太赫兹片上系统中低温砷化镓薄膜光电导天线的研究

太赫兹时域光谱技术是一种在太赫兹频段内,广泛应用的光谱测量技术。这种技术可以用于许多物质的频谱分析,对于研究化学、半导体与生物分子等领域有着无可比拟的作用。然而用该系统进行样品探测时,受回波的影响频谱分辨率较低;受太赫兹波光斑大小以及待测样品与电磁波相互作用距离长短的影响,样品消耗量较多,并且整个系统的占用空间较大,这些局限性都限制了太赫兹时域光谱系统的进一步发展。为了突破太赫兹时域光谱系统的局限性,设计了一种将太赫兹泵浦区、探测区和传输波导集成到一个硅片上的太赫兹片上系统,该系统不仅能够解决上述系统的局限性,还能够省去样品测量前的光路准直环节,使样品的测量过程更加简便,同时集成化的系统也很大程度上提高了太赫兹波传输的稳定性。在太赫兹片上系统中,泵浦区和探测区的光电导天线是由低温砷化镓和金属电极制成,由于受到太赫兹片上系统的高度集成化和低温砷化镓晶体生长条件的限制,如何制备出低温砷化镓半导体薄膜衬底,并将其转移与键合,是太赫兹片上系统研制过程中的关键环节。首先利用分子束外延（MBE）技术制备出由半绝缘砷化镓、砷化镓缓冲层、砷化铝牺牲层和低温砷化镓层构成的外延片,然后利用盐酸溶液与砷化铝和低温砷化镓反应速度差别较大的原理,将200 nm厚的AlAs牺牲层腐蚀掉,从而得到2 μm厚的低温砷化镓薄膜。为了更加高效并且完整地得到低温砷化镓薄膜,研究了盐酸溶液在不同温度和不同浓度下与AlAs牺牲层的选择性腐蚀速率的关系。给出了低温砷化镓薄膜制备过程中盐酸的最佳体积比浓度和最佳温度,即在73 ℃下13.57%的盐酸溶液中进行砷化铝牺牲层的腐蚀。相比于已有工艺,这种腐蚀方法对实验设备的要求较低并且具有较高的安全性。最后,将单层低温砷化镓薄膜转移键合至硅片上,并制成光电导天线的结构。利用飞秒激光脉冲进行激发探测到太赫兹信号。由此说明,低温砷化镓薄膜的获取、转移与键合工艺能够满足芯片级太赫兹系统的制作要求,这为太赫兹片上系统的进一步研制打下了坚实的基础。     

Effect of Gallium Arsenide Charge Carrier Life Time on the Generation and Detection Efficiency of Continuous and Pulsed Terahertz Radiation

Russian Physics Journal - A configuration and test samples of photoconductive dipole antennas based on SI-GaAs:Cr and LT-GaAs for generation and detection of terahertz radiation are developed....     

Dependence of terahertz radiation on gap sizes of biased multi-energy arsenic-ion-implanted and semi-insulating GaAs antennas

We investigate the characteristics of terahertz radiation pulses using biased multi-energy arsenic-ion-implanted and semi-insulating GaAs photoconductive antennas with different gap sizes in terahertz time-domain spectroscopy. At a specific fluence excitation, with increasing antenna gap size, the absolute values of the (peak) normalized terahertz waveform minimum (valley), as well as the bandwidth, reveal an increasing trend for multi-energy arsenic-ion-implanted GaAs antennas and a decreasing trend for semi-insulating GaAs antennas. We find that the largest reachable bias fields applied to arsenic-ion-implanted GaAs antennas are higher than those applied to semi-insulating GaAs antennas. On the basis of pump fluence dependences of peak terahertz amplitude, we deduce that multi-energy arsenic-ion-implanted GaAs antennas have the ability to acquire higher THz power at even higher pump fluence in comparison with semi-insulating GaAs antennas.     

光电导开关产生太赫兹电磁波双极特性分析

利用光电导体产生太赫兹电磁波(THz波)，THz远场辐射波形与光电导体材料的载流子寿命、偏置电场以及触发光有直接关系.用不同方法对低温GaAs(LT-GaAs)和半绝缘GaAs(SI-GaAs)光电导开关辐射的THz电磁波所呈现的双极特性进行了模拟计算.结果表明，LT-GaAs光电导开关辐射THz波呈现双极性的主要原因是光生载流子寿命小于一个THz波产生时间；而光生载流子寿命大于100ps的SI-GaAs光电导开关，在不同的实验条件（不同偏置电场、不同光脉冲能量）下，产生的THz波呈现双极特性的主要原因分别是载流子发生了谷间散射和空间电荷电场屏蔽. 关键词： 光电导开关 THz电磁波 载流子寿命 空间电荷屏蔽     

大孔径光电导天线产生高功率窄带宽THz辐射特性分析

从大孔径光电导天线产生THz辐射的饱和理论出发,考虑了载流子的瞬变迁移率.分析了脉冲序列激发大孔径光电导天线产生高功率窄带宽THz辐射的特性.对比了单个光脉冲和序列光脉冲激发SI-GaAs和LT-GaAs光电导天线的饱和特性.分析表明,采用序列光脉冲激发载流子寿命小于光脉冲间隔的光电导天线时,可以克服大孔径光电导天线的饱和特性,产生高峰值功率的窄带THz辐射.     

太赫兹频段开口环谐振器的可调谐振模式转换

在硅衬底上设计了一种单开口环谐振器，对其太赫兹频段内的透射性质进行了研究。假定通过光注入方式改变衬底硅的电导率，实现了谐振环的双谐振透射率可调。将砷化镓材料生长于该谐振环的开口处，通过光注入方式改变砷化镓材料的电导率，可以实现谐振环的双频LC共振和偶极子共振模式与单频闭合环共振模式之间的转换。这种通过光注入改变半导体材料电导率的方法，可以在不破坏原来谐振器件物理结构的前提下，实现谐振环谐振模式的可逆转换。     

Properties of thin manganite films grown on semiconducting substrates for spintronics applications

La_0.7Sr_0.3MnO₃ (LSMO) manganite thin films were grown by pulsed plasma deposition on silicon (Si) and gallium arsenide (GaAs) substrates covered by an amorphous oxide. Manganite films are characterized by polycrystalline structure. Ferromagnetic transition is above room temperature and for 50 nm thick film the Curie temperature was as high as 325 K and 305 K for LSMO/SiO_x/Si and LSMO/AlO_x/GaAs, respectively.     

低温生长砷化镓的超快光抽运-太赫兹探测光谱

本文采用光抽运-太赫兹探测技术系统研究了低温生长砷化镓(LT-GaAs)中光生载流子的超快动力学过程.光激发LT-GaAs薄层电导率峰值随抽运光强增加而增加,最后达到饱和,其饱和功率为54μJ/cm~2.当载流子浓度增大时,电子间的库仑相互作用将部分屏蔽缺陷对电子的俘获概率,从而导致LT-GaAs的快速载流子俘获时间随抽运光强增加而变长.光激发薄层电导率的色散关系可以用Cole-Cole Drude模型很好地拟合,结果表明LT-GaAs内部载流子的散射时间随抽运光强增加和延迟时间(产生光和抽运光)变长而增加,主要来源于电子-电子散射以及电子-杂质缺陷散射共同贡献,其中电子-杂质缺陷散射的强度与光激发薄层载流子浓度密切相关,并可由散射时间分布函数α来描述.通过对光激发载流子动力学、光激发薄层电导率以及迁移率变化的研究,我们提出适当增加缺陷浓度,可以进一步降低载流子迁移率和寿命,为研制和设计优良的THz发射器提供了实验依据.     

The photoelectric properties of polycrystalline films of gallium arsenide

Certain photoelectric properties of polycrystalline films of gallium arsenide at room temperature obtained by a gas deposition method are studied. It is found that film specimens of GaAs have much greater photosensitivity than the solid material for the same current carrier density.The barrier theory of conductivity is invoked in order to explain the relationships observed.     

基于LT-GaAs外延片的THz片上系统

太赫兹（THz）波在物质检测方面发挥着巨大的作用,是一种非常有潜力的生化传感工具。但是传统的太赫兹时域光谱系统（TDS）结构复杂,系统的集成度低,占用空间较大。所以,如何对THz波进行有效引导、实现集成化传输并得到高质量光谱就成为太赫兹光谱系统的研究热点。太赫兹片上系统是将THz的产生、传输以及探测都集成到同一芯片上,然后通过相干探测的方法获得THz时域光谱。它可以实现对多种样品的检测,尤其在对难于取样的微量样品探测方面具有广泛的应用价值。它无需光路准直,操作简便,成品率高。两个研究工作都是基于低温砷化镓(LT-GaAs)外延片开展的。首先将一根直径为200 μm的铜线固定在LT-GaAs外延片的上方,通过真空蒸镀的方法制备出天线电极,同时得到天线间隙,研制出基于LT-GaAs外延片的THz天线。利用波长为800 nm的飞秒激光对其进行测试,得到了质量较高的THz信号,验证了天线的实用性。然后在另一外延片上利用光刻微加工工艺制作出传输线和微电极,得到了集成的THz片上系统。使用波长为1 550 nm的飞秒激光分别激发片上系统的太赫兹产生天线和探测天线,天线产生的太赫兹波在传输线上传播,在探测端同样得到了质量较高的THz时域信号,证实了THz片上系统的可行性。该方法省去了腐蚀牺牲层以及LT-GaAs薄膜的转移、键合等步骤,极大地提高了片上系统的成品率,避免了薄膜转移过程中易破碎及腐蚀液存在毒性的问题。最后,研究了外加电压对从片上系统中获得的THz波性能的影响,结果为电压越高,THz波的信号强度越强;另外,通过在传输线上方垂直放置铜箔的方法验证了THz波沿着传输线传播的事实。该研究中采用的基于LT-GaAs外延片的片上系统的制备方法简单,制作周期短,制作过程安全,应用领域广泛,这为将来与微流控芯片相结合实现对液体样品的探测打下了基础。     

On-chip pulsed terahertz systems and their applications

The generation and detection of guided wave terahertz (THz) transients in microstrip transmission line systems is demonstrated at both room and cryogenic (∼ 4 K) temperatures using thin film low-temperature-grown GaAs (LT-GaAs) switches, excited by a 100 fs, 80 MHz repetition rate pulsed Ti:Sapphire laser. The characterisation of passive filter elements formed in the microstrip line is reported, together with their response to the application of dielectric loads of varying thickness at room temperature.     

Ion-irradiated In0.53Ga0.47As photoconductive antennas for THz generation and detection at 1.55 μm wavelength

We present a detailed study of the photoconductive antennas made from heavy-ion-irradiated In_0.53Ga_0.47As material. The optical and transport properties of ion-irradiated In_0.53Ga_0.47As material are characterized. The terahertz waveforms emitted and detected by ion-irradiated In_0.53Ga_0.47As photoconductive antennas excited by 1.55 μm wavelength femtosecond laser pulses are reported and the effect of the carrier lifetime on the terahertz signal characteristics emitted by such devices is analysed. The performances of ion-irradiated In_0.53Ga_0.47As photoconductive antennas excited by 1.55 μm and also by 0.8 μm wavelength femtosecond laser pulses are compared to those of similar low-temperature-grown GaAs photoconductive antennas. To cite this article: J. Mangeney, P. Crozat, C. R. Physique 9 (2008).     

Measurement of the dielectric constant of thin films by terahertz time-domain spectroscopic ellipsometry

We present a reflection-type terahertz time-domain spectroscopic ellipsometry (THz-TDSE) technique for measuring the complex dielectric constants of thin-film materials without replacement of the sample. THz-TDSE provides complex dielectric constants from the ratio of the complex amplitude reflection coefficients between p- and s-polarized THz waves. The measured dielectric constants of doped GaAs thin films show good agreement with predictions of the Drude model, even though the film thickness is of the order of a tenth of the penetration depth of the THz waves. In addition, we demonstrate the measurements of soft-phonon dispersion in SrTiO(3) thin films deposited on a Pt layer. The obtained dielectric constants agree well with the predictions of a generalized harmonic oscillator model.     

Magnetic properties of thermally deposited Fe/GaAs(100) thin films

Thin (50–200 Å) films of iron have been prepared on (100) gallium arsenide substrates by thermal evaporation at a deposition rate of 3–30 Å/s and a pressure of ～10^?5 torr. Dependences of the saturation magnetization, cubic and uniaxial planar anisotropy constants, and the ferromagnetic resonance linewidth on the film thickness were studied by ferromagnetic resonance at 9.8 GHz. It has been found that the parameters of thermally deposited Fe/GaAs (001) films are comparable to those achieved with molecular-beam epitaxy.     

Giant injection magnetoresistance in gallium arsenide/granulated film heterostructures with nanosize cobalt inclusions

Electron transport has been studied in the gallium arsenide/granulated SiO₂ film heterostructure with Co nanoparticles and in the gallium arsenide/TiO₂ film heterostructure with Co island sublayers. When electrons are injected from a film into a semiconductor, a new phenomenon is observed, which is called injection magnetoresistance. For the SiO₂(Co)/GaAs structure with 60 at. % Co in a magnetic field of 23 kOe at a voltage of 50 V, the injection magnetoresistance reaches 5200% at room temperature.     

Effects of silicon negative ion implantation in semi-insulating gallium arsenide

ABSTRACT

In the present work, effects of silicon negative ion implantation into semi-insulating gallium arsenide (GaAs) samples with fluences varying between 1?×?10¹⁵ and 4?×?10¹⁷?ions?cm^?2 at 100?keV have been described. Atomic force microscopic images obtained from samples implanted with fluence up to 1?×?10¹⁷?ion?cm^?2 showed the formation of GaAs clusters on the surface of the sample. The shape, size and density of these clusters were found to depend on ion fluence. Whereas sample implanted at higher fluence of 4?×?10¹⁷?ions?cm^?2 showed bump of arbitrary shapes due to cumulative effect of multiple silicon ion impact with GaAs on the same place. GXRD study revealed formation of silicon crystallites in the gallium arsenide sample after implantation. The silicon crystallite size estimated from the full width at half maxima of silicon (111) XRD peak using Debye-Scherrer formula was found to vary between 1.72 and 1.87?nm with respect to ion fluence. Hall measurement revealed the formation of n-type layer in gallium arsenide samples. The current–voltage measurement of the sample implanted with different fluences exhibited the diode like behavior.     

雪崩倍增GaAs光电导太赫兹辐射源研究进展

在飞秒激光激励下用GaAs光电导开关作为太赫兹(THz)辐射天线, 已经广泛用于太赫兹时域光谱系统, 但目前国际上都是使用GaAs光电导开关的线性工作模式, 而GaAs光电导开关的雪崩倍增工作模式所输出的超快电脉冲功率容量远大于其线性工作模式, 迄今为止, 还没有人提出用雪崩倍增机理的GaAs 光电导开关作为辐射源产生THz电磁辐射. 本文探讨了用 雪崩倍增工作模式的GaAs光电导开关作为光电导天线产生THz电磁波的可能性及研究进展. 通过理论分析及实验研究, 在实验上实现了: 1) 利用nJ量级飞秒激光触发GaAs光电导天线, 可以进入雪崩倍增工作模式; 2) 利用光激发电荷畴的猝灭模式, 可以使GaAs光电导天线载流子雪崩倍增模式的延续时间(lock-on 时间)变短. 这为利用具有雪崩倍增机理的GaAs光电导天线产生强THz辐射奠定了基础.     

Integrated terahertz source based on three-wave mixing of whispering-gallery modes

We propose an integrated terahertz emitter operating at room temperature between 2.4 and 6 THz. Based on difference-frequency generation in a triply resonant Au/AlAs/GaAs/AlAs/Au microcylinder, this nonlinear source is pumped by two near-IR whispering-gallery modes that are excited by InAs quantum dots embedded in the resonator. In the vertical direction, these pump modes are due to total internal reflection at GaAs/AlAs interfaces, while the terahertz mode is confined between the metallic layers. This parametric source offers potential advantages with respect to existing terahertz sources for spectroscopic applications, such as room-temperature operation and electrical pumping.     

Hall effect and photoluminescence in vapor-phase epitaxial gallium arsenide heavily doped with sulfur

Hall mobility and photoluminescence have been studied in degenerate sulfur doped gallium arsenide vapor-epitaxial films. The results are in agreement with the measurements on tellurium and selenium doped GaAs made earlier by several investigators.     

GaAs photonic crystal cavity with ultrahigh Q: microwatt nonlinearity at 1.55 microm

We haves realized and measured a GaAs nanocavity in a slab photonic crystal based on the design by Kuramochi et al. [Appl. Phys. Lett. 88, 041112 (2006)]. We measure a quality factor Q=700,000, which proves that ultrahigh Q nanocavities are also feasible in GaAs. We show that owing to larger two-photon absorption in GaAs nonlinearities appear at the microwatt level and will be more functional in gallium arsenide than in silicon nanocavities.