基于白光数字莫尔的三维数字成像系统

提出一种基于数字莫尔的三维光学数字成像系统,此系统采用了非相干光投影和空间相移算法以及混合模板相位复原技术来重构连续位相分布图。给出一种光学几何灵敏度的确定方法并由此区得空间自由表面的三维数字图像。文中还给出由该光学数字化系统得以的真实人体面部的三维数字图像的实验结果。     

Improved phase-shifting diffraction interferometer for microsphere topography measurements

In this study, an improved phase-shifting diffraction interferometer for measuring the surface topography of a microsphere is developed. A common diode-pumped solid state laser is used as the light source to facilitate apparatus realization, and a new polarized optical arrangement is designed to filter the bias light for phase-shifting control. A pinhole diffraction self-calibration method is proposed to eliminate systematic errors introduced by optical elements. The system has an adjustable signal contrast and is suitable for testing the surface with low reflectivity. Finally, a spherical ruby probe of a coordinate measuring machine is used as an example tested by the new phase-shifting diffraction interferometer system and the WYKO scanning white light interferometer for experimental comparison. The measured region presents consistent overall topography features, and the resulting peak-to-valley value of 84.43 nm and RMS value of 18.41 nm are achieved. The average roughness coincides with the manufacturer's specification value.     

Topography with synchrotron radiation

The capability of synchrotron radiation topography compared to related crystal defect imaging techniques is discussed. Recent experimental highlights in white beam, double crystal, and stroboscopic topography are reviewed. An outlook upon future experimental trends in synchrotron radiation topography is given.     

Light Source for Synchrotron Radiation X-Ray Topography Study at Beijing Syncrotron Radiation Laboratory (BSRL)

Characteristics of the synchrotron radiation source for X-ray topography study at Beijing Synchrotron Radiation Laboratory (BSRL) is desribed in this paper,local geometrical resolution of topographs is discussed,the diffracting intensities of white beam topography is given.     

Multi-wavelength phase-shifting interferometry for micro-structures measurement based on color image processing in white light interference

Conventional multi-wavelength phase-shifting interferometry utilizes two or three monochromatic light sources, such as lasers, to realize the measurement of the surface topography with large discontinuity. In this paper, the white light source, with a single-chip CCD color camera, is used to accomplish multi-wavelength phase-shifting interferometry. In addition, we propose an algorithm which combines white light phase-shifting algorithm, equivalent wavelength method and fringe order method to achieve measuring and calibrating the micro-structures ranging from nanometer scale to micrometer scale. Finally, the proposed method is validated by a traceable step height standard.     

基于扫描白光干涉法的表面三维轮廓仪

在强调表面三维形貌测量重要性的基础上 ,介绍了利用扫描白光干涉法测量表面三维微观形貌的原理及三维轮廓仪测量系统的构成。通过给出的几个测量实例 ,反映了该三维轮廓仪的主要特点 ,适合于大范围、高精度、阶梯面的测量。最后分析了影响其测量精度的主要因素。     

Infrared-light interferometry and a phase-stepping algorithm for measuring the three-dimensional topography of components covered with GaAs or Si

White-light scanning interferometry is extended from the visible-light region to the infrared-light region to measure the three-dimensional (3D) topography of components. An infrared-light interference system based on a linnik-type interferometric microscope is developed according to the principle of transmission of semiconductor materials in the infrared-light region. The 3D topography is measured using the components covered with a Si or GaAs wafer based on a phase-stepping algorithm. The 3D topography can be obtained accurately and relative step heights can be determined within an error less than 3% compared with the instrument MSA 400, a well-known commercially available apparatus used in the field of 3D topography measurement.     

基于谱域相位分辨光学相干层析的纳米级表面形貌成像

提出了一种基于谱域相位分辨光学相干层析的纳米级表面形貌成像方法,由干涉光谱计算样品相邻两点的相位差,得到样品表面相位差分图,经过积分,重建样品表面形貌的定量分布.当相邻两点相位差的绝对值小于π,不产生相位包裹,避免了目前的干涉法相位解包裹存在的问题,将干涉法相邻两点相位差绝对值的限制条件由目前的π扩大到2π,提高了干涉法表面形貌成像的适用范围.参考面和样品置于同一平台之上,消除环境干扰及系统振动的影响,噪声幅度小于0.3 nm.通过对光学分辨率片及表面粗糙度标准样板的表面形貌成像,对本方法进行了验证,系统的轴向分辨率优于1 nm.     

大气压中频氩∕丙酮等离子体发射光谱诊断

目前, 等离子体发射光谱应用于中频丙酮等离子体的研究鲜有报道。自建大气压氩∕丙酮喷射中频交流放电等离子体装置, 采用HR2000光纤光栅光谱仪对放电光谱进行记录, 并对实验中的光谱信号进行分析诊断。研究结果说明, 对大气压环境下, 使用氩气为“载气”, 对可挥发有机溶剂进行等离子发射光谱分析是一种可行的技术; 大气压下丙酮等离子体的活性成分和真空环境下丙酮等离子体产生的活性成分有很大区别, 氧元素对两种气压下等离子体活性成分有很大改变; 这种诊断方法对大气压下挥发性有机试剂的等离子体化学反应原理的研究, 有重要的指导意义。此外, 文中展示了大气压下丙酮沉积膜在两种光源下的形貌图, 结果说明在一定实验条件下得到了连续的沉积膜。     

一种四波长轮换的表面形貌干涉测量系统

针对相移干涉法测量表面三维形貌时深度测量范围受波长限制这一问题,提出一种四波长表面形貌干涉测量系统。通过滤波片的轮换,将白光LED光源的光切换出4个不同波长的光源,并依次进行单波长干涉。为解决多波长干涉图像数据处理,采用基于椭圆拟合的算法,在逐帧逐点的相位计算条件下,运用大小尺度相结合的算法实现高精度宽范围的表面形貌测量。实验结果表明:在深度测量范围扩大到约41倍的条件下,测量经中国计量科学研究院采用粗糙度国家基准校准的方波多刻线样板,得到的表面粗糙度数据与校准数据相比,相对误差为4.09%。说明在一定的深度范围内,该系统能够实现表面形貌的高精度测量。     

Analysis of the fringes visibility generated by a lateral cyclic shear interferometer in the retrieval of the three-dimensional surface information of an object

We report the evaluation of the topography of an object with projected fringes generated with a lateral cyclic shear interferometer (CSI) and we then compare the topography recovery obtained with the proposed method with the one obtained from a coordinate measuring machine (CMM). We also study how the fringes visibility along the z axis affects the retrieval. Finally, we discuss the advantages and drawbacks of this profilometry system.     

Curvature sensor for the measurement of the static corneal topography and the dynamic tear film topography in the human eye

A system to measure the topography of the first optical surface of the human eye noninvasively by using a curvature sensor is described. The static corneal topography and the dynamic topography of the tear film can both be measured, and the topographies obtained are presented. The system makes possible the study of the dynamic aberrations introduced by the tear film to determine their contribution to the overall ocular aberrations in healthy eyes, eyes with corneal pathologies, and eyes wearing contact lenses.     

Near-Field Fluorescence and Topography Characterization of a Single Nanometre Fluorophore by Apertureless Tip-Enhanced Scanning Near-Field Microscopy

Tip-enhanced near-field fluorescence and topography characterization of a single nanometre fluorophore is conducted by using an apertureless scanning near-field microscopy system. A fluorophore with size 80hm is mapped with a spatial resolution of 10hm. The corresponding near-field fluorescence data shows significant signal enhancement due to the apertureless tip-enhanced effect. With the nanometre spatial resolution capability and nanometre local tip-enhanced effect, the apertureless tip-enhanced scanning near-field microscopy may be further used to characterize a single molecule by realizing the local near-field spectrum assignment corresponding to topography at nanometre scale.     

Fringe formula for projection type moiré topography

The rays that form moiré fringes in projection type moiré topography are discussed. It is shown that the nodal-ray formula conventionally used in projection type moiré topography gives erroneous results for an object located close to the lenses. An alternative formula based on principal rays is proposed and compared with the conventional nodal ray formula. The principal ray formula proposed can be applied to a wide class of optical systems, including a telecentric system.     

Ultraviolet tip‐enhanced nanoscale Raman imaging

We have constructed an ultraviolet (UV)‐apertureless near‐field scanning optical microscope‐Raman spectroscopy system by using an aluminum tip for the simultaneous measurement of topography and Raman scattering of nanomaterials with high spatial resolution. The topography, Rayleigh scattering image, and tip‐enhanced Raman scattering image of the carbon nanotube film showed that a spatial resolution of around 19 nm was achieved. This spatial resolution of UV‐Raman mapping image exceeds that of previous approaches, which have several hundred nanometers of spatial resolution. Copyright © 2012 John Wiley & Sons, Ltd.     

纳米级精度分光路双频干涉度量系统的设计

为完成快速、精确的外观轮廓度量,设计了一种新型纳米级精度分光路双频干涉度量系统。系统由低频差双频激光干涉度量模块和微探头及二维工作台两部分组成。微探针以轻敲式接近样品至几十纳米时,受原子力作用发生偏转,利用双频干涉模块度量其纵向偏转量,并对样品进行梳状式度量得到外观形貌。根据双频激光的实际光源,对原有双频干涉度量理论进行了改进提高。进行了系统组建和实验验证。结果表明:系统具有纳米级精度,可用于超精样品外观轮廓度量。     

跳动模式对微球CH涂层表面粗糙度的影响

 采用低压等离子体化学气相沉积方法（LPPCVD）,结合反弹盘系统制备了微球CH涂层,研究了跳动模式对微球CH涂层表面形貌的影响。利用光学显微镜和扫描电镜(SEM)对微球涂层表面形貌进行了分析;利用原子力显微镜（AFM）测定了微球CH涂层表面均方根粗糙度（RMS）并对球形度进行了表征;利用X光照相技术对同心度进行了表征。结果表明：采用间歇跳动模式可有效改善微球CH涂层的表面形貌,降低中高模数的粗糙度。在间歇跳动模式下,减小占空比,可使CH涂层的表面粗糙度得到进一步降低。在占空比为1/4的间歇跳动模式下制备的厚度为30 mm的CH涂层,其表面均方根粗糙度低于30 nm,碳氢-聚苯乙烯（CH-PS）微球的球形度与同心度均优于99%。     

基于叠层衍射成像的二元光学元件检测研究

本文提出了一种基于叠层衍射成像(ptychography)的二元光学元件的检测方法,该方法可实现对二元光学元件表面微观轮廓的检测以及特征尺寸的标定.相比于传统的二元光学元件检测方法,其使用无透镜成像技术,简化了系统结构并可适用于特殊环境下的检测.该方法可直接通过采集多幅衍射图,利用叠层衍射成像迭代算法可精确地复原大尺寸待测元件的表面微观轮廓,提高大尺寸器件的检测效率.本文模拟仿真了台阶高度与噪声大小对纯相位台阶板复原结果的影响,并在光学实验中选取计算全息板为样品,复原样品的表面微观轮廓信息以及得到台阶高度.以白光干涉仪检测结果为标准,该方法在精度要求不太高的前提下,可获得令人满意的成像质量.     

一种基于结构光条纹投影的微小物体测量系统

为了通过结构光投影的方法测量微小物体,构建了一套微小物体三维形貌测量系统,视场范围可达1.8 cm×1.6 cm。这套测量系统利用了Light Crafter 4500数字投影组件的高速投影、立体显微镜的低畸变缩放、远心镜头的大景深与低畸变成像的特性。先利用立体显微镜对Light Crafter 4500投影的相移条纹图进行低畸变缩小,再投影到待测物体表面,采用配有远心镜头的相机同步记录受到物体表面形貌调制而发生形变的条纹,利用三步相移法计算出条纹对应的截断相位图,再根据可靠路径跟踪相位展开算法求取连续的相位分布,重建被测物体的三维表面形貌。实验成功重建了以BGA芯片为代表的微小物体表面三维形貌。实验结果表明,系统测量精度达到11 μm,系统的有效深度测量范围为700 μm。     

邻苯二甲酸氢铊单晶位错的Borrmann象衬度

本文报道新近开发的、X射线衍射效率很大的邻苯二甲酸氢铊(TAP)单晶中位错的Borrmann象。位错近核心区的精细象衬度不但与晶片的厚度有关,而且随着Borrmann系数ε值的下降而模糊,以至精细象结构随衬度反转而完全消失。 关键词：