分子束外延n-GaAs/SI-GaAs薄膜材料的拉曼光谱研究

用分子束外延(MBE)技术, 在GaAs(100)衬底上生长了不同Si掺杂浓度（从1016 cm-3到1018 cm-3）的n-GaAs薄膜。通过在室温下拉曼光谱的测量对n-GaAs薄膜的谱形进行了分析,拉曼位移出现了明显的移动,光学横模TO峰相对的增强,光学纵模LO峰相对的减弱。文章分析了原因这是由于Si掺杂浓度不断的提高,致使界面失配位错不断地提高造成的,内部应力也在不断的增大,原来的晶格振动平衡被破坏,四价Si替代了三价Ga致使谱线移动。并且由于横声子模具有Raman活性,横声子模被相对的增强了。实验结果与理论是互相吻合的。     

在6H-SiC衬底上用低压MOVPE法生长AlN和GaN的过程中用(AlN/GaN)多层缓冲层来控制残余应力

人们已提出用BAlGaN四元系材料制备紫外光谱区的光发射器件.GaN和AlN二元系是这种四元材料在器件应用中的基础材料.6H-SiC衬底在氮化物生长中因其晶格失配小是一大优势,而且SiC衬底的热膨胀系数也和AlN的很接近.然而,对于AlN外延层来说,需要控制其中的残余应力,因为在SiC衬底上直接生长的AlN外延层中存在着因晶格失配所产生的压缩应力.另一方面,在SiC衬底上直接生长的GaN外延层中存在着拉伸应力.这种拉伸应力起源于GaN比衬底有着更大的热膨胀系数.本文讨论了在6H-SiC衬底上生长的氮化物外延层中残余应力的类型、数量及控制.为此目的,提出了在6H-SiC衬底上,无论是生长AlN,还是生长GaN,都可以采用(GaN/AlN)多层缓冲层的办法,作为控制残余应力的有效方法.我们还讨论了AlN和GaN外延层的结晶质量和残余应力间的关系.     

GaN载流子浓度和迁移率的光谱研究

用红外反射光谱的方法对生长在蓝宝石衬底上的α-GaN外延薄膜的载流子浓度和迁移率进行了研究.通过测量蓝宝石衬底和不同Si掺杂浓度的一系列GaN外延膜的远红外反射谱并进行理论计算和拟合,得到GaN中的声子振动参量和等离子振荡的频率及阻尼常量,并由此计算得到其载流子浓度和迁移率.计算结果,红外方法得到的载流子浓度与Hall测量相一致,但迁移率比Hall迁移率要低约二分之一.同时红外谱与喇曼谱上明显观察到LO声子与等离子体激元耦合模,(LPP)随掺杂浓度的变化. 关键词： α-GaN外延薄膜 红外反射光谱 载流子浓度 迁移率 LO声子与等离子体激元耦合模 Raman光谱     

气相外延GaN的拉曼散射

测量了在蓝宝石衬底上气相外延生长GaN的拉曼散射谱.除观察到已被确认的两个E2,一个A1(TO)和一个E1(TO)声于振动以外,在734±3cm-1处观察到一个散射峰且从实验上确认其为GaN的纵向光学声子模E1(LO).而且发现其强度与外延层晶体质量密切相关.A1(TO)和高频E2散射峰相对强度变化显示不同生长条件引起的外延层质量的变化.     

LPE碲镉汞薄膜的显微Raman谱与显微荧光谱分析

利用Raman显微镜系统对4块用液相外延(LPE)方法在Cd0.96Zn0.04Te衬底上生长的Hg0.8Cd0.2Te外延薄膜样品，在100～5 000cm^-1光谱范围进行测量，在实验曲线中除了观察到与碲镉汞材料晶格振动相符的类．HgTe的光学振动横模(TO1模)和纵模(LO1模)的Raman散射峰、类-CdTe光学振动横模(TO2模)和纵模(LO2模)混合的Raman散射峰以及来源于TO1 LO1的二级Raman散射峰外，在1 000～5 000cm^-1光谱范围首次发现了LPE碲镉汞薄膜的显微荧光峰，该显微荧光的发光范围换算为电子伏特标度为1．34～1．83eV．发光中心位于2750cm^-1即1.62eV，发光峰的半高宽(FWFIM)约为0．25eV。通过分析指出．该显微荧光来源于碲镉汞外延层中阴性离子空位与材料导带底的共振能级的发光。     

分子束外延GaAs/Si材料的喇曼散射研究

对逐层腐蚀的GaAs/Si材料进行喇曼散射实验,研究晶格振动声子谱沿外延生长方向的剖面分布,发现GaAs外延层从表面到界面经历着从双轴张应力到双轴压应力的变化。用Anastassakis等人提出的特殊相关模型对GaAsLO声子的谱形进行分析,发现GaAs外延层的晶体质量随着外延层厚度的减薄(从1μm—500?)是渐渐退化的,这是由于界面失配位错进入外延层所致。对GaAs LO声子与TO声子强度之比分析表明:外延层厚度从3.3μm变化到1μm左右时,其晶体质量并不是简单地随着厚度的减薄而退化,在1.3μm左右外延层晶体质量反而变好。对这种现象做了详细的讨论。 关键词：     

纤锌矿GaN外延层薄膜热膨胀行为的变温Raman散射研究

本文对纤锌矿结构GaN外延层薄膜的热膨胀行为进行了研究,结合热膨胀系数的物理意义与变温Raman散射时声子频移的变化规律,研究了热膨胀系数与变温Raman散射之间的关系.结果表明:通过测量Raman声子E_2(high),A_1(TO)和E_1(TO)频移与温度之间的线性关系,结合相应声子Gruneisen参数的涵义,可对纤锌矿结构GaN外延层薄膜在一定温度范围内的热膨胀系数进行测量.本文提供了一种表征纤锌矿结构GaN外延层薄膜热膨胀行为的有效方法,为进一步研究III族氮化物外延层薄膜在生长过程中热膨胀系数的匹配、降低外延层薄膜中的位错密度并提高发光二极管的发光效率提供了理论依据.     

三元合金Ga_(0.52)In_(0.48)P的喇曼散射谱

采用室温下微区Raman散射方法 ,观测到了GaInP2 的LO双模行为和禁戒的TO模 ,由于晶格有序导致晶体对称性从Td 降低为C3v,从而使禁戒的TO模变为Raman活性。在所有的样品中都观测到了由晶格无序激活的DALA模。在有序样品中 ,除观测到了二级Raman散射峰LO1+LO2 以外 ,还观测到了由超晶格效应所导致的FLA折叠模和LO模的分裂。对LO模峰谷比b/a的分析表明 ,随着晶格有序度的增加 ,b/a值减小。这是因为 :一方面主要是由于禁戒的TO模变为Raman活性所引起的 ,另一方面 ,还可能有LO1模和LO2 模分裂的贡献。在实验上 ,可以用b/a值或FLA的强度来表示样品的有序度。     

AlN插入层对a-AlGaN的外延生长的影响

采用有机金属化学气相沉积(MOCVD)在r面蓝宝石衬底上生长a-AlGaN外延膜,研究了AlN插入层对a-AlGaN外延膜的应力和光学性质的影响。根据高分辨X射线衍射(HRXRD)技术和扫描电子显微镜(SEM)我们可以得到,AlN插入层有效地提高了a-AlGaN外延膜的晶体质量并减小了外延膜材料结构的各向异性。由拉曼光谱得到AlN插入层的引入减小了a-AlGaN外延膜的面内压应力,其原因是AlN插入层可以当作衬底有效的调制与减小a-AlGaN外延膜与r面蓝宝石衬底的晶格失配,从而使a-AlGaN的面内应力得到适当释放。对室温下的光致发光进行测量得到AlN插入层的使用使近带边发射峰(NBE)发生了红移,这可能是由于残余应力的减小引起。     

基于CVD方法生长在硅基底上立方碳化硅的拉曼散射研究（英文）

立方碳化硅(3C-SiC)薄膜通过化学气相沉积(CVD)制备在Si(100)衬底上。本论文主要通过椭偏光谱仪(SE)和拉曼散射仪对3C-SiC薄膜的微观结构和光学性能进行进一步的研究。根据SE的分析获得3CSiC薄膜厚度;根据拉曼散射的分析:可从TO模式和LO模式的线形形状的拟合得到样品的相关长度和载流子浓度。结果表明:该碳化硅(3C-SiC)薄膜质量随膜厚度增加而得到提高,同时分析了外延层厚度对薄膜特性的影响。     

GaN外延层的拉曼散射研究

ＧａＮ外延层的拉曼散射研究１李国华１韩和相１汪兆平２段树琨３王晓亮（１半导体超晶格国家重点实验室２集成光电子学国家重点联合实验室３半导体材料科学实验室中国科学院半导体研究所北京１０００８３）ＲａｍａｎＳｃａｔｅｒｉｎｇｏｆＧａＮＥｐｉｌａｙｅｒ１Ｌ...     

Si(100)衬底上n-3C-SiC/p-Si异质结构研究

利用LPCVD方法在Si(100)衬底上获得了3C-SiC外延膜,扫描电子显微镜(SEM)研究表明3C-SiC/p-Si界面平整、光滑,无明显的坑洞形成。研究了以In和Al为接触电极的3C-SiC/p-Si异质结的I-V,C-V特性及I-V特性的温度依赖关系,比较了In电极的3C-SiC/p-Si异质结构和以SiGe作为缓冲层的3C-SiC/SiGe/p-Si异质结构的I-V特性,实验发现引入SiGe缓冲层后,器件的反向击穿电压由40V提高到70V以上。室温下Al电极3C-SiC/p-Si二极管的最大反向击穿电压接近100V,品质因子为1.95。     

5 μm thick 3C-SiC layers grown on Ge-modified Si(100) substrates

The effect of the germanium coverage prior to the epitaxial growth of 5 μm thick 3C-SiC on Si(100) substrates were evaluated with Atomic Force Microscopy and μ-Raman spectroscopy. The 3C-SiC layers were grown by atmospheric pressure chemical vapor deposition via a special procedure leading to layers with compressive instead of tensile stress. The Ge amount was varied from 0 up to 2 ML. The obtained results showed that the residual stress inside the layers is shifted in the compressive direction; the crystalline quality is improved with the Ge introduction but on the account of the surface roughness. These results open the route for the use of Ge-modified Si(100) as a potential substrate in order to improve the heteroepitaxial growth of 3C-SiC on silicon substrates.     

Raman scattering as a probe of the tensile strain distribution in GaAs grown on Si(111) by molecular beam epitaxy

Epitaxial layers of GaAs grown on Si substrates, where the layer thickness greatly exceeds any critical thickness based on mismatch in lattice constant alone, have been shown to be under tensile strain for temperature at or below 300 K. This "thermal" strain arises from the difference in thermal expansion coefficients between GaAs and Si. We have performed Raman experiments on GaAs layers grown on both Si (001) and Si (111) substrates. We have observed a shift in the optical modes towards lower frequencies which is indicative of tensile strain in the GaAs layers, this is greater in the (111) growth direction than in the (001) one. In order to investigate the strain distribution as a function of distance from the GaAs/Si interface we have measured Raman spectra after successive removing of the epitaxial layer by chemical etching. We have found out that the strain decreases with increasing distance from the interface. We have developed the theory of Cerdeira et al. (1) to determine quantitatively the strain present in the heteroepitaxial layers. We have used, for the first time, polarization selection rules to separate the various components of the optical phonon modes. According to the theory we have observed that the doubly degenerate TO phonon line exhibits both a splitting and shift with strain, while only a shift is observed for the LO phonon line. In conformity with Cerdeira we have remarked that the strain dependence of the LO phonon is equal to that of the TO phonon mode observed in crossed polarization configuration.     

Laser–MBE growth of high-quality ZnO thin films on Al2O3(0001) and SiO2/Si(100) using the third harmonics of a Nd:YAG laser

High-quality ZnO thin films were grown on single-crystalline Al₂O₃(0001) and amorphous SiO₂/Si(100) substrates at 400–640 °C using laser molecular beam epitaxy. For film growth, the third harmonics of a pulsed Nd:YAG laser were illuminated on a ZnO target. The ZnO films were epitaxially grown on Al₂O₃(0001) with the narrow X-ray diffraction full width at half maximum (FWHM) of 0.04° and the films on SiO₂/Si(100) exhibited a preferred c-axis orientation. Furthermore, the films exhibited excellent optical properties in photoluminescence (PL) measurements with very sharp excitonic and weak deep-level emission peaks. At 15 K, PL FWHM values of the films grown on Al₂O₃(0001) and SiO₂/Si(100) were 3 and 18 meV, respectively. Received: 8 May 2001 / Accepted: 18 September 2001 / Published online: 20 December 2001     

Zn_（1－x）Mg_xS_ySe_（1－y）四元半导体合金的拉曼散射光谱研究

用分子束外延方法在ＧａＡｓ（１００）衬底上生长了Ｚｎ１－ｘＭｇｘＳｙＳｅ１－ｙ四元半导体合金薄膜．用Ｘ－射线衍射方法确定了外延层的结构和晶格常数．测量了这些样品在平行和垂直两种不同几何配置下的拉曼散射光谱并对其特性做了研究。从实验上观察到了四类不同的晶格振动模：类ＺｎＳｅ的ＴＯ和ＬＯ模以及类ＺｎＳ和类ＭｇＳ的ＬＯ模，实验发现：在ＺｎＳｅ和ＺｎＳＳｅ中加入Ｍｇ使得类ＺｎＳｅ的ＴＯ和ＬＯ模的振动频率下降；同时，也使类ＺｎＳ模的频率随Ｓ的增加率减小。     

Temperature-dependent photoluminescence spectra of GaN epitaxial layer grown on Si(111) substrate

In this paper, the temperature-dependent photoluminescence(PL) properties of Ga N grown on Si(111) substrate are studied. The main emission peaks of Ga N films grown on Si(111) are investigated and compared with those grown on sapphire substrates. The positions of free and bound exciton luminescence peaks, i.e., FX A and D0 X peaks, of Ga N films grown on Si(111) substrates undergo red shifts compared with those grown on sapphire. This is attributed to the fact that the Ga N films grown on sapphire are under the action of compressive stress, while those grown on Si(111) substrate are subjected to tensile stress. Furthermore, the positions of these peaks may be additionally shifted due to different stress conditions in the real sample growth. The emission peaks due to stacking faults are found in Ga N films grown on Si(111) and an S-shaped temperature dependence of PL spectra can be observed, owing to the influence of the quantum well(QW) emission by the localized states near the conduction band gap edge and the temperature-dependent distribution of the photo-generated carriers.     

The comparison between CdS thin films grown on Si(111) substrate and quartz substrate by femtosecond pulsed laser deposition

Two kinds of cadmium sulfate (CdS) thin films have been grown at 600 °C onto Si(111) and quartz substrates using femtosecond pulsed laser deposition (PLD). The influence of substrates on the structural and optical properties of the CdS thin films grown by femtosecond pulsed laser deposition have been studied. The CdS thin films were characterized by X-ray diffraction (XRD), atomic force microscopy (AFM), scanning electron microscopy (SEM), photoluminescence (PL) and Raman spectroscopy. Although CdS thin films deposited both on Si(111) and quartz substrates were polycrystalline and hexagonal as shown by the XRD , SEM and AFM results, the crystalline quality and optical properties were found to be different. The size of the grains for the CdS thin film grown on Si(111) substrate were observed to be larger than that of the CdS thin film grown on quartz substrate, and there is more microcrystalline perpendicularity of c-axis for the film deposited on the quartz substrate than that for the films deposited on the Si substrate. In addition, in the PL spectra, the excitonic peak is more intense and resolved for CdS film deposited on quartz than that for the CdS film deposited on Si(111) substrate. The LO and TO Raman peaks in the CdS films grown on Si(111) substrate and quartz substrate are different, which is due to higher stress and bigger grain size in the CdS film grown on Si(111) substrate, than that of the CdS film grown on the amorphous quartz substrate. All this suggests that the substrates have a significant effect on the structural and optical properties of thin CdS films. PACS 81.15.Fg; 81.05.Ea; 78.20.-e; 78.67.-n; 42.62.-b     

Photoluminescence studies of ZnO thin films on R-plane sapphire substrates grown by sol–gel method

Zinc oxide (ZnO) thin films on R-plane sapphire substrates were grown by the sol–gel spin-coating method. The optical properties of the ZnO thin films were investigated using photoluminescence. In the UV range, the asymmetric near-band-edge emission was observed at 300 K, which consisted of two emissions at 3.338 and 3.279 eV. Eight peaks at 3.418, 3.402, 3.360, 3.288, 3.216, 3.145, 3.074, and 3.004 eV, which respectively correspond to the free exciton (FX), bound exciton, transverse optical (TO) phonon replica of FX recombination, and first-order longitudinal optical phonon replica of FX and the TO (1LO+TO), 2LO+TO, 3LO+TO, 4LO+TO, and 5LO+TO, were obtained at 12 K. From the temperature-dependent PL, it was found that the emission peaks at 3.338 and 3.279 eV corresponded to the FX and TO, respectively. The activation energy of the FX and TO emission peaks was found to be about 39.3 and 28.9 meV, respectively. The values of the fitting parameters of Varshni's empirical equation were α=4×10^?3 eV/K and β=4.9×10³ K, and the S factor of the ZnO thin films was 0.658. With increasing temperature, the exciton radiative lifetime of the FX and TO emissions increased. The temperature-dependent variation of the exciton radiative lifetime for the TO emission was slightly higher than that for the FX emission.