多脉冲飞秒激光对锗材料的烧蚀效应

 开展了脉宽为40 fs的不同数量激光脉冲对锗材料的烧蚀效应实验,采用扫描电镜、激光共聚焦显微镜等方法对不同数量的飞秒激光脉冲作用下锗材料表面烧蚀区进行了检测,并对作用后材料烧蚀形貌演化规律进行了分析,初步分析了锗材料烧蚀区周围形成的不同环区的形貌特征及成因,对各环区烧蚀形貌特征随激光作用脉冲数的增加而产生的形貌演化过程进行了观测。并给出单脉冲飞秒激光对锗材料的烧蚀阈值为1.2 J·cm^-2,采用激光共聚焦显微镜测得该阈值条件下单个飞秒激光脉冲对锗材料的烧蚀深度约为150 nm。     

Application of time-resolved digital holographic microscopy in studies of early femtosecond laser ablation

We studied evolution of femtosecond laser ablation by employing novel method of time-resolved off-axis digital holographic microscopy. Phase and amplitude profiles of early shock front and ablation plume dynamics of irradiated tempered steel were reconstructed from the digital holograms. In order to gain additional information, digital holographic microscopy was combined with plasma emission imaging. By using both techniques simultaneously we studied material response to multi-pulse irradiation, shock wave propagation, ablation plume formation and plasma emission. The significant changes in ablation performance were observed when using multi-pulse irradiation if compared to widely investigated single-shot regime.     

Experimental study of infrared nanosecond laser ablation of silicon: The multi-pulse enhancement effect

Experimental study has been performed on nanosecond (ns) laser ablation of silicon at 1064 nm, through which a so-called “multi-pulse enhancement effect” has been revealed, which has been rarely reported in literature. The major features of this effect are: (1) for multi-pulse laser ablation at the same spatial location, the ablation efficiency increases as the pulse number increases and the pulse-to-pulse temporal distance decreases; (2) for multi-pulse ablation performed sequentially at a group of locations, the ablation quality and efficiency starting from the second location can be significantly enhanced if the distance between adjacent locations is sufficiently small. Further study is needed to confirm and understand the underlying physical mechanism for the multi-pulse enhancement effect, which can be utilized to significantly improve the quality and efficiency of laser silicon micromachining using the low-cost and low-energy-consumption infrared ns lasers. This may decrease the cost and energy consumption of many relevant areas, such as the solar cell industry.     

Copper oxide particles produced by laser ablation in water

Laser ablation of copper metal in water was performed in order to obtain copper oxide particles. Scanning electron microscopy, energy dispersive X-ray fluorescence spectrometry, transmission electron microscopy, and electron diffraction were conducted in order to determine the size, shape and structure of the particles. The source of the O atoms in the copper oxide particles is the surrounding water molecules. The copper oxide particles obtained by laser ablation were both crystalline and amorphous. The crystalline particles were determined to be paramelaconite Cu₄O₃.     

Crystallization of amorphous Ge2Sb2Te5 films induced by a single femtosecond laser pulse

Crystallization is achieved in amorphous Ge₂Sb₂Te₅ films upon irradiation with a single femtosecond laser pulse. Transmission electron microscopy images evidence the morphology of the crystallized spot which depends on the fluence of the femtosecond laser pulse. Fine crystalline grains are induced at low fluence, and the coarse crystalline grains are obtained at high fluence. At the damage fluence, ablation of the films occurs.     

高温合金不同脉宽超快激光作用下多脉冲去除阈值

实验研究了激光脉冲宽度和脉冲个数对镍基高温合金材料去除阈值的影响,分别在290 fs,1 ps和7 ps脉宽的激光下,使用1,10,50,100,300,500和1000个不同能量的激光脉冲辐照高温合金样品表面。实验结果表明,烧蚀坑尺寸会随脉冲数的增加而增加,而脉冲宽度的增加会加大脉冲个数对烧蚀坑直径的影响。通过烧蚀坑直径的平方值与激光脉冲能量之间存在的对数关系,得到了不同脉冲宽度下镍基高温合金的多脉冲材料阈值。3种不同脉宽下的高温合金多脉冲去除阈值都存在显著的累积效应。根据去除阈值计算得到290 fs,1 ps和7 ps脉宽下的累积效应系数分别为0.88,0.86和0.78。     

All-optical characterization of single femtosecond laser-pulse-induced amorphization in silicon

The non-destructive optical imaging method of scanning laser microscopy has been used to evaluate quantitatively the thickness of an amorphous layer induced by a single, spatially Gaussian-shaped 130-fs Ti:sapphire laser pulse on n-doped single-crystalline 〈111〉-silicon wafers for laser fluences between melting and ablation threshold. A parabolic thickness profile exhibiting a maximum value of approximately 60 nm has been found for fluences of 80% of the ablation threshold value by means of scanning laser microscopy in combination with a thin film optical model. This suggests that the melt and the amorphous layer thickness are linearly related to each other. PACS 79.20.Ds; 78.68.+m; 64.60.-i     

基于发射光谱及成分分析的激光除漆机理研究

基于激光诱导击穿光谱和X射线能谱技术,测量了激光与油漆作用时发射光谱及作用前后元素成分的变化,以此研究了激光除漆的机理。实验测量了不同纳秒激光能量下激光诱导击穿油漆表面的光谱,计算了等离子体的电子密度和温度。通过扫描电子显微镜对油漆烧蚀形貌进行了分析,采用X射线能谱仪测量了烧蚀前后油漆成分的变化。研究结果表明,等离子体电子密度、温度以及烧蚀区域大小都随着入射激光能量的增加逐渐增加。在激光作用前后油漆中碳(C)含量明显降低,原子百分比从78.25%降低到67.07%,说明激光与油漆作用过程中发生了烧蚀。通过对比钛(Ti)元素、C元素和铝(Al)元素的相对原子比例,表明更高的激光能量下油漆烧蚀的更剧烈。该工作对深入研究激光除漆机理有重要意义。     

Mössbauer study of iron carbide nanoparticles produced by laser ablation in alcohols

Iron carbide nanoparticles were synthesized by laser ablation of iron in alcohols (methanol and ethanol). A new cell, designed to allow the ablation to be conducted in a flowing solvent, enabled separation and collection of the nanoparticles immediately after production, thus preventing further photochemical reactions of the colloids. The nanoparticles were investigated using Mössbauer spectroscopy, X-ray diffraction, and transmission electron microscopy. In methanol, they consisted of α-iron, γ-iron, iron carbide, and amorphous paramagnetic iron carbides, whereas in ethanol they consisted of iron carbides and amorphous paramagnetic iron carbides. The difference in products depending on the alcohol was attributed to the different carbon supplies for methanol and ethanol. For both solvents, the average particle size was found to be 16 nm, and the nanoparticles were dispersed in amorphous carbon. We also examined the effect of further laser irradiation of the colloids using stagnant solvent, and the particle size was found to increase and a very small amount of carbonization was observed.     

Morphology of Tungsten Nanooxides,Synthesized by Laser Ablation of Metal in Water

Colloidal solution precipitates obtained during laser ablation of tungsten in water and containing nanostructured metal oxides are studied using X-ray diffraction and scanning electron microscopy. The nanostructure composition and morphology are analyzed. It is shown that the material composing nanostructures is X-ray amorphous, i.e., the particle size does not exceed 1–2 nm. The high degree of the structure surface development implies prospects of their use as substrata when analyzing the composition of various materials by surface-enhanced Raman scattering.     

Imaging-XPS/Raman investigation on the carbonization of polyimide after irradiation at 308 nm

The laser ablation of polyimide was studied using 308 nm laser irradiation 𙜡 mJ cm^-2. Confocal Raman microscopy revealed the deposition of carbon surrounding the ablation crater, which consists of amorphous carbon with some crystalline features. Inside the crater, graphitic material was detected on top of the cones, very similar to the material from cw-Ar⁺ ion laser irradiation. FT-Raman measurements reveal the presence of intermediates of the polyimide decomposition. Imaging-X-ray photoelectron spectroscopy confirmed the deposition of carbon material surrounding the ablation crater and showed that the oxygen and nitrogen contents of the remaining material decrease.     

Ultrashort-pulse laser ablation of indium phosphide in air

Ablation of indium phosphide wafers in air was performed with low repetition rate ultrashort laser pulses (130 fs, 10 Hz) of 800 nm wavelength. The relationships between the dimensions of the craters and the ablation parameters were analyzed. The ablation threshold fluence depends on the number of pulses applied to the same spot. The single-pulse ablation threshold value was estimated to be φ_th(1)=0.16 J/cm². The dependence of the threshold fluence on the number of laser pulses indicates an incubation effect. Morphological and chemical changes of the ablated regions were characterized by means of scanning electron microscopy and Auger electron spectroscopy. Received: 30 May 2000 / Accepted: 31 May 2000 / Published online: 23 August 2000     

Generation of web-like structures and nanoparticles by femtosecond laser ablation of silicon target in ambient air

Silicon nanoparticles were produced by femtosecond laser ablation in ambient air. Obtained samples were studied using dark-field optical microscopy, scanning electron microscopy and Raman-scattering spectroscopy. Two groups of structures can be found: (1) branched amorphous structures with a minimum element size of about 10 nm and incorporations of nanocrystals (0.6–6.6 nm from Raman scattering analysis); (2) larger crystal particles with smooth surface and a typical size of 50–200 nm that provide directional visible light scattering (at dark-field optical microscopy observations). An influence of environment on resulting phase composition of silicon nanoparticles was investigated by numerical evaluation of nanoparticle’s cooling rate. The calculation shows that cooling in ambient air ensures cooling rate sufficient for crystallization.     

Thermal melting and ablation of silicon by femtosecond laser radiation

The space-time dynamics of thermal melting, subsurface cavitation, spallative ablation, and fragmentation ablation of the silicon surface excited by single IR femtosecond laser pulses is studied by timeresolved optical reflection microscopy. This dynamics is revealed by monitoring picosecond and (sub)nanosecond oscillations of probe pulse reflection, which is modulated by picosecond acoustic reverberations in the dynamically growing surface melt subjected to ablation and having another acoustic impedance, and by optical interference between the probe pulse replicas reflected by the spalled layer surface and the layer retained on the target surface. The acoustic reverberation periods change during the growth and ablation of the surface melt film, which makes it possible to quantitatively estimate the contributions of these processes to the thermal dynamics of the material surface. The results on the thermal dynamics of laser excitation are supported by dynamic measurements of the ablation parameters using noncontact ultrasonic diagnostics, scanning electron microscopy, atomic force microscopy, and optical interference microscopy of the modified regions appearing on the silicon surface after ablation.     

Incubation effect and its influence on laser patterning of ITO thin film

Results are presented on the surface damage thresholds of ITO thin films induced by single- and multi-pulse laser irradiation at a pulse duration of 10 ps and a wavelength of 1064 nm. For multi-pulse ablation the incubation effect results in a reduction of the damage threshold, especially apparent at low pulse numbers and very small film thicknesses. The incubation effect attributes to the accumulation of defect sites and/or the storage of thermal stress-strain energy induced by the incident laser pulses. An incubation coefficient of S=0.82 has been obtained which is independent on the film thickness in the range of 10–100 nm. In practical applications, the incubation effect determines the laser patterning structure of ITO films while increasing the pulse overlapping rate. The width of the patterned line can be predicted by the proposed model involving the laser fluence, the overlapping rate and the incubation coefficient.     

Direct observation of laser-induced crystallization of a-C:H films

The post-growth modification of diamond-like amorphous hydrogenated carbon a-C:H films by laser treatment has been studied by transmission electron microscopy and Raman spectroscopy. a-C:H films grown on Si substrates by benzene decomposition in a rf glow discharge were irradiated with 15 ns pulses of a KrF-excimer laser with fluences in the range of E=50–700 mJ/cm². At fluences below 100 mJ/cm² an increase in the number of graphitic clusters and in their ordering was evidenced from Raman spectra, while the film structure remained amorphous according to electron microscopy and electron diffraction observations. At higher fluences the appearance of diamond particles of 2–7 nm size, embedded into the lower crystallized graphitic matrix, was observed and simultaneously a progressive growth of graphite nanocrystals with dimensions from 2 nm to 4 nm was deduced from Raman measurements. The maximum thickness of the crystallized surface layer (400 nm) and the degree of laser annealing are limited by the film ablation which starts at E>250 mJ/cm². The laser-treated areas lose their chemical inertness. In particular, chemical etching in chromium acid becomes possible, which may be used for patterning the highly inert carbon films.     

Fabrication of micro/nano crystalline ITO structures by femtosecond laser pulses

A method is proposed for the fabrication of micro/nano crystalline indium tin oxide (c-ITO) structures using a Ti:Sapphire laser with a repetition rate of 1 kHz and a wavelength of 800 nm. In the proposed approach, an amorphous ITO (a-ITO) thin film is transformed into a c-ITO micro/nano structure over a predetermined area via laser beam irradiation, and the residual a-ITO thin film is then removed using an etchant solution. The fabricated c-ITO structures are observed using scanning electron microscopy (SEM) and cross-sectional transmission electron microscopy (TEM). The observation results show that the use of a low repetition rate laser induces a high thermal cycling effect within the ITO film and therefore prompts the formation of micro-cracks in the c-ITO structure. In addition, it is shown that as the laser power approaches the ablation threshold of the a-ITO thin film, nanogratings and disordered nanostructures are formed along the center lines of the c-ITO patterns formed using linearly polarized and circularly polarized laser beam irradiation, respectively. The nanogratings are found to have a period of approximately 200 nm (i.e. one-quarter of the irradiation wavelength), while the nanostructures have an average diameter of approximately 100–160 nm.     

Laser-assisted nanostructuring of Silicon in liquid environment

Formation of surface nanostructures on a Silicon target immersed into liquids is experimentally studied under its ablation by femtosecond laser pulses. Nanotexturing of Silicon upon its exposure to delayed femtosecond pulses and double exposure method is investigated. Two different types of morphological features are observed, namely periodic ripples and nanostructures. Field emission scanning electron microscopy shows that the density of nanostructures as well as their morphology depends on such parameters as fluence and the delay time between pulses and reaches its maximum at delay of 1 ps. Two-dimensional homogenous array of nanostructures is formed by laser ablation in liquids using double-exposure method. Possible applications of generated nanostructures are discussed.     

Effects of green laser fluence on the characteristics of graphene nanosheets synthesized by laser ablation method in liquid nitrogen medium

We have studied the effects of laser fluence on the characteristics of graphene nanosheets produced by pulsed laser ablation technique. In this work, The second harmonic of a Q-switched Nd:YAG laser at 532 nm wavelength and 5 Hz repetition rate with different laser fluences in the range of 0.5–1.8 J/cm² was used to irradiate the graphite target in liquid nitrogen medium. The products of ablation were characterized using Fourier transform infrared spectroscopy, field emission scanning electron microscopy, X-ray diffraction pattern, UV–Vis absorption spectroscopy, Raman spectrum and transmission electron microscopy. The Raman spectroscopy indicates that the quality of the graphene nanosheets was decreased while their structure defects were increased as the laser fluence was increased from 0.5 to 1.4 J/cm². Our results suggest that the amount of defects and the number of layers in graphene nanosheets can be changed by adjusting the laser fluence. This study could be a useful guidance for producing of high quality of graphene nanosheets by laser ablation method.     

Laser ablation of copper and aluminium in air

The ablation behavior of copper alloy and aluminium irradiated in air by 1.06 m, 10 ns pulsed laser with power density of 6.4×10⁹W/cm² was studied using scanning electron microscopy (SEM), MCS-RBS and X-ray microanalysis. Evidence of bulk vaporization via bubble formation was observed for the copper alloy under the laser irradiation. Silver-enrichment microregions were found in the ablation crater created by the laser shots on the copper alloy sample. Material removal rates of these materials were determined by crater shape-profile measurement. Using self-similar solutions of the gas-dynamic equations, gas-dynamic parameters of the vaporization waves are obtained. These parameters are used to calculate material removal rates and impulse coupling coefficients of these materials under the pulsed laser irradiation. The calculated mass removal rates and the coupling coefficients are compared with the corresponding experimentally determined values. The surface kinetic energy of the irradiated area on the Al sample is estimated. Possible mechanisms for laser ablation of the materials under study are discussed.