Review on grazing incidence X-ray spectrometry and reflectometry

Grazing incidence X-ray techniques are now widely used for surface and thin film analysis. The present article overviews the recent advancement since 1993 of the grazing incidence X-ray spectrometry and reflectometry in both theoretical and experimental aspects. Every current topic related to the total reflection X-ray fluorescence spectrometry (TXRF) is described in detail through the introduction of numerous published works on the application in the various fields of the science and industrial technologies. Recent rapid growth in diffuse scattering at grazing incidence as well as in specular reflection is another important scope. The combined measurements of different grazing incidence X-ray techniques might be a future trend for realizing further advanced analysis of the surface and interfaces of materials.     

Observation of surface contamination layer by X‐ray reflectometry (XRR) analyses

Ultra‐thin HfO₂ films of 3.5, 5.0, and 8.0 nm nominal thicknesses were prepared, respectively, on silicon substrates by using atomic layer deposition method. Through the analyses of X‐ray reflectometry (XRR), X‐ray photoelectron spectroscopy, and transmission electron microscopy for HfO₂ films with and without sample cleaning, the effects of surface contamination on XRR curve and film thickness were investigated, and contamination layer was observed and the thickness of the layer was determined. X‐ray photoelectron spectroscopy results indicated that the amount of surface contamination varied considerably because of the surface cleaning. XRR curve shapes and the positions of thickness fringes changed and the thickness from Fourier analyses of the curves were different for the same sample due to the different surface contamination. Contamination layer of about 1 nm thickness was observed by Fourier analysis of XRR curve. Simulation for XRR curve showed the best fit to data when contamination layer of about 1 nm thickness was considered, and the result was consistent with that of the Fourier analysis. Copyright © 2016 John Wiley & Sons, Ltd.     

New insights in the c(4 x 2) reconstruction of hexadecanethiol on Au(111) revealed by grazing incidence X-ray diffraction

The c(4 x 2) structure of C16H33SH alkanethiol monolayers self-assembled on Au(111) has been studied by grazing incidence X-ray diffraction. This structure coexists on the surface with the (radical3x radical3)R30 degrees phase. The structural refinement of the c(4 x 2) phase has been accomplished by omitting the fractional order reflections common to both structures. The surface unit cell consists of four symmetry-independent molecules with atomic displacements related by couples, such that only two nonequivalent chains are present in the surface cell. The stability between neighbor chains is due to van der Waals interactions. The substrate plays an important and non-negligible role in the c(4 x 2) reconstruction. The lateral and normal substrate relaxations to the surface plane are small, and gold atom displacements are lower than 0.25 angstroms but contribute very strongly to the fractional order intensities. The molecular chains form a close packed structure tilted by 37 degrees from the surface normal with no indications of dimer formation between closest S atoms.     

Depth-profiling of vertical sidewall nanolayers on structured wafers by grazing incidence X-ray flourescence

The Physikalisch-Technische Bundesanstalt (PTB), Germany's national metrology institute, developed an alignment strategy to specify elemental depth profiling in vertical sidewall layers on structured wafers. For this purpose, PTB's irradiation chamber for 200 mm and 300 mm silicon wafers was used to combine total-reflection X-ray fluorescence (TXRF) and grazing incidence XRF (GIXRF) techniques by employing monochromatized undulator radiation of the BESSY II electron storage ring. 3-D test structures were fabricated to develop an optimal alignment strategy allowing for depth profiling in such nanolayers. The test structures consisted of silicon bars with widths/spacings either in the μm or in the nm range. In order to be able to differentiate the sidewalls more easily from the remainder of the structures, they were provided with an additional silicon nitride layer. Four structure types of different bar width and density parameters on two 200 mm silicon wafers were investigated. The alignment procedure developed in the present work consists of three main steps and allows for distinct excitation of multiple sidewalls of one kind. Information about depth-dependent sidewall contamination, layer thickness and composition can be obtained by this approach. First results obtained on these test structures demonstrate the application potential of this new technique. In principle, depth-dependent chemical speciation should also be possible using GIXRF in combination with near edge absorption X-ray fine structure (NEXAFS).     

Analysis of myoglobin adsorption to Cu(II)-IDA and Ni(II)-IDA functionalized Langmuir monolayers by grazing incidence neutron and X-ray techniques

The adsorption of myoglobin to Langmuir monolayers of a metal-chelating lipid in crystalline phase was studied using neutron and X-ray reflectivity (NR and XR) and grazing incidence X-ray diffraction (GIXD). In this system, adsorption is due to the interaction between chelated divalent copper or nickel ions and the histidine moieties at the outer surface of the protein. The binding interaction of histidine with the Ni-IDA complex is known to be much weaker than that with Cu-IDA. Adsorption was examined under conditions of constant surface area with an initial pressure of 40 mN/m. After approximately 12 h little further change in reflectivity was detected, although the surface pressure continued to slowly increase. For chelated Cu2+ ions, the adsorbed layer structure in the final state was examined for bulk myoglobin concentrations of 0.10 and 10 microM. For the case of 10 microM, the final layer thickness was approximately 43 A. This corresponds well to the two thicker dimensions of myoglobin in the native state (44 A x 44 A x 25 A) and so is consistent with an end-on orientation for this disk-shaped protein at high packing density. However, the final average volume fraction of amino acid segments in the layer was 0.55, which is substantially greater than the value of 0.44 calculated for a completed monolayer from the crystal structure. This suggests an alternative interpretation based on denaturation. GIXD was used to follow the effect of protein binding on the crystalline packing of the lipids and to check for crystallinity within the layer of adsorbed myoglobin. Despite the strong adsorption of myoglobin, very little change was observed in the structure of the DSIDA film. There was no direct evidence in the XR or GIXD for peptide insertion into the lipid tail region. Also, no evidence for in-plane crystallinity within the adsorbed layer of myoglobin was observed. For 0.1 microM bulk myoglobin concentration, the average segment volume fraction was only 0.13 and the layer thickness was < or = 25 A. Adsorption of myoglobin to DSIDA-loaded with Ni2+ was examined at bulk concentrations of 10 and 50 microM. At 10 microM myoglobin, the adsorbed amount was comparable to that obtained for adsorption to Cu2+-loaded DSIDA monolayers at 0.1 M. But interestingly, the adsorbed layer thickness was 38 A, substantially greater than that obtained at low coverage with Cu-IDA. This indicates that either there are different preferred orientations for isolated myoglobin molecules adsorbed to Cu-IDA and Ni-IDA monolayer films or else myoglobin denatures to a different extent in the two cases. Either interpretation can be explained by the very different binding energies for individual interactions in the two cases. At 50 microM myoglobin, the thickness and segement volume fraction in the adsorbed layer for Ni-IDA were comparable to the values obtained with Cu-IDA at 10 microM myoglobin.     

Applicability of a cut-off reflector for grazing incidence X-ray fluorescence analysis

The applicability of a cut-off reflector, instead of the commonly used multilayer reflector, for grazing incidence X-ray fluorescence (GI-XRF) analysis is demonstrated. Owing to the precise angular adjustment possible in the total reflection X-ray fluorescence (TXRF) spectrometer developed in house, it is possible to adjust the cut-off reflector so as to pass all X-ray energies up to Cu-K_α, eliminating Cu-K_β and higher X-ray energies emitted from a Cu target X-ray generator. The advantage of this technique is that one gets a higher flux of Cu-K_α radiation (>98%) compared to 80–90% from a good quality multilayer optics. Moreover, the same cut-off reflector, used at different grazing angles, serves the purpose for different primary beam energies. The suitability of such an arrangement for GI-XRF analysis for surface characterization has been demonstrated by analyzing a 50 ng aqueous residue of Fe on top of a float glass substrate. The GI-XRF results thus obtained are compared with those obtained using a multilayer monochromator in the primary beam as well as with theoretical calculations.     

Observation of zinc phthalocyanine aggregates on a water surface using grazing incidence X-ray scattering

Reported here are the structural properties of a zinc 2,9,16,23-tetra-tert-butyl-29H,31H-phthalocyanine Langmuir monolayer on a water surface under progressive lateral compression investigated by grazing incidence X-ray scattering. Grazing incidence diffuse X-ray scattering out of the specular plane (GIXOS) is exploited to determine specular reflectivity-like information where the phase change of flat-lying molecules on the surface to edge-standing molecules perpendicular to the surface is directly observed. Furthermore, grazing incident X-ray diffraction (GIXD) is used to investigate the in-plane ordering of the system where it has been found that in the high-density state (approximately 0.35 nm2 per molecule) the system can be considered to be a monolayer consisting of arrays of side-by-side lying cofacially aggregated cylindrical rodlike entities.     

Determination of CoSi2 self-aligned nanostructures with grazing incidence X-ray absorption spectroscopy

Self-aligned nanostructures (SAN) made by reacting Co nanoparticles with crystalline Si substrates at high temperatures were studied with grazing incidence X-ray absorption spectroscopy (GI-XAS). The results from extended X-ray absorption fine structure (EXAFS) analysis and X-ray absorption near-edge spectroscopy (XANES) were used to identify SAN as crystalline CoSi2. Theoretical calculations of EXAFS and XANES spectra of several crystalline cobalt silicides were performed with the FEFF8 package. On the basis of these studies, the SAN samples were determined to contain nearly pure CoSi2.     

A study of cadmium sulfide nanocrystalline films by grazing incidence X-ray diffraction

Thin cadmium sulfide films were prepared on a monocrystalline-crystal silicon substrate by chemical deposition from aqueous solutions. Grazing incidence X-ray diffraction revealed that the cadmium sulfide films are comprised of nanocrystal particles, with 80% of the particles having a size of 5 ± 1 nm. Some nanocrystals have a wurtzite structure, while others, a sphalerite one. The presence of cubic phase in the films is indicative of a nonequilibrium state of the nanocrystalline films. Thirty minutes after the onset of the formation of cadmium sulfide, the size and crystal structure of the constituent particles of the film become independent of the deposition time—only the film thickness increases. In addition, the initial stage of the formation of the cadmium sulfide film is accompanied by the deposition of cadmium hydroxide Cd(OH)₂.     

Phase transition of alkylsilane monolayers studied by temperature-dependent grazing incidence X-ray diffraction

The phase transition of organosilane monolayers on Si-wafer substrate surfaces prepared from octadecyltrichlorosilane (OTS) or docosyltrichlorosilane (DOTS) was investigated on the basis of grazing incidence X-ray diffraction (GIXD) at various temperatures. The OTS monolayer was prepared by a chemisorption method. The DOTS monolayer was prepared by a water-cast method (DOTS). The GIXD measurement clarified that the OTS monolayer also changed from hexagonal phase to amorphous state above a melting point of otadecyl groups. The GIXD measurements also clarified that the molecular aggregation state of the DOTS monolayer changes from an anisotropic phase to an isotropic phase with an increase in temperature. An estimated linear thermal expansion coefficient of the lattice lengths of a and b of the DOTS monolayer in the rectangular crystalline state assigned a similar value to those of bulk polyethylene with an orthorhombic crystalline lattice. The setting angle of the ab plane of the rectangular DOTS monolayer also showed similar behavior to that of the ab plane of bulk polyethylene.     

Analysis of crystalline phases in airborne particulates by grazing incidence X-ray diffractometry

Amounts of crystalline phases of airborne particulates collected on a silicon wafer (10 x 10 mm) using a high-volume air sampler were analyzed by grazing incidence X-ray diffractometry (GIXD). Airborne particulates were classified into five size ranges (1.09-10.5 microm) with a cascade impactor attached on the sampling ports of the high-volume air sampler. GIXD was used throughout this analysis to obtain better sensitivity for small amounts of airborne particulates on the silicon wafer. Calibration standards on the silicon wafer for the diffractometric determination were prepared by the suspension droplet method of the crystalline standards dispersed in cyclohexane. Analytical lines were (020) for gypsum, (101) for quartz, (104) for calcite, (200) for halite, and (110) for sal ammoniac. The sample and the calibrating standards were heated at 350 degrees C for 2 h to avoid mutual interference with gypsum (041 and 221) when calcite and halite were determined. The GIXD method enables us to determine 0.23-13.2 microg of gypsum, quartz, calcite, halite and sal ammoniac in 0.110-0.233 mg of airborne particulates on the silicon wafer.     

X-ray induced fluorescence spectrometry at grazing incidence for quantitative surface and layer analysis

Summary Single layers and layer systems on diverse substrates were measured by Total Reflection X-Ray Fluorescence (TXRF) spectrometry. The angular dependence of the fluorescence intensities at grazing incidence allows the elemental composition, density and thickness of the layers to be evaluated using model calculations.     

Study of surface oxidation of iron foils by grazing incidence electron-induced X-ray emission spectroscopy

Surface oxidation of metallic iron was studied by grazing incidence electron-induced X-ray emission spectroscopy. We have shown the feasibility of the quantitative chemical-state analysis in the nanometer depth range on the basis of the results by Monte Carlo simulations in the grazing incidence setup. It is also found that the self-absorption effect is not negligible in the nanometer depth range.     

Supported particle track etched polyimide membranes: a grazing incidence small-angle X-ray scattering study

Particle track etched polyimide membranes on silicon substrates covered with a native oxide layer are investigated. Preparation steps similar to the common classical particle track etched membrane production, giving rise to free-standing membranes, are successfully applied to the supported membranes. Polyimide films are used as a starting material for a template preparation based on high energy ion irradiation. The film/membrane structure is probed at different length scales by grazing incidence small-angle X-ray scattering at each individual preparation step. In addition, characterization with atomic force microscopy, variable-angle spectroscopic ellipsometry, Fourier transform infrared transmission, and attenuated total reflection spectroscopy is performed. An amount of 6 +/- 1 vol % pores inside the polyimide film is detected. The pores are oriented perpendicular to the substrate surface and have a conical shape, yielding a slightly reduced pore size at the substrate/film interface.     

Study of metallic components of historical organ pipes using synchrotron radiation X-ray microfluorescence imaging and grazing incidence X-ray diffraction

A comparative study of the composition and microstructure of two different brass alloys from reed pipes, one from a Spanish baroque organ and the other from a modern one, was carried out. This study allowed us to determine the procedure followed to produce the brass used to make ancient reed pipes. Moreover the distribution and correlation of lead and other trace elements present into the main component of the brass, the copper and zinc phases, of the historical tongues and shallots were established. This chemical composition was compared with that of a tongue from a twentieth-century organ. The whole study was accomplished using a combination of laboratory and synchrotron radiation techniques. X-ray fluorescence was the technique used to obtain elemental and chemical imaging of the main phases and the trace elements at a sub-micrometer scale.     

Direct observation of liquid crystal phases under nanoconfinement: A grazing incidence X-ray diffraction study

We have controlled the molecular orientation of nematic and smectic A liquid crystal (LC) phases in a porous anodic aluminium oxide (AAO) film, in which the pore diameter was varied from 20 nm to 100 nm. Surface anchoring to induce planar and homeotropic molecular arrangement was controlled by chemical modification of the AAO inner surface. Direct observation of the molecular orientation of LC phases was performed using grazing incidence X-ray diffraction technique, showing in-plane and out-of-plane molecular orientation, and the corresponding layer orientation. The systematic investigation of LC phases under nanoconfinement will be useful to design various kinds of physicochemical environments to control the orientation of other soft matters.     

X-ray Cherenkov radiation under conditions of grazing incidence of relativistic electrons onto a target surface

X-ray Cherenkov radiation in the vicinity of the photoabsorption edge of a target is considered in this work. A possibility of substantial increase in the yield of emitted photons under conditions of grazing incidence of emitted electrons onto the target surface is shown. We discuss peculiarities in the process of X-ray Cherenkov radiation from a multilayer nanostructure as well as possibilities of focusing emitted X-rays with the use of grazing-angle optics.     

Total reflection X-ray fluorescence and grazing incidence X-ray spectrometry — Tools for micro- and surface analysis. A review

A review of Total Reflection X-ray Spectrometry and related methods covering literature of four decades is presented. History, theory, instrumentation, sample preparation, and applications are summarized and some examples are given. New developments and trends are discussed with respect to emerging nano-technologies in all fields of sciences.     

Effect of sodium dodecyl sulfate at different hydration conditions on dioleoyl phosphatidylcholine bilayers studied by grazing incidence X-ray diffraction

The effect of the surfactant content and hydration conditions in the phases of dioleoyl phosphatidylcoline (DOPC)/sodium dodecyl sulfate (SDS) mixtures was studied. To this end, surface X-ray diffraction experiments have been performed on bilayers of the mixtures deposited on hydrophobic silicon wafers by dip coating. To investigate the effect of relative humidity (RH) on bilayer organization, a humidity chamber with dry-wet air control was used, and RH values were fixed between 1 and 65%. Our results showed, in addition to the lamellar phase, a rhombohedral phase in mixtures at low hydration conditions (RH < 30%). The d spacing between lamellae increased with the RH and SDS content. This fact could be associated with a swelling effect that is probably due to the localization of water molecules between the polar headgroups of the DOPC and SDS forming the bilayers. The electron-density profiles calculated by Fourier reconstruction of the lamellar stacking for the different samples also confirmed this fact. In addition, the increase in d spacing could be related to the increase in the hydrophilic character of the mixture when the SDS content increases. The rhombohedral phase was more clearly observed in mixtures with high SDS content. Thus, the stalk structure of the rhombohedral phase could be facilitated because of the SDS contribution to inverse structures.