Optimization of neon soft X-rays emission from 200 J fast miniature dense plasma focus device: A potential source for soft X-ray lithography

The neon soft X-ray (SXR) emission characteristics of a Fast Miniature Plasma Focus (FMPF-3) device have been investigated. The FMPF-3 device used for our experiment is of sub-kilojoule energy capacity, which is an order of magnitude lesser than the other well established plasma focus devices. The influence of different geometrical parameters of the anode and the pressure of the filling gas on the SXR emission was investigated to optimize the neon SXR yield and thereby make it a potential source for X-ray lithography. The SXR signal, solely from the desired, characteristic spectral range (900–1600) eV was selectively extracted and acquired using appropriate X-ray absorption filters on diode X-ray spectrometer. It was found that the neon SXR emission from 17 mm long cylindrical anode, which produced best neutron yields, was rather poor, in a very narrow pressure range and that too at low operating pressure. With decrease in the length of cylindrical anode, the optimum operating pressure shifts to higher pressure side, the working pressure range widens and the SXR yield also increases until the anode length is reduced to 12 mm, after which, the SXR yield and working pressure range start to degrade. The highest neon SXR yield of 1.1 J/shot, corresponding to a wall plug efficiency of 0.57%, was obtained for 12 mm long cylindrical anode. The tapered anodes with different length were also designed and tested, but they did not show any significant improvement in neon SXR yield.     

X-ray emission from plasma generated by nanosecond laser irradiating tantalum

A continuum spectrum of X-rays, originating from the interaction of a moderate intensity nanosecond Nd:Yag laser (1064 nm, 9 ns, 30 Hz, 900 mJ, 10¹¹ W/cm²) with metal targets producing plasma, is investigated. The photon emission intensity is particularly high when the plasma expands in a low-pressure gas. The photon energy is measured through selective thin absorber films employed in front of the solid state detector. The temperature of the hot electrons generated from the plasma, responsible for the continuum spectrum emission, is calculated from the fit of the X-ray spectrum with a Maxwellian distribution, and it is about 1–2 keV.     

Enhancement of soft X-ray emission from a pinch plasma using a rotating plasma for pre-ionization

An experimental study on the enhancement of soft X-ray emission from a pinch plasma has been carried out by using a rotating plasma for pre-ionization. The rotating plasma is produced by a pulsed J×B cross-field discharge between coaxial electrodes, and subjected to a pinch discharge. Under an optimized discharge condition, it has been observed that UV emission of 251.6 nm (Ar III) soft X-ray intensity increases with increasing applied axial magnetic field B. At 400 G, the X-ray intensity is enhanced by a factor of 3 compared to that without the rotating plasma. It is considered that this result is due to the improved characteristics of the pre-ionization rotating plasma, which influences the uniformity and stability of subsequent pinch plasma.     

激励软X光激光的毛细管预-主脉冲放电装置

 介绍了主脉冲和预脉冲的产生电路、预-主脉冲延时触发的方案以及对预-主脉冲的联调结果。毛细管放电X光激光装置经改造后，抑制了原有电流幅值过大的预脉冲，外加预脉冲发生器可以提供幅值几十A的预脉冲。预 主脉冲的联调结果表明，预脉冲的电流为20A，主脉冲的第一个峰的峰值电流为40.1kA，前沿为26.6ns，脉宽38ns，预-主脉冲之间的触发延时在3～50μs之间可调。     

毛细管放电软X光激光预-主脉冲延时电路

 以预-主脉冲方式工作的激励软X光激光毛细管放电装置，其预-主脉冲先后触发时间间隔的控制，直接影响了泵浦能量转换为X射线激光能量的效率。运用光电耦合及脉冲变压器隔离等技术，将集成芯片构成的延时电路用于快速高压放电装置中。实验结果表明，预-主脉冲协调工作，延时触发2～50μs，为产生软X光激光提供了条件。     

放电参数对毛细管放电泵浦的软X射线激光的影响

 以哈尔滨工业大学可调谐激光技术国家重点实验室中的Marx发生器的放电脉冲波形为基础,理论上模拟计算了在不同放电参数下充氩气的毛细管放电产生的等离子体状态和类氖氩离子3p_3s跃迁线的增益系数的时空演变过程。中心模型中,选取内径为3.1 mm 的陶瓷毛细管并充入初始密度为1.07×10^-6g·cm^-3的氩气,电流脉冲峰值为27.81 kA,脉冲宽度为61.4 ns。改变放电参数进行模拟,结果表明：上升前沿越陡,则增益系数越大,电流脉冲上升时间在20~40 ns,电流峰值在25~40 kA,电流脉冲宽度在50~70 ns范围内,毛细管放电产生的等离子体状态比较理想,可获得较高的增益系数。     

半圆柱壳槽靶的激光等离子体软X射线光谱发射特点的研究

通常对一种半圆柱壳槽靶与平面靶激光等离子体软X射线光谱空间分布特点和流体动力学行为的比较,证实这种槽形靶可以有效地提高槽区内等离子体温度,从而增强该区域内的软X＇射线光谱发射.     

Parametric study of plasma active medium and gain saturation region in a Ne-like soft X-ray laser

Plasmas created by the interaction of high power optical laser with a target surface can be used as a source of soft X-ray lasers. Plasma and pump laser characteristics play significant role in achieving high gain coefficient for such plasma based on soft X-ray lasers. In the present work, the plasma active medium parameters for germanium element at a wavelength of 19.6 nm irradiated by a double-pulse pump laser have been studied using MED103 hydrodynamic code. For this purpose, first, the effects of laser intensity, pulse width and delay time of two pulses on the gain coefficient have been investigated and the optimum conditions for the maximum gain extent of Ne-like germanium soft X-ray laser are obtained. Then, in order to calculate the intensity of such high gain lasers in which Linford equation is invalid, we have adopted the general formula of amplified spontaneous emission intensity, which is valid in all range of intensities even at much higher intensities than saturation intensity. Finally, the soft X-ray laser intensities in the saturated areas for different plasma lengths have been calculated. The results show that the output of soft X-ray laser intensity with 294 cm⁻¹ gain coefficient can reach to about several times saturated intensity by applying a 1–2 mm plasma length as the active medium.     

利用普通视频CCD作为紫外激光和软X射线探测器的研究

 介绍了利用价格便宜的普通视频CCD来获取紫外激光和软X射线图像的方法和应用结果，以代替价格昂贵的紫外CCD、使用不方便的X光胶片或者昂贵的X光CCD，其关键点是：（1）去除CCD相机的自动增益校正；（2）将相机的校正系数γ值设置为1；（3）去除CCD相机前面的保护窗。作为一种简易的装置，可以用于紫外激光测量及激光与等离子体相互作用研究。结果表明，采用改造后的普通视频CCD测量紫外激光光斑，准确可靠，其灵敏度比科学级紫外CCD的低一个量级，它还可以测量软X射线的二维分布，作为X光针孔相机使用非常方便。     

13.9nm软X射线激光用大面积多层膜分束镜研制

 基于分束镜反射率和透射率的乘积为衡量标准的原则,设计了13.9nm软X射线激光干涉测量所需的多层膜分束镜，用磁控溅射法在有效面积达10mm×10mm，厚100nm的氮化硅窗口上镀制Mo/Si多层膜,实现了分束镜制作。用表面轮廓仪实测分束镜面形精度达到nm量级，同步辐射反射率计测试表明,分束镜的反射率和透射率乘积约4%。     

Near diffraction limit output and gain saturation of soft X-ray laser

By using of travelling wave amplification, we have got a soft x-ray laser with near diffraction limit output and gain saturation in the experiment of four series coupling targets with reflector.     

毛细管放电X光激光中的预脉冲研究

 为研究毛细管放电X光激光中预脉冲放电对增益的影响，用简化的XDCH程序，模拟计算了聚乙烯毛细管充Ar气、2μs脉宽的预脉冲放电过程，把预放电之后的等离子体温度、密度和电离度作为初始条件，输入XDCH程序，进行40kA典型主脉冲放电的计算模拟，给出了一些典型预放电幅度下的增益和电子密度分布情况。比较分析的结果发现，对2μs脉宽的预脉冲，100A的电流将得到较好的增益，并且预言激光线时间谱可能出现双峰结构，空间谱会出现环状结构。     

Electron density diagnostic potential of Ar XIV soft X-ray emission lines

Theoretical electron density-sensitive line ratios R₁-R₆ of Ar XIV soft X-ray emission lines are presented. We found that these line ratios are sensitive to the electron density n_e, and the ratio R₁ is insensitive to electron temperature T_e. Recent work has shown that accurate atomic data, such as electron impact excitation rates, is very important for an reliable determination of the electron density of laboratory and astrophysical plasmas. Present work indicates that the maximum discrepancy of line ratios introduced from different atomic data calculated with distorted wave and R-matrix approximations, is up to 18% in the range of . By comparison of these line ratios with experiment results carried out in electron beam ion trap (EBIT-II), electron density of the laboratory plasma is diagnosed, and a consistent result is obtained from R₁, R₂ and R₃. Our result is in agreement with that diagnosed by Chen et al. using triplet of N VI. A relative higher diagnosed electron density from R₂ is due to its weak sensitivity to electron temperature. A better consistency at lower T_e indicates that temperature of the laboratory plasma is lower than logT_e(K)=6.5. Comparison between the measured and theoretical ratios reveals that 32.014 Å  line is weakly blended by lines from other Ar ions, while 30.344 Å  line is strongly contaminated.     

Near diffraction limit output and gain saturation of soft X-ray laser

Abstract: By using of travelling wave amplification, we have got a soft x-ray laser with near diffraction limit output and gain saturation in the experiment of four series coupling targets with reflector.     

激励类氖氩软X射线激光的最佳放电电流波形

 为了提高毛细管放电类氖氩46.9 nm软X射线激光的强度,研究了主脉冲电流波形对等离子体Z箍缩过程、激光的产生时间及激光强度的影响。通过改变主开关导通电感,实现了对主脉冲电流上升沿的改变。随着电流上升沿的增加,激光尖峰幅值减小,激光产生时间增加。实验进一步研究了平均电流变化率对激光强度的影响:在毛细管内径3 mm、管内初始气压30 Pa的情况下,产生46.9 nm激光的最佳平均电流变化率约为7.0×10¹¹ A/s。     

Study of the X-ray emission from Ta plasma obtained by ns laser ablation

In this work, the continuum spectrum of X-rays originated from the interaction of a moderate intensity ns Nd:YAG laser (1064 nm, 9 ns, 30 Hz, 900 mJ, 10¹¹ W/cm²) with Ta target producing plasma is investigated. Plasma expands unisotropically with a velocity, depending on the pressure of the residual gas in the vacuum chamber. The X-ray intensity is a function of the laser energy and of the gas pressure inside the chamber. The X-ray energy is measured with an X-ray filter positioned in front of the Si(Li) solid-state detector. A temperature of about ～1–2 keV of the hot electrons, responsible for the continuum spectrum emission from the plasma, is calculated from the fit of the X-ray spectrum, applying a Maxwellian distribution.     

软X射线激光用自支撑Zr滤光膜的制备及测量

 利用直流磁控溅射方法制备了质量厚度为200 μg·cm^-2,直径为20 mm的自支撑金属Zr滤光膜。用同步辐射光源和紫外可见分光光度计分别测量了滤光膜在软X射线和可见光波段的透射率,用俄歇电子能谱（AES）分析了膜中的元素含量。结果表明:Zr膜在13.9 nm波长的透射率达19%, 对可见光的抑制性能达43 dB。杂质、膜层氧化及表面污染是影响滤光膜软X射线光谱透射率的主要因素。     

Quasi-simultaneous ultraviolet and infrared emission from a plasma cathode TEA laser

Quasi-simultaneous laser action in the UV (0.337 μm) and the IR (10.6 μm) was observed from a pulsed laser with a sliding discharge plasma cathode. The laser operates at atmospheric pressure, with a gas mixture of CO₂/N₂/He, at a 0.26/0.50/4.0 lmin⁻¹ flow rate. Output energies of 30 mJ in the IR and 0.35 mJ in the UV were obtained, from a laser discharge volume of 38.0×1.0×2.8 cm³. The optimum gas mixtures have been determined and the temporal behavior of the discharge parameters, the performance characteristics of the laser and the beam spatial distributions were investigated.     

Pressure effect on emission spectra and crystal field for La OBr : Eu

Abstract

The emission spectra for LaOBr : Eu were measured at pressures up to 13 GPa and room temperature. The pressure dependences of levels of ⁷F_0,1,2,3,4 and ⁵D_0,1,2 are given. The crystal field parameters B^k _q were computed by fitting the experimental levels. The strength of crystal field decreases with increasing pressure. A brief discussion on the observed phenomena is presented.     

激光软X—射线近贴显微技术初步研究

描述了用高功率脉冲激光打靶产生的等离子体作为软X-射线源而进行的近贴显微研究,并得到了分辨率好于1μm的结果.