云纹干涉法面内位移测量的光栅补偿方法研究

分析导致云纹干涉法面内位移和应变测量的根本原因，给出对称入射光路云纹干涉法面内位移计量的基本公式，设计定量补偿面内位移和变形的非对称光栅补偿光路系统。最后证明基准光栅补偿方法的可行性和可靠性。     

云纹干涉法在线复制变形光栅技术研究

介绍了一种云纹干涉法现场转移高密度光栅的新工艺，将现场转移光栅与实验室测量有机结合起来，同时得到物体变形的面内U、V位移场。从理论上分析讨论该方法的可行性及误差。通过实验验证该方法与传统云纹干涉法具有相同的灵敏度和量程，使云纹干涉法应用范围更加广泛。     

耐高温光刻胶光栅模板的制作与转移技术及其应用

作为试件变形传感元件的云纹光栅的制作是云纹干涉法的关键技术。本文提出了在１２０～２００℃高温下使用的光刻胶光栅模板的制作及在此温度下试件栅的复制工艺，并利用此技术研究了新型微电子封装组件在１２５～２０℃温度载荷下的热变形。实验结果表明：采用该方法可以获得高质量的试件栅，云纹条纹质量好，可用于试件微小区域内热变形的精确测量     

应用菲涅耳三面镜形成云纹干涉空间高频栅进行离面位移及振动的测量技术

本文提出应用菲涅耳三面镜在空间形成云纹干涉高频栅及贴片云纹干涉技术进行离面位移与振动的测量技术，文中就测量原理、定量公式推导、条纹解释、测量精度及灵敏度等方面都作了详细论述，为工程中的位移与振动模态分析提供了一种现场测试新途径。     

全息光栅拼接系统中的像差补偿法

全息光栅拼接参数需要用参考干涉条纹来检测。系统像差会造成干涉条纹扭曲,产生光栅拼接误差。为补偿像差造成的光栅拼接误差,对像差与干涉条纹扭曲量之间的理论关系进行了研究,利用计算机模拟了参考干涉条纹图像,并将光栅拼接误差预调制到参考干涉条纹图像中。为验证该方法的有效性,在曝光系统像差峰-峰值为0.72λ的情况下进行了光栅拼接实验,在光栅拼缝处像差造成-1级衍射波面最大突变量为0.36λ。利用预制参考干涉条纹图像作为拼接参考时,其最大突变量为0.097λ。实验结果表明,在曝光系统像差较大的情况下,干涉条纹预制法能够有效地控制光栅拼接误差。     

应用菲涅耳三面镜形成云纹干涉空间高频栅进行离面位移及振动的测量技术

本文提出应用菲涅耳三面镜在空间形成云纹干涉高频栅及贴片云纹干涉技术进行离面位移与振动的测量技术,文中就测量原理、定量公式推导、条纹解释、测量精度及灵敏度等方面都作了详细论述,为工程中的位移与振动模态分析提供了一种现场测试新途径。     

表面封装技术组件焊点热变形的云纹干涉法研究

表面封装技术组件的焊点作为唯一联接芯片载体与电路板基板之间的机械物，它在温度循环下的可靠性问题是人们普遍关注的焦点。本文通过在组件的不同部位复制１２００线／ｍｍ高频正交全息光栅，采用高灵敏度云纹干涉法测得了翼型引脚首尾两端的面内剪切位移，为阐述表面封装组件的疲劳损伤机理提供了可靠的实验数据。     

载波相移云纹干涉法研究

通过对载波技术研究,提出载波相移云纹干涉法,采用该方法可以实现云纹干涉条纹信息的自动识别,给出了灵敏度和载波频率的定量关系式;同时,对载波数字相移云纹干涉法测试的精度进行了系统分析。     

载波相移云纹干涉法研究

通过对载波技术研究,提出载波相移云纹干涉法.采用该方法可以实现云纹干涉条纹信息的自动识别.给出了灵敏度和载波频率的定量关系式;同时,对载波数字相移云纹干涉法测试的精度进行了系统分析.     

用于多参数同时测量的散斑干涉仪

本文描述了一种新的散斑干涉仪,它可以同时对表面应变物体的面内位移、离面位移、位移梯度和莫尔曲率进行测量;由于利用了取向滤波方法,在滤波系统输出平面同时得到了与这些参数对应的散斑条纹.还利用散斑空间运动规律较好地解释了散斑干涉与散斑剪切干涉之间的关系.     

A modified moiré interferometer for three-dimensional displacement measurement

This paper presents a new optical interferometric system, MMI-T/G, composed of a modified four-beam moire interferometer and a Twyman/Green interferometer. The MMI-T/G system can measure threedimensional displacement fringe patterns with a single loading on the specimen, and the in-plane and out-of-plane displacement fields can be measured independently and defined clearly. The optical setup has the advantages of structural novelty, flexibility, and high fringe contrast. Moreover, the in-plane displacement sensitivity is twice of that of the normal moire interferometer. The measuring techniques to obtain the fringe patterns and displacement fields using the MMI-T/G system axe described. The experimental results of thermal displacement of an electronic device are shown.     

Influence of in-plane displacement and strain components on slope fringe distributions in double-aperture speckle wedge-shearing interferometry

The influence of in-plane displacement and strain components on slope (first-order derivative of out-of-plane displacement component) fringe distributions in double-aperture speckle wedge-shearing interferometry is discussed in detail. The research results show that only the in-plane displacement component parallel to the centre line of double apertures has an influence on the slope fringe distributions. It is also shown that the in-plane strain components have no influence on the slope fringe distributions when utilising normal illumination and an axisymmetric system. A theoretical analysis and an experimental demonstration are given. The experimental results are in good agreement with the quantitative analysis.     

Simultaneous measurement of whole in-plane displacement using phase-shifting ESPI

A novel method for simultaneously measuring whole field in-plane displacements by using optical fiber phase-shifting electronic speckle pattern interferometry (ESPI) is presented in this paper. A 1 × 4 single mode optical fiber beamsplitter is employed to split the laser beam into four beams of equal intensity. One pair of fibers is utilized to illuminate the diffuse target at equal angles in the horizontal plane so it is sensitive only to horizontal in-plane displacement. Another pair of optical fibers is set to be sensitive only to vertical in-plane displacement. The polarization directions of light emitted by fibers are the same for each pair, but are at a right angle between pairs. The optical fibers are equal in length for each pair, but are not equal between two pairs. In this case the speckles are interference between each pair of fibers, thus the horizontal and vertical displacement components can be obtained simultaneously. By means of a fiber phase shift technique we can obtain the quantitative data of whole field displacements. This method has made it possible to study the in-plane displacement of a thin metal plate, and the examples of the results are shown to demonstrate the novel method.     

基于径向剪切干涉仪的三维位移测量技术

本文提出一种基于双圆光栅径向剪切干涉仪的三维位移测量方法,其测量原理是径向剪切干涉仪所形成的莫尔条纹不仅由二维平面内位移决定,轴向位移会在+1和–1级莫尔条纹之间产生一个特定的相移.首先,基于标量衍射理论对双圆光栅径向剪切干涉仪的+1和–1级莫尔条纹强度分布进行推导,建立了三维位移量与莫尔条纹强度分布的精确解析关系;其次,在频谱分析的基础上,利用半圆环滤波器进行空间滤波,实现+1和–1级莫尔条纹的同时成像;然后,提出了从莫尔条纹图中定量提取三维位移的算法,并通过数值模拟进行验证;最后,实验结果验证了该方法测量平面内位移的最大绝对误差为4.8×10^–3 mm,平均误差为2.0×10^–4 mm,轴向位移的最大绝对误差为0.25 mm,平均误差为8.6×10^–3 mm.该方法具有装置简单、测量精度高、非接触、瞬时测量等特点,可实现三维位移的同时测量.     

频闪云纹倍增技术的研究

本文提出了一种研测面内振动的技术——频闪云纹倍增技术.它可用商品化的低密度云纹栅获得高灵敏度的测量结果.     

Moiré interferometry for strain analysis

Moiré interferometry is a sophisticated optical method for measuring in-plane strain fields. The basic technology for generating interferograms is discussed, along with the reasoning behind the choice of this technique for particular duties. Methods are evaluated for deriving useful data from interferograms. A range of applications is described, and the various limitations of the method are outlined.     

Sandwich-speckle hologram: A combined method for local displacement analysis

Sandwich hologram interferometry and sandwich speckle photography tend to complement each other as displacement measuring methods; a sandwich hologram is best suited for out-of-plane movements, while speckle photography is used to determine in-plane components. The two techniques can be combined and both holographic and speckle photographic data can be stored on the same sandwich pair. Fringes caused by in-plane rigid body motion can be compensated for and local displacement evaluated.