扫描质子微探针质子束刻写

质子束刻写技术利用MeV能量的聚焦质子束对抗蚀剂材料直接刻写m甚至nm尺度微结构。研究了质子束刻写中抗蚀剂胶层样品厚度与涂层机旋转速度的关系以及曝光对抗蚀剂的影响,解决了质子束刻写中抗蚀剂厚胶层样品的制备、固化、显影等技术问题,利用扫描质子微探针系统,在正型抗蚀剂胶层上刻写出m尺度的海宝图形、 双矩形结构,在负型抗蚀剂上刻写出m尺度的平行线条、十字形微结构。     

基于连续激光的纳米结构研制

基于激光受激辐射损耗原理的远场光学超分辨成像技术,当圆形入射高斯激光经过涡旋相位板调制后,将转变为中心光强为零的圆环形光束,该形状的激光束与光敏聚合物作用,能够制备出具有一定功能的纳米结构。介绍了自主搭建的基于圆环连续激光光源的激光直写系统,以及利用该系统研制的复合纳米结构。当光源为532 nm连续激光输出时,与正性光刻胶作用,得到直径 < 50 nm的纳米柱复合结构,以及整齐均匀的纳米柱阵列结构;与负性光刻胶作用,得到直径 < 100 nm的纳米通道,以及整齐均匀的中央有纳米通道的微米柱复合结构阵列。当光源为405 nm连续光纤激光时,与正性光刻胶作用,也得到了直径小至153 nm的纳米柱复合结构及其阵列。这些纳米结构的基本单元尺寸都突破了光学“阿贝衍射极限”的限制,具有实用潜力。     

Multilevel phase Fresnel zone plate lens as a near-field optical element

We propose and develop a new solid immersion lens (SIL), which is called the multilevel phase Fresnel zone plate lens (FZPL) for the near-field (evanescent wave) microscopy. The simple analysis is presented by using the scalar diffraction theory. The outstanding advantages of this FZPL are that it both focuses incident waves and produces evanescent waves. A FZPL can effectively concentrate the high angle rays important for the high resolution in comparison with the conventional SILs. The optical system equipped with the FZPL is not only simple in the assembly but also effective in making an optical head unit.     

畴腐蚀掺镁铌酸锂可调阵列光分束器的研究

研究了不同畴腐蚀深度的掺镁铌酸锂二维六角可调阵列光分束器的分数Talbot效应.对不同Talbot分数β和不同畴腐蚀深度的阵列光分束器Talbot衍射像进行了数值模拟理论研究.模拟结果表明,Talbot分数β可以改变Talbot衍射像的周期及结构分布,而畴腐蚀深度可有效调制衍射像的光强分布.在理论研究的基础上,设计并制备了具有不同畴腐蚀深度的掺镁铌酸锂二维六角阵列光分束器,对其在不同Talbot分数β条件下的分数Talbot效应进行了通光实验研究,实现了畴腐蚀阵列光分束器对近场Talbot衍射光强分布的调制,实验结果与理论研究结果一致.     

Development of a Unique, High Precision Linear Motor Integrated Air Slide Table, and Its Application to Laser Beam Writers

This paper reports on the development of a unique, high precision linear motor integrated air slide table for precise positioning and its application to laser beam writers for photo-mask pattern-making. The air slide table takes advantage of the balance between the air bearing’s levitating and magnetic forces. A brushless linear motor and a high resolution linear encoder are integrated into the table. The unique construction of the device results in a very compact package with excellent accuracy. The basic characteristics of the air slide table are evaluated. The device is applied to a laser beam writer, which must be capable of rendering minute and precise patterns for photo-masking equipment. Examples are given including optical devices such as wave guides and Fresnel zone plates which were fabricated and evaluated. Experimental data is given to show that the Fresnel zone plate fabricated here can be used to focus a laser beam to the theoretical limit, just like a standard refractive lens.     

X射线布拉格-菲涅耳光学元件的实验研究

用光学全息方法在涂有光刻胶的多层膜表面上的形成布拉格－菲涅耳元件所需的波带片图形,通过离子束刻蚀方法将波带片图形转写到多层膜上,完成元件的制作,给出布拉格－菲涅耳光学元件测量结果,测量结果表明上述方法适于制作布拉格－菲涅耳元件。     

Directly laser-written integrated photonics devices including diffractive optical elements

Femtosecond laser-written integrated devices involving Fresnel Zone Plates (FZPs) and waveguide arrays are demonstrated as built-in optical couplers. These structures were fabricated in borosilicate glass using a direct laser writing technique. The optical properties of these integrated photonic structures were investigated using CW lasers and high-resolution CCDs. For a single FZP coupled to a single waveguide, the overall coupling efficiency was 9%. A multiplexed optical coupler composed of three FZP layers was demonstrated to couple three waveguides simultaneously in a waveguide array. Structures of this type can be used as platforms for multichannel waveguide coupling elements or as microfluidic sensors that require higher light collecting efficiency.     

Generation of Optical Vortex Using a Spiral Phase Plate Fabricated in Quartz by Direct Laser Writing and Inductively Coupled Plasma Etching

A simple, economical and reliable technique is proposed for fabricating a spiral phase plate （SPP） in a quartz substrate to generate optical vortex with a unit topological charge at the wavelengths of 632.8nm. The spiral phase plate is first formed in the photoresist by direct laser writing lithography and then transferred into the quartz substrate by inductively coupled plasma etching. The performance of the fabricated SPP is verified by using beam intensity distribution, which is in agreement with the theoretical calculation result. The interference measurement suggests that we have succeeded to generate optical vortex with a unit topological charge with the fabricated SPP.     

A new type of small size acousto-optic tunable filter with super narrow optical linewidth

The new concept of the creation of an acousto-optic tunable filter (AOTF) with super-resolution and small size is discussed. The advantage of the device is based on the use of a novel type of multi reflector beam expander that produces a highly collimated optical beam (angular spread about 100 ppm), tilted with a change in optical wavelength. The proposed AOTF, 1 cm in length, can have an optical linewidth about 0.1 nm and up to 400 tunable channels at a wavelength of 1540 nm. It can be utilized as a tunable filter for dense wavelength-division multiplexing (DWDM) in fiber optic networks and as a small-sized tunable optical spectrometer, for example, in sensors of gases, liquids and solids. The acousto-optic tunable filter can be developed by known technology developed for the creation of integrated optics and microelectronics devices. Received: 28 April 2001 / Revised version: 22 August 2001 / Published online: 2 November 2001     

Diffraction of a plane, finite-radius wave by a spiral phase plate

We derive analytical expressions containing a hypergeometric function to describe the Fresnel and Fraunhofer diffraction of a plane wave of circular and ringlike cross section by a spiral phase plate (SPP) of an arbitrary integer order. Experimental diffraction patterns generated by an SPP fabricated in resist through direct e-beam writing are in good agreement with the theoretical intensity distribution.     

Femtosecond laser-fabricated microstructures in bulk poly(methylmethacrylate) and poly(dimethylsiloxane) at 800 nm towards lab-on-a-chip applications

Laser direct writing technique is employed to fabricate microstructures, including gratings (buried and surface) and two-dimensional photonic crystal-like structures, in bulk poly(methylmethacrylate) (PMMA) and poly(dimethylsiloxane) (PDMS) using ∼100 femtosecond (fs) pulses. The variation of structure size with different writing conditions (focussing, speed and energy) was investigated in detail. Diffraction efficiencies of the gratings were calculated and the changes in diffraction efficiency (DE) as a function of period, energy and scanning speed were evaluated. Highest diffraction efficiencies of 34% and 10%, for the first order, were obtained in PMMA and PDMS respectively. Heat treatment of these gratings demonstrated small improvement in the diffraction efficiency. Several applications resulting from these structures are discussed. Fs modification in PMMA and PDMS demonstrated emission when excited at a wavelength of 514 nm. We attempted to prepare buried waveguides in PMMA with higher refractive index at the core. We have successfully fabricated branched and curved structures in PMMA and PDMS finding impending applications in microfluidics.     

Heterodyne polarimetry for mapping defects in lithography masks

A new optical technique based on the heterodyne polarimetry is developed for fast inspection of uniformity of lithography masks in semiconductor industry. Sub-wavelength periodical structure of a sample acts as a wire-grid polarizer, making both the amplitude and phase of the reflected laser beam dependent on geometrical dimensions and optical properties of the mask pattern. The heterodyne technology based on the cross-polarized two-frequency Zeeman laser is used to simultaneously measure the amplitude and the phase of the reflected laser beam. A two-dimensional map of spatial variations can be obtained via point-by-point scanning of the sample. The technique is applicable not only to exact periodical structures like diffraction gratings, but also to double-periodical patterns consisting of large number of periodically distributed small areas of sub-wavelength gratings. Theoretical background, simulation, and experimental results are presented.     

Macromolecular nanoelectronics

We have explored new organic materials and fabrication methods to fabricate organic photodiodes and light emitting diodes. Grafting of a fullerene derivative to a polythiophene backbone yielded an integrated acceptor-donor polymer that we used as the active material in organic photodiodes. Using a method of soft lithography, soft embossing, we fabricated submicron structures to be used as organic light emitting diodes. Employing a silicone rubber replica (stamp) of an optical diffraction grating we transferred the grating pattern to an organic resist layer by placing the stamp in conformal contact with the resist. The transferred pattern was subsequently used as an etch mask for the processing of the device. The structures were successfully utilized as light emitting diodes and photodiodes, with device characteristics influenced by the imposed structure.     

The fabrication of 3-D nanostructures by a low- voltage EBL

Three-dimensional (3-D) structures are used in many applications, including the fabrication of opto-electronic and bio-MEMS devices. Among the various fabrication techniques available for 3-D structures, nano imprint lithography (NIL) is preferred for producing nanoscale 3-D patterns because of its simplicity, relatively short processing time, and high manufacturing precision. For efficient replication in NIL, a precise 3-D stamp must be used as an imprinting tool. Hence, we attempted the fabrication of original 3-D master molds by low-voltage electron beam lithography (EBL). We then fabricated polydimethylsiloxane (PDMS) stamps from the original 3-D mold via replica molding with ultrasonic vibration.First, we experimentally analyzed the characteristics of low-voltage EBL in terms of various parameters such as resist thickness, acceleration voltage, aperture size, and baking temperature. From these e-beam exposure experiments, we found that the exposure depth and width were almost saturated at 3 kV or lesser, even when the electron dosage was increased. This allowed for the fabrication of various stepped 3-D nanostructures at a low voltage. In addition, by using line-dose EBL, V-groove patterns could be fabricated on a cured electron resist (ER) at a low voltage and low baking temperature. Finally, the depth variation could be controlled to within 10 nm through superposition exposure at 1 kV. From these results, we determined the optimum electron beam exposure conditions for the fabrication of various 3-D structures on ERs by low-voltage EBL. We then fabricated PDMS stamps via the replica molding process.     

An azobenzene functionalized polymer for laser direct writing waveguide fabrication

We report on non-lithographic laser direct writing fabrication of optical waveguides by using a 4′-hydroxy-4-nitroazobene dye-functionalized polymer film. The polymer film reveals permanent change of refractive index at high laser illumination intensity. A focused continuous wave low power green laser beam at 532 nm wavelength is used to directly write waveguide structures on the polymer film. The magnitude of refractive index increase at film surface is about 0.006. One-step laser writing results in graded index waveguides in film depth direction under ambient conditions without pre- and post-processing. As a by-product, the laser writing also results in a very small air valley at the boundary between the laser written and non-written regions which may contribute in part although minimal to the waveguide lateral confinement and can be used for visual observation of waveguide patterns. The fabricated waveguide is found to be stable and easily reproducible.     

Phase-shifted Fresnel axicon

We propose an optical element: a phase-shifted Fresnel axicon for generation of multiple Bessel beams. By giving a binary phase modulation to the standard Fresnel axicon, the proposed element is generated. The phase profile of the binary phase modulation is engineered to generate two and three Bessel beams of equal intensities. This composite optical element is fabricated using electron beam direct writing. The performance of the fabricated device is evaluated using a semiconductor laser, and the generation of two and three Bessel beams is successfully demonstrated.     

Feasibility of Non-Collinear TeO2 Acoustic-Optic Tunable Filters Used in the Optical Communication

The characteristics and the structure of TeO2 acoustic-optic tunable filter used in communication are discussed briefly based on the acoustic-optic theory and it is shown that a large optical incident angle and a long interaction length are suitable for the optical add/drop multiplexer based on the TeO2 acoustic-optic tunable filter. The distribution of acoustic energy flow in the device supports the large optical incident angle. The long interaction length depends on the change of the device structure to some degree. The measured results of the samples show that the diffraction efficiency reaches at 96% in the tuning range larger than lOOnm and the bandwidth is about 2nm. It can be found that there is a good consistency with the basic theoretical mode. The optimized design result shows that the diffraction efficiency can arrive at 100%, and the bandwidth can be less than 0.4nm. Thus, the non-collinear TeO2 acoustic-optic tunable filter can play an important role in the coming general optical network.     

Imprinted conjugated polymer DFB lasers optimized based on simulation results

In this study, we present distributed feedback structure lasers which were fabricated by imprinting a grating directly into a highly luminescent conjugated polymer. Based on the interplay between simulations and experimental results, we optimized some basic parameters, crucial for the effective behavior of the structure. On the base of these parameters, new grating structures were designed and fabricated by e-beam lithography and transferred to the polymer by the soft lithographic technique of “liquid imprinting”. Due to these improved grating structures, the devices showed stable, low threshold lasing under photo-excitation using a frequency doubled Nd:YAG laser. The obtained experimental results were again successfully modeled by simulating the electromagnetic modes within the structure, and, in addition, the grating response to an electromagnetic field as a function of the waveguide thickness and grating depth was monitored.     

高衍射效率衍射望远镜系统的设计/加工及成像性能测试

为提高衍射效率,设计并制作了口径为300mm的衍射成像系统.该系统的物镜是由一块四台阶位相型菲涅尔波带片通过激光直写套刻和Ar离子束物理刻蚀技术在石英玻璃基板上加工而成.测试了衍射物镜的衍射效率,实验结果表明:衍射物镜在波长632.8nm处的衍射效率为66.4%,达到理论值的82%.搭建了衍射成像系统光路,分别采用10μm星点孔与分辨率板,测试了系统的成像性能.实验测得星点像直径为44μm,分辨率板的极限分辨率达到84lp/mm,接近该系统的理论计算值,表明该衍射成像系统具有较好的成像性能.     

Nanometer linear focusing of hard x rays by a multilayer Laue lens

We report on a type of linear zone plate for nanometer-scale focusing of hard x rays, a multilayer Laue lens (MLL), produced by sectioning a multilayer and illuminating it in Laue diffraction geometry. Because of its large optical depth, a MLL spans the diffraction regimes applicable to a thin Fresnel zone plate and a crystal. Coupled wave theory calculations indicate that focusing to 5 nm or smaller with high efficiency should be possible. Partial MLL structures with outermost zone widths as small as 10 nm have been fabricated and tested with 19.5 keV synchrotron radiation. Focal sizes as small as 30 nm with efficiencies up to 44% are measured.