dependent dielectric constant, of which k is significantly higher than the aluminum oxide matrix from 1 kHz to 200 kHz in frequency. The increased dielectric constant is attributed to the lithium ions shifting locally upon the applied electrical field, which shows an additional polarization to the Al₂O₃ matrix. This work provides a new strategy with promising potential to engineers for the dielectric constant of the gate oxide and sheds light on the application of electrolyte/dielectric hybrid structure in a variety of devices from capacitors to transistors.     

TiO<Subscript>2</Subscript> microstructures by inversion of macroporous silicon using atomic layer deposition

An approach is presented which is capable of fabricating arbitrarily shaped three-dimensional microstructures. Two methods—namely, macroporous silicon and atomic layer deposition—are combined to realize structures in the micrometer and submicrometer range. Using TiO₂ as an example, the fabrication of single hollow objects as well as complex network structures is shown. The scalability and the wide range of applicable materials are the key points of this method for future applications.     

Influences of annealing on structural and compositional properties of Al_2O_3 thin films grown on 4H–SiC by atomic layer deposition

Annealing effects on structural and compositional performances of Al_2O_3 thin films on 4H–Si C substrates are studied comprehensively. The Al_2O_3 films are grown by atomic layer deposition through using trimethylaluminum and H_2 O as precursors at 300?C, and annealed at various temperatures in ambient N_2 for 1 min. The Al_2O_3 film transits from amorphous phase to crystalline phase as annealing temperature increases from 750?C to 768?C. The refractive index increases with annealing temperature rising, which indicates that densification occurs during annealing. The densification and grain formation of the film upon annealing are due to crystallization which is relative with second-nearest-neighbor coordination variation according to the x-ray photoelectron spectroscopy(XPS). Although the binding energies of Al 2p and O 1s increase together during crystallization, separations between Al 2p and O 1s are identical between as-deposited and annealed sample, which suggests that the nearest-neighbour coordination is similar.     

Microstructure and photoluminescence of Er-doped SiOx films synthesized by ion beam assisted deposition

Er-doped SiO_x films were synthesized at 500℃ by ion beam assisted deposition technique and annealed at 800 and 1100℃ for 2h in the air atmosphere. The analysis by using energy dispersive x-ray spectroscopy showed that the ratio of Si to O decreased from 3 in the as-deposited films to about 1 in the annealed films. The investigation by using transmission electron microscopy and x-ray diffraction indicated that annealing induces a microstructure change from amorphous to crystalline. The grain sizes in the films were about 10 and 40nm when annealed at 800 and 1100℃, respectively. The films annealed at temperatures of 800 and 1100℃ exhibited a sharp photoluminescence (PL) at 1.533μm from the Er centres when pumped by 980nm laser. The influence of microstructure and grain size on the PL from Er-doped SiO_x films has been studied and discussed.     

II–VI semiconductor nanoparticles synthesized by laser ablation

Nanoparticles of the II–VI semiconductors CdTe, CdSe and ZnTe were synthesized by laser ablation (387 nm, 180 fs, 1 kHz, pulse energy of 7 μJ (fluence of 2 J/cm²)) of the target materials in methanol, de-ionized water and acetone. The nanoparticles size distributions follow log-normal functions with median diameters between about 6 and 11 nm for the several materials. The nanoparticles have the same crystalline structure as that of the corresponding bulk material and under the present conditions of ablation are rich in the higher volatility element of the two in the binary alloy and oxidized. Photoluminescence emission in the green-yellow (∼570 nm) was detected from CdSe nanoparticles.     

Functional Fe–Pd nanomaterials synthesized by template-assisted methods

In this work, we highlight our recent progress in the synthesis and characterization of functional nanomaterials based on Fe–Pd ferromagnetic alloys by means of template-assisted deposition techniques employing highly ordered nanoporous alumina membranes, such as ordered arrays of nanowires and antidots thin films. Special attention is paid on their basic magnetic properties, such as coercivity, remanence and magnetic anisotropy, and their dependence on the microstructure and morphological parameters of the ordered arrays.     

Growth of polymer–metal nanocomposites by pulsed laser deposition

Complex polymer–metal nanocomposites have a wide range of applications, e.g. as flexible displays and packaging materials. Pulsed laser deposition was applied to form nanostructured materials consisting of metal clusters (Ag, Au, Pd and Cu) embedded in a polymer (polycarbonate, PC) matrix. The size and amount of the metal clusters are controlled by the number of laser pulses hitting the respective targets. For Cu and Pd, smaller clusters and higher cluster densities are obtained as in the cases of Ag and Au due to a stronger reactivity with the polymers and thus a lower diffusivity. Implantation effects, differences in metal diffusivity and reactivity on the polymer surfaces, and the coalescence properties are discussed with respect to the observed microstructures on PC and compared to the metal growth on poly (methyl methacrylate), PMMA.     

Electrical properties, structure, and surface morphology of poly(p-xylylene)–silver nanocomposites synthesized by low-temperature vapor deposition polymerization

The crystalline structure, surface morphology, electrical, and optical properties of thin films of nanocomposites consisting of silver nanoparticles embedded in poly(p-xylylene) matrix prepared by low-temperature vapor deposition polymerization were studied. Depending on the filler content, the average size of silver nanoparticles varied from 2 to 5 nm for nanocomposites with 2 and 12 vol.% of silver, correspondingly. The optical adsorption in the visible region due to surface plasmon resonance also exhibited a clear correlation from silver content, revealing a red shift of the adsorption peak with the increase of the metal concentration. The temperature dependences of the dc resistance of pure p-xylylene condensate and p-xylylene–silver cocondensates during polymerization as well as temperature dependences of the formed poly(p-xylylene)–silver nanocomposites were examined. The observed variation of the temperature dependences of electrical resistance as a function of silver concentration are attributed to different conduction mechanisms and correlated with the structure of the composites. The wide-angle X-ray scattering and AFM measurements consistently show a strong effect of silver content on the nanocomposite structure. The evolution of the size of silver nanoparticles by thermal annealing was demonstrated.     

Determination of Particle Size,Core and Shell Size Distributions of Core–Shell Particles by Analytical Ultracentrifugation

In core–shell nanoparticle analysis, the determination of size distributions of the different particle parts is often complicated, especially in liquid media. Density matching is introduced as a method for analyzing core–shell nanoparticles using Analytical Ultracentrifugation (AUC), making it possible to obtain the core size distribution in liquid dispersions. For this approach, the density of the dispersion is adjusted to the density of the shell. Oil filled nanocapsules are utilized with component densities of around 1 g mL⁻¹ to demonstrate this technique. The shell size distribution is calculated supposing the particle size distribution as a convolution of the shell- and core size distributions. Finally, the distributions of core size, shell thickness, particle size, and particle density and thus particle composition are obtained. To clarify the effect of swelling, AUC measurements are combined with further size characterization methods like Particle Tracking Microscopy and Dynamic Light Scattering.     

Classical simulation of atomic beam focusing and deposition for atom lithography

We start from the intensity distribution of a standing wave (SW) laser field and deduce the classical equation of atomic motion.The image distortion is analyzed using transfer function approach. Atomic flux density distribution as a function of propagation distance is calculated based on Monte-Carlo scheme and trajectory tracing method.Simulation results have shown that source imperfection,especially beam spread, plays an important role in broadening the feature width,and the focus depth of atom lens for real atomic source is longer than that for perfect source.The ideal focal plane can be easily determined by the variation of atomic density at the minimal potential of the laser field as a function of traveling distance.     

Room-temperature ferromagnetism in amorphous In–Ga–Zn–O films fabricated by using pulsed-laser deposition

Room-temperature ferromagnetism (RTFM) was observed in pulsed-laser deposited amorphous In–Ga–Zn–O (a-IGZO) films undoped with impurities containing unpaired d or f electrons. The presence of oxygen vacancies in the prepared a-IGZO films was verified by X-ray photoelectron spectroscopy and suggested to be responsible for the observed RTFM. The electrical and optical properties of the a-IGZO films were also investigated.     

Effect of InxGal-xN ＂continuously graded＂ buffer layer on InGaN epilayer grown by metalorganic chemical vapor deposition

In this paper we report on the effect of an lnxGal xN continuously graded buffer layer on an InGaN epilayer grown on a GaN template. In our experiment, three types of buffer layers including constant composition, continuously graded composition, and the combination of constant and continuously graded composition are used. Surface morphologies, crystalline quality, indium incorporations, and relaxation degrees of InGaN epilayers with different buffer layers are investigated. It is found that the InxGa1-xN continuously graded buffer layer is effective to improve the surface morphology, crystalline quality, and the indium incorporation of the InGaN epilayer. These superior characteristics of the continuously graded buffer layer can be attributed to the sufficient strain release and the reduction of dislocations.     

Structure and magnetic properties of Co–Ni–Li ferrites synthesized by citrate precursor method

Nanoparticles of Co_0.5Ni_0.5−2xLi_xFe_2+xO₄ with x ranging from 0.00 to 0.25 in steps of 0.05 were prepared by using citrate precursor method. The microstructure and the magnetic properties of the as-prepared nanosamples and the effect of increasing Li¹⁺ ions on their physical properties were studied. X-ray diffraction (XRD), transmission electron microscopy (TEM), particle size analyzer (PSA), Fourier transform infrared spectroscopy (FTIR) and vibrating sample magnetometer (VSM) were used to investigate the samples. The XRD analysis confirmed the cubic spinel phase formation of the prepared samples, while TEM images and PSA ensure the nanostructural features of them. The FTIR spectra reveal the presence of two prominent absorption bands v₁ and v₂ in the range of 600 and 400 cm⁻¹ which are usually attributed to the tetrahedral and octahedral complexes of the spinel lattice, respectively. The change of v₂ gradually towards lower frequency and the slightly change of v₁ were explained depending on the effect of increasing Li¹⁺ content on the bond length of B-site metal ions and the spin canting of A-site metal ions, respectively. Saturation magnetization and remnant magnetization were found to increase with adding Li¹⁺ ions up to x=0.15 and then to decrease again, while coercivity decreases monotonically by increasing Li¹⁺ ions. The change in magnetic properties by adding Li¹⁺ ions is explained as to be dependent on many factors such as crystallite size, measured density, porosity, expected cation distribution, A–B exchange interactions, and magnetocrystalline anisotropy.     

Study on electro-magnetic properties of La substituted Ni–Cu–Zn ferrite synthesized by auto-combustion method

(Ni_0.25Cu_0.20Zn_0.55)La_xFe_2−xO₄ ferrite with x=0.00, 0.025, 0.050 and 0.075 compositions were synthesized through nitrate–citrate auto-combustion method. Crystalline spinel ferrite phase with about 16–19 nm crystallite size was present in the as-burnt ferrite powder. These powders were calcined, compacted and sintered at 950 °C for 4 h. Initial permeability, magnetic loss and AC resistivity of different compositions were measured in the frequency range from 10 Hz to 10 MHz. Saturation magnetization and hysteresis parameters were measured at room temperature with a maximum magnetic field of 10 kOe. Permeability and AC resistivity were found to increase and magnetic loss decreased with La substitution for Fe, up to x=0.025. Saturation magnetization and coercive field also increases up to that limit. The electromagnetic properties were found best in the ferrite composition of x=0.025, which would be better for more miniaturized multi layer chip inductor.     

Photoluminescence of amorphous carbon films fabricated by layer—by—layer hydrogen plasma chemical annealing method

A method in which nanometre-thick film deposition was alternated with hydrogen plasma annealing (layer-by-layer method) was applied to fabricate hydrogenated amorphous carbon films in a conventional plasma-enhanced chemical vapour deposition system.It was found that the hydrogen plasma treatment could decrease the hydrogen concentration in the films and change the sp^2/sp^3 ratio to some extent by chemical etching.Blue photoluminescence was observed at room temperature,as a result of the reduction of sp^2 clusters in the films.     

Indium doping effect on properties of ZnO nanoparticles synthesized by sol–gel method

Pure ZnO and indium-doped ZnO(In–ZO) nanoparticles with concentrations of In ranging from 0 to 5% are synthesized by a sol–gel processing technique. The structural and optical properties of ZnO and In–ZO nanoparticles are characterized by different techniques. The structural study confirms the presence of hexagonal wurtzite phase and indicates the incorporation of In~(3+) ions at the Zn~(2+) sites. However, the optical study shows a high absorption in the UV range and an important reflectance in the visible range. The optical band gap of In–ZnO sample varies between 3.16 e V and 3.22 e V. The photoluminescence(PL) analysis reveals that two emission peaks appear: one is located at 381 nm corresponding to the near-band-edge(NBE) and the other is observed in the green region. The aim of this work is to study the effect of indium doping on the structural, morphological, and optical properties of ZnO nanoparticles.     

Core–corona PSt/P(BA–AA) composite particles by two-stage emulsion polymerization

Raspberry-shaped composite particles with polystyrene (PSt) as core and poly(n-butyl acrylate-co-acrylic acid) (P(BA–AA)) as corona were synthesized via emulsion polymerization. The random copolymer, P(BA–AA), was pre-prepared and used as a polymeric surfactant, its emulsifying properties adjusted by changing the mass ratio of BA and AA. The morphology of the resulting core–corona composite particles, P(St/P(BA–AA)), could be regulated and controlled by varying the concentrations of P(BA–AA) or the mass ratio of BA:AA in P(BA–AA). The experimental results indicate that 3.0–6.0 wt% of P(BA–AA) is required to obtain stable composite emulsions, and P(BA–AA) with a mass ratio of BA:AA = 1:2 is able to generate distinct core–corona structures. A mechanism of composite particle formation is proposed based on the high affinity between the PSt core and the hydrophobic segments of P(BA–A). The regular morphology of the colloidal film is expected to facilitate potential application of core–corona particles in the field of light scattering. Furthermore, the diversity of core–corona particles can be expanded by replacing P(BA–AA) corona particles with other amphiphilic particles.     

Shockwave–boundary layer interaction control by plasma aerodynamic actuation:An experimental investigation

The potential of controlling shockwave–boundary layer interactions(SWBLIs) in air by plasma aerodynamic actuation is demonstrated. Experiments are conducted in a Mach 3 in-draft air tunnel. The separation-inducing shock is generated with a diamond-shaped shockwave generator located on the wall opposite to the surface electrodes, and the flow properties are studied with schlieren imaging and static wall pressure probes. The measurements show that the separation phenomenon is weakened with the plasma aerodynamic actuation, which is observed to have significant control authority over the interaction. The main effect is the displacement of the reflected shock. Perturbations of incident and reflected oblique shocks interacting with the separation bubble in a rectangular cross section supersonic test section are produced by the plasma actuation. This interaction results in a reduction of the separation bubble size, as detected by phase-lock schlieren images.The measured static wall pressure also shows that the separation-inducing shock is restrained. Our results suggest that the boundary layer separation control through heating is the primary control mechanism.     

Magnetic anisotropy in Ni–Si nanoparticle films produced by ultrashort pulsed laser deposition

Pulsed laser deposition (uPLD) in vacuum by means of subpicosecond laser pulses is a powerful, versatile technique for the production of films constituted by nanoparticles. On impact with the deposition substrate, the nanodrops ejected from the target assume an oblate ellipsoidal shape, solidifying with the major cross-section parallel to the substrate plane. These features and the difficult coalescence among the deposited nanoparticles are peculiar characteristics specific to the films obtained by uPLD. In the case of magnetic nanoparticle films obtained by means of this technique, a magnetization isotropy in the film plane and a hard magnetization axis orthogonal to the film plane are expected. This simple assumption, generated by the specific shape and orientation of the deposited nanoparticles, was not experimentally verified up to now. The present investigation represents the first experimental validation of magnetic anisotropy, determined by the peculiar morphology and topology of the constituent particles, in the uPLD Ni_xSi_100−x nanoparticle films. The in-plane isotropic magnetization behaviour, as well as the presence of a hard magnetization axis perpendicular to the sample surface were demonstrated for all investigated films. The difficult coalescence among the magnetic nanoparticles, even at high Ni volume fractions, is confirmed by the behaviour of the initial magnetization curve, typical for single-domain nanoparticles systems.