Ablation experiments on polyimide with femtosecond laser pulses

Some applications of polymer films require the microstructuring of partly uneven substrates. This cannot be achieved by conventional photolithography, usually performed with ultraviolet short-pulse lasers (excimer, fourth harmonic Nd:YAG). When processing thermally sensitive or undoped polymers with low optical absorption, the use of femtosecond laser pulses can improve the ablation precision, also reducing the heat-affected zone. Therefore, a Ti:sapphire laser system was employed to perform ablation experiments on polyimide (PI). The irradiated areas were evaluated by means of optical and scanning electron microscopy. Highly oriented ripple structures, which are related to the polarization state of the laser pulses, were observed in the cavities. The relationship between the ablation threshold fluence and the number of laser pulses applied to the same spot is described in accordance with an incubation model.     

Ablation of microstructures applying diffractive elements and UV femtosecond laser pulses

A new method for simple and economic fabrication of diffractive optical elements (DOEs) with three and four phase levels, by UV nanosecond (ns) laser ablation is presented. The technique is based on the combination of two sequentially generated complementary 2-level phase elements. During the fabrication, complete ablative removal of a highly absorbing silicon suboxide layer by pixelated backside illumination ensures the necessary high precision and optical quality. Full functionality of the new DOEs is demonstrated by fabricating micro-structures using UV femtosecond pulses.     

Ablation and cutting of planar silicon devices using femtosecond laser pulses

Although lasers are generally able to machine silicon, the major material in many microsystems applications, doing so without influencing the physical properties of the bulk material remains an important challenge. Ultrafast lasers, in particular, with their potential to precisely ablate all kinds of solid materials, are able to perform such processes with high efficiency and accuracy. This article starts with an overview of the general interaction of ultrafast laser radiation with semiconductors, explaining the absorption processes and different fluence regimes for the ablation of silicon. Major parameter influences, especially for cutting processes in thin silicon, are described. By varying pulse energies, beam shaping methods, the beam polarization, and temperatures, the cutting quality and speed can be significantly influenced. One important quality aspect, besides kerf widths and surface roughness, is the amount of back-side chipping when cutting brittle materials. Achievements in speed enhancement using linear focus shapes are presented, with cutting speeds up to five times higher than by conventional spot-focusing. On the other hand, laser processes that cut with a spot focus offer the possibility of free-shape cutting, which is explained using the example of wafers carrying silicon chips with highly increased package densities. Received: 10 December 2002 / Accepted: 20 January 2003 / Published online: 28 May 2003 RID="*" ID="*"Corresponding author. Fax: +49-511/2788-100, E-mail: nb@lzh.de     

Talbot effect under illumination of double femtosecond laser pulses

The Talbot effect under illumination of double femtosecond laser pulses has been reported. Spectrums of double femtosecond laser pulses with phase differences are quite different from that of one single femtosecond laser pulse. Therefore, the Talbot images of the double femtosecond laser pulses with phase differences are different from that of one single femtosecond laser pulse. Specifically, for the phase difference corresponding to π, the Talbot image shows the largest difference from that of one single pulse. Experimental results are in good agreement with the theoretical analysis. The behaviors of Talbot images under double femtosecond laser pulses illumination cannot be obtained under one femtosecond laser pulse, monochromatic or polychromatic light illumination. Therefore, it is a new interesting optical phenomenon for the Talbot effect which should have potential applications.     

Nonlinear absorption of femtosecond light pulses under conditions of multiphoton resonances in solids

A theory of nonlinear absorption of femtosecond light pulses by bulk crystals and nanostructures of differing dimensionality is developed. The pulse width is assumed to be small compared to the relaxation times of the electron and hole momenta. Expressions for the absorbed energy under conditions of multiphoton resonance are derived for transitions between discrete or band-related electron states and between sub-band states of size quantization in quantum wells and quantum wires. The dependence of the absorbed energy on the multiphoton resonance detuning and pulse width is analyzed.     

Multiple filamentation of femtosecond laser pulses

The formation of fluorescent channels with color centers in LiF crystals under the action of the multiple filamentation of femtosecond laser pulses is studied experimentally and theoretically for pulse powers around four orders of magnitude higher than the critical self-focusing value.     

Ablation and ultrafast dynamics of zinc selenide under femtosecond laser irradiation

The ablation in zinc selenide (ZnSe) crystal is studied by using 150-fs, 800-nm laser system. The images of the ablation pit measured by scanning electronic microscope (SEM) show no thermal stress and melting dynamics. The threshold fluence is measured to be 0.7 J/cm2. The ultrafast ablation dynamics is studied by using pump and probe method. The result suggests that optical breakdown and ultrafast melting take place in ZnSe irradiated under femtosecond laser pulses.     

Towards nanostructuring with femtosecond laser pulses

Detailed investigations of the possibilities for using femtosecond lasers for the nanostructuring of metal layers and transparent materials are reported. The aim is to develop a simple laser-based technology for fabricating two- and three-dimensional nanostructures with structure sizes on the order of several hundred nanometers. This is required for many applications in photonics, for the fabrication of photonic crystals and microoptical devices, for data storage, displays, etc. Measurements of thermionic electron emission from metal targets, which provide valuable information on the dynamics of femtosecond laser ablation, are discussed. Sub-wavelength microstructuring of metals is performed and the minimum structure size that can be fabricated in transparent materials is identified. Two-photon polymerization of hybrid polymers is demonstrated as a promising femtosecond laser-based nanofabrication technology. Received: 20 November 2002 / Accepted: 20 January 2003 / Published online: 28 May 2003 RID="*" ID="*"Corresponding author. Fax: +49-511/2788-100, E-mail: ch@lzh.de     

Non-equilibrium electron and phonon dynamics in metals under femtosecond laser pulses

Different models for relaxation dynamics of electrons and phonons in a thin metal film heated by femto-pico second laser pulses have been discussed. The traditional two-temperature approach reveals to be inaccurate due to deviations of electrons and phonons from Fermi-Dirac and Bose-Einstein distributions, respectively. Coupled Boltzmann kinetic equations have been adapted for the quantum statistics to study the energy distribution of electrons and phonons in metals. Theoretical details have been discussed and a new solution method has been proposed overcoming numerical problems and improving stability, allowing the study of the dynamics until the complete relaxation. Numerical results have been compared with photoemission spectroscopy experimental data.     

Feedback-controlled optimization of amplified femtosecond laser pulses

Received: 17 December 1998     

Thermodynamic evolution of materials during laser ablation under pico and femtosecond pulses

Using molecular-dynamics, we study the thermodynamic evolution of a simple two-dimensional Lennard–Jones system during laser ablation for pulse durations ranging from 200 fs to 400 ps. We briefly review results previously obtained for fs pulses where the evolution of the material was shown to be solely a function of the locally absorbed energy (provided that only thermal effects are important), i.e., is adiabatic. For longer pulses (100 and 400 ps) the situation becomes more complex, as the relaxation path also depends on the position in the target and on the timescale on which expansion occurs. We show that, in contrast to fs pulses, the material ejected following ps laser irradiation does not enter the liquid–vapor metastable region before ablation occurs, hence showing that phase explosion is not the dominant mechanism in this regime. Following on from previous work, we propose that trivial fragmentation is the main ablation mechanism. PACS 79.20.Ds; 79.20.Ap; 61.80.Az     

Nanostructuring with spatially localized femtosecond laser pulses

Spatially localized femtosecond pulses have been produced by a combination of scanning near-field optical microscopy with ultrashort pulse lasers. With these pulses direct ablative writing on metal surfaces is demonstrated. Possible applications of this technique for nanostructuring, repair, and production of lithographic masks are discussed.     

Ablation with femtosecond pulses: The effect of temporal contrast

An inherent property of the ultrashort pulse lasers used presently for materials processing is that the main pulse is accompanied by an amplified spontaneous emission background. The temporal quality of the pulses is characterized by the temporal contrast. Due to the 5-6 orders of magnitude difference in the duration of the main pulse and the pedestal, high intensity contrast does not mean necessarily high enough difference in the respective energies. In materials processing applications consideration of the energy contrast is advisable. The importance of the contrast in determining the ablation process is exemplified by the dependence of the ablation rate of boron carbide on the cleanness of the pulses of a high brightness hybrid dye/excimer laser system. It is shown that serious consideration of the effects of the nanosecond background is mandatory when evaluating the results.     

Micromachining soda-lime glass by femtosecond laser pulses

The physical process of forming a modified region in soda-lime glass was investigated using 1 kHz intense femtosecond laser pulses from a Ti: sapphire laser at 775 nm. Through the modifications induced by the femtosecond laser radiation using selective chemical etching techniques, we fabricated reproducible and defined microstructures and further studied their morphologies and etching properties. Moreover, a possible physical mechanism for the femtosecond laser modification in soda-lime glass was proposed.     

整形飞秒激光金属材料精细加工

实验通过二极管记录透射光信号随脉冲个数变化关系以及观测样品烧蚀形貌来研究不同实验条件对激光烧蚀的影响。使用的样品是厚度为50 m铝箔。实验中通过研究不同变量:激光焦点与样品的相对位置、激光的能量、背景气体压强以及脉冲形状对烧蚀加工过程和结果的影响,从而获得较好烧蚀效果的条件,达到控制烧蚀加工过程的目的。特别是通过使用不同形状的脉冲和具有一定规律的脉冲序列对样品进行烧蚀,发现某些形状的整形脉冲烧蚀结果明显优于变换极限脉冲。说明脉冲整形作为一种新的技术可以在激光精细钻孔领域得到更深入的研究和应用。     

Self-guided glass drilling by femtosecond laser pulses

Straight through-holes of high aspect ratio have been fabricated in glass by femtosecond laser pulses, utilizing unique characteristics of ultrafast lasers such as volumetric multi-photon absorption and nonlinear self-focusing. In this study, interestingly, the drilling process was initiated and progressed in a self-regulated manner, while the laser focus was fixed through the specimen at the neighborhood of the rear surface that was in contact with liquid during the entire drilling process. The deposition of laser energy along the nonlinearly extended focal range and the guided drilling along the pre-defined region are explained based on time-resolved optical transmission and emission measurements.     

飞秒激光制备彩色镍

采用飞秒脉冲激光在空气条件下扫描处理镍片表面,制备了彩色镍。用扫描电子显微镜、紫外-可见-近红外分光光度计、拉曼光谱仪等对其进行了表征。扫描电子显微镜测量显示,彩色镍表面出现了纳米激光诱导周期表面结构,结构周期为480～510 nm;紫外-可见-近红外分光光度计测量表明,彩色镍对波长为200～2 200 nm的光的反射率大大降低;拉曼谱表明样品表面形成了一定含量的氧化镍。     

飞秒激光制备彩色镍

 采用飞秒脉冲激光在空气条件下扫描处理镍片表面,制备了彩色镍。用扫描电子显微镜、紫外-可见-近红外分光光度计、拉曼光谱仪等对其进行了表征。扫描电子显微镜测量显示,彩色镍表面出现了纳米激光诱导周期表面结构,结构周期为480～510 nm;紫外-可见-近红外分光光度计测量表明,彩色镍对波长为200～2 200 nm的光的反射率大大降低;拉曼谱表明样品表面形成了一定含量的氧化镍。     

Ultrafast temperature relaxation evolution in Au film under femtosecond laser pulses irradiation

Ultrafast temperature relaxation processes in Au film including two temperature relaxation and thermal diffusion relaxation with femtosecond laser pulse excitation were investigated numerically by Finite Element Method (FEM). With the temperature dependent thermal parameters, the full 2D temperature field evolution in picosecond and nanosecond domains were obtained. It is proposed that the heat transfer depth can be alternatively localized or enhanced by the distinct temperature relaxation mechanisms. Moreover, the effect of laser parameters and Au film thickness and surface reflectivity on the two temperature relaxation time were analysed.