用特征多项式构造相移干涉相位提取算式

用相移干涉术测量物体表面形貌时，各种误差因素特别是相移器移相误差的影响使得表面形貌的测量偏离了实际值，甚至会产生形貌失真的现象。采用傅里叶分析的方法对相位提取算式作了理论分析，并根据特征多项式设计分析理论构造了新的、对移相误差不敏感的相位提取算式。经实验验证，该算法有效地提高了相移干涉仪测量表面形貌的Ra值，重复测量精度达5倍以上，使测量结果更接近实际值。     

波长调谐干涉测量的相移标定方法

基于菲索干涉的变频相移技术,提出一种分步相移标定方法.生成n组t步相移干涉图,每步相移为π/2;将每步的n组干涉图分别与初始干涉图做相乘和傅里叶变换运算,在此基础上构建每步相移的误差函数;通过求取误差函数极值点来实现对每步相移值的准确标定.结果表明,该标定方法的标定准确度优于传统标定方法,且标定准确度提高了2~3个数量级.该方法不仅避免了传统相移标定中存在的随机误差,也彻底消除了累积误差.     

基于傅里叶变换的单帧闭合条纹相位解调方法

提出一种有效的单帧闭合条纹解调方法,该方法采用傅里叶变换、带通滤波器和傅里叶逆变换估得初始相位,然后通过图像分割、相位符号校正和Zernike多项式拟合得到高准确度相位分布.用图像分割和相位符号校正解决了相位符号不确定性,用Zernike多项式拟合抑制了分割线附近的局部相位误差.数值分析了残余相位误差与干涉图参量(如倾斜量、离家量和随机噪音)之间的定性关系,结果表明:该方法所得相位与ZYGO移相干涉仪测试结果吻合较好,残余相位误差小于参考值的1/10,验证了该方法的有效性.     

基于二维傅里叶变换的单帧干涉图相位提取方法

针对大口径光学元件干涉测试过程中,测试装置和干涉腔长较大,气流扰动和环境振动对移相测试过程产生影响等问题,采用一种基于二维傅里叶变换的单帧干涉图处理方法,只需要对一幅空间载频干涉条纹图进行处理即可获得待测相位,具有抗振测试的优点。对该方法的基本原理和算法过程进行分析,并对近红外大口径移相平面干涉仪中600 mm口径的光学平晶进行了面形测试。实验结果表明:采用该方法所得波面峰谷值(PV)为0.112,波面均方根值(RMS)为0.014,与移相算法所得波面数据相比,波面峰谷值偏差不到(1/500);波面均方根值(RMS) 偏差几乎为零。     

基于光强迭代的单幅干涉图相位提取方法

提出了一种基于光强迭代的单幅干涉图相位提取方法,实现了对单幅干涉条纹图的高精度相位提取。首先通过对原始干涉图进行预处理得到初始相位;将初始相位引入到干涉条纹图的强度表达式中,利用最小二乘法初步得到背景光和调制光;再将初步估计的背景光和调制光代入最初干涉图的强度表达式中以求解待测相位,比较得到的待测相位和初始相位,若不满足迭代精度要求,则重复上述相位求解过程并实现迭代,若求解的相位与初始相位的均方根差值满足收敛条件,则停止迭代。进行仿真和实验研究,得到的Φ100 mm口径平面元件的测量提取结果与实际相位一致。结果表明,该方法在具有较高检测精度的同时能够有效地保证算法的稳定性。     

基于相移干涉与分数傅里叶变换的纯相位图像加密

只有两步的正交相移干涉方法,只需记录两幅干涉图,不需要记录物光波和参考光波的强度信息,就可以再现没有零级像和共轭像的再现像.结合分数傅里叶变换和双随机相位编码,提出一种纯相位光学图像加密技术.解密时,只要获得正确的密钥,经过简单的计算就可以重建清晰的原始图像.模拟实验验证了它的可行性和有效性,并分析了抗裁剪和噪声的鲁棒性以及参考光强度大小对加密解密的影响.     

倾斜相移闭合干涉图的非迭代相位提取方法（英文）

针对带倾斜相移误差的闭合干涉图,提出一种非迭代的高精度相位提取方法.该方法用傅里叶变换估计闭合条纹的相位,并用图像分割校正相位的符号,然后利用Zernike多项式拟合确定倾斜相移量,最后用最小二乘拟合得到高精度相位.数值模拟结果表明:该方法的相位提取误差随着干涉图中条纹根数的增多而减小;当干涉图中条纹根数为4.5时,倾斜相移的估计误差为0.37%.实验结果表明该方法的残余误差均方根值为0.121 7rad.该方法精度高,且无需迭代计算,可应用于相移干涉测量.     

一种变频相移干涉测量的相位提取算法

相位提取的精度直接影响相移干涉测量的精度。在变频相移干涉测量中,相移量由干涉腔长和波长变化量决定,必须对测试系统进行相位标定,但常因相位标定不精确而引入相移误差,影响相位提取的精度。运用一种基于迭代的相位求解算法,该算法无需对测试系统进行相位标定,可以在被测相位和相移量均未知的情况下,通过交替迭代法求解出被测相位。通过仿真比较了传统四步相移和基于迭代的相位求解算法的相位提取精度,结果表明,基于迭代的相位求解算法的相位提取精度优于传统四步相移算法的精度。     

静态傅里叶变换光谱仪的机理及干涉条纹的校正

针对高速、瞬时光谱测量要求光谱仪的结构简单、装备方便、实时性强的特点,文章介绍了一种静态傅里叶变换光谱仪,并对其原理进行了推导与剖析。针对其调整中出现的干涉条纹的倾斜校正问题,进行了详细的理论分析和干涉条纹模型的数学推导,得出倾斜镜旋转参数和光学元件最小通光口径之间的数学关系,以及倾斜镜旋转参数和干涉条纹旋转参数之间的数学关系。通过利用Matlab7.0数学工具,对所总结推导的干涉条纹模型进行模拟,对所得的各种参数之间的数学关系进行验证。分析结果表明据此数学关系所求得的β角校正精度达到1.4%,是一种有效可行的校正方法。     

基于样本块匹配的干涉图延拓方法

在快速傅里叶变换(FFT)方法处理单幅干涉图原理的基础上,提出一种基于样本块匹配的干涉图延拓方法,利用干涉图像的可信度和等照度线特征,来确定待填充块的优先权,然后在干涉图的已知区域寻找与待填充块最相似的样本块来进行填充。充分利用了干涉图的条纹特征,结合梯度变化方向有效地合成纹理信息,具有很好的延拓效果。最后将该干涉图延拓方法与傅里叶变换,合适的滤波函数和相位解包方法结合起来形成整套单幅干涉图处理方法。采用该单幅干涉图处理方法获得的波面峰谷值与Zygo移相干涉仪得到的平均相差不到λ/100,并且两种方法获得的波面均方根值平均相差不到λ/200。     

Accurate carrier-removal technique based on zero padding in Fourier transform method for carrier interferogram analysis

Based on interferogram zero padding and fast Fourier transform (FFT) methods, an effective, straightforward and stable carrier-removal approach in Fourier transform (FT) based method for carrier interferogram analysis is proposed. The spatial carrier interferogram is firstly extrapolated by zero padding method, and the carrier-frequency values within a small fraction of an integral (or a pixel) are estimated from the extrapolation interferogram with FFT method. Then the carrier-phase component is removed by subtracting a pure carrier-frequency phase constructed by the estimated carrier-frequencies in the spatial domain. Numerical simulations and experiments are given to demonstrate the performance of the proposed method and the results show that the proposed method is effective and stable for suppressing the carrier-removal error in the FT method for carrier interferogram analysis.     

Comparison of eight unwrapping algorithms applied to Fourier-transform profilometry

Phase unwrapping is a task common to many applications like interferometry imaging, medical magnetic resonance imaging, solid-state physics, etc. Fourier transform profilometry (FTP) values the height distribution of object, elaborating the interference between a plane reference grating and a deformed object grating. Since the height information is extracted from the phase of a complex function, the phase unwrapping is a critical step of the process. Several unwrapping algorithms are proposed in literature, but applied to measurement technologies different from FTP. The purpose of this paper is to define the performances of eight different unwrapping algorithms applied to FTP optical scan method and to define the best one. The algorithms chosen are: Goldstein's algorithm, quality guided path following method, Mask cut method, Flynn's method, multi-grid method, weighted multi-grid method, preconditioned conjugate gradient method and minimum L_p-norm method. The methods were tested on real images acquired by a FTP scanner developed and calibrated for these experiments. The objects used vary from simple geometries, like planes and cylinders, to complex shapes of common use objects. Algorithms were qualified considering the phase unwrapping errors, execution time and accuracy of the shape of objects obtained from the scan method in comparison with real ones. The results show that quality guided algorithm best fits in FTP application.     

Evaluation of spectral phase in spectrally resolved white-light interferometry: Comparative study of single-frame techniques

Spectral phase in a white-light interferogram contains information about the absolute optical path difference (OPD) in the interferometer. Evaluation of spectral phase is therefore important in applications such as profilometry with white light. In spectrally resolved white-light interferometry (SRWLI) the white-light interferogram is spectrally decomposed by a spectrometer in order to determine this phase. Several single-frame techniques in SRWLI have been proposed for the evaluation of the phase including Fourier transform, Hilbert transform, spatial phase shifting, windowed Fourier transform and wavelet transform. In this paper we present a comparative study of these techniques in this application in relation to the temporal phase-shifting technique which is a multi- frame method. Further, we also propose a modified method to remove the influence of source spectrum modulation in Hilbert transform procedure.     

Phase retrieval from fringe pattern with 1-D discrete wavelet transform

This paper proposes a novel method to obtain frequency modulation (FM) signals from a single fringe pattern for phase retrieval. First, a 1D discrete Meyer wavelet is employed to decompose the pattern image signal row by row and the soft-thresholding approach is applied to remove noise. The low frequency coefficients of the wavelet decomposition are then set to 0, and the signal is reconstructed. Moreover, the optimal wavelet decomposition level is adaptively determined using a cost function-based method. The reconstructed signal, which no longer contains a background component, is normalized using a nonlinear and piecewise normalization method. The proposed method is faster and more accurate than some other phase retrieval approaches, which is illustrated with two test cases.     

Phase extraction using multi-directional moiré fringes for multi-lateral shearing interferometry

The multi-lateral shearing interferometers (multi-LSIs) are featured in the improved accuracy and noise resistance of wavefront reconstruction using phase differences in multiple directions. Nowadays the multidirectional phase differences are usually extracted from multi-LSIs’ interferogram using the fast Fourier transform (FFT) method, whose accuracy is limited by spectral leakage effect. To improve the measurement accuracy of multi-LSIs, a phase extraction method developed from moiré technique is proposed in this paper. Using virtual gratings with properly large carrier frequencies, the desired phase information in each of the multiple directions can be modulated into low-frequency domain of the corresponding moiré pattern with larger separations between unnecessary side lobes. In this way, low-pass filters with higher cut-off frequencies can be applied in moiré technique to reduce the inaccuracy induced by spectral leakage effect. Meanwhile, phase shifting method can be applied to extract phase information from a single fringe pattern with better noise resistance by easily introducing phase shifts in computer generated virtual gratings. Simulation results show that the proposed method has higher accuracy and better anti-noise performance than the FFT method when spectral leakage effect exists. To demonstrate accuracy of the proposed method, a null test experiment of the quadriwave LSI has been conducted and experimental results show that measurement accuracy of the quadriwave LSI can be significantly improved by substituting the FFT method with the proposed method in phase extraction process.     

Phase retrieval in DSSI for relatively large deformation

Methods for phase retrieval in digital speckle shearing interferometry (DSSI) with relatively large deformation are proposed using a single wavelength illumination with windowed Fourier filtering (WFF) and two-wavelength simultaneous illumination with iterative sine-cosine average filtering (ISCAF). For relatively large deformation measurement, WFF technique has a higher noise suppression capability than ISCAF technique but requires careful selection of the processing parameters, while ISCAF is a simple filtering with less parameter setting. Both methods for phase retrieval are discussed. Experimental results show that both methods are capable of noise suppression in the phase retrieval for relatively large deformation.     

On window size selection in the windowed Fourier ridges algorithm

The windowed Fourier ridges (WFR) algorithm can be used to extract the frequency and phase information from an exponential or carrier fringe pattern. The selection of the window size for this algorithm is investigated in this paper. For exponential phase fringe patterns, the window size does not need to be adjusted according to the signal frequency. Hence the scaling strategy of the wavelet transform is not necessary. Instead, the window size should be selected according to the balance between the linear phase approximation error and the noise level. For carrier fringe patterns, the influence of the conjugate component should also be considered. However it can be ignored when the lowest frequency of the fringe pattern is higher than 1.5/σ (σ is used to represent the window size).     

傅变光谱仪数据处理中相位误差非线性的分析及对Mertz相位修正方法的讨论

傅里叶变换成像光谱仪在遥感应用中是一种很重要的科学仪器,在傅里叶变换光谱仪信号处理中存在相位误差的问题,文章阐述了相位误差产生的原因,分析了由零点采样偏移带来的相位误差的非线性,说明了产生这种非线性的原因是干涉图为有限长的离散序列,从一个新的角度通过数学推导的结果给出了这种非线性的解释和表达。接着由相位误差的非线性讨论了Mertz相位修正方法中的相位插值可能存在的误差,分析了已有的研究中的较好的处理方法,并提出了一种改进这种误差的补零变换的方法。使用通过标准光谱库中的源光谱数据仿真的干涉数据,对方法进行了比较和验证,说明了补零变换法可以改善相位插值的误差以及在一些情况下的相位突变,得到质量更好的复原光谱。     

Phase retrieval of speckle fringe pattern with carriers using 2D wavelet transform

A novel two-dimensional (2D) Gabor continuous wavelet transform (CWT) for phase retrieval and fringe filtering of speckle fringe patterns with spatial carriers is proposed. Theoretical analysis of 2D Gabor CWT is presented and results are compared with advanced fan 2D CWT using both the computer simulated and experimental speckle fringe patterns. It is shown that noise reduction by 2D Gabor CWT demonstrates better results than that of the advanced fan 2D CWT. Two-dimensional Gabor CWT is also compared with 2D Fourier transform and results show that 2D Gabor CWT algorithm has better noise immunity.