共查询到20条相似文献,搜索用时 62 毫秒
1.
Meenakshi Bhatt Kala P.K. Bandyopadhyay B.B. Nautiyal 《Infrared Physics & Technology》2012,55(5):409-411
Most infrared transmitting optics have high refractive indices which in turn have high per surface reflection loss. So antireflection coating has very important role in increasing the transmission in the desired wavelength region. In this paper a study has been carried out on the design and fabrication of Thorium free antireflection coating effective for Silicon substrate in MWIR (3.6–4.9 μm) region. The wave band 3.6–4.9 μm is chosen for the reported work because the detected system used in MWIR region has a band selection filter effective in the same wavelength region. Comprehensive search method was used to design the multilayer stack on Silicon substrate. The coating materials used in the design were Germanium (Ge) and Silicon dioxide (SiO2). The fabrication of coating was made in a coating plant fitted with Cryo pump system and Residual Gas Analyzer. The evaporation was carried out at high vacuum (2–6 × 10–6 mbar) using Electron Beam Gun and layer thicknesses were measured with crystal monitor. The result achieved for the antireflection coating was 96% average transmission in 3.6–4.9 μm band which withstood MIL-F-48616 environmental testing. This work provides an alternate antireflection coating on Silicon by replacing radioactive Thorium Fluoride, used as a coating material in most IR antireflection coating designs. 相似文献
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We report a new structure for broadband antireflection coating by dip-coating technique, which has minimal cost and is compatible with large-scale manufacturing. The coatings are prepared by depositing SiO 2 sol-gel film on a glass substrate, subsequently depositing SiO 2 single-layer particle coating through electrostatic attraction, and depositing a final very thin SiO 2 sol-gel film to improve the mechanical strength of the whole coating structure. The refractive index of the structure changes gradually from the top to the substrate. The transmittance of a glass substrate has been experimentally found to be improved in the spectral range of 400 1 400 nm and in the incidence angle range from 0 to at least 45 . The mechanical strength is immensely improved because of the additional thin SiO 2 sol-gel layer. The surface texture can be applied to the substrates of different materials and shapes as an add-on coating. 相似文献
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为了制备满足设计要求的宽角度、宽波段减反膜,利用离子束溅射沉积技术,在时间-功率控厚的模式下,对膜层沉积速率进行了精确修正。在实验中,利用时间-功率控厚的离子束溅射沉积技术,选择HfO2和SiO2作为高低折射率组合,在超抛ZF6玻璃基底上制备了宽角度、宽带减反膜,通过对实验后的透过率光谱曲线的数值反演计算,获得膜层厚度修正系数,初步得到了沉积速率随沉积时间变化的规律。利用修正后的沉积参数制备设计的膜系,在0°~30°入射角度下,600~1 200 nm波段的平均透过率达到99%以上。 相似文献
4.
用低压反应离子镀的方法制备Ge_(1-x)C_x单层非均匀增透膜的研究 总被引:2,自引:0,他引:2
用低压反应离子镀(RLVIP)的方法在Ge基底上制备了Ge1-xCx单层非均匀增透薄膜。随着沉积速率在0.05~0.4nm/s之间的变化,其折射率在2.31~3.42之间可变。实验结果表明,镀制的Ge1-xCx单层非均匀增透保护薄膜均为无定形结构,并实现了从2000~8000nm的宽波段增透。当沉积速率为0.1nm/s时,单面平均透过率从68.6%提高到了80.9%,比单面未镀膜时提高了17.9%。通过对薄膜的稳定性和牢固度进行测试表明,制备的Ge1-xCx单层非均匀增透薄膜具有良好的性能。 相似文献
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Leszek A. Dobrzański Marek Szindler Aleksandra Drygała Magdalena M. Szindler 《Central European Journal of Physics》2014,12(9):666-670
The paper presents the possibility of using Al2O3 antireflection coatings deposited by atomic layer deposition ALD. The ALD method is based on alternate pulsing of the precursor gases and vapors onto the substrate surface and then chemisorption or surface reaction of the precursors. The reactor is purged with an inert gas between the precursor pulses. The Al2O3 thin film in structure of the finished solar cells can play the role of both antireflection and passivation layer which will simplify the process. For this research 50×50 mm monocrystalline silicon solar cells with one bus bar have been used. The metallic contacts were prepared by screen printing method and Al2O3 antireflection coating by ALD method. Results and their analysis allow to conclude that the Al2O3 antireflection coating deposited by ALD has a significant impact on the optoelectronic properties of the silicon solar cell. For about 80 nm of Al2O3 the best results were obtained in the wavelength range of 400 to 800 nm reducing the reflection to less than 1%. The difference in the solar cells efficiency between with and without antireflection coating was 5.28%. The LBIC scan measurements may indicate a positive influence of the thin film Al2O3 on the bulk passivation of the silicon. 相似文献
7.
A hemispherical surface structure was fabricated on a sapphire substrate by utilizing a self-assembly and spin-coating process for a terahertz (THz) antireflection coating. The self-assembled glass spheres and spin-coated material led to a gradual change in the effective refractive index. The aspect ratio of the hemispherical surface structure was controlled easily by adjusting the thickness of the B-staged bisbenzocyclobutene used as a coating. The reflectance of the fabricated hemispherical surface structure, having a period of 140 μm, exhibited low reflectance and low Fabry-Perot resonance in a THz spectral range from 0.1 to 1.9 THz. 相似文献
8.
A double-layer anisotropic antireflection coating is designed and fabricated using the technique of serial bideposition. Both layers in the coating are biaxial with nanostructural columns directed normal to the substrate. Incident light with the p polarization encounters a pair of quarter-wave layers with refractive indices that satisfy the standard relationship for zero reflectance at the design wavelength. Light with the s polarization meets non-quarter-wave layers and different indices and hence is partially reflected. As an example to illustrate potential applications of the coating, we have used a thin glass plate with anisotropic antireflection coatings on both sides as an intracavity element to select the direction of polarization of an open-cavity HeNe laser. 相似文献
9.
三硼酸锂晶体上1064 nm,532 nm,355 nm三倍频增透膜的设计 总被引:1,自引:0,他引:1
采用矢量法设计了三硼酸锂晶体上1064 nm、532 nm和355 nm三倍频增透膜,结果表明1064 nm、532 nm和355 nm波长的剩余反射率分别为0.0017%、0.0002%和0.0013%。根据误差分析,薄膜制备时沉积速率精度控制在 5.5%时,1064 nm、532 nm和355 nm波长的剩余反射率分别增加至0.20%、0.84%和1.89%。当材料折射率的变化控制在 3%时,1064 nm处的剩余反射率增大为0.20%,532 nm和355 nm处分别达0.88%和0.24%。与薄膜物理厚度相比,膜层折射率对剩余反射率的影响大。对膜系敏感层的分析表明,在1064 nm和355 nm波长,从入射介质向基底过渡的第二层膜的厚度变化对剩余反射率的影响最大,其次是第一膜层。在532 nm波长,第一和第三膜层是该膜系的敏感层。同时发现,由于薄膜材料的色散,1064 nm5、32 nm和355 nm波长的剩余反射率分别增加至0.15%、0.31%和1.52%。 相似文献
10.
Young-Kyoung Choi Young-Ki Ha Jae-Eun Kim Hae Yong Park Kihong Kim 《Optics Communications》2004,230(4-6):239-243
We calculated the transmittance of a one-dimensional (1D) metallo-dielectric photonic crystal (MDPC) in the optical region including the absorption losses in metal layers. The structure consists of five Ag and four GaN layers stacked alternately. When we add an antireflection coating to each end of the stack, the transmittance of the MDPC is increased twice as much and the oscillations in the transmission spectrum are also smoothed out compared with the case without them. The transmittance for oblique incident angles is also increased by the addition of two antireflection layers at the ends of the 1D MDPC. 相似文献
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The concept of antireflection coating in the theory of multilayer films is introduced to the two-dimensional metal–insulator–metal
(MIM) structures to realize total transmission of optical energy at the waveguide discontinuities. The antireflection structure
consists of a resonant cavity which is constructed by changing the insulator width of the waveguide. A numerical method is
used to achieve the optimal design directly. A T-splitter with zero reflection is proposed, utilizing a cavity structure in the input waveguide. A transformer with enhanced
transmission between different waveguides is presented for further validating the efficiency and generality of these cavity
based antireflection structures. The simulation results show that such a structure can realize a perfect antireflection function. 相似文献
13.
从实际应用出发,在0°入射的条件下,在ZnS基底上针对0.8~1.7 μm和3.7~4.8 μm两个红外波段,设计并制备了双波段红外增透膜。论述了材料选择、膜系设计和制备方法,最终使用等离子辅助沉积技术在ZnS窗口上制备出双波段红外增透膜,透过率及环境测试结果表明:在0.8~1.7 μm波段双面平均透过率大于95%,在3.7~4.8 μm波段双面平均透过率大于96%。膜层结合牢固并有良好的耐摩擦性能。 相似文献
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A. N. Buzynin Yu. N. Buzynin V. V. Osiko V. I. Panov B. N. Zvonkov I. V. Chinareva P. E. Khakaushev M. A. Trishenkov 《Bulletin of the Russian Academy of Sciences: Physics》2011,75(9):1213-1216
Fianite is a promising multipurpose material for new electronic technologies owing to its unique combination of physical and
chemical properties. It can be used in virtually all of the main technological stages of the production of micro-, opto-,
and SHF-electronics; in particular, as a bulk dielectric substrate and a material for buffer layers in heteroepitaxy; as a
material for insulating, antireflection, and protective layers in device elements; and as a gate dielectric [1–3]. In this
work, we consider the possibilities for using fianite and ZrO2 as an antireflection coating for silicon solar cells (SCs) and SCs based on InGaAsP heterostructures. 相似文献
16.
C.Q. Hu J.J. Li Q. Jiang H.W. Tian X.Y. Lu J.W. Liu L. Xu J.B. Wang 《Applied Surface Science》2006,252(23):8135-8138
The antireflection Germanium carbide (Ge1-xCx) coating, deposited using RF reactive sputtering, on both sides of ZnS substrate wafer has been developed. The infrared (IR) transmittance spectra show that the IR transmittance in the wavelength region between 8 and 12 μm for the designed system Ge1-xCx/ZnS/Ge1-xCx is greatly enhanced compared to that for ZnS substrate. In addition, the double-layer coated ZnS substrate is approximately four times as hard as uncoated ZnS substrate. This investigation indicates that a double-layer Ge1-xCx coating can be used as an effective antireflection and protection coating on ZnS infrared window. 相似文献
17.
Fabrication of broadband antireflection coatings using broadband optical monitoring mixed with time monitoring 下载免费PDF全文
Multi-layer optical coatings with complex spectrum requirements, such as multi-band pass filters, notch filters, and ultra-broadband antireflection coating, which usually contain very thin layers and sensitive layers, are difficult to be fabricated using a quartz crystal monitoring method or a single wavelength optical monitoring system(SWLOMS). In this paper, a broadband antireflection(AR) coating applied in the wavelength range from 800 nm to 1800 nm was designed and deposited by ion beam sputtering(IBS). Ta_2O_5 and Si O_2 were chosen as high and low refractive index coating materials,respectively. The optimized coating structure contains 9 non-quarter-wave(QW) layers totally with ultra-thin layers and sensitive layers in this coating stack. In order to obtain high transmittance, it is very important to realize the thickness accurate control on these thin layers and sensitive layers. A broadband optical monitoring mixed with time monitoring strategy was successfully used to control the layer thickness during the deposition process. At last, the measured transmittance of AR coating is quite close to the theoretical value. A 0.6% variation in short wavelength edge across the central 180 mm diameter is demonstrated. A spectrum shift of less than 0.5% for 2 continuous runs is also presented. 相似文献
18.
《Infrared Physics & Technology》1999,40(1):49-53
The dual channel thermal imager, operating in the 3–5 and 7.5–10.6 μm wavelength bands, is one of the latest achievements in instrumentation for target recognition and acquisition. While the 3–5 μm band is utilised for detecting hot objects such as engine exhausts of vehicles and fighter planes, the 7.5–10.6 μm band is employed for human bodies and objects at ambient temperatures. Many substrates are available which transmit in both these wavelength bands and their transmission can be enhanced by providing a suitable antireflection coating. In this paper, a broad band antireflection coating on germanium substrate is reported. The design approach involves achieving a continuously varying refractive index from that of the incident medium to the substrate. The continuously varying refractive index profile may be generated by using a sequence of thin layers of high and low refractive index materials. In this design a continuous refractive index profile is approximated by using a 13-layer stack of thorium fluoride and germanium as low and high index coating materials respectively. This coating conforms to environmental stability standards and shows an average transmission of 91% in 3–5 μm band and 94.5% in 7.5–10.6 μm band with a peak of 97% at 9 μm on 10 mm thick germanium substrate. Polycrystalline germanium has 2.5% absorption for a 10 mm thick substrate. 相似文献
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为了提高Glan-Taylor棱镜的透射率,研究了Glan-Taylor棱镜在可见光波段及1064nm波长处减反射膜膜的设计和制备.为提高薄膜和冰洲石晶体的附着力,采用沉积Al2O3为过渡层,ZrO2作缓冲层的方法,用单纯形优化的方法进行膜系优化设计.用电子束沉积和离子柬辅助沉积的方法制备了多层减反射膜,并采用石英晶体振荡法监控膜厚和沉积速率.测量结果表明,在可见光波段及1064nm波长处的剩余反射率均小于0.5%经测试薄膜与冰洲石晶体的附着力性能良好. 相似文献