A study of the impact on telecentricity to the illumination system based on CCD imaging

One of the important properties of the illumination system is of determining telecentricity for the realization of the place of wafer in the optical lithography. In this paper, we present numerical simulations of the optical imaging using four different illumination models and based on CCD imaging. We simulate the imaging of light source for different illumination pupil distributions and determine the energy centroid through the imaging of the conventional illumination which exist telecentricity of 11 mrad. Furthermore, we discuss the influencing factors of two aspects on telecentricity. One is the non-uniformity of light intensity distribution, and the other is pinhole defocus in the wafer. The range between the non-uniformity of light intensity distribution and pinhole defocus are quantified by computing the allowed telecentricity error in the illumination system. Finally, experiments have verified telecentricity measurement feasibility and validity. The presented scheme that with CCD imaging instead the actual wafer which saves cost and improves the accuracy in the optical lithography. In comparison with the measurement methods of convention the CCD imaging has a series of advantages such as fast response, high sensibility, high precision and the measurement is carried out on-line.     

用于真空弧等离子体放电阴极温度场测量的多光谱高温计

阴极表面温度是真空弧等离子体放电过程中一个重要参数,对真空弧等离子体的形成、电极腐蚀预测、热传导以及离子源的寿命都有重要影响。真空弧离子源的阴极具有目标小,放电过程快等特点,其温度的测量,对于时间分辨率和空间分辨率要求都很高,阴极表面温度的测量技术的欠缺,使得仅靠理论解析获得的结果难以得到验证。并且等离子体放电过程中测量仪器极易受到弧光的影响,如何避免放电过程中等离子体的辐射也是采用辐射法测量阴极表面温度要考虑的问题。这无疑给其温度场的测试研究带来困难。针对脉冲真空弧等离子体开展阴极表面温度测试实验有着重要意义,在分析了真空弧等离子体放电特性以及背景辐射特性和等离子体放电阴极测温的实际需求,本文基于高速CCD相机研制了一种新型的多光谱高温计。该高温计采用单色高速CCD相机,主要避免RGB彩色相机不能完全滤除背景辐射的弧光。为使用单色CCD相机实现多光谱辐射测温,设计了高温计的光学系统,该系统采用4孔径分光系统。将4种不同波长的滤光片嵌入到1个滤光片中。该研究设计的高温计可用于2 000~6 000 K的等离子体温度测量。并在中国工程物理研究院电子工程研究所进行现场测试,测试过程中将研制的高温计,通过外部触发形式对等离子体放电过程进行跟踪拍摄,高温计完全拍摄到等离子体放电过程。利用真空弧等离子体金属电极阴极放电的实测数据对高温计进行了验证。实验结果表明,设计的新型多光谱高温计能够用于测量真空弧等离子体放电时阴极温度场信息,测量的温度值低于放电电极的沸点温度,与等离子体放电过程中出现气化现象相符,说明高温计测的是等离子体放电阴极的温度。     

Non-uniformity correction of infrared focal plane array in point target surveillance systems

We discuss the influence of non-uniformity and non-uniformity correction on point target detection in infrared surveillance system, and propose a non-uniformity correction approach which is based on signal intensity and sensor characteristics. Theoretical models are used to derive the combined effect of background clutter, sensor random noise, target, non-uniformity and correction error on the signal-to-noise-and-clutter ratio. From our analysis, it can be noted that background clutter intensity is successively modulated by sensor non-uniformity and non-uniformity correction, while sensor random noise is modulated by the non-uniformity correction process only. Furthermore, background clutter and sensor random noise are the key factors that affect the performance of a surveillance system, when it is used to detect point targets. The method presented in this paper takes all of the above into account, moreover, it considers the difference between scanning and staring focal plane array. The experimental results demonstrate the effectiveness of the proposed method.     

基于EMCCD的AOTF成像光谱仪噪声分析与信噪比研究

声光可调谐滤波器(AOTF)成像光谱仪是一种新型高光谱成像系统。针对系统存在的波段间辐射灵敏度差异较大,低照度条件下部分波段信噪较低的问题,引入了电子倍增CCD(EMCCD)作为感光器件。对该原理仪器在普通和电子倍增两种工作模式下的噪声进行了分析,推导了信噪比模型,并利用研制的原理样机进行了实验验证。在此基础上,提出了电子倍增模式下系统动态范围的评价方法,给出了以入瞳光谱辐亮度为判据的工作模式选择方法。结果表明,信噪比模型与实测结果吻合,电子倍增模式的合理选择有效提高了低照度条件下的信噪比,改善波段间辐射灵敏度的非一致性。     

用于固体火箭羽焰真温测量的宽量程多光谱高温计

现有的多光谱高温计的测量下限均大于1 173 K(900 ℃),不适用于新型火箭羽焰真温测量范围的要求(900~2 700 K)。为了解决现有的多光谱高温计无法测量1 173 K以下羽焰真温的问题,研制了用于固体火箭发动机羽焰真温测量的宽量程多光谱高温计。该多光谱高温计采用了并联光电探测器阵列相邻像元的方法,并且创建了基于对数函数的900~1 173 K温区的温度标定方法,从而拓宽了高温计的温度测量范围。针对某型号固体火箭发动机羽焰的三个目标点进行了现场测量,实验结果验证了该高温计的有效性。     

基于CCD传感的激光粒度测试技术研究

颗粒测试在工业生产和科学研究中涉及的领域非常广泛,常用的颗粒粒度及其分布的测试方法是激光粒度测试法,其具有测试精度高、测量速度快、重复性好和可测粒径范围宽等突出优点。CCD传感器有灵敏度高、分辨率高、噪声小和较大的动态范围等优点,其作为激光粒度仪的探测器提高光强分辨率的应用已经很普遍了。为提高测量精度,通过对CCD传感技术的研究,应用图像处理的方法来设计光电探测器,搭建了基于米氏散射原理的激光粒度测试系统。实验结果表明,用CCD传感器采集光散射图像,再对图像进行处理,D50与D10误差在6%之内,D90误差在1%之内,降低了测量的重复误差。     

Inverse analysis of non-uniform temperature distributions using multispectral pyrometry

Optical diagnostics can be used to obtain sub-pixel temperature information in remote sensing. A multispectral pyrometry method was developed using multiple spectral radiation intensities to deduce the temperature area distribution in the measurement region. The method transforms a spot multispectral pyrometer with a fixed field of view into a pyrometer with enhanced spatial resolution that can give sub-pixel temperature information from a “one pixel” measurement region. A temperature area fraction function was defined to represent the spatial temperature distribution in the measurement region. The method is illustrated by simulations of a multispectral pyrometer with a spectral range of 8.0–13.0 μm measuring a non-isothermal region with a temperature range of 500–800 K in the spot pyrometer field of view. The inverse algorithm for the sub-pixel temperature distribution (temperature area fractions) in the “one pixel” verifies this multispectral pyrometry method. The results show that an improved Levenberg–Marquardt algorithm is effective for this ill-posed inverse problem with relative errors in the temperature area fractions of (–3%, 3%) for most of the temperatures. The analysis provides a valuable reference for the use of spot multispectral pyrometers for sub-pixel temperature distributions in remote sensing measurements.     

The application analyses for primary spectrum pyrometer

In the applications of primary spectrum pyrometry, based on the dynamic range and the minimum sensibility of the sensor, the application issues, such as the measurement range and the measurement partition, were investigated through theoretical analyses. For a developed primary spectrum pyrometer, the theoretical predictions of measurement range and the distributions of measurement partition were presented through numerical simulations. And the measurement experiments of high-temperature blackbody and standard temperature lamp were processed to further verify the above theoretical analyses and numerical results. Therefore the research in the paper provides the helpful supports for the applications of primary spectrum pyrometer and other radiation pyrometers.     

超高速碰撞LY12铝靶产生闪光的辐射演化特征

为研究超高速碰撞产生闪光的辐射演化特征,利用建立的瞬态光纤高温计测量系统结合二级轻气炮加载系统,进行了4种实验条件下的超高速碰撞实验。每组实验使用一组光纤探头,基于实验所获原始数据结合标定,通过Matlab编程处理得到了给定实验条件及光纤探头安装方案条件下的闪光强度演化,利用比率法得到碰撞闪光的辐射温度演化特征。实验结果表明,在488~667 nm波长范围内超高速碰撞LY12铝靶产生的闪光强度与辐射温度峰值随碰撞角度（与靶板平面的夹角）的增大而减小。     

Optical Differentiation Phase Measurement Using the Bias Shifting Method

A new optical phase measurement method using a differentiation filter is proposed. The new method uses two images obtained by shifting the filter. This method has an advantage in that non-uniformity of the wavefront intensity does not produce errors. We present herein the theory of the newly proposed method and verify the theory by computer simulation. The effects of non-uniformity of the wavefront intensity, noise, and bias shifting length for errors are discussed. The system has been demonstrated for a plane wave and a spherical wave. For the proposed method, although the number of errors due to noise increases, the number of errors due to non-uniformity decreases. Therefore, the proposed method is useful for the phase measurement of a wavefront for which the intensity is not uniform. In addition, it improves the accuracy of the phase measurement system using a differentiation filter.     

Research on temperature distribution of combustion flames based on high dynamic range imaging

The imaging-based three-color method is widely used in the field of non-contact temperature measurement of combustion flames. In this paper, by analyzing the imaging process of a combustion flame in detail, we re-derivate the three-color method by adopting a theory of high dynamic range imaging. Instead of using white balanced, gamma calibrated or other algorithms applied 8-bit pixel values, we use irradiance values on the image plane; these values are obtained by combining two differently exposed raw images into one high dynamic range irradiance map with the help of the imaging system's response function. An instrumentation system is presented and a series of experiments have been carried out, the results of which are satisfactory.     

Novel optical sensor for simultaneous measurement of liquid concentration and temperature

The paper describes a new optical sensor for simultaneous liquid concentration and temperature measurement. Temperature-dependent semiconductor absorption at the band edge is used as the principle of the temperature measurement, and the sensor exploits beam deviation caused by refraction due to the liquid concentration at the receiving end face of the optical device. The light intensity peak value and its deviation are detected by a charge-coupled device (CCD), and then the measured optical signal is reflected by a reflecting pyramid prism. The sensor probe is composed of an intrinsically pure GaAs single crystal, a reflecting pyramid prism, a partitioned water cell. Theoretical analysis and preliminary experimental results verify the feasibility of the proposed system.     

自动恒温控制在可见光CCD成像系统中的应用研究

随着高性能CCD传感器的发展,其在空间成像探测系统得到广泛应用。为解决传感器的成像质量和恒温控制问题,采用基于帕尔贴效应的热电制冷（Thermo—ElectricCooling,TEC）技术,以FPGA为控制芯片,运用PID控制算法,实现了小型温度控制系统。实验结果表明,该系统能快速准确地实现恒温控制,可扩展性强,具有一定的应用价值。     

用CCD摄像机动态估算测量云雾含水量的初步试验

云雾含水量是一个研究和定义云雾微物理结构的关键物理量 ,它与云雾的强度直接有关。介绍一种以 CCD数字摄像机为核心器件的光学图像传感系统 ,该系统通过基于数字摄像的能见度自动测量技术 ,可以有效反演出云雾的含水量。在报告系统的测量原理、理论方法和系统基本构成后 ,给出了用该系统动态估算测量两次大雾过程的雾含水量与实测雾含水量的对比分析结果。实验结果表明 :用仪器系统动态估算测量的结果与实测值吻合得相当好。两者的均方根差小于 0 .1g/ m3,相对均方根偏差小于 2 0 %     

Noncontact thermal pyrometry for condensed materials

Pyrometry technique is suggested aimed at minimizing the measurement error and increasing the accuracy of contactless temperature measurements. Significantly, the suggested method of pyrometer calibration allows using a two-tiered approach with preliminary or additional recording of the system’s state and thermal radiation to refine temperature measurements. To improve the reliability of results and extend the application range of thermal pyrometry, it is necessary to decrease the influence of the relative error of the spectral ratio on measuring data.     

超高速碰撞闪光强度与碰撞角度关系

为了测量超高速碰撞过程中产生的闪光现象,进而研究相近碰撞速度、不同入射角度(弹道与靶板平面的夹角)条件下超高速碰撞产生闪光在整个物理过程的闪光强度随时间的变化规律,设计了适用于瞬态闪光测量的光学高温计测量系统。通过二级轻气炮加载LY12球形铝弹丸,运用设计的瞬态高温计测量系统分别进行了入射角度为30°,45°,60°和90°相近碰撞速度条件下碰撞LY12铝靶产生闪光现象的测量。获得了平均碰撞闪光强度峰值与碰撞角度的关系,平均碰撞闪光强度峰值随碰撞角度的减小而增大,碰撞角度为30°时表现更为明显。     

基于阵列波导光栅的边缘滤波温度解调系统

为克服传统阵列波导光栅解调系统体积大、价格昂贵等问题,提出了以窄带光源为输入光源,采用边缘滤波和阵列波导光栅相结合的解调方案,实现对增敏封装后的光纤光栅温度传感器进行温度解调实验。以窄带光源作为输入,通过边缘滤波的方法使得温度传感器反射谱的中心波长偏移程度与解调光路输出光强的变化相对应,利用阵列波导光栅的波分复用实现多传感器同时测量,实现了多传感器多通道的分布式测量,实验结果表明:解调系统的波长解调范围为1 545.30 nm～1 560.50 nm,对35 ℃～42 ℃的温度范围进行检测,波长解调精度为±5.34 pm,温度测量误差可达±0.1 ℃。     

一种多光谱高温计无源温区的标定方法研究

目前,高温测量中,多光谱高温计具有高分辨率与高信噪比的优点,但无源温区(大于3 000℃)标定方法的发展却远滞后于多光谱高温计制造水平,并已严重影响高温计的测量精度和应用范围。为突破高温测量领域中无源温区标定方法的瓶颈,文章提出了一种多光谱高温计无源温区的标定方法。此方法利用已知温度点的多光谱高温计的输出电压U建立了一种基于幂函数的温度-电压(T-U)模型。在此基础上应用导数最小二乘法对模型参数求解,实现对无源温区的标定。理论和实测数据都验证了此方法的有效性与精度。在多光谱高温测量应用的光谱范围(0.4～1.1μm)内,对精度优于3‰,1%和3%的无源温区标定范围做出理论上的划分。     

一种测量金属熔点温度和法向光谱发射率的多光谱数据处理方法研究

金属熔点温度和法向光谱发射率数据是国际上对电流脉冲加热技术测量材料热物性参数的关键比对点。针对连续测量金属熔点附近温度的特点,提出了一种新的发射率假设模型,并在此基础上提出了一种新的多光谱高速高温计的数据处理方法。该方法只需使用多光谱高速高温计作为测量装置,通过处理两个不同时刻多光谱高速高温计的测量数据,由计算可同时获知两个时刻的真温及光谱发射率。经对国外的标准铌试样进行了测试,所得数据与国外同行的测量数据进行了比对,具有较好的一致性,实验结果表明,熔点真温计算值与生产者提供的值之差在±20K以内。     

CCD摄像机用于测量中存在的问题及解决方法

本文从ＣＣＤ面阵探测器的光电响应不均匀性、非线性以及摄像机内部的制式转换电路、自动增益控制（ＡＧＣ）电路和γ校正电路等方面阐述了ＣＣＤ摄像机用于能量分布测量存在的问题，并给出了相应的解决方法。同时对去除噪声的多幅积分法作了介绍。