Nontraditional manufacturing technique— Nano machining technique based on SPM

Nano machining based on SPM is a novel, nontraditional advanced manufacturing technique. There are three main machining methods based on SPM, i.e. single atom manipulation, surface modification using physical or chemical actions and mechanical scratching. The current development of this technique is summarized. Based on the analysis of mechanical scratching mechanism, a 5 μm micro inflation hole is fabricated on the surface of inertial confinement fusion (ICF) target. The processing technique is optimized. The machining properties of brittle material, single crystal Ge, are investigated. A micro machining system combining SPM and a high accuracy stage is developed. Some 2D and 3D microstructures are fabricated using the system. This method has broad applications in the field of nano machining.     

超声振动对光学玻璃加工的锯切力特征研究

超声振动辅助方法已在各种硬脆性材料的加工工艺中得以应用,其优异的加工能力和效果已得到广泛证明。本研究中通过采集有无超声振动条件下锯切光学玻璃的平均锯切力以及单颗金刚石磨粒划擦实验下的力信号,对不同工艺条件下的平均锯切力、单颗磨粒受力特征进行分析。同时通过扫描电镜观察对应力信号下工件与工具加工后表面形貌,进一步通过超声振动下材料去除机理解释超声振动对锯切力影响。结果表明：与传统锯切工艺相比,超声振动辅助使得单颗磨粒划擦过程中的受力降低引起平均锯切力的降低;超声振动改变普通锯切下材料的去除方式;同时可使工具保持良好的锯切状态,降低光学玻璃材料的锯切力比,改善其可加工性。     

Analysis the complex interaction among flexible nanoparticles and materials surface in the mechanical polishing process

Mechanical polishing (MP), being the important technique of realizing the surface planarization, has already been widely applied in the area of microelectronic manufacturing and computer manufacturing technology. The surface planarization in the MP is mainly realized by mechanical process which depended on the microdynamic behavior of nanoparticle. The complex multibody interaction among nanoparticles and materials surface is different from interaction in the macroscopic multibody system which makes the traditional classical materials machining theory cannot accurately uncover the mystery of the surface generation in the MP. Large-scale classical molecular dynamic (MD) simulation of interaction among nanoparticles and solid surface has been carried out to investigate the physical essence of surface planarization. The particles with small impact angle can generate more uniform global planarization surface but the materials removal rate is lower. The shear interaction between particle and substrate may induce large friction torque and lead to the rotation of particle. The translation plus rotation makes the nanoparticle behaved like micro-milling tool. The results show that the nanoparticles may aggregrate together and form larger cluster thus deteriorate surface the quality. This MD simulation results illuminate that the final planarized surface can only be acquired by synergic behavior of all particles using various means such as cutting, impacting, scratching, indentation and so on.     

飞秒激光湿法刻蚀微纳制造

飞秒激光微加工作为一种新型微纳制造技术,在复杂三维构型制作方面具有其独特的优势,但激光加工效率问题严重制约了飞秒激光微加工技术走向实际工程应用,提出一种飞秒激光湿法刻蚀微纳制造方法,以提高飞秒激光微加工的效率为突破口,通过调控激光与物质相互作用获得材料的目标靶向改性,进而结合化学湿法刻蚀实现硬质材料上的高效和高精度三维微加工,采用这一方法制作出的微透镜尺寸为80 m,球冠高6.7 m,表面粗糙度小于10 nm。利用这种方法,实现了不同结构与特性的高质量微透镜阵列的超精密制备,在石英内部也实现了螺旋微通道的复杂三维结构,螺旋通道直径为20 m,长径比超过100。     

Multifunctional universal SPM nanoprobe fabrication with laser technology

Scanning probe microscopy (SPM) is a high spatial resolution method of surface topography visualization and measurement of its local properties. The detecting of interaction arising between the sharp solid-state probe and the sample surface is the foundation of SPM. In dependence from nature of this interaction the scanning tunneling microscopy (STM), scanning force microscopy (SFM), scanning near field optical microscopy (SNOM), etc. are distinguished. The spatial resolution of all types of probe microscopy determines both sharpness of increasing of interaction between a probe and a sample at their approach, and shape and size of a top of a solid-state probe. So, the progress in SPM information capabilities is highly depends on probe properties and first of all on properly fabricated aperture size. Fabrication procedures are rather complicated because of nanometric scale size of aperture and hard requirements to reproducibility and need to be improved. The way how to do it by laser-assisted drawing-out is involving of feed-back in a processing procedure-results in two types of feedback for the process of drawing-out has been suggested, tested and installed into the technological set-up. Different probes have been fabricated by above mentioned laser-assisted stretching during this work: SNOM types from optical fibers, micropipettes from quartz glass capillaries, micropipettes with microwires inside and with metallic covers outside. Some examples of application of above mentioned combined probes for cell membrane technology are described. Most important from them are topographical studying of cells and bacteria in living condition (in liquid) and studying of the mechanical properties of cell (rigidity of cell membrane) using the nanopipette as a tip of a force sensor. Except for that using the model sample the measurement of ion current that runs through nanopipette which also carries out a role of a tip of a force sensor have been done. Thus it is shown, that using a probe as a nanopipette, it is possible to combine SPM method with well-known patch-clamp method.     

纳构件加工后的力学特性

"采用分子动力学模拟的方法,运用镶嵌原子模型,研究了经过刻划后的单晶铜纳构件在不同拉伸速度条件下的力学行为. 通过原子位图、缺陷原子透视图、径向分布函数及应力-应变关系研究加工后纳构件在拉伸负载作用下的变化特性,并与理想单晶铜纳构件进行对比分析．模拟结果表明,加工后的纳构件的屈服强度较理想纳构件的屈服强度有明显下降,屈服强度随着刻槽深度的增加而下降,而且屈服强度对刻槽方向和拉伸速度敏感;纳结构在拉伸负载作用下,其应力应变关系出现了双峰形式,即工作硬化现象,二次屈服后表现为Z字形逐波下降形式．刻划深度、刻划     

Processing of micro-particles by UV laser irradiation in a field cage

An electric cage-laser micro-turning lathe was realised and applied to contact-free handling and mechanical processing of micro particles. Since particles with diameters of several micrometers cannot be fixed in mechanical chucks, an octode field cage was used to trap and rotate a single particle in a fluid without any mechanical surface contact. A pulsed nitrogen laser of high beam quality focused to about 1 μm in diameter could be adjusted independently of the cage position. The trapping forces (negative dielectrophoresis) acting on a bead of 5 to 15 μm are up to several hundred pN. This and the surrounding fluid damp down the effect of the laser pulses during bead processing. Examples demonstrating the possibilities of this technique are shown. Microsystems with high optical quality were fabricated photolithographically or by laser direct-write chemical vapor deposition (LCVD). Technical and biotechnological applications are discussed. Received: 20 October 1999 / Accepted: 27 October 1999 / Published online: 10 November 1999     

High‐resolution microanalysis of suspended particulate matter using a transition edge sensor microcalorimeter x‐ray spectrometer

Suspended particulate matter (SPM) collected in the urban area of Tokyo was analyzed using a transition edge sensor (TES) microcalorimeter x‐ray detector mounted on a FE‐SEM system. This prototype microcalorimeter spectrometer with an energy resolution of 19 eV identified some severe peak overlaps in the spectra measured by the traditional Si(Li) solid state detector, including S Kα with Pb Mα, Zn Lα with Na Kα, and Ti Kα with Ba Lα. In addition, the TES microcalorimeter showed good spatial resolution for the microanalysis of SPM. The focused ion beam(FIB) was successfully applied to fabricate a cross section of a single SPM particle. The chemical compositonal difference between surface and inner parts, and among different surface parts of the SPM was also determined. Through combination of the FIB technique and the TES microcalorimeter, we achieved a better understanding of the SPM. Copyright © 2009 John Wiley & Sons, Ltd.     

Electronic states of self-organized InGaAs quantum dots on GaAs (3 1 1)B studied by conductive scanning probe microscope

We have used conductive scanning probe microscope (SPM) in high vacuum and operated at 173 K in order to investigate the electronic properties of self-organized InGaAs quantum dots (QDs) grown on GaAs (3 1 1)B and (0 0 1) substrates. Ordered InGaAs quantum dot arrays on GaAs (3 1 1)B surface were fabricated by atomic-H assisted molecular beam epitaxy (H-MBE), and Si SPM tips coated with Au which warrants electrical conductivity were used to measure simultaneously both the topographic and current images of QDs surface. From the current–voltage (I–V) curves, unique and different plateau features were observed for QDs formed on GaAs (3 1 1)B and (0 0 1) substrates. The results suggested that a high degree of symmetry of InGaAs QDs on (3 1 1)B was responsible for the observed degeneracy of electronic states and artificial atom-like states. We demonstrate that this conductive SPM technique becomes a powerful tool in studies of single electron charging of individual dots.     

Three-dimensional micromachining of glass using femtosecond laser for lab-on-a-chip device manufacture

Three-dimensional (3D) micromachining of photosensitive glass is demonstrated by photochemical reaction using femtosecond (fs) laser for lab-on-a-chip application. True 3D hollow microstructures embedded in the glass are fabricated by fs laser direct writing followed by heat treatment and successive wet etching. The modification mechanism of the photosensitive glass by the fs laser and advantage of this process are discussed. Various microcomponents for the lab-on-a-chip devices such as microfluidics, microvalves, microoptics, microlasers, etc. are fabricated by using this technique and their performance is examined . PACS 42.62.-b; 82.50.Pt; 87.80.Mj     

Phase-Only Encryption and Single Path Decryption System Using Phase-Encoded Exclusive-OR Rules in Fourier Domain

A phase-only encryption scheme using phase-encoded exclusive-OR (XOR) rules in a Fourier plane and a single path decryption system are presented. To generate phase-only encrypted data, a zero-padded original image, multiplied by a random phase image, is Fourier transformed and its real-valued data is encrypted with key data by using phase-encoded XOR rules. Since the original information is encrypted on the Fourier plane, the proposed encryption is more tolerant to loss of key information by scratching or cutting than previous XOR encryption in a space domain. A decryption is simply performed based on 2-f setup with spatial filter by Fourier transform for multiplication phase-only encrypted data with phase-only key data. Due to single path architecture without a reference wave, the proposed system is resistant to mechanical vibrations and fluctuation. Numerical simulations have confirmed the validity of the proposed encryption scheme and simple decryption architecture.     

Irregular elliptical plasmonic rings for engineering near-field and phase

Metallic glasses find wide applications in nanotechnology and micro electro-mechanical systems because of their unique physical properties due to their amorphous structures. The material removal mechanism in nanometric cutting of Cu₅₀Zr₅₀, a typical metallic glass, is studied using molecular dynamics method. The chip formation, workpiece deformation and scratching forces under various scratching depths, scratching velocities and temperatures are investigated. The effect of void defect on the cutting behaviors of metallic glass is also explored. The results show that the material removal in nanometric cutting process is based on extrusion instead of shearing, achieving a good understanding of material removal at the nanoscale.     

微机械FP腔可调谐滤波器在WDM系统中的串扰分析

介绍了一种以FP谐振腔为基础,用于波分复用系统的MOEMS器件-电控可调谐FP光滤波器.器件采用微电子机械加工技术研制.研究了FP型解复用器在密集波分复用系统中引入的信道间串扰对系统的影响,并分别讨论了激光器线宽、滤波器带宽、信道间距对串扰的影响.在信道间隔为100GHz,激光器线宽为5GHz,串扰可达到-21dB左右.     

Preparation and application of the 3C–SiC substrate to piezoelectric micro cantilever transducers

This study examines the fabrication process and mechanical properties of piezoelectric films with the substrate, which is made from silicon carbide. After depositing the PZT thick film on silicon carbide substrate and silicon substrate respectively, it was shown that silicon carbide substrate formed a stable interface with PZT thick film up to 950?°C, compared with silicon substrate. In addition, the dielectric constant of the PZT thick film sintered at 950?°C on a silicon carbide substrate was 843, and this value was about over 25 % improved value compared with that on a silicon substrate. A thick film piezoelectric micro transducer of a micro cantilever type was fabricated by using a multifunctional 3C–SiC substrate. The fabricated micro cantilever was a micro cantilever with multiple thin films on either silicon or silicon carbide substrate. The piezoelectric thick-film micro cantilever that was fabricated by using a SiC substrate showed excellent mechanical and thermal properties. The piezoelectric micro cantilever on the SiC substrate shows an excellent sensitivity towards the change of mass compared with the piezoelectric micro cantilever on the Si substrate.     

Fabrication of large-area 3D photonic crystals using a holographic optical element

A holographic technique for fabricating 3D photonic crystal is presented. The key element in the fabrication system is a holographic optical element (HOE) consisting of three gratings. Used in combination with a mask, the HOE can generate four beams under single illuminating beam, and 3D lattice structures can be formed by the interference of the four beams. Holographic approach is used to make HOE, so large area lattice structures can be fabricated. Numerical simulations indicate that beam intensity ratio of central beam to outer beam is one of the factors that affects the structures fabricated in photoresist, and high diffraction efficiency of the gratings in HOE is favorable when using cw laser with relatively low power as light source. Experimental results show clear 3D lattice structures fabricated using the HOE, verifying the effectiveness of the technique.     

3D打印技术应用于加工微靶零件

采用三种商业3D打印机尝试加工了金属材质和树脂材质的微型靶零件。通过EOSINT M290 3D打印机以激光烧结的方式加工了钛金属靶架;通过Object 30 Pro 3D打印机以聚丙烯树脂为材料,通过喷射打印的方式加工了构型复杂的树脂靶架;通过Freeform Pico 3D打印机以蜡质树脂为材料,通过光固化成型的加工方式,获得了微腔、圆柱和平面元件,并在其表面设计了周期性图形结构。采用光学工具显微镜和共聚焦显微镜对样品的尺寸和表面形貌进行了表征。结果表明:金属靶架的线粗糙度为7.3~17.79m,抛光之后降低为0.87~1.66m;树脂靶架的面均方根粗糙度为2.88m;微腔和圆柱元件端面的面均方根粗糙度为2.03m,表面的条纹周期与设计值偏差为1.40%,平均振幅值偏差为55.50%;平面元件的面均方根粗糙度为4.87m,表面调制图形的周期与设计值偏差为0.80%,平均振幅偏差为3.60%。通过商业3D打印机加工靶零件,为惯性约束聚变实验中微靶零件的加工提供了新思路。     

3D polycarprolactone (PCL) scaffold with hierarchical structure fabricated by a piezoelectric transducer (PZT)-assisted bioplotter

The 3D bioplotter, which is one of the rapid-prototyping systems, enables us to produce the design-based scaffolds which could control good mechanical properties and pore structures for mimicking human organs. Although the plotting system has several advantages to fabricate a variety of designed scaffolds, the main disadvantage of scaffolds fabricated by the system is that the strand surfaces are too smooth and tend to discourage initial cell attachment within the scaffolds. To overcome the problem, we suggest a new 3D plotting method supplemented by piezoelectric vibration system for fabricating scaffolds that have hierarchical surface structures, which increase the surface roughness of the scaffold without any additional chemical process. The surface-modified 3D scaffold exhibited various positive qualities including enhanced compressive modulus and improved initial cell attachment and proliferation. Cell culturing results demonstrated that the interactions between chondrocytes and the scaffold were much more favorable than those between the cells and conventionally plotted 3D scaffolds. This process provides a feasible new technique for fabricating high-quality 3D scaffolds for tissue engineering applications.     

高分辨率表面等离子体显微镜综述

本文对表面等离子体显微镜的原理、架构和应用进行了综述,指出表面等离子体显微镜技术的未来发展方向是着力提高横向分辨率,接近光学衍射极限,以及发展与电化学、力学等微纳操纵手段结合的表面等离子体显微镜,形成微纳尺度下显微成像和操纵的闭环测量路径。     

ZnO纳米/微米结构传感器对乙醇气敏性研究

采用化学气相法分别在石英舟内表面和单晶硅衬底上制备了ZnO微米片、纳米线、微米四足体以及微米球4种结构,并制作了相应的气敏传感器。扫描电子显微镜、气敏测试仪等结果显示：合成的ZnO纳米/微米结构尺寸在200 nm~100 μm之间,传感器最佳工作电流区间为120~130 mA,其中微米四足体制备的传感器灵敏度高达127,展现出优异的气敏特性。在4种结构中,微米四足体材料内部的V_O缺陷含量最高,结合气敏测试与荧光光谱结果,我们认为材料内部的V_O缺陷含量是影响材料气敏特性的最重要因素。     

Improving the resolution and the uniformity of AFM tip induced oxide patterns with pulsed voltages

Oxide line patterns were fabricated on the surface of titanium (Ti) film using atomic force microscopy (AFM) tip induced local oxidation technique. The growth behavior of the oxide under static voltages was studied. It was found the lateral growth of the oxide experienced two stages and the growth rate at the initial stage was very high. Pulsed voltages were employed and their effects on the controlling of the oxidation dynamics were examined. The results indicated that the high lateral and vertical growth rates of oxide at the initial stage could be suppressed with pulsed voltages. A minimum line width of 8 nm and highly uniform patterns were obtained with optimized voltage pulses. These results indicated that applying pulsed voltage is an effective method for improving both the resolution and the uniformity of the fabricated structures with scanning probe microscopy (SPM) tip induced local oxidation technique.