共查询到17条相似文献,搜索用时 78 毫秒
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《固体电子学研究与进展》2013,(6)
报道了一款开关线型Ka波段MEMS移相器,采用了16只悬臂梁结构MEMS开关,实现了4位相移。采用阶梯阻抗共面波导(CPW)传输线设计,实现了一种新型而紧凑的移相器阻抗匹配的结构。采用RF MEMS低温表面牺牲层工艺,在高阻硅片上实现了单片4位MEMS移相器样品,在35GHz频点,平均插入损耗-5.8dB,16态相移误差≤8.5°,芯片尺寸5.3mm×2.9mm。分析MEMS移相器插损的构成,提出了降低MEMS移相器插损的工艺途径,预期Ka波段4位MEMS移相器的平均插损可降为-2.6dB,满足低成本毫米波MEMS相控阵系统应用需求。 相似文献
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设计了一种五位分布式微电子机械系统(MEMS)移相器,通过分析对比传统分布式MEMS移相器加载直流偏置的两种方式,提出了一种新的直流偏置的加载方式,能解决传统方式带来的交直流干扰和引线繁杂问题,同时工艺容易实现。采用ADS软件对移相器进行级联仿真,优化了微波性能参数,仿真得出移相器在35 GHz时移相精确度小于3°,移相器的插入损耗小于0.5 dB,回波损耗大于23 dB。给出了五位分布式MEMS移相器的工艺流程,同时验证了所设计加载直流偏置方式工艺简单的优势。 相似文献
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通过在共面波导上周期性地加载分布电容,外加驱动电压改变电容值,实现分布式MEMS移相器。首先给出了5位分布式MEMS移相器的总体结构图,分析了理论参数的设计方法。再采用HFSS建立单个微桥的三维电磁仿真模型,利用仿真得到的S参数拟合微桥的up态和down态电容值并与理论设计电容值对比,确定MEMS桥精确的结构参数。最后采用ADS建立分布式MEMS移相器整体的微波等效电路,仿真得出移相器的性能指标参数。仿真结果表明移相器在35GHz时移相精度小于0.6°,移相器的插入损耗小于0.3dB,回波损耗大于25dB。 相似文献
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用于X波段移相器的RF MEMS开关设计 总被引:1,自引:1,他引:1
针对某片上集成开关线式MEMS移相器设计了一款串联接触式悬臂梁开关。该移相器要求结构紧凑,工作频段为X波段,工作电压低于27V。利用Ansoft HFSS软件仿真分析了开关关键结构参数对电磁性能的影响,包括传输线断开间距d,接触金属与传输线之间的垂直间距h,接触金属的宽度B,总结了各参数对开关电磁性能的影响趋势,确定了本设计中各结构参数的最优取值;利用MEMS CAD软件CoventorWare对初始设计的开关进行机电耦合仿真,确定了开关的详细结构参数。仿真结果表明,设计的串联接触式悬臂梁开关驱动电压约为18V;中心频率为10GHz时,开关闭合态回波损耗为0.02dB,隔离度为36dB,导通态下,插入损耗为0.028dB。 相似文献
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通过在共面波导传输线上周期性地加载分布电容,外加驱动电压改变电容值,实现分布式MEMS传输线移相器。从三个方面优化了五位分布式MEMS传输线移相器的设计:一是分别设计了11.25°和22.5°两种微桥,单元在Ka波段的插入损耗均大于-0.8 dB,回波损耗均小于-15 dB,相移精度小于0.4°,新的五位移相器以2种单元、19个微桥的结构替代了传统单一单元、31个微桥的结构,可减少微桥的总数;二是CPW传输线采用折叠布局,通过共用部分地线,移相器平面尺寸减小至1.81 mm×3.84 mm,相比传统五位分布式移相器,面积减小了56%,实现了器件的小型化;三是设计了一种新型的直流偏置结构,结构简单、工艺容易实现。 相似文献
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介绍了一种可用于电光采要系统的微波扫描移相器,其线性度≤1.4%,插入损耗≤4.05dB。用此移相器组成的电光采样测试系统测量了高速门电路波形,并讨论了扫描时间的定方法。 相似文献
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提出了一种基于微机械工艺的新型复合微桥膜结构 ,由低应力SiN/SiO2 (0 .5 μm/5 0nm )及Cr/Au(30nm/1μm)构成。相应的工艺流程较为简单。对影响其特性的因素进行了理论分析 ,并提出了 3种桥膜的平面结构 ;利用静电 /力耦合有限元法分析了各种结构的静电驱动特性以及各阶模态 ,结果得到了令人满意的驱动和机械性能 ;通过有限元高频仿真软件对桥膜结构与共面波导形成的可调电容结构进行了分析 ,结果表明其具有良好的射频 /微波性能。该桥膜结构适用于RFMEMS开关、移相器及开关式可调电容和滤波器等 相似文献
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提出了一种基于微机械工艺的新型复合微桥膜结构,由低应力SiN/SiO2 (0.5μm/50nm)及Cr/Au(30nm/1μm)构成.相应的工艺流程较为简单.对影响其特性的因素进行了理论分析,并提出了3种桥膜的平面结构;利用静电/力耦合有限元法分析了各种结构的静电驱动特性以及各阶模态,结果得到了令人满意的驱动和机械性能;通过有限元高频仿真软件对桥膜结构与共面波导形成的可调电容结构进行了分析,结果表明其具有良好的射频/微波性能.该桥膜结构适用于RF MEMS开关、移相器及开关式可调电容和滤波器等. 相似文献
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Thomas Beluch Daniela Dragomirescu Vincent Puyal Robert Plana 《Microelectronics Journal》2011,42(12):1321-1326
This paper presents a circuit used to actuate Radio Frequency MicroElectroMechanical Systems (RF MEMS) based phase shifters for 60 GHz beam forming. Wireless transmission in the 60 GHz band show a dramatic free space loss, thus making it mandatory to use antennas with high gain in a desired direction. Beam forming is then necessary to optimize the link budget between communicating nodes. Antenna arrays can be used for beam forming. The work done at LAAS was aiming to provide RF MEMS based phase shifters working with a standard digital command. RF MEMS commonly have high actuation voltages usually obtained with charge pumps. This paper presents a full 1 bit phase shifter with a digital translation part, an analog DC–DC converter, and an RF MEMS based loaded line phase shifter for 60 GHz signals. This converter is built using boost converters as an alternative to the use of charge pumps for driving RF MEMS in the field of wireless communications. Boost converters, despite relatively high current peaks, allow shorter settling times compared to charge pumps. 相似文献
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Congsi Wang Kang Ying Haihua Li Wei Gao Lei Yin Meng Wang 《International Journal of Electronics》2018,105(8):1358-1373
MEMS phase shifter has many advantages as the ‘steering wheel’ of phased array antenna beam steering. The deformation of mechanical structures of MEMS phase shifter influenced by the complex environmental factors, which became the biggest obstacle to further enhance the performance of phased array antennas. The electromechanical coupling model between the bridge height and phase shift of the distributed MEMS phase shifter is developed. The coupling model could be used to predict the phase error and determine the bridge height tolerance for the deformed MEMS phase shifter. The simulation results of four-bit distributed MEMS phase shifter with 15 bridges illustrate the validity of coupling model and demonstrate the application potential for engineering design and test. 相似文献
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《Microelectronics Journal》2014,45(8):1093-1102
This paper aims to present in detail the design, fabrication and the various characterization techniques adopted in realizing a novel miniature-size switched capacitor based phase shifter. The work strives to provide an all-round development of a DMTL (Distributed MEMS Transmission Line) based phase shifting unit yielding an overall phase shift of 15° at a frequency of 15 GHz. The RF MEMS (Radio Frequency Micro Electro Mechanical Systems) Switched Capacitor based phase shifter has highly miniaturized dimensions, and is capable of solving many limitations to which the conventional Switched Capacitors are mostly susceptible. This miniature RF MEMS switched capacitor actuates at a low actuation voltage of 12 V, exhibits a fundamental frequency of vibration as high as 1.468 MHz and a switching time of 1.4 µs which is an improvement over the other reported designs. Various characterization results seem to validate the simulations. 相似文献
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介绍了波导二极管移相器的设计原理和实现方法。运用矩形波导的传输理论,将加载线型移相单元插入矩形波导内,对波导内的24个加载线型移相单元进行调配组合实现五位地址数码控制移相器。实测结果表明该移相器移相范围大、插入损耗低、输入驻波小、转换时间快、移相精度高及耐高功率性好。 相似文献
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