微型电子回旋共振离子推力器离子源结构优化实验研究

微型电子回旋共振(ECR)离子推力器可满足微小航天器空间探测的推进需求. 为此, 本文开展直径20 mm的微型ECR离子源结构优化实验研究. 根据放电室内静磁场和ECR谐振区的分布特点, 研究不同微波耦合输入位置对离子源性能的影响, 结果表明环形天线处在高于ECR谐振强度的强磁场区域时, 微波与等离子体实现无损耦合, 电子共振加热效果显著, 引出离子束流较大. 根据放电室电磁截止特性, 结合微波电场计算, 研究放电容积对离子源性能的影响, 实验表明过长或过短的腔体长度会导致引出离子束流下降甚至等离子体熄灭. 经优化后离子源性能测试表明, 在入射微波功率2.1 W、氩气流量14.9 μg/s下, 可引出离子束流5.4 mA, 气体放电损耗和利用率分别为389 W/A和15%.     

A numerical model for lithium plasma process in a hybrid microwave ion source

Lithium ions are widely used in many scientific fields; in order to get these ions, it is necessary to study lithium plasma process thoroughly. Recently, a hybrid ⁷Li³⁺ ion source has been designed and tested at Peking University (PKU). To understand the lithium plasma behaviour inside the plasma chamber and to provide some guidelines for ion source optimization to generate ⁷Li³⁺, a numerical model based on the plasma equilibrium equations is developed in this work, which is helpful not only for our ion source, but also for understanding the physical process of lithium plasma from ECR ion sources with different frequencies. This model can describe the density and fraction of lithium ions in various system parameters. The dependences of the Li⁺, Li²⁺, and Li³⁺ ion density and fraction on electron temperature, gas pressure, microwave power, surface ionizer, and the magnetic field are investigated systematically.     

2 cm电子回旋共振离子推力器离子源中磁场对等离子体特性与壁面电流影响的数值模拟

电子回旋共振离子推力器(electron cyclotron resonance ion thruster,ECRIT)离子源内等离子体分布会影响束流引出,而磁场结构决定的ECR区与天线的相对位置共同影响了等离子体分布.在鞘层作用下,等离子体中的离子或电子被加速对壁面产生溅射,形成壁面离子或电子电流,造成壁面磨损和等离子体损失,因此研究壁面电流与等离子体特征十分重要.为此本文建立2 cm ECRIT的粒子PIC/MCC(particle-in-cell with Monte Carlo collision)仿真模型,数值模拟研究磁场结构对离子源内等离子体与壁面电流特性的影响.计算表明,当ECR区位于天线上游时,等离子体集中在天线上游和内外磁环间,栅极前离子密度最低,故离子源引出束流、磁环端面电流和天线壁面电流较低.ECR区位于天线下游时,天线和栅极上游附近的等离子体密度较高,故离子源引出束流、天线壁面电流和磁环端面电流较高.腔体壁面等离子体分布与电流受磁场影响最小.     

非对称磁镜场电子回旋共振氧等离子体刻蚀化学气相沉积金刚石膜

分别应用郎缪尔双探针和离子灵敏探针对非对称磁镜场电子回旋共振氧等离子体的电子参数、空间分布和离子参数进行了测量,分析了气压对等离子体参数及空间分布的影响。利用该等离子体在优化的气压条件下对化学气相沉积金刚石膜进行了刻蚀,并研究了刻蚀机理。结果表明:电子温度为5~10 eV,离子温度为1 eV左右,而等离子体数密度在1010cm-3数量级。随气压的升高,电子和离子温度降低,而电子数密度先增大后减小。在低气压下等离子体数密度空间分布更均匀,优化的刻蚀气压为0.1 Pa。刻蚀过程中,离子的回旋运动特性得到了加强,有利于平行于金刚石膜表面的刻蚀,有效地保护了金刚石膜的晶界和缺陷。     

Understanding hydrogen plasma processes based on the diagnostic results of 2.45 GHz ECRIS at Peking University

Optical emission spectroscopy(OES), as a simple in situ method without disturbing the plasma, has been performed for the plasma diagnosis of a 2.45 GHz permanent magnet electron cyclotron resonance(PMECR) ion source at Peking University(PKU). A spectrum measurement platform has been set up with the quartz-chamber electron cyclotron resonance(ECR) ion source [Patent Number: ZL 201110026605.4] and experiments were carried out recently. The electron temperature and electron density inside the ECR plasma chamber have been measured with the method of line intensity ratio of noble gas. Hydrogen plasma processes inside the discharge chamber are discussed based on the diagnostic results. What is more, the superiority of the method of line intensity ratio of noble gas is indicated with a comparison to line intensity ratio of hydrogen. Details will be presented in this paper.     

Effects of downstream magnetic field collimation on ion behavior inelectron cyclotron resonance microwave plasma

Effects of a magnetic held collimation on ion behavior in the downstream region of an electron cyclotron resonance (ECR) plasma device are clarified experimentally using a directional ion energy analyzer. The drift energy and its spread of the ion beam observed in the downstream region decrease and the beam temperature increases with the collimating magnetic flux density. Then, the ion temperature measured perpendicular to the axis of the plasma stream slightly decreases. The ion beam is found to be almost parallel to the magnetic field lines, that is, the beam tends to be collimated     

不同磁路电子回旋共振离子源引出实验

空间推进所用的电子回旋共振离子源(ECRIS)应具有体积小、效率高的特点. 本文研究的ECRIS使用永磁体环产生磁场, 有效减小了体积, 该离子源利用微波在磁场中加热电子, 电子与中性气体发生电离碰撞产生等离子体. 磁场在微波加热电子的过程中起关键作用, 同时影响离子源内等离子体的约束和输运. 通过比较四种磁路结构离子源的离子电流引出特性来研究磁场对10 cm ECRIS性能的影响. 实验发现: 在使用氩气的条件下, 特定结构的离子源可引出160 mA的离子电流, 最高推进剂利用率达60%, 最小放电损耗为120 W·A^-1; 所有离子源均存在多个工作状态, 工作状态在微波功率、气体流量、引出电压变化时会发生突变. 离子源发生状态突变时的微波功率、气体流量的大小与离子源内磁体的位置有关. 通过比较不同离子源的引出离子束流、放电损耗、气体利用率、工作稳定性的差异, 归纳了磁场结构对此种ECRIS引出特性的影响规律, 分析了其中的机理. 实验结果表明: 保持输入微波功率、气体流量、引出电压不变时, 增大共振区的范围、减小共振区到栅极的距离, 离子源能引出更大的离子电流; 减小共振区到微波功率入口、气体入口的距离能降低维持离子源高状态所需的最小微波功率和最小气体流量, 提高气体利用率, 但会导致放电损耗增大. 研究结果有助于深化对此类离子源工作过程的认识, 为其设计和性能优化提供参考.     

Parameter space map of an electron cyclotron resonance plasma in acompact chamber

Ion current density measurements were made in an electron cyclotron resonance (ECR) plasma reactor for both argon and oxygen discharges. Spatial changes in the ion current density were also recorded across the reactor diameter for changes in pressure and power. These measurements revealed a minimum in the ion current density on the reactor axis. This observation has been explained as a consequence of the shape of the ECR region, which, in turn, is dependent on the mode of coupling. Current density measurements were made as a function of reactor pressure and microwave power for two different axial locations in the system. A Langmuir probe was also used at these two locations to measure the electron temperature as a function of these process conditions. It was observed that the ion current density and/or plasma density measured downstream from the ECR zone, increased significantly in the low-pressure/high-microwave power region. Results from this region of the operating parameter space have not previously been reported. Further existing models do not predict this observed increase in plasma density or ion current density. It has been proposed that a rarefication of the gas in the ECR region, as a result of gas heating, has acted to increase the outward diffusion of electrons from the ECR zone and, thus, has increased the ambipolar diffusion of ions to the downstream location. This proposal has been partially validated by experimental results in which the ion energy was measured as a function of reactor pressure and gas flow rate. The shape of the oxygen parameter space map differs significantly from that for Ar. The principal reasons for these changes are a number of different inelastic electron scattering mechanisms which effect the transport electrons out of the ECR zone and through ambipolar diffusion also the transport of ions. The second factor is the production of negative ionic species which varies with reactor pressure and, thus, T_e     

电子回旋共振等离子体密度均匀性的数值研究

基于漂移扩散近似,在轴对称假设下,对电子回旋共振等离子体源腔室内的等离子体建立了二维流体模型.采用有限差分法对所建立的模型进行了自洽数值模拟,得到了等离子体密度均匀性随时间演化的数值结果.通过对数值结果的分析,研究了背景气体压强、微波功率和磁场线圈电流对等离子体密度均匀性的影响.研究表明,在电离初期,电子密度的均匀性好于离子密度的均匀性.在电离后期,离子密度的均匀性好于电子密度的均匀性.随着背景气体压强的增大,电子密度和离子密度的均匀性都在增加,且离子密度的均匀性增加的更快.随着微波功率的增大,电子密度和 关键词： 等离子体密度均匀性 背景气体压强 微波功率 磁场线圈电流     

ECR离子源束流发射度的实验研究

利用最新自行研制的电扫描发射度探测系统, 在ECR离子源上进行了一系列关于ECR离子源引出束流发射度的研究. 这套电扫描发射度探测系统安装在中国科学院近代物理研究所(兰州)的LECR3试验平台的束运线上. 试验中, 通过测量相关参数, 研究了磁场、微波、掺气效应及负偏压效应等对引出束流发射度的影响. 利用实验所得的结果与关于ECR等离子体和离子源束流发射度的半经验理论, 分析推导了离子源各可调参数与ECR等离子体的直接关系, 这为分析探索ECR离子源的工作机制提供了一定的参考依据.     

氧等离子体刻蚀CVD金刚石膜的影响机理

采用电子回旋共振(ECR)等离子体在不同的磁场位形和工作气压下刻蚀化学气相沉积(CVD)金刚石膜,运用双探针和离子灵敏探针法对等离子体进行了诊断,研究了等离子体参数对刻蚀效果的影响。结果表明:磁场由发散场向收敛场转变时,离子温度、电子温度和等离子体密度都随之增大,刻蚀效果逐渐增强;当工作气压由低气压向高气压变化时,等离子体参数先增大后减小,CVD金刚石膜表面粗糙度降低程度也出现了相同的趋势。     

Numerical investigation of radio-frequency negative hydrogen ion sources by a three-dimensional fluid model

A three-dimensional fluid model is developed to investigate the radio-frequency inductively coupled H2 plasma in a reactor with a rectangular expansion chamber and a cylindrical driver chamber, for neutral beam injection system in CFETR. In this model, the electron effective collision frequency and the ion mobility at high E-fields are employed, for accurate simulation of discharges at low pressures(0.3 Pa–2 Pa) and high powers(40 k W–100 k W). The results indicate that when the high E-field ion mobility is taken into account, the electron density is about four times higher than the value in the low E-field case. In addition, the influences of the magnetic field, pressure and power on the electron density and electron temperature are demonstrated. It is found that the electron density and electron temperature in the xz-plane along permanent magnet side become much more asymmetric when magnetic field enhances. However, the plasma parameters in the yz-plane without permanent magnet side are symmetric no matter the magnetic field is applied or not. Besides, the maximum of the electron density first increases and then decreases with magnetic field, while the electron temperature at the bottom of the expansion region first decreases and then almost keeps constant. As the pressure increases from 0.3 Pa to 2 Pa, the electron density becomes higher, with the maximum moving upwards to the driver region, and the symmetry of the electron temperature in the xz-plane becomes much better. As power increases, the electron density rises, whereas the spatial distribution is similar. It can be summarized that the magnetic field and gas pressure have great influence on the symmetry of the plasma parameters, while the power only has little effect.     

用于半导体加工的腔耦合－磁多极型ECR源的研究

本实验室研制出一台谐振腔耦合一多极场位形的电子回旋共振（ＥＣＲ）微波等离子体源（ＭＥＰ）。采用朗谬探针和离子能量分析器，测量了ＭＥＰ中Ａｒ等离子体的放电特性。实验结果表明．ＭＥＰ能在很宽的运行参数范围，高效率地产生具有较高密度、较低离子温度和空间电位的大面积均匀等离子体，特别适合于半导体加工应用研究。     

分段表面放电沉积效率研究

利用一种结构紧凑的分段表面放电辐射源模块，详细研究了在不同电压、电容、气压实验条件下回路等效电阻、等效电感及放电能量沉积效率的变化规律，利用四分幅相机拍摄获得了不同实验条件下的放电等离子体通道图像，分析讨论了放电等离子体运动对放电能量沉积效率的影响，提出了提高能量放电沉积效率的有效途径。     

30cm口径离子推力器磁场设计

为了对30cm口径离子推力器的磁场设计提出合理建议,研究了四极磁场结构下,不同尺寸的磁极宽度和磁极间距对磁极表面磁场强度和放电室电子约束长度的影响,并利用Maxwell-3D磁场分析软件得到柱段和锥段永磁体分别呈30°,60°和90°夹角时的放电室磁场强度分布,根据不同磁场强度计算了电子温度、离子密度以及电离率等推力器放电参数。结果表明,当推力器放电电压为30V时,磁极长度设计为0.008m且磁极间距取为0.12m,电子约束路径大约为50m;柱段和锥段永磁体分别呈30°,60°和90°夹角时,放电室磁场等势线基本在0.002~0.005T之间;永磁体夹角为60°时磁场分布和磁空区相比30°和90°夹角更为合理,此时的电子温度约在2~6eV,等离子体密度约在4×1017~8×1017 m-3,电子碰撞频率比率约在0.2~1.8范围内。     

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在非对称磁镜场微波ECR等离子体中引入了磁电加热系统,研究了电极环大小、轴向位置以及双环加热对离子温度的影响.结果表明,大小合适的电极环能有效提高离子的加热温度,且最优电极环尺寸主要取决于离子回旋半径.电极环轴向位置的选择主要与磁镜场位形有关,将电极环置于磁镜场中部的弱磁场位置时最有利于离子温度的提高.采用双电极环加热能进一步提高离子温度,并且其加热效果是单环加热的两倍.     

宽带微波馈入对于具有常规磁场构型的ECR离子源性能的提高

As clearly demonstrated at several laboratories,the performances of electron-cyclotron resonance (ECR)ion sources can be enhanced by increasing the physical sizes(volumes)of embedded ECR zones.En- larged ECR zones have been achieved by engineering the central magnetic field region of these sources so they are uniformly-distributed"volumes"in resonance with single-frequency rf power.Alternatively,the number of ECR surfaces in conventional minimum-B geometry sources can be increased by heating their plasmas with multiple,discrete frequency microwave radiation.Broadband rf power offers a simple,low cost and arguably more effective means for increasing the physical sizes of the ECR zones within the latter source type.In this article,theoretical arguments are made in support of the volume effect and the charge-state enhancing ef- fects of broadband microwave radiation(bandwidth:200MHz)plasma heating are demonstrated by comparing the high-charge-states of Ar ion beams,produced by powering a conventional minimum-B geometry,6.4GHz ECR ion source,equipped with a biased disk,with those produced by conventional bandwidth(bandwidth:～1.5MHz)radiation.     

大面积等离子体片密度分布分析

利用空心阴极放电产生了尺寸为60 cm× 60 cm× 2 cm的大面积等离子体面. 在实验室条件下对大面积等离子体片的密度分布进行了测量. 由于高压放电脉冲脉宽较短, 实验中改变了测量方法, 同时, 在中等磁场影响下, 为了得到真实的等离子体密度, 进行了必要的数值修正.在放电电流为1---6 A时, 测量了二维的电子密度分布. 另外, 测量并讨论了其他环境参数对等离子体密度的影响. 电子密度的分布情况对与微波波束切换相当重要. 由空心阴极增强型放电产生的大面积等离子体面具有反射X波段(8---12 GHz) 微波需要的足够稠密的电子密度和足够均匀的密度分布, 这是等离子体面在雷达系统中取代金属面板的有利条件.     

圆筒电极对离子磁电加热的影响

高效的磁电加热不仅能够提高电子回旋共振(ECR)等离子体的离子温度,还能改善离子的径向和轴向分布,促进ECR等离子体在化学气相沉积金刚石膜刻蚀中的应用.将磁电加热系统中的圆环电极改进为圆筒电极,研究了圆筒电极对离子磁电加热的影响,对比了圆筒和圆环电极加热离子的区别.结果表明:在同一阳极偏压下,圆筒比圆环电极更有利于提高离子温度,圆筒电极加热时各径向位置的离子温度升高的幅度较大,其中圆筒电极内部的离子温度径向分布差异较大,而圆筒下游的离子温度径向分布比较均匀;磁电加热对离子密度的影响很小;采用圆筒电极加热时,有利于离子向轴向下游的输运,改善了离子的轴向均匀性.     

PSII系统中微波ECR等离子体的朗缪尔探针诊断

用朗缪尔探针对一个新颖的双谐振腔多功能PSII系统的微波ECR等离子体进行了诊断,得出了会切场中工作气体压强和微波功率对等离子体密度和电子温度的影响,及真空室内等离子体的分布。