深亚微米激光光刻研究

报道用远紫外准分子激光进行亚微光刻的实验结果，以波长为２４８．３ｎｍ的ＫｒＦ准分子激光为光源，以光管均匀器为主构成照明系统，采用带有平行平板为像差样正板的１：１折反射投影光刻物镜，在两种光刻胶上分别获得了０．６μｍ和０．５μｍ的光刻分辨率。     

亚微米投影光刻物镜光学制造技术

本文报告亚微米光刻５倍ｇ线与ｉ线投影光刻物镜的光学制造技术。讨论超高精度要求的球面曲率半径、透镜中心厚度、球面面形与透镜偏心差等各项指标的综合控制技术与检测方法。着重介绍了作者所发展的大口径高精度双胶合透镜的计算机辅助无变形胶合技术。给出了加工检测结果以及镜头的主要性能指标。     

0.7微米i线投影曝光系统光刻物镜的设计与试制

介绍了微电子专用关键设备０．７μｍｉ线投影曝光系统光刻物镜的主要技术指标，及设计试制中解决的关键单元技术和试制结果。结果表明，数值孔径ＮＡ＝０．４２，光刻工作分辨力０．６μｍ，像场尺寸１４．６ｍｍ×１４．６ｍｍ，畸变＜±０．１μｍ的５倍精缩投影光刻物镜已试制成功。物镜具有双远心和有温度气压控制补偿，在满足高精度成像的同时，又能同时满足暗场同轴对准的特点。     

用于激光等离子体诊断实验的二倍频探针光系统

为了满足基准物理实验的要求,准确地探测出靶面的等离子体的电子温度、密度、电子离子漂移速度等参数,在星光Ⅱ激光装置上发展了一束二倍频激光作为探针光。通过模拟实验已经证实了该探针光的二倍频总能量大于5J,焦斑尺寸小于100μm,可以满足激光与等离子体相互作用的高功率要求。目前,该探针光系统已经用于用于激光等离子体诊断实验的常规运行。     

用于激光等离子体诊断实验的二倍频探针光系统

为了满足基准物理实验的要求 ,准确地探测出靶面的等离子体的电子温度、密度、电子离子漂移速度等参数 ,在星光 激光装置上发展了一束二倍频激光作为探针光。通过模拟实验已经证实了该探针光的二倍频总能量大于 5J,焦斑尺寸小于 1 0 0 μm,可以满足激光与等离子体相互作用的高功率要求。目前 ,该探针光系统已经用于用于激光等离子体诊断实验的常规运行。     

利用PPKTP晶体倍频产生397.5nm激光的实验研究

使用周期性极化(PPKTP)晶体进行了795nm激光倍频的实验研究.实验中,基频(795nm)激光通过锥形放大器(TPA)实现了激光功率放大(400mW),再经过光纤整形后功率输出达100mW以上.将该激光单次通过PPKTP晶体,我们测量了倍频效率随晶体温度的变化关系.再将PPKTP晶体放入红外谐振倍频腔内,在最佳匹配温度和红外光共振条件下,获得了近14mW的397.5nm紫外光,倍频效率为13%.     

飞秒脉冲激光的倍频实验研究

用I类匹配BBO晶体对近红外波段钛宝石飞秒脉冲激光做倍频实验,取得近30%的转换效率,对飞秒脉冲激光倍频的有关问题进行了分析讨论。     

飞秒脉冲激光的倍频实验研究

用互类匹配ＢＢＯ晶体对近红外波段钛宝石飞秒脉冲激光做倍频实验,取得近３０％的转换效率,对飞秒脉冲激光倍频的有关问题进行了分析讨论．     

亚微米(i线和g线)投影光刻物镜的光学装校

本文列出了ｉ线和ｇ线大数值孔径亚微米投影光刻物镜的技术指标要求，讨论了这类超高精度光刻物镜的光学装校技术特点，报告了计算机辅助高精度复杂光学系统偏心校正仪器和方法，最后给出了ｉ线和ｇ线光刻物镜装校检测结果。     

亚10 μm线宽的投影光刻物镜设计及其成像性能的实验测定

 采用Zemax软件设计出6镜片、数值孔径为0.06、2倍缩小、以405 nm半导体激光器为光源、分辨精度达5 μm、视场12 mm×12 mm 内波像差小于1/4波长、畸变小于0.005%的双远心投影光刻物镜的设计方法。将设计的物镜实物化,并对其光学传递函数(MTF)作精确的实验测定,利用所提出的MTF标准实验测量法,得到该投影物镜的成像性能达亚10 μm线宽。     

Second Harmonic Conversion-efficiency of Aberrated Laser Beam

How aberrations of pump wave affect second harmonic generation is studied. The solution is applied to type I second harmonic generation in KDP crystal. The results of conversion-efficiency and transverse intensity distribution in second harmonic generation of Gaussian beam and super-Gaussian beam with aberrations of Zernike polynomials are presented.     

Second Harmonic Conversion-efficiency of Aberrated Laser Beam

1　Ｉｎｔｒｏｄｕｃｔｉｏｎ　　Ｓｅｃｏｎｄｈａｒｍｏｎｉｃ ｇｅｎｅｒａｔｉｏｎｉｓａｎｉｍｐｏｒｔａｎｔｐａｒｔｏｆｎｏｎｌｉｎｅａｒｏｐｔｉｃｒｅｓｅａｒｃｈ ,ｂｕｔｔｈｅｗｉｄｅｌｙｓｐｒｅａｄｅｄｔｈｅｏｒｉｅｓａｒｅａｌｌｂａｓｅｄｏｎｐｌａｎｅｗａｖｅ .Ａｃｔｕａｌｌｙｉｄｅａｌｂｅａｍｓｃａｎｎｏｔｂｅｍｅｔｉｎｅｘｐｅｒｉｍｅｎｔｓａｎｄｔｈｉｓｇｉｖｅｓｖａｌｕｅｔｏｔｈｅｒｅｓｅａｒｃｈｏｆｈｏｗａｂｅｒｒａｔｉｏｎｓｏｆ ｐｕｍｐｗａｖｅａｆｆｅｃｔｓｅｃｏｎｄｈａｒｍｏｎ…     

用于钙原子光频标的半导体倍频激光器及荧光谱

利用BIBO(BiB3O6)晶体的倍频效应,由半导体激光器产生的波长为846 nm激光可以获得波长为423 nm的蓝光。真空室内的钙炉在加热到600 ℃时产生钙原子束。将423 nm激光垂直照射到钙原子束上,用光电探测器可以获得钙原子束的荧光谱,谱线的半峰全宽(FWHM)为100 MHz。     

在AgGaSe2晶体中TEA CO2激光的倍频产生

用炉温下降法生长出尺寸为φ２０×６０ｍｍ的ＡｇＧａＳｅ２单晶体。在１２ｍｍ长，切角为５５°的ＡｇＧａＳｅ２中，获得了ＴＥＡＣＯ２激光的倍频输出，其功率转换效率为１．１２％。泵浦阈值和破坏阈值分别为３ＭＷ／ｃｍ２和１１ＭＷ／ｃｍ２。还讨论了泵浦束的发散角对二次谐波转换效率的影响。     

Sensitivity of Narrow-Band Intracavity Laser Spectroscopy in Generation of the Second Harmonic

We carried out an analysis of the sensitivity of the method of intracavity laser spectroscopy with intracavity generation of the second harmonic to small frequency-independent losses evaluated by measuring the energies of laser-radiation pulses. We consider laser behavior with a constant and modulated quality factor of the cavity resonator. It is shown that the sensitivity of the method may be improved by an order of magnitude or higher by transforming the frequency of radiation and selecting the optimal parameters of the active medium pumping, nonlinear crystal, Q-factor of the cavity, and the means of its modulation. Measurement of the radiation power at the frequency of the second harmonic expands the range of laser-operation time regimes in which an increase in the sensitivity of the method is ensured.     

超高真空中C60光聚合效应光学二次谐波的研究

利用１．０６４μｍ基频超短脉冲激光，使用光学二次谐波方法研究了超高真空中蒸镀在多晶银表面上的Ｃ６０薄膜紫外光照射下的光聚合现象，发现聚合以后的Ｃ６０二阶非线性响应增强，同时观察到光聚合的饱和效应，Ｃ６０光聚合二阶非线性的提高可以用电四极了磁偶极子对二次谐波贡献的增强来解释。     

热透镜对铜蒸气激光振荡器与放大器输出光的影响

用几何光学传输矩阵方法和讨论了热透镜对铜蒸气激光非稳腔振荡器和放大器输出特性的影响，获得了与实验相符的计算结果，并提出了在振荡－放大链内热透效应的补偿方法。     

Properties of a Second Harmonic Gyrotron Cavity with Internal Blazed Grating

Spectral domain analysis, scattering matrix analysis and PIC simulations are used here to design a second harmonic gyrotron cavity with an internal blazed grating which favors operation at the second harmonic of the electron cyclotron frequency rather than operation at the electron cyclotron frequency itself. Based on these simulations, the cavity design is optimized. The results show that a new gyrotron with higher power and higher frequency can be achieved by incorporating such a blazed grating.     

Generation of the Second Harmonic by Bessel Light Beams Under the Conditions of Quasisynchronism

The specific features of the doubling of Bessel light beams in quasisynchronous interaction in periodically polarized nonlinear crystals are investigated. A theoretical model has been developed, which is based on the representation of the second-harmonic field in the form of superposition of Bessel beams. Based on the analysis of overlapping integrals, two groups of modes responsible for the formation of the central and circular beams of the second harmonic under the conditions of quasisynchronism were distinguished. It is found that, unlike homogeneous media, crystals with periodic polarization can be used for doubling the frequency of Bessel beams with cone angles changing in wide limits.