铒掺杂富硅热氧化SiO2/Si发光薄膜的显微结构

利用金属蒸气真空弧 (MEVVA)离子源将稀土元素Er离子掺杂到富硅热氧化SiO2 /Si薄膜中。卢瑟福背散射 (RBS)和X 射线电子能谱仪 (XPS)分析表明 ,Er浓度可达原子百分数 (x)～ 10 ,即Er的原子体浓度为～ 10 2 1·cm-3 。XPS研究发现 ,随着Si注量增大 ,退火态样品表面硅含量增多 ,热氧化硅含量减少。反射式高能电子衍射 (RHEED)和原子灵敏度因子法 (AFM)研究表明 ,样品表面没有大量Er析出或铒硅化物形成 ,退火后表层中Si外延再生长、有针状微晶硅颗粒形成。在 77K及室温下 ,研究了Er掺杂富硅热氧化SiO2 /Si薄膜的近红外区 1 5 4μm附近光致发光光谱     

溶胶-凝胶法Er_2O_3薄膜的结构和光学特性

针对稀土Er掺杂Si光源中Er离子掺杂浓度低的问题,采用溶胶-凝胶(Sol-gel)法在Si(100)和SiO2/Si(100)基片上旋涂法制备Er2O3光学薄膜,Er离子浓度与以前掺杂方法相比提高了2个数量级.900℃热处理获得单一立方结构的Er2O3薄膜材料.光致发光(PL)特性研究表明在654nm波长的激光泵浦下,Er2O3薄膜材料获得了1.535μm的发光峰,并具有较小的温度猝灭1/5.在SiO2/Si(100)基体上制备的Er2O3薄膜材料的光致发光强度比Si(100)基体上制备的薄膜提高2-3倍.研究结果表明具有强光致发光特性的Er2O3薄膜是一种有前景的硅基光源和放大器材料.     

铒掺杂富硅热化SiO2／Si发光薄膜的显微结构

利用金属蒸气真空弧(MEVVA)离子源将稀土元素Er离子掺杂到富硅热氧化SiO2/Si薄膜中.卢瑟福背散射(RBS)和X-射线电子能谱仪(XPS)分析表明,Er浓度可达原子百分数(x)～10,即Er的原子体浓度为～1021·     

Yb3+掺杂浓度对Er3+/Yb3+共掺SiO2-Al2O3-La2O3玻璃光谱性质的影响

测量了不同Yb3+ 离子掺杂浓度下 ,Er3+ /Yb3+ 共掺SiO2 Al2 O3 La2O3玻璃的吸收光谱、荧光光谱和Yb3+离子2 F5/ 2 的能级寿命 ,应用迈克康伯 (McCumber)理论计算了Er3+ 的受激发射截面σemi,讨论了Yb3+ 离子浓度对其自身吸收性质、Er3+ 离子发光性质 ,以及Yb3+ →Er3+ 能量传递效率 (η)的影响 ,初步探明该基质玻璃中Yb3+ 离子掺杂数浓度的最佳范围为 3 .94× 1 0 2 0 cm- 3至 5 .92× 1 0 2 0 cm- 3,在此掺杂范围内 ,Yb3+ 离子的最大吸收系数为9.8cm- 1 ,Er3+ 的峰值发射截面和Yb3+ →Er3+ 能量传递效率 (η)分别为 0 64× 1 0 - 2 4 m2 和 92 %。     

溶胶-凝胶法Er2O3薄膜的结构和光学特性

针对稀土Er掺杂Si光源中Er离子掺杂浓度低的问题,采用溶胶-凝胶（Sol-gel）法在Si(100)和SiO2/Si(100)基片上旋涂法制备Er₂O₃光学薄膜,Er离子浓度与以前掺杂方法相比提高了2个数量级.900 ℃热处理获得单一立方结构的Er₂O₃薄膜材料.光致发光（PL）特性研究表明在654 nm波长的激光泵浦下,Er₂O₃薄膜材料获得了1.535 μm的发光峰,并具有较小的温度猝灭1/5.在SiO₂/Si(100)基体上制备的Er2O3薄膜材料的光致发光强度比Si(100)基体上制备的薄膜提高2-3倍.研究结果表明具有强光致发光特性的Er₂O₃薄膜是一种有前景的硅基光源和放大器材料.     

磁控溅射淀积掺Er富Si氧化硅膜中Er3+ 1.54μm光致发光

用磁控溅射淀积不同富Si程度的掺Er富Si氧化硅薄膜.室温下测量其光致发光谱,观察到各谱中都含有1.54和1.38μm两个发光峰,其中1.54和1.38μm的光致发光峰分别来自Er³⁺和氧化硅中某种缺陷.系统研究了Er³⁺1.54μm光致发光峰强度对富Si程度及退火温度的依赖关系.还发现1.54μm发光峰强度与1.38μm发光峰强度相互关联,对此进行了讨论 关键词： Er 富Si氧化硅 光致发光 纳米硅     

硅基掺铒二氧化钛薄膜发光器件的电致发光:共掺镱的增强发光作用

在我们以前的工作(Zhu C, Lü C Y, Gao Z F, Wang C X, Li D S, Ma X Y, Yang D R 2015 Appl.Phys.Lett.107 131103)中,利用掺铒(Er)二氧化钛薄膜(TiO_2:Er)作为发光层,实现了基于ITO/TiO_2:Er/SiO_2/n~+-Si结构的发光器件的Er相关可见及近红外(约1540 nm)电致发光.本文将镱(Yb)共掺入TiO_2:Er薄膜中,显著增强了Er相关可见及近红外电致发光.研究表明,一定量Yb的共掺会导致TiO_2:Er薄膜由锐钛矿相转变为金红石相,从而使得Er~(3+)离子周围晶体场的对称性降低.此外,Yb~(3+)离子比Ti~(4+)离子具有更大的半径,这使TiO_2基体中Er~(3+)离子周围的晶体场进一步畸变.晶体场的对称性降低及畸变使得Er~(3+)离子4f能级间的跃迁概率增大.由于上述原因,Yb在TiO_2:Er薄膜的共掺显著增强了相关发光器件的电致发光.     

ZnS:ErF3电致发光薄膜2H11/2,4S3/2→4I15/2发光的猝灭过程

本文通过ZnS:ErF3交流电致发光薄膜发光光谱和发光衰减特性研究了Er3+离子2H11/2,3S3/2发光的猝灭过程,实验结果表明由于Er3+离子间多极矩相互作用,一个激发的Er3+离子从2H11/2态无辐射弛豫到4F9/2态,同时另一个激发的Er3+离子从4F7/2或4F5/2+4F3/2态跃迁到2H9/2或4G11/2态的交叉弛豫过程是2H11/2,4S3/2发光浓度猝灭的一个主要机制,交叉弛豫几率随着掺杂浓度的增加而增大,根据在固定掺杂浓度下2H11/2,4S3/2、4F9/2发光衰减时间不随激发密度而改变的实验结果,排除了处于激发的Er3+离子之间直接能量传递的可能性,这结果与扩散限制的能量传递理论相符。     

TeO2-ZnO-Na2O-K2O玻璃中Er3+离子掺杂浓度对其发光及荧光寿命的影响

测量了不同掺杂浓度下Er3+离子在碲酸盐玻璃中的吸收光谱、发射光谱和Er3+离子的荧光寿命,计算了Er3+离子的发射截面σe,分析了Er3+离子掺杂浓度对其发光强度和荧光寿命的影响.结果表明,Er3+离子掺杂浓度较低时,对其荧光强度和荧光寿命没有显著的影响;掺杂浓度高时,出现了浓度猝灭效应,使Er3+离子荧光光强度降低,荧光寿命下降.实验确定了掺杂浓度最优值,同时对浓度猝灭机制进行了分析.     

(Si,Er)双注入热氧化硅的光致发光

采用强流金属蒸汽真空弧（MEVVA）离子源注入机，先将Si大束流注入热氧化SiO2/单晶硅，直接形成镶嵌在SiO2中的纳米晶Si，再小束流注入Er。Er离子在掺杂层中的浓度可达10^21cm^-3量级，大大地提高了作为孤立发光中心的Er^3 浓度。在77K和室温下，观察到了Er^3 的1.54цm特征发射。     

New efficient mechanism of excitation of electroluminescence from erbium ions in crystalline silicon

In p–n junctions based on c-Si : Er we have realized highly efficient excitation of erbium electroluminescence at 1.54 μm with an efficiency close to unity. A possible mechanism is Auger recombination of electrons occupying the upper subband of the conduction band with free holes in the valence band whereas the energy of the recombination process is transferred by Coulomb interaction to 4f-electrons of an erbium ion transmitting it to the second excited state ⁴I_11/2 (excitation energy 1.26 eV). The observed three-level excitation of erbium ions is promising for development of a Si : Er laser.     

Peculiarities of photoluminescence of erbium in silicon structures prepared by the sublimation molecular-beam epitaxy method

The photoluminescence of semiconducting structures Si: Er: O/Si grown by the molecular-beam epitaxy method is studied. The dependences of Er photoluminescence intensity on the intensity of pumping are measured at the liquid helium temperature. An analysis of the experimental results on the basis of the exciton model of excitation of Er ions in a crystalline silicon matrix reveals the significant role played by an alternative channel of free-exciton trapping (apart from the donor energy levels of erbium-oxygen complexes), as well as that played by the nonradiative channel in the recombination of excitons, bound to erbium donors, without the excitation of erbium. The ratio of the concentration of optically active centers of erbium luminescence to the total concentration of introduced erbium is estimated.     

掺铒硅基材料发光的新途径

关键词：     

Erbium excitation in a SiO<Subscript>2</Subscript>: Si-nc matrix under pulsed pumping

The photoluminescence of Er³⁺ ions in a SiO₂ matrix containing silicon nanocrystals 3.5 nm in diameter is studied under resonant and nonresonant pulsed pumping with pulses 5 ns in duration. The effective erbium excitation cross section under pulsed pumping, σ_eff = 8.7 × 10^?17 cm₂, is close to that for nanocrystals. Comparison of the erbium photoluminescence intensity obtained for a SiO₂ matrix with and without nanocrystals made it possible to determine the absolute concentration of optically active nanocrystals capable of exciting erbium ions, the concentration of optically active erbium, and the average number of erbium ions excited by one nanocrystal. The study revealed that excitation transfer from one erbium ion to another is a relatively slow process, which accounts for the low efficiency of erbium ion excitation under pulsed pumping in a SiO₂ matrix containing silicon nanocrystals.     

Photoluminescence of Er<Superscript>3+</Superscript> ions in layers of quasi-ordered silicon nanocrystals in a silicon dioxide matrix

The spectra and kinetics of photoluminescence from multilayered structures of quasi-ordered silicon nanocrystals in a silica matrix were studied for undoped samples and samples doped with erbium. It was shown that the optical excitation energy of silicon nanocrystals could be effectively transferred to Er³⁺ ions, which was followed by luminescence at a wavelength of 1.5 µm. The effectiveness of energy transfer increased as the size of silicon nanocrystals decreased and the energy of exciting light quanta increased. The excitation of erbium luminescence in the structures was explained based on dipole-dipole interaction (the Förster mechanism) between excitons in silicon nanocrystals and Er³⁺ ions in silica surrounding them.     

Si-based materials and devices for light emission in silicon

We report on the fabrication and performances of extremely efficient Si-based light sources. The devices consist of MOS structures with erbium (Er) implanted in the thin gate oxide. The devices exhibit strong 1.54 μm electroluminescence (EL) at 300 K with a 10% external quantum efficiency, comparable to that of standard light-emitting diodes using III–V semiconductors. Er excitation is caused by hot electrons impact and oxide wearout limits the reliability of the devices. Much more stable light-emitting MOS devices have been fabricated using Er-doped silicon rich oxide (SRO) films as gate dielectric. These devices show a high stability, with an external quantum efficiency reduced to 1%. In these devices, Er pumping occurs by energy transfer from the Si nanostructures to the rare-earth ions. Finally, we have also fabricated MOS structures with Tb- and Yb-doped SiO₂ which show room temperature EL at 540 nm (Tb) and 980 nm (Yb) with an external quantum efficiency of a 10% and 0.1%, respectively.     

Erbium-doped Si nanocrystals: optical properties and electroluminescent devices

In the last decade, a strong effort has been devoted towards the achievement of efficient light emission from silicon. Among the different approaches, rare-earth doping and quantum confinement in Si nanostructures have shown great potentialities. In the present work, the synthesis and properties of low-dimensional silicon structures in SiO₂ will be analyzed. All of these structures present a strong room temperature optical emission, tunable in the visible by changing the crystal size. Moreover, Si nanocrystals (nc) embedded in SiO₂ together with Er ions show a strong coupling with the rare earth. Indeed each Si nc absorbs energy which is then preferentially transferred to the nearby Er ions. The signature of this interaction is the strong increase of the excitation cross section for an Er ion in the presence of Si nc with respect to a pure oxide host. We will show the properties of Er-doped Si nc embedded within Si/SiO₂ Fabry–Pérot microcavities. Very narrow, intense and highly directional luminescence peaks can be obtained. Moreover, the electroluminescence (EL) properties of Si nc and Er-doped Si nc in MOS devices are investigated. It is shown that an efficient carrier injection at low voltages and quite intense room temperature EL signals can be achieved, due to the sensitizing action of Si nc for the rare earth. These data will be presented and the impact on future applications discussed.     

Sensitisation of erbium emission by silicon nanocrystals-doped SnO2

SnO₂ thin films undoped and doped with antimony (Sb), erbium (Er) and Si nanocrystals (Si-nc) have been grown on silicon (Si) substrate using sol-gel method. Room-temperature photoluminescence (PL) measurement of undoped SnO₂, under excitation at 280 nm, shows only one broad emission at 395 nm, which is related to oxygen vacancies. The PL of Er³⁺ ions was found to be enhanced after doping SnO₂ with Sb and Si-nc. The excitation process of Er is studied and discussed. The calculation of cross-section suggests a sensitisation of Er PL by Si-nc.     

MBE-grown Si: Er light-emitting structures: Effect of implantation and annealing on the luminescence properties

Features appearing in the photo-and electroluminescence spectra of light-emitting structures based on MBE-grown Si: Er layers are studied. The luminescence properties of Si layers implanted by Er and O ions were used as a reference. The temperature quenching of the photoluminescence intensity of Er-containing centers in MBE-grown and implanted layers can be approximated adequately by the same functional relationships with equal activation energies but with preexponential factors differing by more than two orders of magnitude. It is shown that the electroluminescence of Er³⁺ ions can be increased by additional coimplantation of erbium and oxygen ions into MBE-grown light-emitting diode structures and subsequent annealing. After this treatment, the Er-containing centers continue to dominate the luminescence spectrum.     

Er<Superscript>3+</Superscript> photoluminescence excitation spectra in erbium-doped epitaxial silicon structures

Excitation spectra of erbium photoluminescence (λ=1540 nm) in Si: Er epitaxial structures were studied within a broad pump wavelength range (λ=780–1500 nm). Erbium photoluminescence was observed to occur at pump energies substantially less than the silicon band-gap width. Possible mechanisms of erbium ion excitation in this pump radiation energy region are discussed.