共查询到20条相似文献,搜索用时 46 毫秒
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为了满足类氖-锗X射线激光研究的需要,设计制备了23.4 nm软X射线多层膜反射镜.依据多层膜选材原则并考虑材料的物理化学特性选择新的材料Ti与Si组成材料对.设计优化材料多层膜的周期厚度(d),材料比例(Γ),周期数(N),计算出Ti/Si反射率曲线.通过实验优化各种镀膜工艺参数,制备出了23.4 nm的Ti/Si多... 相似文献
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研究了低温退火Co/C软X射线多层膜中掠入射反射率的增强现象.通过测量一级调制峰强度随退火温度和时间的变化,测得了低至-10-25m2s-1的有效扩散系数.由于所研究的Co/C多层膜的调制波长远大于Co-C系统的扩散临界波长,有效扩散系数近似等于真实宏观扩散系数.负的宏观扩散系数表明,在Co-C系统中有相分离的趋势.这一结果可解释为由Miedema宏观原子模型计算得到的正的Co-C系统的混合焓.高退火温度下反射率的降低是界面锐化与界面粗糙化
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4.48 nm正入射软X射线激光用Cr/C多层膜高反射镜的研制 总被引:1,自引:0,他引:1
针对4.48nm类镍钽软X射线激光及其应用实验,设计制备了工作于这一波长的近正入射多层膜高反射镜。选择Cr/C为制备4.48nm高反射多层膜的材料对,通过优化设计,确定了多层膜的周期、周期数以及两种材料的厚度比。模拟了多层膜非理想界面对高反射多层膜性能的影响。采用直流磁控溅射方法在超光滑硅基片上实现了200周期Cr/C多层膜高反射镜的制备。利用X射线衍射仪测量了多层膜结构,在德国BessyⅡ同步辐射上测量了在工作波长处多层膜反射率,测量的峰值反射率达7.5%。对衍射仪测量的掠入射反射曲线和同步辐射测量的反射率曲线分别进行拟合,得到的粗糙度和厚度比的结果相近。测试结果表明,所制备的Cr/C多层膜样品结构良好,在指定工作波长处有较高的反射峰,达到了设计要求。 相似文献
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软X射线波段滤光膜材料大都为自支撑金属薄膜,实验室环境下自支撑薄膜长期与空气接触表面易氧化,空气中的杂质原子进入自支撑薄膜内部,致使自支撑膜光学性能大幅下降.5 nm至20 nm软X射线波段Zr具有较低的质量吸收系数和较小的密度,在该波段Zr滤光膜透过率较高.采用脱模剂法制备自支撑Zr膜,在洁净的浮法玻璃上蒸镀一层NaCl做为脱膜剂,直流磁控溅射沉积Zr膜,脱膜后的到自支撑Zr膜.为防止薄膜表面氧化及空气中杂质原子进入薄膜内部,在Zr膜两面各直流磁控溅射沉积一层10 nm厚的C或Si膜作为保护膜,得到C/Zr/C、Si/Zr/Si复合膜,测试结果显示C或Si膜的引入对于自支撑Zr膜光学性能基本无影响. 相似文献
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软X射线波段滤光膜材料大都为自支撑金属薄膜,实验室环境下自支撑薄膜长期与空气接触表面易氧化,空气中的杂质原子进入自支撑薄膜内部,致使自支撑膜光学性能大幅下降.5 nm至20 nm软X射线波段Zr具有较低的质量吸收系数和较小的密度,在该波段Zr滤光膜透过率较高.采用脱模剂法制备自支撑Zr膜,在洁净的浮法玻璃上蒸镀一层Na... 相似文献
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月基极紫外相机多层膜反射镜 总被引:1,自引:0,他引:1
月基极紫外相机用于月球表面对地球等离子体层辐射出的30.4 nm谱线进行成像观测,多层膜反射镜是月基极紫外相机的重要光学元件。根据月基极紫外相机技术参数,选择了B4C/Mg,B4C/Mg2Si,B4C/Al,B4C/Si,Mo/Si等材料,对其周期厚度、材料比例、周期数等参数进行优化。计算了以上材料组合在30.4 nm的反射率曲线。考虑到月球环境的特殊性和材料的物理化学性质,从中选择出Mo/Si和B4C/Si两种组合,利用磁控溅射进行镀制。Mo/Si和B4C/Si多层膜在30.4 nm反射率分别达到15.3%和22.8%。 相似文献
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磁控溅射法沉积SiN_x非晶薄膜的生长机制及结构分析 总被引:1,自引:0,他引:1
利用磁控溅射技术在单晶Si衬底上沉积了Six非晶薄膜.样品的傅里叶变换红外吸收光谱(FTIR)显示,SNx非晶薄膜在812~892 cm-1范围内存在一个较强的吸收谱带.该吸收谱带对应于Si-N-Si键的伸缩振动吸收(stretching vibration mode),其吸收峰峰位随着溅射功率的增大明显红移;但退火后,该吸收峰又逐渐蓝移.结合中心力模型和自由结合模型,分析了磁控溅射过程中Six非晶薄膜的生长机制和内部结构.研究认为,随着溅射功率的提高,薄膜中先后形成Si-N4四面体,Si-N-Si3,Si-N2-S2及Si-N3-Si等结构,这几种结构分别对应着Si-N-Si键的不同模式的振动吸收.随着退火温度的升高,分子热运动逐渐加剧,非晶SiNx薄膜发生相分离,生成Si3N4和Si纳米晶颗粒,因此,S-N-Si键的吸收峰逐渐向Si3N4的特征振动吸收峰位870 cm-1靠近. 相似文献
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AbstractThe aim of this article is to review the literature on the application of the total reflection X-ray fluorescence (TXRF) spectrometry for the determination of the chemical composition of aqueous samples. Details of the main stages of the analytical procedures are described. Special attention is given to the sample preparation procedure, current instrumentation, and potential error sources when analyzing the water samples of varying compositions. The examples of matrix effects and spectral interferences as well as the analytical figures of merit are also presented. 相似文献
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50~110 nm波段高反射率多层膜的设计与制备 总被引:1,自引:0,他引:1
阐述了50~110 nm强吸收波段亚四分之一波长多层膜的设计方法.这种膜系是由强吸收材料叠加而成,每层膜光学厚度小于四分之一个波长.与常规周期多层膜相比,这种膜系更适用于提高强吸收波段的反射率.利用该方法设计了50 nm处高反射多层膜,并以此为初始条件通过Levenberg-Marquart优化方法完成了50~110 nm强吸收波段宽带高反射率Si/W/Co多层膜的设计,其平均反射率达到45%.采用直流磁控溅射方法制备了Si/W/Co多层膜,用X射线衍射仪(XRD)对膜层结构进行了测试,测试结果表明制作出的多层膜结构与设计结构基本相符. 相似文献
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N atoms were incorporated into sp2-rich a-C networks using DC facing-target reactive sputtering at various N2 fraction (PN2) and their structure and opto-electrical properties were investigated systematically. As PN2 increases, the fraction of CN bonded carbons (or the N content) increases primarily at the expense of the CC bonded carbons and then reaches its saturated value at PN2 > 40%. The incorporated N preferentially forms different kinds of non-aromatic CN phase, leading to more localization of π electrons and the loss of the connectivity of nanographite fragments in the films, which is different from the case in N-doped sp3-rich a-CNx films. Hence, with increasing PN2, the a-C(:N) film converts from a semiconductor with a narrower optical band gap to an insulator-like material with a wider gap. Additionally, the variation of optical constants (n and k) and spin defects are related to the enhancement of the non-aromatic CN phase. 相似文献
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光在一维光子晶体中的全反射贯穿效应 总被引:1,自引:0,他引:1
为了研究一维光子晶体中光波的全反射贯穿效应,利用传输矩阵法计算了TE波和TM波在大于全反射角入射一维光子晶体的透射率.在透射波中发现了全反射贯穿效应,得出了全反射贯穿效应随入射角的变化规律、全反射贯穿效应的波长特性以及全反射贯穿效应随介质光学厚度的变化规律.利用波的量子理论和渐逝波的理论对一维光子晶体的全反射贯穿效应作出了理论解释. 相似文献
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Thomas P. Trainor Alexis S. Templeton Peter J. Eng 《Journal of Electron Spectroscopy and Related Phenomena》2006,150(2-3):66-85
Chemical processes occurring at environmental interfaces (e.g. mineral–fluid, mineral–organic matter and mineral–biofilm interfaces) have a profound impact on the environmental fate and bioavailability of aqueous metals and other contaminant species. However, the direct analysis of molecular scale structure and properties of environmental interfaces, particularly under “high-pressure” or “wet” conditions is highly challenging. Synchrotron based X-ray scattering and spectroscopic approaches offer numerous advantages, such as the high penetrating power and molecular scale information inherent to X-ray techniques. Yet, the ability to localize information content to environmental interfaces requires challenging experimental configurations. Here, the application of grazing angle X-ray fluorescence techniques is reviewed, including the presentation of a model formalism that allows for quantitative analysis of fluorescent yield profiles and discussion of the experimental setup. Illustrative examples are discussed, particularly in the context of combining results of GI measurements with the results of other complementary interface probes such as crystal truncation rod diffraction and X-ray microprobe spectroscopic studies. 相似文献