网格结构微环谐振电光开关阵列的特性分析

设计了由N+1条水平通道、N条竖直通道和2 N个微环构成的电光开关阵列器件,并对其传输特性进行了分析.通过在列微环上加载不同的工作电压,实现相应通道的开关功能.以5×4通道8微环结构为例,取波导芯的宽度与厚度均为1.5μm,波导芯与电极之间的限制层厚度为2.0μm,电极厚度为0.05μm,微环与通道之间的耦合距离为0.1μm.当开关电压为8V时,该器件的插入损耗在2.79～4.31dB范围内,串扰在-20dB以下,消光比在12.5dB以上.     

两节推挽极化波导Y型耦合器电光开关特性分析（英文）

针对两节独立反相集总电极聚合物Y型耦合器电光开关响应速度慢的问题,通过对该器件两节电光区的波导进行推挽极化,设计了一种无偏置行波电极高速电光开关.为了获得低的驱动电压、良好的阻抗匹配和光波与微波间较小的折射率失配,对电极参数做了设计和优化.通过对施加的方波开关信号做傅里叶变换并结合行波传输线理论,给出了一种用于建模和表征器件高频响应的解析分析法.对该器件的数值计算结果表明,在1 550nm中心工作波长下,其3dB状态电压为0 V,开关电压为2.68V,上分支状态电压和下分支状态电压分别为-1.34V和+1.34V,器件的插入损耗和串扰分别小于3.55和-30dB,10%~90%上升时间和下降时间均为3.90ps,截止开关频率可达128.2GHz.     

一种带有U形波导的交叉信道单微环电光开关

本文利用耦合模理论,电光调制理论和传输矩阵法,提出了一个带有U形波导的交叉信道单微环电光开关的器件模型,并在谐振波长为1561 nm的情况下对该器件进行了仿真计算.结果表明,该电光开关的开关电压约为400 V,串扰小于-30 dB,插入损耗小于4 dB,开关时间仅为5.4 ps,其中微环上的上升和下降时间仅为0.32 ps.此外,该电光开关由单刀双掷开关控制,通过在微环和U形波导上加载驱动电压可实现三种开关状态,不仅可以实现光信号在两条输出信道的选择,还可以使两条信道同时有光信号输出.     

聚合物定向耦合电光开关的模拟和优化

阐述了定向耦合电光开关的基本结构及工作原理,利用耦合模理论和电光调制理论,在1 550 nm波长下,对器件的结构参量进行了优化,并对其传输光谱、开关电压、插入损耗、串扰等特性进行了分析.模拟过程中,考虑了因金属电极和聚合物材料引起的模式损耗.器件的结构参量优化值为：波导芯截面尺寸为1.7×1.7 μm2,波导芯与电极间的限制层厚度为1.5 μm、电极厚度为0.15 μm,波导间的耦合间距为2.0 μm,相应的耦合长度为2 926 μm.模拟结果表明,本文所设计的器件在开关转换电压0和17.4 V下,在1 534到1 565 nm的波长范围内,器件的插入损耗小于0.16 dB,串扰小于－20 dB,耦合区在2 734~3 120 μm范围内,器件的插入损耗小于0.22 dB,串扰小于－20 dB.     

低功耗聚合物Mach-Zehnder热光开关

采用传统的半导体工艺制作了聚合物Mach-Zehnder型热光开关.利用扫描电镜观测波导形貌,通过红外摄像机观测波导的近场输出光斑,在通信波段1550nm波长下测试了器件的输出光谱.在电极上施加直流信号,测得热光开关的消光比为-15dB,驱动功率为16mW.引入直流偏置网络,获得了器件的开关特性曲线,经测量开关上升时间为1.2ms,下降时间为0.8ms.     

聚合物微环谐振器电光开关阵列的优化与模拟

利用耦合模理论、电光调制理论和微环谐振理论,提出了一个聚合物微环谐振器电光开关阵列的模型.该器件由N-1个微环和N条平行信道构成,在微环上施加不同方式的驱动电压,可以实现N条信道的开关功能.以7微环8信道结构为例,在1550 nm谐振波长下对该器件进行了优化和模拟.结果表明,微环波导芯的截面尺寸为1.7μm×1.7μm,波导芯与电极间的缓冲层厚度为2.5 μm,电极厚度为0.2μm,微环半径为13.76 μm,微环与信道间的耦合间距为0.14μm,输出光谱的3 dB带宽约为0.05 nm,开关电压约为8.1 V左右,插入损耗约为0.23～4.6 dB,串扰小于-20 dB.     

聚合物2×2定向耦合型电光开关

设计并制作了一种聚合物2×2定向耦合型电光开关.针对溶胶-凝胶法合成的有机/无机杂化电光材料膜厚较薄的情况,采用一种加载条形波导结构,利用掺有环氧丙脂的聚甲基丙烯酸甲脂-甲基丙烯酸缩水甘油脂作为引导层,在电光薄膜上构成定向耦合器,通过紫外光刻、反应离子刻蚀、电晕极化等工艺,制备了聚合物定向耦合型电光开关,并采用共面波导行波电极以电推挽方式工作.经测试,其器件损耗约为16 dB,开关电压9 V.     

1×N信道聚合物微环谐振器电光开关阵列的开关特性

利用耦合模理论、电光调制理论和微环谐振理论,提出了一个完善合理的聚合物微环谐振器电光开关阵列模型.该器件由1条水平信道、N条竖直信道和N个微环构成,在微环上施加不同方式的驱动电压,可以实现N+1条信道的开关功能.以1×8信道结构为例,在1 550 nm谐振波长下对该器件进行了优化设计和模拟分析.其结果是:微环波导芯的截面尺寸为1.7×1.7 μm2,波导芯与电极间的缓冲层厚度为2.5 μm,电极厚度为0.2 μm,微环半径为13.76 μm,微环与信道间的耦合间距为0.14 μm,输出光谱的3 dB带宽约为0.05 nm,开关电压约为12.6 V,插入损耗约为0.67～1.26 dB,串扰小于-20 dB,开关时间约为11.35 ps.     

聚合物串联耦合双环电光开关的优化

利用耦合模理论、电光调制理论和微环谐振理论,提出一个聚合物串联耦合双环电光开关器件模型,在1.55 μm谐振波长下对该器件进行了模拟和优化.结果为：微环波导芯截面尺寸为1.6×1.6 μm2,波导芯与电极间的限制层厚度为1.6 μm,电极厚度为0.15 μm,微环半径为15.2 μm,微环与信道间的耦合间距为0.14 μm,微环与微环间的耦合间距为0.6 μm,输出光谱的3 dB带宽约为0.06 nm,开关电压约为6 V左右,插入损耗约为2.2 dB,串扰约为－20 dB.所设计的双环电光开关较单环型电光开关不仅输出光谱更加平坦陡峭,非谐振光更弱,而且开关电压更低.     

低功耗聚合物Mach-Zehnder热光开关

采用传统的半导体工艺制作了聚合物Mach-Zehnder型热光开关.利用扫描电镜观测波导形貌,通过红外摄像机观测波导的近场输出光斑,在通信波段1 550 nm波长下测试了器件的输出光谱.在电极上施加直流信号,测得热光开关的消光比为－15 dB,驱动功率为16 mW.引入直流偏置网络,获得了器件的开关特性曲线,经测量开关上升时间为1.2 ms,下降时间为0.8 ms.     

Flexible integration of optical switch with optical power splitting and attenuating functions for optical fiber-based networking applications

A flexible integration of optical switch with optical power splitting and attenuating functions has been proposed to optimally serve optical fiber-based networking applications. In this switch, an etched binary-slope sidewall reflector is electrostatically actuated in and out of the plane to manipulate optical signals between input and output optical fibers. The fabrication process is a simple combination of a bulk-silicon micromachining process and silicon-to-glass anodic bonding where fiber alignment grooves, reflectors and actuators are fabricated on the same silicon substrate. Ball-lensed fibers are assembled with the device to achieve high coupling efficiency. Performances of the fabricated devices are measured and discussed. The switching time is less than 9 ms at 31 V. The excess loss of the device is less than 3 dB and the controllable attenuation range is up to 38 dB at 139 V, respectively. Moreover, polarization-dependent loss is less than 0.7 dB in the whole attenuation and splitting range.     

Design and Fabrication of Micromechanical Optical Switches Based on the Low Applied Voltage

A micromechanical optical switch driven by electrostatic was fabricated with (100) silicon and tilted 2.5°(111) silicon. The pull-in voltage is 13.2V, the insertion loss is less than 1.4dB, the crosstalk is less than -50 dB.     

一种智能光网络中的亚毫秒光开关阵列

设计研制了一种亚毫秒级微机械光开关阵列.该阵列驱动电压为5V,开关时间小于750μs, 插入损耗在0.6 dB～0.8 dB之间,串扰<－70 dB.具有结构简单、成本低廉、可大规模集成的优点,能很好地解决智能光网络节点连接设备OADM快速信号转换和串扰问题.详细介绍了该光开关阵列实现原理,报告了器件性能测试,并应用FEA软件分析了开关单元中磁场和开关驱动过程.     

光纤直接耦合微加工型1×2光开关

设计研制了一种新型小体积,低成本的1×2光纤直接耦合微加工型光开关.该器件使用电磁微线圈驱动一封装在微加工柔性框架上的活动光纤,使其对准另两根固定光纤,实现光路转换.驱动电压为5 V,开关时间小于2 ms,插入损耗达到0.9~1.1 dB.器件构造工艺采用了CNC雕刻技术和EDM技术.本文剖析了器件损耗,用有限元软件ANSYS分析了器件的磁场和弹簧受力而优化结构设计,并报告了器件性能测试.     

A new form of optical transmission system using 1 × 6 optical switch

Optical switches are useful for various optical systems. This paper describes a new form of optical transmission system, using 1 × 6 optical switch with built-in optical multiplexer. The insertion loss of the optical switch was 3.1 dB (including filter loss of 1.4 dB). This switch is useful for a traffic monitoring system, and its transmission characteristics were measured. The measured signal-to-noise ratio is 44 dB when the switch is applied to a 2-km video transmission line.     

A new form of optical transmission system using 1 × 6 optical switch

Optical switches are useful for various optical systems. This paper describes a new form of optical transmission system, using 1 × 6 optical switch with built-in optical multiplexer. The insertion loss of the optical switch was 3.1 dB (including filter loss of 1.4 dB). This switch is useful for a traffic monitoring system, and its transmission characteristics were measured. The measured signal-to-noise ratio is 44 dB when the switch is applied to a 2-km video transmission line.     

Design of a spectrum-expanded polymer Mach�CZehnder interferometer electro-optic switch using two-phase generating couplers

A novel structure, thorough analysis and design technique are presented for a kind of polymer Mach?CZehnder Interferometer (MZI) electro-optic (EO) switch consisting of two-phase generating couplers (PGCs). By optimizing the PGCs structure, the output spectrum of the two PGCs based MZI EO switch is greatly expanded to almost six times of that of the traditional MZI EO switch with two 3?dB directional couplers. Under a central wavelength of 1550 nm, the driving voltages of the designed switch are as low as about 0 (ON state) and ±0.925?V (OFF state) with an EO region length of 5000???m. A wide spectrum more than 350 nm (1380??1730?nm) is achieved, and within this wavelength range, the crosstalk is less than ?30?dB, and the insertion loss is less than 5.91?dB which is larger than that of the traditional MZI EO switch due to the longer waveguide length by introducing two PGCs. The design technique on the two PGCs based MZI EO switch is supported to be reasonable compared with the beam propagation method (BPM). The proposed structure shows potential wide applications especially in optical cross-connect (OXC) and optical add-drop multiplexing (OADM) systems.     

反相电极聚合物定向耦合电光开关的优化设计

为了消除单节电极定向耦合电光开关的工艺误差对器件性能的不良影响,应用耦合模理论、电光调制理论、保角变换及镜像法,优化设计了一种两节交替反相电极聚合物定向耦合电光开关.模拟结果表明,该器件具有良好的开关性能:在1 550 nm的工作波长下,器件耦合区的长度为4 753.5 μm,交叉态电压为1.22 V,直通态电压为2.65 V,插入损耗小于2.21 dB,串扰小于-30 dB.通过微调状态电压,可以很容易地消除工艺误差对器件性能产生的不良影响.本文方法的设计结果与光束传播法的仿真结果符合得很好.     

聚合物微环电光开关的模拟和优化

利用耦合模理论、电光调制理论和微环谐振理论,提出一个完善合理的聚合物微环电光开关的器件模型,并给出了可用以分析微环谐振过程的光强传递函数,据此在谐振波长1 550 nm下对该器件进行了模拟和优化.结果表明：微环波导芯截面尺寸为1.8×1.8 μm2,波导芯与电极间的限制层厚度为1.1 μm,电极厚度为0.15 μm,微环半径为15.2 μm,微环与信道间的耦合间距为0.16 μm,光绕微环转300 圈即可形成稳定的谐振状态,此时的谐振时间约为147.4 ps.不加电压时,下信道的插入损耗约为0.8 dB,上信道的串扰约为－26 dB;当取工作电压等于19.7 V为开关电压时,上信道的插入损耗约为0.34 dB,下信道的串扰约为－20 dB.     

Fully packaged high-speed Ti:LiNbO3, waveguide mach-zehnder intensity modulator

A fully packaged high-speed Ti:LiNbO₃, Mach-Zehnder intensity modulator at a 1.5μm wavelength has been designed and fabricated. The design has been considered with respect to optical insertion loss, switching voltage, and modulation bandwidth. Re fiber-pigtailed device has a 6.7 dB fiber-to-fiber loss and an optical modulation bandwidth of 8 GHz. The voltage required to switch the device from the on to off state is measured to be 7.3 V, with an on-off extinction ratio of 21 dB.