Time‐of‐flight secondary ion mass spectroscopic characterization of the nitrogen profile of shallow gate oxynitride thermally grown on a silicon substrate

Silicon oxynitride has been used as a shallow gate oxide material for microelectronics and its thickness has been reduced over the years to only a few tens of angstroms due to device size scaling. The nitride distribution and density characteristic in the gate oxide thus becomes imperative for the devices. The shallow depth profiling capability using time‐of‐flight secondary ion mass spectrometry (TOF‐SIMS) has huge potential for the nitrogen characterization of the shallow gate oxide film. In this article, both positive and negative spectra of TOF‐SIMS on silicon oxynitride have been extensively studied and it was found that the silicon nitride clusters Si_xN^? (x = 1–4) are able to represent the nitrogen profiles because their ion yields are high enough, especially for the low‐level nitride doping in the oxide, which is formed by the annealing of nitric oxide on SiO₂/Si. The gate oxide thickness measured by the TOF‐SIMS profiling method using ¹⁸O or CsO profile calibration was found to correlate very well with transmission electron microscope measurement. The nitrogen concentration in the gate oxide measured using the TOF‐SIMS method was consistent with the results obtained using the dynamic SIMS method, which is currently applied to relatively thicker oxynitride films. Copyright © 2012 John Wiley & Sons, Ltd.     

Structural Variations in the Solid‐Solution Series LnxCa2−xAl[Al1+xSi1−xO7] with 0 ≤ x ≤ 1 and Ln = La,Eu, Er

Gehlenite, Ca₂Al[AlSiO₇], has melilite‐type structure with space group . It contains two topologically distinct positions coordinated tetrahedrally by oxygen. One is completely occupied by Al³⁺, whereas the other one contains Al³⁺ and Si⁴⁺. Normally, the Al³⁺ molar fraction in the second tetrahedrally coordinated position does not exceed x_Al = 0.5, i.e. the so‐called Loewenstein‐rule is obeyed. In this contribution the structural variations in the melilite‐type compounds of the compositions La_xCa_2?xAl[Al_1+xSi_1?xO₇], Eu_xCa_2?xAl[Al_1+xSi_1?xO₇] and Er_xCa_2?xAl[Al_1+xSi_1?xO₇] are discussed. All members of the solid solution except the end‐members violate Loewenstein's rule. Rietveld refinements against X‐ray powder diffraction patterns confirm that the compounds have space group , without changes in the Wyckoff‐positions of the ions compared to gehlenite.     

Synthese,Kristallstruktur und festkörper‐NMR‐spektroskopische Untersuchung neuer Oxonitridosilicate der Mischkristallreihe Ba4−xCaxSi6N10O

The new oxonitridosilicates Ba_4?xCa_xSi₆N₁₀O have been synthesized by means of high‐temperature synthesis in a radio‐frequency furnace, starting from calcium, barium, silicon diimide and amorphous silicon dioxide. The maximum reaction temperature was at about 1450 °C. The solid solution series Ba_4?xCa_xSi₆N₁₀O with a phase width 1.81 ≤ x ≤ 2.95 was obtained. The crystal structure of Ba_1.8Ca_2.2Si₆N₁₀O was determined by X‐ray single‐crystal structure determination (P2₁3, no. 198), a = 1040.2(1) pm, Z = 4, wR2 = 0.082). It can be described as a highly condensed network of corner‐sharing SiN₄ and SiON₃ tetrahedra, the voids of which are occupied by the alkaline earth ions. The structure is isotypic with that of BaEu(Ba_0.5Eu_0.5)YbSi₆N₁₁. In the ²⁹Si solid‐state MAS‐NMR spectrum two isotropic resonances at ?50.0 and ?53.6 ppm were observed.     

Synthese,Kristallstruktur und Festkörper‐NMR‐spektroskopische Untersuchung des Oxonitridosilicates BaSi6N8O

Synthesis, Crystal Structure and Solid‐State NMR Spectroscopic Investigation of the Oxonitridosilicate BaSi₆N₈O The phase‐pure oxonitridosilicate BaSi₆N₈O has been synthesized starting from BaCO₃ and silicon diimide Si(NH)₂ in a radiofrequency furnace at temperatures below 1630 °C as a coarsely crystalline colorless material. The structure has been determined by single‐crystal X‐ray diffraction analysis (BaSi₆N₈O, space group Imm2 (no. 44), a = 810.5(2), b = 967.8(2), c = 483.7(1) pm, V = 379.4(2)·10⁶ pm³, Z = 2, R1 = 0.014, 618 independent reflections, 44 parameters). The oxonitridosilicate comprises a three‐dimensional network structure of corner sharing SiN₄ and SiON₃ tetrahedra with Ba²⁺ located in the resulting voids. BaSi₆N₈O is isostructural with the oxonitridoalumosilicate (sialon) Sr₂Al_xSi_12?xN_16?xO_2+x (x ≈ 2) that previously has been described in the literature. Furthermore, the anionic network of BaSi₆N₈O derives from that of the homeotypic reduced nitridosilicate SrSi₆N₈ by a topotactic insertion of oxygen into the Si–Si single bonds. In the ²⁹Si MAS‐NMR spectrum two sharp isotropic signals have been observed at ?54.0 and ?56.3 ppm, respectively. With respect to their observed intensity ratio of 1 : 2.1(1) these two signals have to be attributed to the central atoms of SiON₃ and SiN₄ tetrahedra, respectively, which is in accordance with the X‐ray crystal structure determination (Si at Wyckoff positions 4d (SiON₃) and 8e (SiN₄)).     

Pr10[Si10−xAlxO9+xN17−x]Cl with x ≈ 1 – an Oxonitridoaluminosilicate Chloride

The oxonitridoaluminosilicate chloride Pr₁₀[Si_10?xAl_xO_9+xN_17?x]Cl was obtained by the reaction of praseodymium metal, the respective chloride, AlN and Al(OH)₃ with “Si(NH)₂” in a radiofrequency furnace at temperatures around 1900 °C. The crystal structure was determined by single‐crystal X‐ray diffraction (Pbam, no. 55, Z = 2,a = 10.5973(8) Å, b = 11.1687(6) Å, c = 11.6179(7) Å, R1 = 0.0337). The sialon crystallizes isotypically to the oxonitridosilicate halides Ce₁₀[Si₁₀O₉N₁₇]Br, Nd₁₀[Si₁₀O₉N₁₇]Br and Nd₁₀[Si₁₀O₉N₁₇]Cl, which represent a new layered structure type. The structure refinement was performed utilizing an O/N‐distribution model according to Paulings rules, i.e. nitrogen was positioned on all bridging sites and mixed O/Noccupation was assumed on the terminal sites resulting in charge neutrality of the compounds. The Si and Al atoms were refined equally distributed on their three crystallographic sites, due to their poor distinguishability by X‐ray analysis. The tetrahedra layers of the structure consist of condensed [(Si,Al)N₂(O,N)₂] and [(Si,Al)N₃(O,N)] tetrahedra of Q² and Q³ type. The chemical composition of the compound was derived from electron probe micro analyses (EPMA).     

A theoretical study of the dependence of the ASxSi6−x cluster structures and properties on composition

The effect of the composition ratio between arsenic and silicon atoms on the structures and properties of As_xSi_6?x (x = 0–6) have been systematically investigated using the density functional theory at the B3LYP/6‐311+G* level. The As_xSi_6?x clusters prefer substitutional rather than attaching structures; the Si‐rich clusters favor Si₆‐like structures, whereas the As‐rich clusters prefer As₆‐like structures. The As atoms locating at the framework may explain the difficulty of removal of arsenic impurities from polycrystalline silicon. In general, the average binding energies gradually decrease, implying the As_xSi_6?x clusters become increasingly unstable as x increases. Both the HOMO‐LUMO gaps and the As‐dissociation energies present a strong even–odd alternation, implying alternating chemical stability, with the even x members being more stable than the odd ones. The dissociation energies of an As atom from As_xSi_6?x are: 3.07, 2.84, 1.84, 2.52, 1.86, and 2.85 eV, for x = 1–6, respectively, and 3.80, 3.08, 2.64, 3.01, 2.93, 3.16 eV for Si (x = 0–5). These dissociation energy results should provide a useful reference for further experimental investigations. © 2011 Wiley Periodicals, Inc. Int J Quantum Chem, 2012     

The Sialons MLn[Si4−xAlxOxN7−x] with M = Eu,Sr, Ba and Ln = Ho‐Yb – Twelve Substitution Variants with the MYb[Si4N7] Structure Type

The oxonitridoalumosilicates (so‐called sialons) MLn[Si_4?xAl_xO_xN_7?x] with M = Eu, Sr, Ba and Ln =Ho, Er, Tm, Yb were obtained by the reaction of the respective lanthanoid metal, the alkaline earth carbonates or europium carbonate, resp., AlN, “Si(NH)₂” and MCl₂ as a flux in a radiofrequency furnace at temperatures around 2100 °C. The compounds MLn[Si_4?xAl_xO_xN_7?x] are relevant for the investigation of substitutional effects on the materials properties due to their ability of tolerating a comparatively large phase width up to x ≈ 2.0(5). The crystal structures of the twelve compounds were refined from X‐ray single crystal data and X‐ray powder data and are found to be isotypic to the MYb[Si₄N₇] structure type. The compounds crystallize in space group P6₃mc (no. 186, hexagonal) and are made up of chains of so‐called starlike units [N^[4](SiN₃)₄] or [N^[4]((Si,Al)(O,N)₃)₄], respectively. These units are formed by four (Si,Al)(N/O)₄ tetrahedra sharing a common central nitrogen atom. The structure refinement was performed utilizing an O/N‐distribution model according to Paulings rules, i.e. nitrogen was positioned on the four‐fold bridging site and nitrogen and oxygen were distributed equally on both of the two‐fold bridging sites, resulting in charge neutrality of the compound. The Si and Al atoms were distributed equally on their two crystallographic sites, referring to their elemental proportion in the compound, due to being poorly distinguishable by X‐ray methods. The chemical compositions of the compounds were derived from electron probe micro analyses (EPMA).     

Cubic Siloxanes with Both Si−H and Si−OtBu Groups for Site‐Selective Siloxane Bond Formation

Cage‐type siloxanes have attracted increasing attention as building blocks for silica‐based nanomaterials as their corners can be modified with various functional groups. Cubic octasiloxanes incorporating both Si?H and Si?OtBu groups [(tBuO)_nH_8?nSi₈O₁₂; n=1, 2 or 7] have been synthesized by the reaction of octa(hydridosilsesquioxane) (H₈Si₈O₁₂) and tert‐butyl alcohol in the presence of a Et₂NOH catalyst. The Si?H and Si?OtBu groups are useful for site‐selective formation of Si?O?Si linkages without cage structure deterioration. The Si?H group can be selectively hydrolyzed to form a Si?OH group in the presence of Et₂NOH, enabling the formation of the monosilanol compound (tBuO)₇(HO)Si₈O₁₂. The Si?OH group can be used for either intermolecular condensation to form a dimeric cage compound or silylation to introduce new reaction sites. Additionally, the alkoxy groups of (tBuO)₇HSi₈O₁₂ can be treated with organochlorosilanes in the presence of a BiCl₃ catalyst to form Si?O?Si linkages, while the Si?H group remains intact. These results indicate that such bifunctional cage siloxanes allow for stepwise Si?O?Si bond formation to design new siloxane‐based nanomaterials.     

Color Point Tuning in Lu3−x−yMnxAl5−xSixO12:yCe3+ for White LEDs

A series of the solid‐solution phosphors Lu_3?x?yMn_xAl_5?xSi_xO₁₂:yCe³⁺ is synthesized by solid‐state reaction. The obtained phosphors possess the garnet structure and exhibit similar excitation properties as the phosphor Lu₃Al₅O₁₂:Ce³⁺, but with an effectively improved red component in the emission spectrum. This can be attributed to the energy transfer from Ce³⁺ to Mn²⁺. Our investigation reveals that electric dipole–quadrupole interactions dominate the energy‐transfer mechanism and that the critical distance determined by the spectral overlap method is about 9.21 Å. The color‐tunable emissions of the Lu_3?x?yMn_xAl_5?xSi_xO₁₂:yCe³⁺ phosphor as a function of Mn₃Al₂Si₃O₁₂ content are realized by continuously shifting the chromaticity coordinates from (0.354, 0.570) to (0.462, 0.494). They indicate that the obtained material may have potential application as a blue radiation‐converting phosphor for white LEDs with high‐quality white light.     

Über den H‐ und A‐Typ von La2[Si2O7]

On the H‐ and A‐Type Structure of La₂[Si₂O₇] By thermal decomposition of La₃F₃[Si₃O₉] at 700 °C in a CsCl flux single crystals of a new form of La₂[Si₂O₇] have been found which is called H type (triclinic, P1; a = 681.13(4), b = 686.64(4), c = 1250.23(8) pm, α = 82.529(7), β = 88.027(6), γ = 88.959(6)°; V_m = 87.223(9) cm³/mol, D_x = 5.113(8) g/cm³, Z = 4) continuing Felsche's nomenclature. It crystallizes isotypically to the triclinic K₂[Cr₂O₇] in a structure closely related to that of A–La₂[Si₂O₇] (tetragonal, P4₁; a = 683.83(7), c = 2473.6(4) pm; V_m = 87.072(9) cm³/mol, D_x = 5.122(8) g/cm³, Z = 8). For comparison, the latter has been refined from single crystal data, too. Both the structures can be described as sequence of layers of each of two crystallographically different [Si₂O₇]^6– anions always built up of two corner‐linked [SiO4] tetrahedra in eclipsed conformation with non‐linear Si–O–Si bridges (∢(Si–O–Si) = 128–132°) piled up in [001] direction and aligned almost parallel to the c axis. They differ only in layer sequence: Whereas the double tetrahedra of the disilicate units are tilted alternating to the left and in view direction ([010]; stacking sequence: AB) in H–La₂[Si₂O₇], after layer B there follow due to the 4₁ screw axis layers with anions tilted to the right and tilted against view direction ([010]; stacking sequence: ABA′B′) in A–La₂[Si₂O₇]. The extremely irregular coordination polyhedra around each of the four crystallographically independent La³⁺ cations in both forms (H and A type) consist of eight to ten oxygen atoms in spacing intervals of 239 to 330 pm. The possibility of more or less ordered intermediate forms will be discussed.     

The chemistry and thermal stability of HfTaO/Si interface by x‐ray photoelectron spectroscopy

The chemistry and thermal stability of HfTaO/Si interface as a function of annealing temperature have been investigated by x‐ray photoelectron spectroscopy. For the as‐deposited sample, the formation of Hf‐silicate bond is observed on Hf 4f core‐level spectra, which contributes to bulk HfO₂ and SiO₂. Besides, the suboxide of tantalum (Ta⁺¹) is formed at the interface at room temperature because of oxygen‐deficient conditions. HfSi₂, Hf_xSi_yO_4, and HfO₂ coexists in interfacial region at 850 °C, meanwhile, an evidence for transforming from the Ta¹⁺ to tantalum oxide (Ta⁵⁺) is verified. The peaks of Hf–O–Si and Hf–O have disappeared, only one peak of Hf silicide remained after the annealing at 950 °C. A stable SiO₂ phase in HfTaO/Si is formed under different annealing conditions. Copyright © 2011 John Wiley & Sons, Ltd.     

Analysis of light elements in superposed layers by Monte Carlo simulation of EELS spectra

A Monte Carlo code, previously set up to simulate electron energy loss spectra of carbon films on silicon at 100 kV, has been extended to the analysis, at 300 kV, of a Si/SiO₂/Si structure; the final goal is the determination of the oxygen concentration in SiO_x precipitates embedded in a Si matrix. The upgrading of the programme has required the introduction of relativistic kinematics and relativistic corrections to elastic and inelastic cross sections.The Si/SiO₂/Si samples have been prepared by CVD deposition of a 16 nm thick silicon film onto a silicon wafer covered with a 11 nm thick thermal oxide. The thickness of both films has been checked by transmission electron microscopy on cross sections. The EELS experiments have been performed on planar sections, in regions of different thickness; the EELS spectra have been acquired with a parallel 666 Gatan spectrometer, fitted to a Philips CM 30 TEM/STEM, operating at 300 kV. The stoichiometry of the SiO_x can be obtained by the ratioing of the areas under the OK and SiK edges, taking advantage of the possibility given by the Monte Carlo simulation to separate the background electrons from the one suffering the characteristic energy loss. The agreement between experiments and calculations in the case examined is satisfactory, so that the application of this procedure to SiO_x precipitates is promising.     

SrB5O7F3 Functionalized with [B5O9F3]6− Chromophores: Accelerating the Rational Design of Deep‐Ultraviolet Nonlinear Optical Materials

Fluorooxoborates, benefiting from the large optical band gap, high anisotropy, and ever‐greater possibility to form non‐centrosymmetric structures activated by the large polarization of [BO_xF_4?x]^(x+1)? building blocks, have been considered as the new fertile fields for searching the ultraviolet (UV) and deep‐UV nonlinear optical (NLO) materials. Herein, we report the first asymmetric alkaline‐earth metal fluorooxoborate SrB₅O₇F₃, which is rationally designed by taking the classic Sr₂Be₂B₂O₇ (SBBO) as a maternal structure. Its [B₅O₉F₃]^6? fundamental building block with near‐planar configuration composed by two edge‐sharing [B₃O₆F₂]^5? rings in SrB₅O₇F₃ has not been reported in any other borates. Solid state ¹⁹F and ¹¹B magic‐angle spinning NMR spectroscopy verifies the presence of covalent B?F bonds in SrB₅O₇F₃. Property characterizations reveal that SrB₅O₇F₃ possesses the optical properties required for deep‐UV NLO applications, which make SrB₅O₇F₃ a promising crystal that could produce deep‐UV coherent light by the direct SHG process.     

Vacancy‐Rich Monolayer BiO2−x as a Highly Efficient UV,Visible, and Near‐Infrared Responsive Photocatalyst

Vacancy‐rich layered materials with good electron‐transfer property are of great interest. Herein, a full‐spectrum responsive vacancy‐rich monolayer BiO_2?x has been synthesized. The increased density of states at the conduction band (CB) minimum in the monolayer BiO_2?x is responsible for the enhanced photon response and photo‐absorption, which were confirmed by UV/Vis‐NIR diffuse reflectance spectra (DRS) and photocurrent measurements. Compared to bulk BiO_2?x, monolayer BiO_2?x has exhibited enhanced photocatalytic performance for rhodamine B and phenol removal under UV, visible, and near‐infrared light (NIR) irradiation, which can be attributed to the vacancy V_Bi‐O′′′ as confirmed by the positron annihilation spectra. The presence of V_Bi‐O′′′ defects in monolayer BiO_2?x promoted the separation of electrons and holes. This finding provides an atomic level understanding for developing highly efficient UV, visible, and NIR light responsive photocatalysts.     

Magnetic Investigations and 151Eu Mössbauer Spectroscopy of MYbSi4N7 with M = Sr,Ba, Eu

The isotypic nitridosilicates MYb[Si₄N₇] (M = Sr, Ba, Eu) were obtained by the reaction of the respective metals with Si(NH)₂ in a radiofrequency furnace below 1600 °C. On the basis of powder diffraction data of MYb[Si₄N₇] Rietveld refinements of the lattice constants were performed; these confirmed the previously published single‐crystal data. The compounds contain a condensed network of corner‐sharing [N(SiN₃)₄] units. The central nitrogen thus exhibits ammonium character. Magnetic susceptibility measurements of MYb[Si₄N₇] (M = Sr, Ba, Eu) show paramagnetic behavior with experimental magnetic moments of 3.03(2), (Sr), 2.73(2) (Ba), and 9.17(2) (Eu) μ_B per formula unit. In EuYbSi₄N₇ the europium and ytterbium atoms are in stable divalent and trivalent states, respectively. According to the non‐magnetic character of the alkaline earth cations, ytterbium has to be in an intermediate valence state Yb^III‐x in the strontium and barium compound. Consequently, either a partial exchange N^3—/O^2— resulting in compositions MYb^III‐x[Si₄N_7—xO_x] or an introduction of anion defects according to MYb^III‐x[Si₄N_7—x/3□_x/3] has to be assumed. The phase width 0 ≤ x ≤ 0.4 was estimated according to the magnetic measurements. ¹⁵¹Eu Mössbauer spectra of EuYb[Si₄N₇] at 78 K show a single signal at an isomer shift of δ = —12.83(3) mm s^—1 subject to quadrupole splitting of ΔE_Q = 5.7(8) mm s^—1, compatible with purely divalent europium.     

Phase transition of negative thermal expansion Zr1-xHfxW2O8 solid solutions

A powder X-ray diffraction experiment was performed on cubic Zr_1-xHf_xW₂O₈ (x=0.25, 0.50 and 0.75) solid solutions from 90 to 560 K. The lattice parameters of Zr_1-xHf_xW₂O₈ at 121 K decreased linearly with increasing Hf contents, due to smaller ionic radius of hafnium than that of zirconium. Transition temperatures due to α-β structural phase transition increased with increasing Hf contents, reflecting the decrease of lattice free volume related to the orientation of unshared vertex of WO₄. Anomaly in the heat capacity of Zr_0.5Hf_0.5W₂O₈ was observed around 450 K which was 9 K lower than that by X-ray diffraction method. Transition entropy of Zr_0.5Hf_0.5W₂O₈ was 2.1 J mol^-1 K^-1, consistent with those of ZrW₂O₈ and HfW₂O₈. This consistent entropy supports that Zr_1-xHf_xW₂O₈ (x=0-1.0) has the same order-disorder phase transition mechanism. This revised version was published online in August 2006 with corrections to the Cover Date.     

Metal‐Free,Room‐Temperature Oxygen‐Atom Transfer in the N2O/CO Redox Couple as Catalyzed by [Si2Ox].+ (x=2–5)

The thermal reduction of N₂O by CO mediated by the metal‐free cluster cations [Si₂O_x]^.+ (x =2–5) has been examined in the gas phase using Fourier transform ion cyclotron resonance (FT‐ICR) mass spectrometry in conjunction with quantum chemical calculations. Three successive oxidation/reduction steps occur starting from [Si₂O₂]^.+ and N₂O to form eventually [Si₂O₅]^.+; the latter as well as the intermediate oxide cluster ions react sequentially with CO molecules to regenerate [Si₂O₂]^.+. Thus, full catalytic cycles occur at ambient conditions in the gas phase. Mechanistic aspects of these sequential redox processes have been addressed to reveal the electronic origins of these unparalleled reactions.     

Development of Hybrid BiOClxBr1−x‐Embedded Alumina Films and Their Application as Highly Efficient Visible‐Light‐Driven Photocatalytic Reactors

A highly stable 75 wt % BiOCl_xBr_1?x‐loaded alumina composite film has been developed for the fabrication of glass‐based photoreactors. A very simple approach has been adopted that does not involve the use of a special instrument and can be applied to all types of substrates irrespective to their size and shape. The structure and morphology of the films were well characterized by XRD, SEM, TEM, N₂‐sorption, IR, Raman, and UV/Vis diffuse reflectance spectroscopy. BiOCl_xBr_1?x microspheres (1–3 μm) with closely packed thin nanoplates (width ≈10 nm) were integrated within alumina to develop a hybrid film. The photocatalytic capacity of the films was evaluated for the decomposition of Rhodamine B (RhB) and naphthalene under visible‐light irradiation. The composite films showed a remarkable photocatalytic activity and stability and have been reused for several cycles without any deterioration of their original activity.     

SiIV Incorporation into a [28]Hexaphyrin That Triggered Formation of Möbius Aromatic Molecules

Incorporation of Si^IV into an expanded porphyrin has been achieved for the first time. Treatment of [28]hexaphyrin 1 with CH₃SiCl₃ and N,N‐diisopropylethylamine gave Si^IV complex 2 and its N‐fused product 4 that both have Möbius aromatic nature. In both complexes, the coordinated Si atom is satisfied in a typical trigonal bipyramidal coordination. Si^IV incorporation induces conformational rigidification and redshifted absorption profiles due to σ–π conjugation between the Si atom and hexaphyrin macrocycle. Tamao–Fleming oxidation of 2 with H₂O₂ gave β‐hydroxy [28]hexaphyrin 5 , which exists as a ruffled rectangular shape in the solid state, yet it has been revealed to exist predominantly as a twisted Möbius aromatic conformer in CH₂Cl₂.     

Accessing Tetravalent Transition‐Metal Nitridophosphates through High‐Pressure Metathesis

Advancing the attainable composition space of a compound class can lead to fascinating materials. The first tetravalent metal nitridophosphate, namely Hf_9?xP₂₄N_52?4xO_4x (x≈1.84), was prepared by high‐pressure metathesis. The Group 4 nitridophosphates are now an accessible class of compounds. The high‐pressure metathesis reaction using a multianvil setup yielded single crystals that were suitable for structure analysis. Magnetic properties of the compound indicate Hf in oxidation state +IV. Optical measurements show a band gap in the UV region. The presented route unlocks the new class of Group 4 nitridophosphates by significantly improving the understanding of this nitride chemistry. Hf_9?xP₂₄N_52?4xO_4x (x≈1.84) is a model system and its preparation is the first step towards a systematic exploration of the transition‐metal nitridophosphates.