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1.
研究了真空热处理对掺CH.的SiCOH低介电常数薄膜的电流.电压(I-V)特性、电容.电压(C-V)特性、疏水性能以及微结构的影响.结果表明:在热处理过程中,热稳定性较差的碳氢基团发生了热解吸,使薄膜的漏电流减小、绝缘性能改善,并使薄膜的导电行为更趋于空间电荷限流过程.碳氢基团的热解吸使SiCOH/Si界面的界面态发生改变,导致SiCOH薄膜MIS结构的平带电压VFB发生漂移.封端的碳氢基团热解吸使薄膜表面的开口孔结构减少,薄膜表面变得更平整.但是碳氢基团为疏水基团,其热解吸导致薄膜的疏水性能降低. 相似文献
2.
以十甲基环五硅氧烷和甲烷作为反应气体,采用电子回旋共振等离子体化学气相沉积(ECR-C VD)方法制备了k = 2.45,485℃下的热稳定性优良的SiCOH低介电常数薄膜.通过薄膜结构的 FTIR谱分析,比较了十甲基环五硅氧烷(D5)液态源和不同甲烷流量下制备的薄膜的键结构差 异,发现在沉积过程中甲烷含量的增大,一方面有利于D5源环结构的保留,另一方面有利于 薄膜中形成高密度的CHn基团.高密度碳氢大分子基团的存在降低了薄膜密度, 结合薄膜中形成的本构孔隙、低极化率Si—C键以及—OH键减少的共同作用,导致薄膜介电 常数的降低.
关键词:
低介电常数
SiCOH薄膜
碳氢掺杂 相似文献
3.
以十甲基环五硅氧烷(D5)和氧气(O2)作为反应气体,采用电子回旋共振等离子体化学气相沉积(ECR-CVD)方法制备了k=2.62的SiCOH薄膜.研究了O2掺杂对薄膜结构与电学性能的影响.结果表明,采用O2掺杂可以在保持较低介电常数的前提下极大地降低薄膜的漏电流,提高薄膜的绝缘性能,这与薄膜中Si-O立体鼠笼、Si-OH结构含量的提高有关.
关键词:
SiCOH薄膜
2掺杂')" href="#">O2掺杂
介电性能
键结构 相似文献
4.
研究镶嵌在超薄非晶氮化硅(a-SiNx)层之间的双层纳米硅(nc-Si)的电荷存储现象.利用等离子体增强化学气相淀积(PECVD)技术在硅衬底上制备a-SiNx/a-Si/a-SiNx/a-Si/a-SiNx多层薄膜结构.采用常规热退火方法使非晶硅(a-Si)层晶化,形成包含双层nc-Si的金属-氮化物-半导体(MIS)结构.通过电容电压(C-V)特性测量,观测到该结构中由于电荷存储引起的C-V回滞现象,并在室温下成功观察到载流子基于Fowler-Nordheim(F-N)隧穿注入到第一层、第二层nc-Si的两级电荷存储状态.结合电流电压(I-V)特性的测量,对电荷存储的机理进行了深入分析.
关键词:
纳米硅
氮化硅
电容电压法
电流电压法 相似文献
5.
用共蒸发法沉积了ZnTe/ZnTe:Cu复合多晶薄膜,通过XRD,XPS,C-V,I-V等研究了沉积温度对薄膜结构、Cu浓度分布及电池性能的影响.结果表明,沉积温度对薄膜的结构影响不明显,薄膜呈立方相,经185 ℃退火后出现了六方相.对薄膜的剖析发现,Cu浓度分布呈现先上升到一极大值而后快速下降的趋势, 100 ℃沉积的ZnTe/ZnTe:Cu薄膜,ZnTe层起到了阻止Cu扩散作用,用这种薄膜制作的太阳电池XD较大
关键词:
ZnTe多晶薄膜
沉积温度
薄膜结构
器件性能 相似文献
6.
在等离子体增强化学气相沉积(PECVD)系统中,利用逐层淀积非晶硅(a-Si)和等离子体氧化相结合的方法制备二氧化硅(SiO2)介质层.电容电压(C-V)和电导电压(G-V)测量结果表明:利用该方法在低温(250 ℃)条件下制备的SiO2介质层均匀致密,其固定氧化物电荷和界面态密度分别为9×1011cm-2和2×1011cm-2·eV-1,击穿场强达4.6 MV/cm,与热氧化形成的SiO2介质层的性质相当.将该SiO2介质层作为控制氧化层应用在双势垒纳米硅(nc-Si)浮栅存储结构中,通过调节控制氧化层的厚度,有效阻止栅电极与nc-Si之间的电荷交换,延长存储时间,使存储性能得到明显改善.
关键词:
等离子体氧化
二氧化硅
纳米硅
控制氧化层 相似文献
7.
以单质硼和高纯石墨的混合粉末压制成型的靶材作为靶源,采用过滤阴极真空电弧技术制备不同硼含量的掺硼四面体非晶碳膜.分别采用四探针法、阻抗分析仪和电化学界面对薄膜的变温电导率、I-V特性和C-V特性进行了测试和研究.实验结果表明,当B含量由0增加至6.04 at%时,薄膜的室温电导率先逐渐增大而后逐渐减小,相应薄膜的电导激活能先逐渐减小而后逐渐增大,并在2.13 at%时分别出现最大和最小值1.42×10-7S/cm和0.1eV.此外,掺硼四面体非晶碳/n型硅异质结的I-V曲线表现出典型的整流特性,表明p-n结二极管已经形成,且结两端的掺杂能级在空间上连续统一.
关键词:
四面体非晶碳
电导率
I-V曲线')" href="#">I-V曲线
C-V曲线')" href="#">C-V曲线 相似文献
8.
采用O2等离子体及HF溶液对AlGaN/GaN异质结材料进行表面处理后,Ni/Au肖特基接触特性比未处理有了明显改善,反向泄漏电流减小3个数量级.对制备的肖特基接触进行200—600℃ 5min的N2气氛退火,发现退火冷却后肖特基反向泄漏电流随退火温度增大进一步减小.N2气中600℃退火后肖特基二极管C-V特性曲线在不同频率下一致性变好,这表明退火中Ni向材料表面扩散减小了表面陷阱密度;C-V特性曲线随退火温度增大向右移动,从二维电子气耗尽电压绝对值减小反映了肖特基势垒的提高.
关键词:
AlGaN/GaN
肖特基接触
表面处理
退火 相似文献
9.
利用X射线对一种N沟VDMOS在不同的负载功率下进行了辐射试验,采用电流-电压(I-V)测试方法发现这种H2-O2(氢氧合成)氧化栅介质VDMOS样品存在自退火效应时,新增界面陷阱特性与通常的理论不能够很好地一致.根据所测数据,明确提出了有自退火效应样品的新增界面陷阱除了电荷效应外还具有传导电流能力的观点,初步认为该电流是表面费米能级和陷阱能级相互作用导致的产生复合电流,该电流不能简单地从I-V曲线上定量分
关键词:
界面陷阱
亚阈值电流
X射线辐射
VDMOS 相似文献
10.
点接触金属/Pr$lt;sub$gt;0.7$lt;/sub$gt;Ca$lt;sub$gt;0.3$lt;/sub$gt;MnO$lt;sub$gt;3$lt;/sub$gt;/Pt结构稳定的低电流电阻开关特性
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利用自主开发的导电原子力显微镜控制Pt,W探针构成点接触金属/Pr0.7Ca0.3MnO3(PCMO)/Pt三明治结构,对其电流-电压(I-V)及脉冲诱导电阻开关(EPIR)特性进行了研究.研究发现,在10 nA限流下两种电极对应结构的I-V都表现出相当稳定的双极性电阻开关特性,以及大于100的电阻开关比.进一步测试发现,点接触W/PCMO/Pt器件具有在10 nA限流下稳定的EPIR特性以及100 pA限流下重复的双极性电阻开关特性.此电流比已报道的电流低3个数量级,表明此结构在低功耗存储器件方面的潜在应用.通过对比样品不同位置、不同限流、不同接触面积点接触Pt/PCMO/Pt的I-V回滞特性,把点接触器件在低电流下稳定、显著的电阻开关效应归结于小的器件面积导致强的局域电场加强了O离子迁移效应.
关键词:
脉冲诱导电阻开关
电场下氧离子迁移
电阻开关 相似文献
11.
12.
利用X-射线光电子能谱(XPS)和程序升温脱附谱(TPD)研究了三甲基镓在Pd(111)表面的吸附和解离行为,并考察了表面预吸附H和O的影响。结果表明,在吸附温度为140 K时,三甲基镓在Pd(111)上主要为解离吸附,此时表面物种为Ga(CH3)x (x=1,2,3)和CHx物种。加热将导致Ga的甲基化合物中的Ga-C键发生分步断裂,在不同温度下产生CH4和H2从表面脱附。同时,XPS结果证实了在275~325 K的温度区间内存在Ga甲基化合物的分子脱附。退火至更高温度,表面只观察到积碳和金属Ga物种,这二者随着温度的继续升高逐渐向体相扩散。在Pd(111)表面预吸附O和H对上述吸附和解离行为存在显著的影响。当表面预吸附H时,脱附产物CH4和H2的脱附主要位于315 K,可归属为一甲基镓的解离脱附。当表面预吸附O时,只在258 K观察到CH4和H2的脱附峰,可能来自于Pd-O-Ga(CH3)2吸附结构的解离. 相似文献
13.
A density functional theory study of the electronic structures and magnetic properties of Fe(1-x)Cox alloy nanowires encapsulated in (10,0) carbon nanotubes
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Under the generalized gradient approximation, the electronic structures and magnetic properties of Fe(1-x)Cox alloy nanowires encapsulated inside zigzag (10,0) carbon nanotubes (CNTs) are investigated systematically using firstprinciple density functional theory calculations. For the fully relaxed Fe(1-x)Cox/CNT structures, all the C atoms relax outwards, and thus the diameters of the CNTs are slightly increased. Formation energy analysis shows that the combining processes of all Fe(1-x)Cox/CNT systems are exothermic, and therefore the Fe(1-x)Coxalloy nanowires can be encapsulated into semiconducting zigzag (10,0) CNTs and form stable hybrid structures. The charges are transferred from the Fe(1-x)Coxnanowires to the more electronegative CNTs, and the Fe-C/Co-C bonds formed have polar covalent bond characteristics. Both the spin polarization and total magnetic moment of the Fe(1-x)Cox/CNT system are smaller than those of the corresponding freestanding Fe(1-x)Coxnanowire, and the magnetic moment of the Fe(1-x)Cox/CNT system decreases monotonously with increasing Co concentration, but the Fe(1-x)Cox/CNT systems still have a large magnetic moment, implying that they can be utilized in high-density magnetic recording devices. 相似文献
14.
Thin tungsten nitride (WNx) films were produced by reactive DC magnetron sputtering of tungsten in an Ar-N2 gas mixture. The films were used as Schottky contacts on AlGaN/GaN heterostructures. The Schottky behaviours of WNx contact was investigated under various annealing conditions by current-voltage (I-V ) measurements. The results show that the gate leakage current was reduced to 10-6 A/cm2 when the N2 flow is 400 mL/min. The results also show that the WNx contact improved the thermal stability of Schottky contacts. Finally, the current transport mechanism in WNx/AlGaN/GaN Schottky diodes has been investigated by means of I-V characterisation technique at various temperatures between 300 K and 523 K. A TE model with a Gaussian distribution of Schottky barrier heights (SBHs) is thought to be responsible for the electrical behaviour at temperatures lower than 523 K. 相似文献
15.
improvement of electrical properties of Cu/SiCOH low-k film integrated system by O2 plasma treatment
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This paper investigates the effect of O2 plasma treatment on the electric property of Cu/SiCOH low dielectric constant (low-k) film integrated structure. The results show that the leakage current of Cu/SiCOH low-k integrated structure can be reduced obviously at the expense of a slight increase in dielectric constant k of SiCOH films. Bythe Fourier transform infrared (FTIR) analysis on the bonding configurations of SiCOH films treated by O2 plasmar it is found that the decrease of leakage current is related to the increase of Si-O cages originating from the linkage of Si dangling bonds through O, which makes the open pores sealed and reduces the diffusion of Cu to pores. 相似文献
16.
M. Bhihi M. Lakhal H. Labrim A. Benyoussef A. El Kenz O. Mounkachi E. K. Hlil 《中国物理 B》2012,21(9):97501-097501
In this work, the hydrogen storage properties of the Mg-based hydrides, i.e., Mg1-xMxH2 (M=Ti, V, Fe, 0 ≤ x ≤ 0.1), are studied using the Korringa-Kohn-Rostoker (KKR) calculation with the coherent potential approximation (CPA) approximation. In particular, the nature and the concentrations of the alloying elements and their effects are studied. Moreover, the material's stability and hydrogen storage thermodynamic properties are discussed. In particular, we find that the stability and the temperature of desorption decrease without significantly affecting the storage capacities. 相似文献
17.
18.
Density-functional theory investigation of energy gaps and optical properties of Hg1-xCdxTe and In1-xGaxAs
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We use a modified Becke-Johnson exchange plus a local density approximation correlation potential within the density functional theory to investigate the electronic structures of Hg1-xCdxTe and In1-xGaxAs with x being 0, 0.25, 0.5, 0.75, and 1. For both of the two series, our calculated energy gaps and dielectric functions (real part ε1 and imaginary part ε2) are in agreement with the corresponding experimental results with x being between 0 and 1. The calculated zero-frequency refractive index varies greatly with x for Hg1-xCdxTe, but changes little with x for In1-xGaxAs, which is consistent with the real parts of their dielectric functions. Therefore, this new approach is satisfactory to describe the electronic structures and the optical properties of the semiconductors. 相似文献