Geometrical method for determining the surface damage threshold for femtosecond laser pulses

A new geometrical method to determine the surface damage threshold for ultrashort pulses is presented. It consists in the formation of a surface damage profile by a movement of the sample across the laser beam focus. A single measurement of the maximum transversal dimension of this damage profile, which depends solely on the laser beam power, is used to calculate the local damage threshold intensity. It is also theoretically shown that the damage in the transverse dimension can be controlled under the diffraction-limited spot.     

A new method for increasing the laser damage threshold of metal mirrors

In order to increase the damage threshold of metal mirrors we propose to create a special structure on the surface of the mirrors (“photonic surface”). This structure must have the period about λ/2 and will suppress propagation of surface plasmons with the frequency ω₀=2πc/λ along the surface. This structure will also slightly increase the heat removal from the mirror’s surface by the excitation of the thermostimulated plasmon emission from the surface. The heat removal from the surface is estimated and possible implementation of this approach for use with CO₂-lasers (λ=10.6 μm) and Nd-YAG-lasers (λ=1.06 μm) is analyzed.     

超声波辅助酸蚀提高熔石英损伤阈值

为了提高熔石英元件表面抗激光损伤阈值,利用超声波辅助HF酸研究平滑光学元件表面缺陷形貌和去除刻蚀后残留物效果,通过扫描电子显微镜电镜和原子力显微镜记录表面形貌结构,以及单脉冲激光辐照测试抗损伤阈值确定实验参数。研究表明,超声波场的引入能催化HF酸的刻蚀速率、提高钝化效果并且更易剥离嵌入的亚μm级杂质粒子。经过实验测试,获得了熔石英类元件相匹配的超声辅助HF酸刻蚀实验参数,研究结果对应用超声波辅助HF酸研究熔石英表面抗激光损伤有重要意义。     

The polarization-dependence of femtosecond laser damage threshold inside fused silica

The laser damage threshold inside fused silica is dependent not only on the numerical aperture (NA) of the focusing objective, but also on the polarization of the incident femtosecond laser pulses. The damage threshold for circularly polarized beams is higher than that for linearly polarized beams when NA>0.4, but the former was lower than the latter when NA<0.4. The reverse might be due to different damage processes: laser induced damage at high NA and the self-focusing induced breakdown at low NA.     

熔石英亚表面划痕激光诱导损伤阈值实验研究

用原子力显微镜和光学显微镜观测酸蚀后熔石英亚表面划痕,并根据形貌特征将其分为Boussinesq-point-force crack(BPFC)、Hertzian-conical scratch(HCS)和Plastic indent(PI)三类,测试了各类划痕的损伤阈值,讨论了激光损伤机制。结果表明锐度较大的BPFC损伤阈值不超过2.0 J/cm<>2;深度小于1 μm的 HCS阈值可达2.6 J/cm2;形变较大的PI阈值至2.8 J/cm2,形变较小的PI的激光损伤阈值与无缺陷材料相当。BPFC 和深度超过1 μm的HCS是导致熔石英损伤阈值低的主要因素。     

超声波辅助酸蚀提高熔石英损伤阈值

为了提高熔石英元件表面抗激光损伤阈值,利用超声波辅助HF酸研究平滑光学元件表面缺陷形貌和去除刻蚀后残留物效果,通过扫描电子显微镜电镜和原子力显微镜记录表面形貌结构,以及单脉冲激光辐照测试抗损伤阈值确定实验参数。研究表明,超声波场的引入能催化HF酸的刻蚀速率、提高钝化效果并且更易剥离嵌入的亚m级杂质粒子。经过实验测试,获得了熔石英类元件相匹配的超声辅助HF酸刻蚀实验参数,研究结果对应用超声波辅助HF酸研究熔石英表面抗激光损伤有重要意义。;     

熔石英亚表面划痕激光诱导损伤阈值实验研究

 用原子力显微镜和光学显微镜观测酸蚀后熔石英亚表面划痕,并根据形貌特征将其分为Boussinesq-point-force crack(BPFC)、Hertzian-conical scratch(HCS)和Plastic indent(PI)三类,测试了各类划痕的损伤阈值,讨论了激光损伤机制。结果表明锐度较大的BPFC损伤阈值不超过2.0 J/cm<>2;深度小于1 μm的 HCS阈值可达2.6 J/cm²;形变较大的PI阈值至2.8 J/cm2,形变较小的PI的激光损伤阈值与无缺陷材料相当。BPFC 和深度超过1 μm的HCS是导致熔石英损伤阈值低的主要因素。     

Design of optical system for flattop beam shaper based on the measurement of laser induced damage threshold of thin films

To solve the problem of large error when measure the laser induced damage threshold of thin films in the case of Gaussian distribution beam induced damage thin films, optical system of flattop beam shaper which is capable of redistributing a beam with a Gaussian profile to a flattop profile was designed with optical design software ZEMAX. The Fermi-Dirac beam model was chosen as the distribution function of the flattop beam in this paper, the mapping formula of the input Gaussian beam and the output flattop beam was establish, the surface coefficient of aspheric was given. The energy conversion efficiency was 95.33% and the flattened degree was 93.66% in this design. The accuracy of measurement has been improved when measure the laser induced damage threshold of thin films by the flattop beam.     

不同原料DKDP晶体的生长和损伤阈值

 采用传统降温法,利用不同原料从氘化程度为85%的溶液生长了四方相磷酸二氘钾(DKDP)晶体,并选取部分样品进行三倍频光损伤阈值测试。实验结果表明：不同纯度原料对DKDP晶体的损伤阈值以及DKDP晶体的生长溶液稳定性的影响效果相反,即由于原料中杂质金属离子含量的差别,高纯原料生长的晶体较一般原料生长的晶体损伤阈值可提高1.5倍,但其生长溶液的稳定性比一般原料低。     

单发大口径光束下介质膜损伤阈值测试

针对传统的激光诱导损伤阈值测试中存在的耗时问题,提出了一种利用单发次、大口径光束的介质膜损伤阈值的快速测定方法。该方法以图像处理为基础,通过坐标变换和栅格压缩,建立了样品辐照区域内损伤分布与光斑强度分布之间的精确对应关系。基于对大口径光斑辐照区域内损伤信息的快速提取和统计方法,通过单次激光辐照,获取了待测区域的损伤阈值。根据此方法搭建了单发大口径光束损伤阈值测试平台,并对HfO2/SiO2高反射膜损伤阈值进行了单发次测定的验证。     

热退火对KDP晶体损伤阈值的影响（英）

研究了不同退火温度下磷酸二氢钾（KDP）晶体的透过光谱和损伤阈值的变化。发现热退火对晶体的透过光谱没有影响,退火温度分别为140 ℃和160 ℃时晶体的损伤阈值没有明显变化。但是在150 ℃下,晶体的损伤阈值提高了约1.4倍。实验证明150 ℃下的热退火对提高晶体的损伤阈值效果最好。     

热退火对KDP晶体损伤阈值的影响（英）

研究了不同退火温度下磷酸二氢钾（KDP）晶体的透过光谱和损伤阈值的变化。发现热退火对晶体的透过光谱没有影响,退火温度分别为140 ℃和160 ℃时晶体的损伤阈值没有明显变化。但是在150 ℃下,晶体的损伤阈值提高了约1.4倍。实验证明150 ℃下的热退火对提高晶体的损伤阈值效果最好。     

减反膜的梯度化与激光损伤阈值之间的关系研究

光学减反膜是激光系统的重要组成部分，也是在激光照射下最容易发生损伤的部分，如何提高减反膜的激光损伤阈值是研究的热点之一。在保持目标透射光谱要求和膜系总光学厚度不变的前提下，研究了不同梯度化减反膜与激光损伤阈值之间的关系。首先采用混合渐变膜系设计方法设计了一种渐变减反膜系，G/H₁→H/L/A；其次通过渐变折射率分层等效方法将渐变减反膜系进行不同的梯度化，并利用PECVD技术，在K9玻璃上沉积了满足光学性能指标要求的不同渐变减反膜系(多层梯度渐变膜系和相应的坡度渐变膜系)；最后进行了激光损伤阈值(LIDT)测量。研究结果表明:在保持目标透射光谱要求和膜系总光学厚度不变的前提下，渐变减反膜系相比于传统减反膜系，抗激光损伤阈值有明显的提高；随着梯度化层数的增加，渐变减反膜系的激光损伤阈值呈减小的趋势；对于相同膜层的渐变折射率薄膜，采用坡度法制备的样片抗激光损伤阈值均优于采用梯度化制备的样片。     

He-Ne散射光检测光学薄膜激光损伤阈值

准确测定光学薄膜的激光损伤阈值可以衡量光学薄膜的抗激光损伤能力,测定损伤阈值的关键是准确地判定损伤的发生与否。建立了He-Ne散射光检测光学薄膜激光损伤阈值系统。通过测量同一样品点的He-Ne散射光能量变化来判断薄膜表面发生的损伤,并对制备的类金刚石薄膜与HfO₂/SiO₂反射膜进行了阈值测试。与等离子体闪光法的阈值测试结果进行比较,具有较好的一致性。分析表明：He-Ne散射光测试系统能有效地判断出激光诱导损伤,易于实现在线检测。     

提高多层介质膜脉宽压缩光栅阈值的清洗方法

采用HPM溶液（盐酸、双氧水和去离子水的混合液）结合氧等离子体对多层介质膜脉宽压缩光栅进行清洗研究。用X射线光电子能谱检测光栅表面的元素成分及其原子含量的变化。实验结果表明,氧等离子体处理能有效去除光栅表面残留光刻胶和碳氟化合物; 再经HPM溶液清洗,反应离子束刻蚀和氧等离子体处理过程产生的金属污染物被进一步去除。经过上述清洗工艺处理后,光栅一级衍射效率仍保持在95%以上,光栅表面激光诱导损伤阈值达到1.6 J/cm2 (1053 nm, 10 ps)。实验结果说明了氧等离子体和HPM溶液相结合能有效清洗多层介质膜脉宽压缩光栅,并显著提高光栅损伤阈值。     

单发大口径光束下介质膜损伤阈值测试

针对传统的激光诱导损伤阈值测试中存在的耗时问题,提出了一种利用单发次、大口径光束的介质膜损伤阈值的快速测定方法。该方法以图像处理为基础,通过坐标变换和栅格压缩,建立了样品辐照区域内损伤分布与光斑强度分布之间的精确对应关系。基于对大口径光斑辐照区域内损伤信息的快速提取和统计方法,通过单次激光辐照,获取了待测区域的损伤阈值。根据此方法搭建了单发大口径光束损伤阈值测试平台,并对HfO2/SiO2高反射膜损伤阈值进行了单发次测定的验证。     

Modeling of femtosecond laser damage threshold on the two-layer metal films

The heating processes of the single-layer gold thin film and the two-layer film assembly of gold padded with other metal (silver, copper and nickel) irradiated by femtosecond laser pulse are studied by the two-temperature model. It is found that the substrate metal can change energy transport, which is corresponding to the temperature changing process, and the thermal equilibrium time. Compared with the single-layer gold film at the same laser fluence, the two-layer film structure can change the damage threshold of the gold surface. Our results indicate that we can maximize the damage threshold of the gold film surface by altering the thickness ratio of the gold layer and the substrate layer in the two-layer film assembly.     

Study of organic silicon resin protective coating with high laser damage threshold for KDP crystal

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力学边界对透射型光学元件激光破坏阈值的影响

 建立了激光与透射型光学元件相互作用的热弹性力学模型,解析求解了自由、固定以及一种人为边界条件下光学元件热-力学响应的定解问题。研究发现,不同的边界条件对破坏阈值有很大的影响。针对光学元件中热应力的演变情形,设计了一种“最佳”边界,消除了激光作用过程中产生的拉应力,从而使破坏阈值在理论上达到最大值。     

不同方法DKDP晶体生长和损伤阈值

生长方法是影响DKDP晶体生长和光损伤阈值的一个重要因素。分别采用传统降温法和点籽晶快速生长法,利用同种原料从氘化程度为85%的溶液生长了DKDP晶体,并选取部分Ⅱ类3倍频晶片进行3倍频光损伤阈值和透过性能测试。实验表明,不同生长方法对DKDP晶体的损伤阈值以及DKDP晶体的生长速度的影响效果正好相反,即由于生长溶液过饱和度的差别,点籽晶快速生长法晶体生长速度为传统方法的10倍,但晶体损伤阈值下降了50%,且紫外波段透过性能下降明显。