Issues on nanoimprint lithography with a single-layer resist structure

We summarize our key developments in nanoimprint lithography (NIL) that employs a single layer resist lift-off process: lowering of the imprint temperature (for thermal imprint) and pressure, achieving uniform resist thickness and low residual resist layer thickness in the trenches, and eliminating metal ‘rabbit ears’ for the single-layer lift-off. In thermal NIL, our requirements for lower operating temperature and pressure motivated us to develop an alternative resist that is a viscous fluid at room temperature and cures at a lower temperature of 70 °C than the operating temperature of the conventional thermal NIL (≈200 °C). For UV NIL, we devised a method to dispense the resist onto a hydrophobic mold and use the hydrophilic substrate surface to spread the resist via surface wetting to engineer a continuous and uniform film. We also explored the use of Si(110) substrates as molds to produce features with perfectly vertical side walls, and the use of aqua regia to directly etch away rabbit ears. PACS 86.65.+h; 81.16.Nd; 81.16.Rf     

Phonon structure and dynamics of boron nitride single wall nanotube

We report a detailed study of the phonon properties of hexagonal boron nitride (BN) monolayers as well as nanotubes by using De Launay type of angular force model. The force constants used for calculation of phonon dispersion relations of the nanotube are derived from those for the monolayers of hexagonal by employing force constant method. These force constants have been modified to include the effect of curvature of the tubule. The results are then used to derive the phonon dispersion relations for (10,10) BN nanotubes using ‘zone-folding’ method. Calculated phonon modes are in good agreement with the experimental values obtained so far, for (10,10) armchair BN nanotubes.     

Interferometric testing of optical aspherical surfaces

This paper explains theoretically the principle of the Talbot interferometer using two ‘Fourier images’. The experimental results show that video techniques are more useful for superimposing two ‘Fourier images’ than photographic techniques.     

Linear and nonlinear optical properties of CdSexS1−x microcrystallites

Microcrystals of CdSe_xS_1−x (x≈0.6) with nanometer dimensions have been investigated experimentally by a range of optical techniques. This system of ‘quantum dot’ consists of nanometer sized semiconductor particles embedded within an insulating glass matrix. The existence of microscopic CdSeS crystals within the glass matrix is demonstrated by the observation of Raman scattering from the ‘CdSe-like’ and ‘CdS-like’ LO phonons. The nature of the electronic states within these three dimensionally confined systems is investigated by linear absorption and photoluminescence spectroscopy. The photoluminescence spectra show features which are attributed to direct electron-hole recombination and recombination via states within the ‘blue shifted’ energy gap (which are possibly surface related). Carrier relaxation is also investigated by a pump-probe experiment whereby the absorption is partially bleached by a short pump pulse then probed some variable time later by a delayed probe pulse of much lower intensity. Fast and slow components in the carrier relaxation process are identified, and a relationship is suggested between the carrier relaxation and the features observed in the photoluminescence spectra. The well known ‘photodarkening’ properties of such materials are also investigated by the above techniques.     

On the environmental decoherence and spin interference in mesoscopic loop structures

Mechanisms of ‘environmental decoherence’ such as surface scattering, Elliot–Yafet process and precession mechanisms, as well as their influence on the spin phase relaxation are considered and compared. It is shown that the ‘spin ballistic’ regime is possible, when the phase relaxation length for the spin part of the wave function (L^(s)) is much greater than the phase relaxation length for the ‘orbital part’ (L^(e)). In the presence of an additional magnetic field, the spin part of the electron's wave function (WF) acquires a phase shift due to additional spin precession about that field. If the structure length L is chosen to be L^(s)>L>L^(e), it is possible to ‘wash out’ the quantum interference related to the phase coherence of the ‘orbital part’ of the WF, retaining at the same time that related to the phase coherence of the spin part and, hence, to reveal corresponding conductance oscillations.     

Preparation and optical constants of the nano-crystal and polymer composite Bi4Ti3O12/PMMA thin films

Bismuth titanate, Bi₄Ti₃O₁₂ (BTO), is a typical ferroelectric material with useful properties for optical memory, piezoelectric and electro-optic devices. Its nano-crystals were compounded by the chemical solution decomposition technique. Its structure and size were analyzed by X-ray diffraction and transmissive electron microscopy. The composite thin film of BTO nano-crystals and high transparency polymethylmethacrylate (PMMA) polymer was prepared by spin coating. The transmitted spectrum of BTO/PMMA composite thin film in 300–1500 nm was measured. The film thickness d and the optical constants of the film, such as the refractive index n, the absorption coefficient α, and the extinction coefficient κ were obtained using the data from the transmitted spectrum.     

Measurement of Stress Intensity Factors of a Mixed-Mode Interface Crack by a Speckle Photography

The image-processing system based on a two-dimensional Fourier transform is presented for the analysis of Young’s fringes pattern created from a double-exposure speckle photograph. The fringe spacing and orientation are determined using only one Young’s fringes pattern without any other diffraction halo patterns. The stress-intensity factors of a mixed-mode interface crack were measured by speckle photography. A compact normal and shear specimen with an interface crack was employed. This specimen enables us to carry out the experiment under various kinds of mixed-mode loading. A steel and an epoxy resin were used as dissimilar materials. The displacement along the crack lines at the free surface was measured by speckle photography. The K₁ and K₁₁ values were determined by a least squares method using displacement data along the crack lines. Three-dimensional finite element analysis was carried out on the same specimen. An accuracy of stress intensity factors obtained by the speckle photography was discussed by comparison of results obtained by the finite element analysis.Presented at 1996 International Workshop on Interferometry (IWI ‘96), August 27–29, Saitama, Japan.     

Analytical calculations and properties of γ-rays polymerization of novel acrylates copolymer system

A detailed study of some physical properties of pure PMMA (polymethyl methacrylate) film and MMA/Ani (methyl methacrylate/aniline) films is presented. Films of thicknesses ranged from 0.04 to 0.72 mm for MMA/Ani were prepared while it is 0.68 mm for PMMA. The structure of the sample is analyzed by X-ray diffraction technique and is found to be amorphous (PMMA) and partially crystalline (MMA/Ani). Ultra violet–visible electronic absorption spectra measurements were analyzed to obtain some important parameters such as molar extrication coefficient, oscillator strength, dipole strength and having good thermal stability (T_d >300 °C) was also reported. TGA studies revealed that the thermal stability of polymethyl methacrylate, prepared by radiation polymerization of methyl methacrylate, improved after copolymerization with aniline. Also, optical behavior of film samples was analyzed by obtaining transmission spectra, in the wavelength range of 200–1100 nm. It was found that all studied samples lead to the appearance of a second edge at lower photon energy due to the formation of the induced energy states. From the intensity of absorption interband transitions (B and Q) which are assigned as type π–π^* for both PMMA and MMA/Ani films, the energy gaps E_g1 and E_g2 were calculated respectively. The optical conductivity (σ) was determined and it was found that with the increase of thicknesses optical energy gap decreases monotonically and the refractive index increases.     

Determination of the absorption for incident light propagating parallel through the guest–host polymer film waveguide

Guest–host polymer thin films of polymethyl methacrylate (PMMA) incorporated with (4′-nitrobenzene)-3-azo-9-ethylcarbazole (NAEC) were fabricated by spin coating and then poled by the method of corona-onset poling at elevated temperature. The absorption mechanism of the polymeric film, which is very important for the optical transmission losses and directly relates to the orientation of chromophore NAEC in polymer PMMA, was investigated in detail. From the UV–visible absorption spectra for NAEC/PMMA film before and after being poled, we determined the change of absorption coefficient κ with the wavelength and approximately calculated the maximum absorption A_max as 3.46 for incident light propagating parallel through the film, i.e. the ordinary polarized light, which cannot be directly measured in the spectrophotometer.     

Growth, structural and optical properties of CdxZn1−xS thin films deposited using spray pyrolysis technique

Cd_xZn_(1−x)S (x = 0, 0.2, 0.4, 0.6, 0.8, and 1) thin films were deposited by the chemical spray pyrolysis technique using a less used combination of chemicals. Depositions were done at 573 K on cleaned glass substrates. The composition, surface morphology and structural properties of deposited films were studied using EDAX, SEM and X-ray diffraction technique. XRD studies reveal that all the films are crystalline with hexagonal (wurtzite) structure and inclusion of Cd into the structure of ZnS improved the crystallinity of the films. The value of lattice constant ‘a’ and ‘c’ have been observed to vary with composition from 0.382 to 0.415 nm and 0.625 to 0.675 nm, respectively. The band gap of the thin films varied from 3.32 to 2.41 eV as composition varied from x = 0.0–1.0. It was observed that presence of small amount of cadmium results in marked changes in the optical band gap of ZnS.     

CO2 laser treatment system of tinea pedis

The CO₂ laser treatment system ‘Melase 1000’ has been developed for the treatment of Tinea pedis and the efficacy of the treatment using the system and its optimum irradiation condition are studied. The present system enables us to make the healing time of Tinea pedis treatment far shorter than conventional pharmaceuticals. This is in spite of using heat levels low enough for patients not to feel discomfort. Features offered by the system are a safe-and-easy operation and a stable laser power for a prolonged use. The efficacy of the present therapy is excellent; only two treatments a week for three weeks, i.e. six consecutive treatments, attained an improvement rate of 71.8% in the skin findings and a ‘usefulness’ of 66.2% determined from cases rated as ‘useful’ or ‘better’. The optimum laser irradiation condition for a single treatment found in this experiment is a light fluence of about 3 J/cm² and four laser pulses with a time interval between pulses of 1 s for a typical horny layer thinner than 0.5 mm.     

Third-order nonlinear optical properties in [(C4H9)4N]2[Cu(C3S5)2]-doped PMMA thin film using Z-scan technique in picosecond pulse

An organometallic complex, [(C₄H₉)₄N]₂[Cu(C₃S₅)₂], abbreviated as BuCu, was synthesized. Then the BuCu-doped polymethylmethacrylate (PMMA) thin film with a doping concentration 1% by weight (1 wt.%) was fabricated using a spin-coating method and its third-order nonlinear optical properties were characterized using the Z-scan technique with 20 ps pulse duration at 532 and 1064 nm, respectively. The Z-scan curves have revealed that the material exhibits a self-defocusing effect at both wavelengths. Saturable absorption at 532 nm and two-photon absorption at 1064 nm were also found, respectively. Additionally, the calculated results of the material in film were compared with that of acetone solution, which indicated that the values in film were larger than that of acetone solution for about two orders in magnitude. The origins were analyzed of the difference between the two wavelengths. Our results suggest that considerable nonlinear optical properties were confirmed in BuCu-doped PMMA film. The material can easily be doped into PMMA film and forms a waveguide mode. So this material should be considered to be manufactured into devices and applied in all-optical switching, laser locking-mode, optical limiting fields etc.     

Stretched exponential relaxation and dispersive conductivity behavior in lithium bismuth silicate glasses

Glasses having compositions xLi₂O∙(85 − x)Bi₂O₃∙15SiO₂ (x = 35, 40, and 45 mol%) were prepared by normal melt quenching technique. Electrical relaxation and conductivity in these glasses were studied using impedance spectroscopy in the frequency range from 20 Hz to 1 MHz and in the temperature range from 453 to 603 K. The ac and dc conductivities, activation energy of the dc conductivity and relaxation frequency were extracted from the impedance spectra. The dc conductivity increases with increase in Li₂O content providing modified glass structure and large number of mobile lithium ions. Similar values of activation energy for dc conduction and for conductivity relaxation time indicate that the ions overcome the same energy barrier while conducting and relaxing. The non-exponential character of relaxation processes increases with decrease in stretched exponential parameter ‘β’ as the composition parameter ‘x’ increases. The observed conductivity spectra follow a power law with exponent ‘s’ which increases regularly with frequency and approaches unity at higher frequencies. Nearly constant losses (NCL) characterize this linearly dependent region of the conductivity spectra. A deviation from the ‘master curve’ for various isotherms of conductivity spectra was also observed in the high-frequency region and at low temperatures, which supports the existence of different dynamic processes like NCL in addition to the ion hopping processes in the investigated glass system.     

Modified nodal point method for the measurement of the large focal length of lenses

Some modifications have been suggested to the nodal slide and microscope method to suit the focal length measurement of large focal length lenses. In this procedure, the experimental set-up has to be accommodated on the two usual optical benches in line, and the position of the nodal point of the lens under test is easily located by introducing an extra lens of comparatively shorter focal length between the test lens and microscope. The results of the measurement of ‘f’ for a few lenses, and the experimental parameters, are presented.     

Global noise characteristics of a laser Doppler vibrometer-II. Experiments using beam dynamics

The use of a laser Doppler vibrometer to obtain velocity information from vibrating structures has gained wide acceptance in recent years. Although use of such an instrument can yield a spatially dense matrix of velocity information, several users have noted ‘noise’ at certain points in the spatial field. The technique by which the SLDV system operates results in occasional velocity ‘drop-outs’ which are unidirectional, always estimating the velocity response closer to zero than reality. These ‘drop-out’ areas occur more predominately at points of maximum velocity response with small rotational components. Alternatively, points exhibiting minimum velocity response with large rotational components are less susceptible to the ‘noise’. In this paper, an experiment to visualize the speckle pattern motions received by the photo-detectors during these vibration conditions is presented. Theories regarding the source(s) of the ‘noise’ are developed.     

Metal-oxide-semiconductor field effect transistor using ‘oxidizedμc-Si/ultrathin oxide’ gate structure

The metal-oxide-semiconductor (MOS) field effect transistor (FET) using ‘oxidized μ c-Si/ultrathin oxide’ gate structure was studied. It was found that this structure shows negative differential resistance behavior, which can be explained by the Coulomb blockade effect of trapped carriers and immediate tunneling into and tunneling out with gate bias variation. The requirements for the device with this structure showing negative differential resistance behavior are based on very weak resistive coupling between floating gate and channel. They are the thinness of the tunnel oxide film, the thickness ratio of the upper oxidized film and the tunnel oxide, and the channel threshold voltage. MOSFET with this gate structure is proposed as a new negative differential resistance device.     

Coupling of one-dimensionally confined optical modes in porous silicon: Spectral observation and photonic-quantum-well description

Single and double photonic-quantum-wells (PQWs) have been fabricated, using refractive-index-modulated porous silicon multilayer structures. The one-dimensionally confined optical modes observed are consistent with those calculated using the transfer matrix method. While single PQWs exhibit atom-like discrete spectral features, molecule-like energy level splitting is accessible by combining two single PQWs into a double PQW structure. Similar to an electron in a double-quantum-well structure, the energy separation between the split ‘anti-bonding’ and ‘bonding’ photonic states can be ‘tuned’ by changing the strength of inter-well coupling.     

Structure and energetics of nickel, copper, and gold clusters

The most stable structures of Cu_N, Ni_N, and Au_N clusters with 2≤N≤60 have been determined using a combination of the embedded-atom (EAM), the quasi-Newton, and our own Aufbau/Abbau methods for the calculation of the total energy for a given structure, the structures of the local total-energy minima, and the structure of the global total-energy minimum, respectively. We have employed two well-known versions of the EAM: (1) the ‘bulk’ version of Daw, Baskes, and Foiles and (2) the Voter-Chen version which takes into account also properties of the dimer in the parameterization. The lower-energy structures (also for the smallest) of Cu_N and Ni_N clusters (i.e., structural details as well as symmetry) obtained with the two versions are very similar. Thus, our study supports an universality of the bulk embedding functions for copper and nickel. But for gold clusters the differences between structures calculated with the two different versions of the EAM are significant, even for larger clusters.     

A spatial filtering technique for improved holographic character recognition

Conventional holographic pattern recognition systems suffer from the disadvantage that, in dealing with highly ordered patterns such as Arabic numerals or the letters of the Roman alphabet it is sometimes impossible to distinguish between patterns with a high degree of similarity (eg the capital letters ‘E’ and ‘F’ or ‘B’ and ‘P’).The present paper analyzes a simple case and shows how the insertion of a suitable spatial filter in the Fourier transform plane can reduce the unwanted cross-correlation signal between dissimilar patterns to zero, without removing the desired auto-correlation signal between similar patterns. Although no attempt is made to generalize the analysis, it seems probable that in cases involving the recognition of a small number of patterns with a strong ‘family resemblance’ a compromise filtering arrangement could be developed which would lead to a substantially improved performance.     

Diffraction-free beams and their caustics

We discuss the feasibility of generating focal areas in different diffraction fields and prove that the term ‘diffraction-free’ beams is used to designate a spatially limited portion of the toroidal light wave. The light line, or axial caustic, is a result of interference of intersecting areas of this wave. It is shown that the ‘diffraction-free’ beams are generated by such optical elements whose phase transmission function includes linear terms with respect to the radial coordinate. A comparison of optical characteristics of caustics in the near- and far-diffraction fields is made. Synthesis of a new diffraction-modulated axicon that forms two focal areas of different types is reported. The results of experimental studies of its optical characteristics are discussed.