共查询到19条相似文献,搜索用时 62 毫秒
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纳米精度外差干涉仪非线性漂移的研究 总被引:10,自引:0,他引:10
在纳米精度外差干涉仪中,由于非线性温度漂移,成为外差干涉仪实现纳米精度测量的重要误差源。本文对差动干涉仪的理论分析得出如下的结论,干涉仪中除了测量光路和参考光路以外,还存在参考光误差分量和测量光误差分量的额外光路,从而引和了干涉混叠,产生非线性漂移:1/4波片的相位延迟量误差和安装是引入非线性漂移的主要因素,其影响程度是一阶的,提高波片对加工精度,并尽量减少其级数可降低非线性漂移。 相似文献
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在线测量表面粗糙度的共光路激光外差干涉仪 总被引:8,自引:0,他引:8
一种新型的、用于在线测量表面粗糙度的激光外差干涉仪已研制完成。该仪器体积小(25cm×20cm×10cm)、抗外界环境干扰能力强。仪器以稳频半导体激光器作为光源。共光路设计,使测量光和参考光沿同一路径入射到被测表面上。计大数和测小数周期相结合的外差信号处理方法,实现了大的动态测量范围和很高的测量分辩率。同时还采用了全反射临界角法进行自动聚焦。该仪器的纵向和横向分辨率分别为0.39nm和0.73μm;自动聚焦范围为±0.5mm,在焦点±25μm范围内,聚焦精度为1μm;80分钟内整机稳定性:3σ=1.95nm。 相似文献
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基于马赫-泽德干涉具的激光光谱探测技术研究 总被引:1,自引:0,他引:1
实时、可靠地探测敌方来袭激光的类型和特征参数是激光告警的主要任务。相干探测技术依靠激光的相干性探测其信息,是较有效的探测技术之一。为了探测来袭激光光谱信息,设计了一种激光探测与光谱实时测量装置。该装置以相干探测技术和傅里叶光学与光信号处理为基础,使用实心小型静态马赫-泽德干涉具作为相干探测元件,它能有效地抑制背景光,无机械扫描部件,光谱检测速度快,可探测纳秒级窄脉冲激光信号;用高速DSP芯片和多通道帧减技术进行实时信息处理,实现背景噪声去除、激光探测和光谱测量。测试结果表明,运用马赫-泽德干涉具和多通道帧减技术,能实现脉冲激光探测,提高测量精度;可探测激光脉冲宽度为10 ns,波长测量误差小于10 nm。 相似文献
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用于纳米测量的混合型外差干涉信号处理方法 总被引:5,自引:1,他引:5
通过对外差干涉信号同时进行相位检测和锁相倍频计数,可得到存在一定冗余度的一组测量结果,经过一定的逻辑混合;可实观测量分辨率优于0.1nm,测量范围不受λ/2周期限制,从而克服了以往单一采用相位测量法测量范围限于一个周期和锁相倍频计数法分辨率不易提高的难题。给出了在实际纳米测量干涉仪采用这种外差信号处理方法的测量结果。 相似文献
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In modern semiconductor and optics industries, there is a strong demand for a highly sensitive and non-contact surface profilometer. This paper describes a practical heterodyne surface profiling interferometer for on-line non-contact measurement which has been developed recently. The essential feature of the profilometer is a newly designed common-path configuration to minimize the effects caused by vibration, air turbulence and other environmental variations. A single-mode frequency-stabilized laser diode (780 nm) serves as the light source to make the whole system compact (total volume 250L×200W×100H mm). A powerful signal processing scheme is also developed, which includes three parts: automatic voltage control, phase measurement with wide range and automatic focusing control. All these make the repeatability and stability of the profiling interferometer greatly improved. The system has vertical resolution of 0.39 nm and lateral resolution of 0.73 μm. During approximately an hour, the stability is within 1.95 nm(3σ). 相似文献
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相位激光测距与外差干涉相结合的绝对距离测量研究 总被引:1,自引:1,他引:1
为了克服一般绝对距离测量方法量程和精度不能同时满足的问题,提出一种相位激光测距与外差干涉相结合的绝对距离测量方案。该方案使用相位激光测距技术进行粗测,双纵模He-Ne激光器外差干涉测长技术进行精测,保证两者结合的单值性。建立测量系统,对方案的可行性进行了实验验证,并对影响系统稳定性的因素进行了分析。与双频激光干涉仪的比对结果表明:测量标准差优于1mm,可以满足一些大尺寸的测量精度要求。 相似文献
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A compact high-resolution optical heterodyne interferometer combining a two-frequency light module and a minute optical system
is described. The light module, which generates two independent frequencies of light, is fabricated by proton exchange method
on LiNbO3 substrate. We report an experiment evaluating measurement accuracy using a micro-displacement measurement system which incorporates
this interferometer. Results of the experiment with a standard thickness sample show high thermal stability with maximum measurement
error of 1.8 nm at a temperature from 19°C to 33°C. The system was used to measure the hysteresis of a piezoelectric element
for displacements of several nm, thereby making it possible to analyze the system quantitatively in practice. 相似文献
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Tong-Jin Park Hyeun-Seok Choi Chang-Soo Han Yong-Woo Lee 《Optics & Laser Technology》2005,37(3):689-234
This paper proposes a robust discrete time Kalman filter (RDKF) for the dynamic compensation of nonlinearity in a homodyne laser interferometer for high-precision displacement measurement and in real time. The interferometer system is modelled to reduce the calculation of the estimator. A regulator is applied to improve the robustness of the system. An estimator based on dynamic modelling and a zero regulator of the system was designed by the authors of this study. For real measurement, the experimental results show that the proposed interferometer system can be applied to high-precision displacement measurement in real time. 相似文献
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提出了一种用于高层大气风场探测的改型大光程差Sagnac干涉仪,论述了其基本原理和分光机理;分析了空间光线在改型大光程差Sagnac干涉仪中的传播路径;利用空间几何方法,通过分析空间直线与其投影之间的关系,给出了入射光线绕入射界面法线旋转360°范围内,从任意方向以任意角度入射时,改型大光程差Sagnac干涉仪的光程差及横向剪切量的精确表达式,较目前文献所报道的只给出入射面与纸平面平行时光程差与横向剪切量的计算具有更加普遍的指导意义.为改型大光程差Sagnac干涉仪的设计、研制提供了重要的理论依据和实践指
关键词:
高层大气风场探测
改型大光程差Sagnac干涉仪
横向剪切量 相似文献
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We present a new circular heterodyne interferometer with electro-optic modulation for measurement of the optical linear birefringence. It enables the measurement of not only the phase retardation but also the principal angle. The measurement procedure is carried out in two steps. In the first step of measurements, we use the electro-optic modulated circular heterodyne interferometer and the phase-lock technique to precisely measure the principal axis angle. After rotating the analyzer in the setup, the phase retardation is determined also by the phase-lock technique. The compact configuration requires only a photodetector and two simple phase-lock extractions to determine the principal axis angle and the phase retardation. The validity of the proposed design is demonstrated by measurement of the principal axis angle and phase retardation of a quarter-wave plate sample. The root-mean-square resolutions for the principal axis angle and phase retardation are found to be 0.0396° and 0.0796°, respectively, with corresponding dynamic ranges of 0–180° and 0–180°. 相似文献