利用光斑图像特征确定飞秒激光有效烧蚀焦距

为确定飞秒激光光束对微尺度结构的烧蚀深度,研究了给定功率条件下对应的激光束有效烧蚀焦距。提出采用激光焦点处获得的烧痕阵列图像及在离焦状态下提取烧痕图像特征,通过分析图像特征与离焦距离,获得激光束有效烧蚀焦距范围的方法。在激光束焦点附近的硅晶片表面烧蚀出斑痕阵列,向下逐渐减小焦距,采集硅晶片斑痕图像,提取斑痕平均像素面积及斑痕目标与背景之间的R分量灰度差,获得斑痕像素面积及灰度差随激光束焦距变化的曲线;向上逐渐增大焦距,提取并获得斑痕像素面积及灰度差随激光束焦距变化的曲线。结合激光束向下离焦阈值(633 μm)及向上离焦阈值(993 μm),确定20 mW输出功率条件下,飞秒激光在硅晶片材料表面的有效烧蚀深度为360 μm。采用中位值方法确定了激光束在硅晶片表面聚焦时的焦距为0.823 mm。实验表明,激光烧蚀斑痕像素面积及灰度差与激光束焦距之间的关系能够客观地反映激光束有效烧蚀焦距的变化范围。     

大口径激光波前测量方法

采用大型透镜阵列对激光波前进行采样，实现了对宽光束的测量。大口径激光束经过大型透镜阵列进行采样形成光斑点阵，通过成像系统，获取点阵图像，得到激光束波前信息，根据激光传输理论和光学系统像差理论，已知激光束的波前函数和强度分布时，可以求出激光束会聚后在焦面处任意位置的光强，因此激光束的波前、发散角、近场分布、远场分布等参数能够通过测量求解得到。     

透镜与样品之间距离对激光等离子体辐射特性的影响

采用高能量钕玻璃激光器产生的激光(～25J)在减压氩气环境下诱导钢和土壤样品等离子体,研究了激光束聚焦透镜(f=130 mm)与样品之间距离对等离子体辐射特性的影响。实验结果表明,当聚焦透镜的焦点围绕样品表面上下移动时,对于合金钢样品,激光束焦斑位于样品表面以下0.4 mm左右,则激光等离子体的辐射强度、激发温度和物质烧蚀质量均出现最大值;而对于土壤样品,当激光束聚焦位置在样品表面以下0.2 mm左右,等离子体辐射强度和物质烧蚀质量具有最大值。为了比较透镜与样品之间距离对等离子体形状的影响,也拍摄了氩气和空气环境下产生的激光等离子体象。所得结果证明,激光等离子体特性明显依赖于透镜与样品之间距离。     

飞秒激光烧蚀齿曲面的复耦合模型及形貌影响

针对飞秒激光烧蚀齿曲面过程中能量累积效应与变离焦效应对齿面形貌与烧蚀尺寸的影响问题,建立飞秒激光烧蚀复耦合模型,通过有限差分法求解得到激光烧蚀面齿轮材料18Cr2Ni4WA的电子与晶格在不同的脉宽与能量密度下的温度变化分布,对烧蚀凹坑的深度及半径进行仿真。考虑激光束在加工齿面时,与被加工齿面之间存在倾斜角,根据光斑能量分布方式得到齿面底角与激光能量的定量关系,结合焦半径与折射率的变化,对飞秒激光烧蚀齿面深度、半径与形貌进行研究。通过实验得到当激光能量密度为1.783 J/cm²且被加工齿面底角过大时,激光能量降低烧蚀过程只发生在材料表面;当能量密度为2.376 J/cm²、激光脉冲数为3 000时,烧蚀凹坑的微结构细密良好。研究结果表明飞秒激光烧蚀曲面时,激光有效能量随着倾斜角的变化降低,同时激光光斑的能量分布影响了烧蚀凹坑深度的变化,可为提高飞秒激光加工齿曲面质量提供参考。     

LY12铝靶激光热烧蚀的实验研究

给出波长为1.06μm的两种脉冲持续时间的会聚激光束照射LY12铝靶的热烧蚀结果。由金相显微仪、扫描电镜观察获得的烧蚀坑孔的显微照片表明,在脉冲持续时间为1.6ms光束照射下。铝合金不仅产生强汽化,而且伴随着严重的液相冲刷效应,其热烧蚀率在焦点处为360～500μg/J,在焦前40mm处为45～140μg/J。而在脉宽100ns的单脉冲激光束照射下,铝合金产生强汽化,但未发生液相冲刷,热烧蚀率为4～10μg/J。     

长脉冲高能激光对金属靶材烧蚀实验研究

为研究长脉冲高能激光与金属靶材相互作用的机理,使用2种激光器对铝、钢、铜和钛靶材进行烧蚀试验。记录靶材穿透时的激光轰击次数,测量穿过通孔的激光能量和孔的面积,得到不同材料在不同能量密度下的烧蚀率。实验表明：能量密度低的激光束,即使对靶材可能有烧蚀作用,它的烧蚀率要比能量密度高的激光束小很多。能量密度达到造成液态质量迁移条件的长脉冲激光,可获得较大的烧蚀率和截面积较大的通孔。     

“神光-Ⅱ”装置倍频激光直接驱动冲击波平面性的实验研究

 设计了3套针对“神光-Ⅱ”倍频激光直接驱动的透镜阵列均匀辐照系统，并对冲击波的平面性进行了实验研究。结果表明，冲击波的平面性与透镜阵列参数、平面靶厚度、靶面位置等有关，采用列阵元数为121的透镜阵列进行激光束匀滑驱动的冲击波平面性最好，间接说明它在靶面的激光辐照是最均匀的；另外，随着靶厚的增加，冲击波平面性变差，平面区变小；而且冲击波平面性随靶面离焦位置的变化成一定的周期性变化，第2套透镜阵列焦点处的冲击波平面性最好。     

长脉冲激光辐照LY—12铝靶烧蚀表面的后退速度

用烧穿靶法测量自由振荡长脉冲 1.06μm会聚激光束烧蚀LY-12铝合金靶时间,用电子微量天平、金相显微仪、收集器等测量激光烧蚀铝靶材参量Am和h的技术,给出激光束烧蚀铝靶的烧蚀表面后退速度和烧蚀速度的结果。当烧蚀靶材的激光通量I=10~5～10~7W/cm~2时,烧蚀表面后退速度为0.5～3.8m/s,烧蚀速度为 1～8g/s。     

碳氢靶强激光烧蚀特性

 给出了准稳态情况下强激光烧蚀碳氢靶的实验结果,并与理论定标关系进行对比。 实验中采用晶体谱仪时间积分和X射线条纹相机同时获取碳氢平面靶强激光烧穿厚度和烧穿时间。采用基频光大能量注入,大焦斑(Φ 400μm），光束经列阵透镜均匀化后, 烧蚀碳氢平面靶。     

纳秒激光烧蚀铝材料的二维数值模拟

为了探索纳秒脉冲强激光与材料的相互作用机理,建立了二维数值模型,利用有限差分法对纳秒激光脉冲烧蚀金属铝的温度场进行了数值模拟.通过对比不同脉宽、光斑和能量下激光引起的温度场随时间的演化,发现脉冲的前期温度升高比后期快.等温图显示中心温度升高最快,烧蚀轮廓与激光束形状相似,烧蚀深度达1—5 μm.脉宽越长,烧蚀越窄和越深,光斑越大,烧蚀越宽和越浅.数值研究表明,1)激光的脉冲形状、脉宽和功率密度直接影响烧蚀的形状和深度,2)激光功率密度在10⁹ W/cm²量级烧蚀     

Rapid and flexible laser marking and engraving of tilted and curved surfaces

We present a novel method for rapid and flexible laser marking and engraving of tilted, curved and freeform work-piece surfaces. The method is based on integrating a three-dimensional (3D) laser measurement system into a 3D laser marking system. We use the same laser source and optics for measurement and processing with a minimum of additional hardware components. A low power CW laser regime is used to measure the 3D shape of a work-piece surface while a high-peak power-pulsed laser regime is used for processing. The acquired 3D surface data are used to determine the 3D trajectory of the processing beam focus. Neither the 3D shape of the work-piece nor its orientation needs to be known in advance as long as the processed surface lies within the working range of the 3D laser processing system. This eliminates the need for exact work-piece positioning before processing and substantially improves processing flexibility (allowing, e.g. variations in work-piece shape or/and orientation from mark to mark). This paper discusses key issues concerning an implementation of the method and presents typical examples of markings and engravings, which demonstrate the advantages of the method with respect to the existing industrial 2D and 3D laser marking and engraving methods. The method can also be applied to flexible laser structuring and microprocessing of curved surfaces.     

The advances and characteristics of high-power diode laser materials processing

This paper presents a review of the direct applications of high-power diode lasers for materials processing including soldering, surface modification (hardening, cladding, glazing and wetting modifications), welding, scribing, sheet metal bending, marking, engraving, paint stripping, powder sintering, synthesis, brazing and machining. The specific advantages and disadvantages of diode laser materials processing are compared with CO₂, Nd:YAG and excimer lasers. An effort is made to identify the fundamental differences in their beam/material interaction characteristics and materials behaviour. Also an appraisal of the future prospects of the high-power diode lasers for materials processing is given.     

不同2×2集束聚焦方式下高功率激光靶面光强分布特性

大口径高功率激光装置为提高激光靶面的光强强度, 通常采用2×2集束聚焦的模式进行打靶. 大口径楔形透镜是组成2×2集束聚焦系统的核心元件, 可分为二维离轴楔形透镜、一维离轴楔形透镜和非离轴楔形透镜3类. 为了获得理想靶面光强分布, 基于这3 类楔形透镜, 对比研究相应2×2集束聚焦系统下的靶面光强分布特性. 研究结果表明: 相比离轴楔形透镜, 采用基于非离轴楔形透镜的2×2集束聚焦系统时, 容易在激光靶面获得更窄的主瓣宽度、更强的峰值强度、更高的能量集中度. 研究结果对高功率激光靶场聚焦系统的配置选择有重要参考价值.     

高功率激光在非均匀大气中传输的自聚焦效应研究进展

地基激光空间碎片清除和利用激光辐射把转换的太阳能从空间轨道输运到地面等应用中,不可避免地遇到高功率激光在非均匀大气中的传输问题。由于激光功率已远远超过大气非线性自聚焦临界功率,大气自聚焦效应是影响光束质量的一个重要物理因素。概述了近年来国内外高功率激光在非均匀大气中上行或下行传输的自聚焦效应研究进展,主要介绍了高功率激光在非均匀大气中的传输模型、理论基础、数值和解析研究方法,着重介绍了自聚焦效应对激光传输特性和光束质量的影响,并总结了优化靶面光束质量的方案。此外,还介绍了大气群速度色散效应和大气湍流效应等物理因素对激光光束质量的影响。最后,还提出了该领域值得进一步深入研究的一些问题。     

Improved thermal model and its application in UV high-power pulsed laser ablation of metal target

An improved thermal model describing UV high-power nanosecond laser ablation of metal target is presented. The vaporization effect, the plasma shielding effect, as well as the absorption coefficient and absorptivity dependence of temperature are considered in this model. Take iron target as an example, the numerical solutions are obtained from the heat flow equations (before and after melting) using a finite difference method. The space and time dependence of temperature of the target, the time dependence of temperature at two different positions for a certain laser fluence, and the ablation rate as a function of laser fluence are also presented. The numerical results that agreed well with the experimental data are much better than the one without, which indicates that the above two effects and the temperature dependence of absorption coefficient and absorptivity in UV high-power laser ablation of metal target should not be neglected. We hope the present model will be useful for further experimental investigation of metal thin films prepared by pulsed laser deposition.     

Dynamic models relating processing parameters and melt track width during laser marking of clay tiles

This paper describes two dynamic models relating processing parameters and melt pool width during laser marking/engraving of clay tiles using a high-power diode laser. The models were determined by process identification techniques and were validated with a PI algorithm. The output variable considered for the laser clay tile marking process was melt pool width, measured by using a fast CCD recording system and analysed with an image-processing software. The input quantities investigated were laser power and traverse speed. Reasonable agreements between the measured data and the model outputs were achieved. Errors less than 1.3 μm of the melt pool width for the operating points were found. On the basis of these models a simple PI-controller was designed and tuned to guarantee zero steady-state error in case of an absorptivity disturbance.     

HeNe双频激光器频差的激光内雕赋值法

在精密测量领域,HeNe激光器是制造激光干涉仪的首选.但能够产生中频差4—40 MHz的双折射-塞曼双频HeNe激光器的频差是随机的,小到几百kHz,大到十几MHz.为了让频差能够满足制作双频激光干涉仪的要求,曾出现过弹性加力法、钻孔应力调节法等调整和频差赋值的方法.但这些方法在实际应用中都不是很理想.采用激光内雕法赋值频差,通过在激光器的平面输出镜内部雕刻出不同图案,使平面镜内部产生满足要求的相位延迟,达到为频差赋值的目的.激光内雕法有很多优点:不损害激光器,美观;功率损失小,出光强度可接近原始光强度;可反复赋值,频差在0—60 MHz范围内可调整;频差的稳定性好,采用稳频措施后频差的波动范围小于每小时10 kHz.     

A melt depth prediction model for quality control of laser surface glazing of inhomogeneous materials

This paper reports on an investigation into the development of an analytical model for the quality control of laser marking/engraving of clay tiles using a high-power diode laser (HPDL). An analytical model for the laser melting of inhomogeneous workpieces with parabolic melt pool geometry being assumed was developed. The theoretical results were compared with the experimental data. The predicted melt pool depth and the experimental values were in close correlation with the parameter for values less than 15 Wmm⁻¹ s^−1/2, in spite of simplifications introduced in the model. At the relatively large values of parameter the assumption of parabolic melt pool shape and one-dimensional heat transfer no longer holds true.     

二维固体激光阵列逆达曼光栅相干合束技术模拟研究

采用逆达曼光栅将二维锁相相干的激光阵列进行相干合束并进行孔径装填是获得远场单一主瓣大功率高光束质量激光输出的一种有效技术方案,将其应用于大尺寸5×5固体激光相干阵列相干合束中,并进行了固体激光阵列合束孔径装填的理论分析和原理性验证实验,测量了系统的实际合束效率,同时进行了后焦面逆达曼光栅的加工和放置误差对合束效率影响的详细分析。实验结果表明,逆达曼光栅用于固体激光阵列相干合束是一种有效的技术方案,且可以通过调节光栅周期和傅里叶透镜焦距来适应系统对激光阵列占空比的要求。这对于开发基于逆达曼光栅相干合束的高功率高光质量的全固态激光系统具有重要的意义。     

高功率激光装备小型化轻量化技术

自激光器问世以来,激光在各领域的需求和应用非常广泛,而随着高功率激光装备输出功率不断提高,重量与体积已成为制约高功率激光装备应用与发展的关键问题之一。由于当前高功率激光装备仍将提高输出功率作为其发展目标,加之高功率激光装备结构功能复杂、能量转换效率低等特点,制约了高功率激光装备小型化、轻量化的实现。本文在介绍高功率激光装备的特点及其小型化、轻量化技术约束的基础上,综述了装备常用小型化、轻量化技术应用、新型高功率激光技术应用、提高能量转换效率及散热效率等高功率激光装备小型化、轻量化实现途径,以及各种技术途径在高功率激光装备中已有的应用。根据高功率激光装备现状及特点,其在小型化、轻量化方面具有很大的发展空间及应用前景。