共查询到19条相似文献,搜索用时 562 毫秒
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提出了一种用朗奇法定量检测大口径非球面的新技术。主要以大口径非球面镜的加工表面为研究对象,设计了大口径非球面检测系统,该系统由CCD摄像机、He-Ne激光器、郎奇光栅、微型计算机等组成。并利用大口径非球面检测系统对一个顶点曲率半径为1638.69mm,被测曲面半通光口径为315mm的光学元件的面形进行了实际测量,给出了光学元件标准偏差和峰谷值测量结果。最后对测量结果进行了讨论。研究结果表明:基于郎奇法的几何原理,利用CCD摄像系统定量检测大口径非球面的方法具有较高的精度。 相似文献
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最近研制与改进的几台CQG II型车间数字干涉仪除应用于平面及球面的面形测量、获得面形误差PV、RMS或N、ΔN外 ,还可以广泛地应用于下列几种特殊的应用 :( 1)微型光学件的检测 :借助 φ60mm~φ15mm放大系统可以测量 φ1mm平面 ;( 2 )光学平行平面的透过波面畸变检测 ;( 3)棱镜角度及面形检测 ;( 4)非球面检测 :低陡度非球面、二次曲面及非球面准直系统 ;( 5 )衍射光检测 ;( 6)镜头的调制传递函数 (MTF)的检测 ;( 7)金属表面 (模具 )或镀反射膜光学件的检测。仪器的口径为 60mm ,平面精度为λ/2 0 ,球面精度为λ/10 ,λ =632 8nm ,对以上的应用均列举了生产实际应用或科研应用的实例。 相似文献
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提出了一种快速检测浅度非球面(非球面度小于0.01 mm)的方法,该方法无需补偿器或其他辅助光学元件进行零位补偿。用移相干涉仪直接测量正轴或离轴的浅度凹非球面,剔除平移、倾斜、失焦等调整误差后,得到实际被测镜面的面形分布数据;根据正轴或离轴的浅度凹非球面矢高方程计算理想非球面的面形分布数据,得到理论波面数据,用实测的面形分布数据减去理论的面形分布数据即可得到被检非球面的剩余波像差,即面形误差。利用该方法测量了一口径为135 mm的双曲面,并用零位补偿法加以验证。两种方法的检测结果精度相当,说明数字波面法可实际应用于正轴或离轴的浅度凹非球面的检测。 相似文献
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一种光学非球面检测技术中的数据处理问题 总被引:1,自引:0,他引:1
本文介绍一种激光束平移转动法检测光学非球面,较好地克服了以往各种检测方法的局限性。文中着重介绍该方法的数学模型、精度分析、非球面参数拟合及面形质量评价等数据处理问题。以计算实例说明激光束平移转动法检测非球面具有通用性强、精度高、测量周期短等特点。 相似文献
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为满足离轴非球面镜在光学检验前的面形检测需求,对使用激光跟踪仪测量离轴非球面的方法进行了研究。详细介绍了使用激光跟踪仪测量离轴非球面的检测步骤及数据处理方法。使用激光跟踪仪对一处于研磨阶段的口径为150 mm,顶点曲率半径为1200 mm,离轴量为240 mm的离轴抛物面镜进行了测量,进行了测量不确定度分析并与三坐标测量机的测量结果进行了比对。结果显示激光跟踪仪与三坐标测量机的面形测量峰谷值一致性优于1 μm。分析及实验结果表明此检测方法简单易行,灵活通用,适用于离轴非球面抛光前的面形检测。 相似文献
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作者于1992年6月参加了在日本东京举行的光学制造、光学与光学表面平价的国际学术讨论会(SPIE Japan Chapter),会议刊出83篇论文,宣读了75篇。会议代表来自美国、德国、英国、瑞士、中国(包括台湾)及日本等国家。会议论文将SPIE Proceedings Vol.1720全文发表。论文宣读在6月10~12日三天内进行,分光学制造与光学设备、光学表面计量、X光光学、现代干涉计量学与现代光学工艺五个部分,分12个会议场次进行,结合我国情况,归纳如下几个方面,以便了解光学工艺与检测在国际上的发展新动向。1.非球面加工技术及设备,包括天文望远镜大型镜面、X光光学用非轴对称非球面及照相镜头、光盘中小型非球面的加工,一般均用数控或微机控制的专用超精机床加工。2.超光滑光学表面的制造与检测仪器,用EEM抛光头及柏油抛光头使石英平面的粗糙度达到1.7(?)rms,研究与生产表面度的美国著名公司WYKO、CHAPMAN到会报导了扫描探针显微镜测量表面粗糙度的特点等。3.测量面形的位相测量干涉仪及波带板干涉仪测量非球面,应用很普遍,重点在于研究如何提高仪器测量的精度。4.采用门封法制造塑料精密透镜,使注射成型透镜的面形达0.26μmPV值。5.光学零件应力双折射分布的二维测量,由于光计算机需要光学件的其他特性与光盘的塑料物镜需作双折射检查,故发展了面测量双折射值的一些方法。6.二元光学器件的制造与检测。 相似文献
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光学非球面度的定义及其准确计算 总被引:6,自引:1,他引:5
本文提出了两个光学非球面度的定义,即加工用非球面度与标准面干涉检测用非球面度,建立了它们的数学模型,给出了计算实例。结果表明,本方法较圆满地解决了准确计算任意回转非球面度的问题,适用于高精度加工与检测非球面度的要求。 相似文献
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激光跟踪仪检验非球面面形的方法 总被引:3,自引:1,他引:2
通过扩充激光跟踪仪的现有功能,提出了一种适用于非球面研磨和粗抛光阶段以及中低准确度非球面面形的快速检测方法.分析了测试原理,设计规划了检测流程.利用激光跟踪仪的靶标球对非球面表面进行多点接触测量,并将测量的结果与非球面CAD模型进行分析对比、处理和运算,获得非球面的面形分布信息,结合实例对一口径为420 mm×270 mm的离轴非球面进行了面形检测,并与零位补偿结果进行对比,结果表明,两种方法测试的面形误差分布是一致的,其峰谷值和均方根值的相对偏差分别仅为6.22%和3.37%.该方法无需其它辅助光学元件就能够准确地实现对大口径非球面面形的检测,测试数据处理和数学运算简单,实验操作简单易行. 相似文献
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Hua Qin 《Optics Communications》2012,285(13-14):2996-3000
In order to design a single aspheric lens to meet the requirements of spherical aberration, the particle swarm algorithm is applied to the aberration correction for a single aspheric lens. A mathematical model is constructed, and a program code is developed. Merit functions in an optical system are employed as fitness functions, which combined coefficients of a higher order polynomial equation, a reciprocal of radius of curvature, the conic constant, thicknesses among lens surfaces and refractive indices regarding an optical system. By using this function, the automatic correction of spherical aberration is carried out. The example for a single aspheric lens design using particle swarm algorithm shows that PSO as a tool of the spherical aberration correction for a single aspheric lens is simple and effective, and easy to find a series of good design results. The asphere's more complex surface profile can reduce or eliminate easily spherical aberration at different incidence heights at one time. The automatic design and analysis of a single aspheric lens using this method from the view of a particular optical design problem are presented. 相似文献
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Interferometric optical testing using computer-generated hologram (CGH) can give highly accurate measurement of aspheric surfaces has been proved. After the system is designed, a phase function is obtained according to the CGH's surface plane. For the requirement of accuracy, an optimization algorithm that transfers the phase function into a certain mask pattern file is presented in this letter, based on the relationship between the pattern error of CGH and the output wavefront accuracy. Then the writing machine is able to fabricate such a mask with this kind of file. With that mask, an improved procedure on fabrication of phase type CGH is also presented. Interferometrie test results of an aspherie surface show that the whole test system obtains the demanded accuracy. 相似文献
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The common camera lens usually includes the spherical glass/plastic lens and aspheric glass/plastic lens. However, spherical/aspheric shape measurement is still a key problem in the process of optical lens fabrication. At present, the in-process measurement of spherical/aspheric shape is conducted mainly by the probe-contacting method. But after a long time, its probe could be scratched severely and cause some big errors. Laser shearing interferometry is a good substitute to some degree. Nevertheless, it is not convenient for general shearing interferometer to carry out the in-process measurement because it is only suitable for certain kind of spherical/aspheric with respect to aperture or asperity. Here a new lateral shearing interferometer is proposed to solve the described problems. It is based on two Jamin plates and rotatable prism pairs which are used not only for shearing displacement and direction, but also for fringe period and tilt degree, in order to meet requirements of various spherical/aspheric shapes or asperities. The new interferometer features a simple optical structure and two symmetric light paths, which makes its system with minimal error. The relation between shearing displacement, fringe period and prism angle of rotation is given in this paper. And the error source is primarily from the manufacture errors of prisms and plates. The final experiments show that one can achieve good-quality fringe patterns according to the requirement of measurement, concerning the shearing direction, shearing displacement, fringe period, tilt degree, etc. 相似文献
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基于主观式测量人眼波前像差的眼模型研究 总被引:8,自引:8,他引:0
通过主观式光线追踪波前像差测量方法得到用Zernike系数描述的人眼波前像差;在Gullstrand-Le Grand眼模型的基础上,引入用医用角膜地形图仪测量并用高次非球面函数拟合的实际人眼角膜形状数据,又引入角膜、前房及玻璃体厚度等个体化的眼结构参数;在光学建模软件Zemax中用所测Zernike系数建立评价函数,并对用Zernike矢高面描绘的晶状体表面进行优化.由此建立了个体化眼模型,并由此模型中可以计算得到与实际测量的波前像差值完全相同的各项Zernike系数值,从而可用于描述实际人眼的光学特性. 相似文献
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S.H. Ghasemi M.R. HantehzadehJ. Sabbaghzadeh D. DorranianV. Vatani A. BabazadehK. Hejaz A. HemmatiM. Lafouti 《Optics and Lasers in Engineering》2012,50(2):293-296
A plano-convex aspheric lens is designed to collimate the emitted light of the fiber optics. In this paper even orders of general aspheres are used to describe the aspheric surfaces sag. To determine the aspheric coefficient, the even asphere polynomial are fitted on the computed sag data. The surface sag data is determined using genetic algorithm method. The surface sag was analyzed by the commercial optical software package ZEMAX. For typical fiber optics, the numerical aperture (NA) of 0.22 was assumed. With this specification, the expected output spot diagram of 20 mm and the maximum aperture of 25.4 mm have been obtained. A comparison between here presented lens and the similar type of conventional lens has been carried out; the proposed aspheric lens corrected the spherical aberration, which led to increase in the collimated distance. 相似文献
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为设计出符合球差要求的单个非球面透镜,把粒子群算法应用到单个非球面透镜的球差校正中,构造相应的数学模型,并编程实现算法.设计关于非球面高次多项式的顶点曲率半径,高次多项式各项系数,透镜面之间的距离和玻璃折射率等光学系统结构参数的适应度函数,用这个函数作为评价函数,实现对球差的自动校正.给出用粒子群算法进行单个非球面透镜设计的实例,结果证明:粒子群算法用于非球面透镜的球差校正简单有效,能同时校正不同入射高处的球差,且容易发现一系列好的设计结果.从实际光学设计角度呈现使用这种方法进行单个非球面透镜的自动设计分析. 相似文献