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采用提拉法在硅基底上制备了多孔溶胶凝胶SiO2膜,用椭偏法测量薄膜的厚度与折射率,考察了提拉速度和胶体浓度对膜层厚度与折射率的影响。对厚度与提拉速度的关系进行线性与幂函数拟合,并比较分析两种拟合的关系及其对工艺流程的作用。比较了不同浓度胶体所得到的同一厚度薄膜的折射率变化规律。结果表明:对于同一胶体浓度下薄膜厚度与提拉速度的正相关关系,线性拟合相比幂函数拟合可以更好地解释实验结果的规律性。同时,折射率在一定范围内也会随着提拉速度的增加而减小。镀同一厚度膜时,浓度大的胶体膜层折射率大。通过对提拉速度和胶体浓度的控制可以得到理想的薄膜厚度与折射率。 相似文献
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采用提拉法在硅基底上制备了多孔溶胶凝胶SiO2膜,用椭偏法测量薄膜的厚度与折射率,考察了提拉速度和胶体浓度对膜层厚度与折射率的影响。对厚度与提拉速度的关系进行线性与幂函数拟合,并比较分析两种拟合的关系及其对工艺流程的作用。比较了不同浓度胶体所得到的同一厚度薄膜的折射率变化规律。结果表明:对于同一胶体浓度下薄膜厚度与提拉速度的正相关关系,线性拟合相比幂函数拟合可以更好地解释实验结果的规律性。同时,折射率在一定范围内也会随着提拉速度的增加而减小。镀同一厚度膜时,浓度大的胶体膜层折射率大。通过对提拉速度和胶体浓度的控制可以得到理想的薄膜厚度与折射率。 相似文献
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对渐变折射率薄膜替代均匀膜系作为高功率激光反射膜的可行性进行了理论研究。以较容易获得的线性共蒸法制备的光学膜在中心波长为1 064 nm的激光作用为例,分析了薄膜与基体之间波长的匹配、场强分布等问题。提出了通过改变微小单元获得梯度膜匹配厚度的数值方法,将之运用在14个周期结构的梯度膜中,并由膜系计算软件验证了所获得结果。最后通过分析Maxwell方程,计算了梯度膜中与薄膜损伤密切相关的电场强度分布。结果表明:周期性结构梯度高反射膜中的电场分布与传统高反射膜具有相似性,但相对于传统高反射膜容易在界面处出现损伤的情形而言,梯度膜更容易在表面出现损伤,使梯度膜表面反射相移接近π是高功率梯度高反射膜的设计方向。 相似文献
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对渐变折射率薄膜替代均匀膜系作为高功率激光反射膜的可行性进行了理论研究。以较容易获得的线性共蒸法制备的光学膜在中心波长为1 064 nm的激光作用为例,分析了薄膜与基体之间波长的匹配、场强分布等问题。提出了通过改变微小单元获得梯度膜匹配厚度的数值方法,将之运用在14个周期结构的梯度膜中,并由膜系计算软件验证了所获得结果。最后通过分析Maxwell方程,计算了梯度膜中与薄膜损伤密切相关的电场强度分布。结果表明:周期性结构梯度高反射膜中的电场分布与传统高反射膜具有相似性,但相对于传统高反射膜容易在界面处出现损伤的情形而言,梯度膜更容易在表面出现损伤,使梯度膜表面反射相移接近π是高功率梯度高反射膜的设计方向。 相似文献
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为满足极紫外、软X射线和X射线大口径多层膜反射镜的需求,采用基板扫掠过矩形靶材表面的镀膜方法,在直径120 mm的平面基板上镀制了Mo/Si周期多层膜。通过调整基板扫掠过矩形靶材表面的速率修正了薄膜的沉积速率,极大地提高了薄膜厚度的均匀性。采用X射线衍射仪对反射镜不同位置多层膜周期厚度进行了测量,结果表明,在直径120 mm范围内,Mo/Si多层膜周期厚度的均匀性达到了0.26%。同步辐射测量多层膜样品不同位置处的反射率,结果表明,在直径120 mm范围内,多层膜的膜层厚度均匀,在入射角10°时13.75 nm波长处平均反射率为66.82%。 相似文献
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为满足极紫外、软X射线和X射线大口径多层膜反射镜的需求,采用基板扫掠过矩形靶材表面的镀膜方法,在直径120 mm的平面基板上镀制了Mo/Si周期多层膜。通过调整基板扫掠过矩形靶材表面的速率修正了薄膜的沉积速率,极大地提高了薄膜厚度的均匀性。采用X射线衍射仪对反射镜不同位置多层膜周期厚度进行了测量,结果表明,在直径120 mm范围内,Mo/Si多层膜周期厚度的均匀性达到了0.26%。同步辐射测量多层膜样品不同位置处的反射率,结果表明,在直径120 mm范围内,多层膜的膜层厚度均匀,在入射角10°时13.75 nm波长处平均反射率为 66.82%。 相似文献
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基于非均匀膜理论提出一种存在微缺陷的介质基底的折射率分层模型,将基底依次分为表面层、亚表面层和体材料层,其中表面层和亚面层分别等效为折射率服从统计分布的非均匀膜,将它们分别再次细分为N1和N2个子层,每一子层均视为均匀介质 膜.应用光学薄膜特征矩阵法对其进行理论分析,并对单层介质膜的光学性能进行数值计算. 研究结果表明:基底的表面和亚表面微缺陷改变了薄膜和基底的等效折射率,导致了准Brew ster角和组合反射率与理想情形的偏离.同时这些微缺陷也改变了光在薄膜和基底中的传播 特性,因此反射相移和相位差均偏离理想情形.在研究基底的微缺陷对多层介质膜光学性能 影响的分析和计算时,该模型同样适用.
关键词:
微缺陷
介质薄膜
非均匀膜
光学性能 相似文献
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Highly adhesive bismuth oxide thin films on glass have been prepared by air oxidation of vacuum evaporated bismuth thin films at various temperatures. The transmittance, optical band gap, refractive index and adhesion show temperature and oxidation time effects. The films show a direct band gap between 2 and 2.5 eV. The refractive indices are in the range 1.854-1.991. The transmittances of the bismuth oxide films are quite high in a large wavelength range. These bismuth oxide films can have potential use in optical waveguides. 相似文献
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N.K. Sahoo 《Applied Surface Science》2006,253(4):1787-1795
Tailoring of the refractive index of optical thin films has been a very fascinating as well as challenging topic for developing new generation optical coatings. In the present work a novel Gd2O3/SiO2 composite system has been experimented and probed for its superior optical properties through phase modulated spectroscopic ellipsometry, spectrophotometry and atomic force microscopy. The optical parameters of the composite films have been evaluated using Tauc-Lorentz (TL) formulations. In order to derive the growth dependent refractive index profiles, each sample film has been modeled as an appropriate multilayer structure where each sub-layer was treated with the above TL parameterizations. All codeposited films demonstrated superiority with respect to the band gap and morphological measurements. At lower silica mixing compositions such as in 10-20% level, the composite films depicted superior spectral refractive index profile, band gap as well as the morphology. This aspect highlighted the fact that microstructural densifications in composite films can override the chemical compositions while deciding the refractive index and optical properties in such thin films. 相似文献
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Determination of Thickness and Optical Constants of ZnO Thin Films Prepared by Filtered Cathode Vacuum Arc Deposition
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ZnO thin films are prepared on glass substrates by filtered cathode vacuum arc (FCVA) deposition technique. A new method is demonstrated to extract the refractive index, thickness and optical band gap of ZnO thin films from the transmission spectrum alone. The refractive index is calculated from the extremes of the interference fingers. The transmission spectrum is divided into two terms, non-interference term and interference effect term. The thickness of thin films is calculated by simulating the interference term, and the non-interference term is used to calculate optical band gap with the gained thickness. The results are compared with measurements by using an ellipsometry and a scanning electron microscope. 相似文献
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M. M. El-Nahass A. M. Hassanien Ahmed Ashour A. Alhuthali Sultan E. Alomariy Ateyyah M. Al-Baradi A. A. Atta 《Optical and Quantum Electronics》2018,50(8):313
The structural and optical properties of RF sputtered Nb2O5 thin films are studied before and after gamma irradiation. The films are subjected to structural and surface morphological analyses by using X-ray (XRD) and field emission scanning electron microscope techniques. In the wavelength range of 300–2000 nm, the optical parameters for amorphous and crystalline Nb2O5 thin films are estimated at differently exposed γ-irradiation doses (0, 50, 100 and 200 kGy). The optical constants, such as optical energy band gap, absorption coefficient, refractive index and oscillators parameters of amorphous and crystalline Nb2O5 thin films are calculated. The optical band gaps of γ-irradiated amorphous and crystalline Nb2O5 thin films are determined. In the non-absorbing region, the real part of the refractive index of amorphous and crystalline Nb2O5 thin films slightly increases with the increase in the exposed γ-irradiation dose. 相似文献
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采用PECVD技术在BK7玻璃基底上沉积了不同厚度的单层SiO2(折射率为1.46)和SiNx(折射率为1.84)光学薄膜,并对这2种膜层进行抗激光损伤阈值(LIDT)测试,分析讨论了PECVD技术制备的单层光学薄膜与抗激光损伤特性之间的关系。实验结果表明:PECVD技术制备的单层SiO2薄膜有较高的LIDT,薄膜光学厚度在o/4~o/2之间时,在光学厚度为350 nm时,LIDT有最小值21.7 J/cm2,光学厚度为433 nm时,LIDT有最大值27.9 J/cm2。SiNx薄膜的LIDT随着光学厚度增加而减小,在光学厚度为o/4时,LIDT有最大值29.3 J/cm2,光学厚度为o/2时,LIDT有最小值4.9 J/cm2。 相似文献
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The kinetics of photoinduced effects on Ga5Sb10Ge25Se60 thin film exposed to continuous wave laser radiations are studied as a function of exposure time and laser intensity. The transmission and reflection spectra of thin films before and after exposure are investigated. The optical band gap and the refractive index are derived from the above spectra. Generalized Miller's rule and linear refractive index are used to find the nonlinear susceptibility and nonlinear refractive index of the thin films. The studies show a red shift in the band gap with increase in exposure time and laser power which is attributed to the photoinduced darkening in the films. 相似文献
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基片温度和退火对CdIn2O4薄膜光学性质和载流子浓度的影响 总被引:2,自引:0,他引:2
对射频反应性溅射Cd In合金靶制备的透明导电CdIn2 O4薄膜 ,研究了基片温度及沉积后在氩气流中退火对薄膜的透射、反射和吸收光谱 ,光学常数和载流子浓度的影响。结果表明 :提高基片温度减少了薄膜的载流子浓度 ,退火增加了薄膜的载流子浓度。随着基片温度提高 ,薄膜折射率n和消光系数κ的短波峰将逐渐蓝移 ,而退火使其出现红移。基片温度和退火对薄膜光学常数的影响与其对薄膜载流子浓度的影响是一致的。在制备CdIn2 O4这样一种对于沉积方法和沉积条件极为敏感的透明导电薄膜的沉积过程中 ,这一现象对于实时监控具有极为重要的意义。 相似文献
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Direct Monitoring of Thickness and Refractive Index of Optical Thin Film Deposited on Fiber End-face
We propose a system for depositing thin films on waveguides which enables low-temperature deposition and precise control of the refractive index and film thickness. It is composed of a conventional ion-beam sputtering (IBS) system and a new system for directly monitoring film characteristics during deposition. We controlled refractive indices over a wide range from 1.52 to 1.97 by moving the sputtering targets (SiO2 and Si3N4) in the IBS system. The refractive index or film thickness was in-situ monitored by observing the optical power reflected from the end-face of a monitoring fiber set in the deposition chamber. Antireflection coating films were successfully deposited on a fiber end-face and a laser diode chip facet with low reflectivity from 0.05 to 0.07%. This deposition system is attractive for constructing highly functional optical devices for future photonic networks. 相似文献
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用电子束蒸发法制备出四种不同Y2O3含量的Y2O3稳定ZrO2(YSZ)薄膜,用X射线衍射和透射光谱测定薄膜的结构和光学性能.结果表明:随着Y2O3含量的增加,ZrO2薄膜从单斜相向高温相(四方相和立方相)转变,获得了结构稳定的YSZ薄膜;YSZ薄膜的晶粒尺寸都比ZrO2薄膜的大,但随着Y2O3加入量的增加,晶粒尺寸有减小的趋势,薄膜表面也趋向光滑平整.所有YSZ薄膜的透射谱线都与ZrO2薄膜相似,在可见光和红外光区都有较高的透过率.Y2O3的加入还可以改变薄膜的折射率,在一定范围内可得到所需的任意折射率. 相似文献