共查询到18条相似文献,搜索用时 78 毫秒
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采用一维无碰撞的动力学鞘层模型计算了脉冲等离子体在恒压引出时的等离子体鞘层厚度变化,分别对短脉冲和长脉冲放电时的离子源发射面演变进行了分析。结果表明:对于短脉冲放电,发射面位置的变化相对等离子体密度的变化存在一定时间的延迟;对于长脉冲的上升沿和直流放电的开启阶段,鞘层厚度变化的速度与离子初始速度相关,稳定后发射面的位置与离子初始速度和等离子体密度的乘积相关。 相似文献
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建立了混合多组分等离子体高压查尔特鞘层动力学模型,数值研究了氘钛等离子体高压查尔特鞘层特性。理论与数值研究结果表明,提升D+离子比例、降低D+离子及Ti2+离子入鞘速度、降低等离子体密度等方式,均会有效增加鞘层厚度,并降低靶面场强幅值,这些方式有利于离子汇聚传输和降低靶面击穿风险。随加速电压的增加,离子引出稳定工作区域范围呈现先增加后减小的趋势。增加D+离子比例、减小D+离子及Ti2+离子入鞘速度,均会显著增加离子引出稳定工作区域范围。 相似文献
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为发展金属离子束材料表面改性技术的工业应用,北师大低能核物理所研制成阴极真空弧离子源和离子注入装置.简要介绍该设备的结构、原理和性能. The cathode vacuum arc ion source and ion implantation facility have been developed in our institute for industrial application of surface modification of materials. In this paper the principle structure and performance of these facilities were described. 相似文献
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利用发射光谱方法对真空弧离子源放电等离子体特性进行了诊断。同时,基于局域热力学平衡等离子体的发射光谱理论,建立了等离子体的发射光谱拟合模型,对真空弧放电等离子体光谱进行了分析。针对TiH真空弧离子源,分别对330~340 nm与498~503 nm范围内Ti+离子与Ti原子的发射光谱进行了对比拟合,获得了较好的符合度,解决了传统Boltzmann斜率法计算等离子体温度需要孤立的不受附近谱线干扰的线状光谱的困难。最后,利用该方法计算了真空弧离子源在不同放电条件下的等离子体发射光谱、等离子体密度与温度参数。结果表明,TiH真空弧放电等离子体温度在1 eV左右,同时,放电所产生的氢原子要远远大于金属原子,并且随着真空弧离子源馈入功率的增加,TiH电极中解吸附出来的氢比蒸发出来的金属增加得更多,这有利于TiH离子源在中子发生器方面的应用。 相似文献
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采用蒙特卡罗方法对氦直流辉光放电平板电极等离子体阴极鞘层内电子的输运过程进行了研究。利用实验数据拟合得到的电子与中性粒子的碰撞截面,计算了电子的平均能量及能量分布的空间变化,同时研究了电子的其它参数分布. 相似文献
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真空弧放电等离子体含有多种离子成分,并且各离子在空间上具有不同的分布规律.本文针对金属氘化物电极真空弧离子源,搭建了一台紧凑型磁分析装置,用来研究放电等离子体中氘离子与金属离子的空间分布.当离子源弧流为100 A左右时,该装置能有效地传输引出束流,并且具有较好的二次电子抑制效果,可准确获得各离子流强.利用该装置测量并获得了氘化钛含氘电极真空弧放电等离子体内氘离子和钛离子空间分布规律,结果表明:径向上,氘离子和钛离子都呈高斯分布,但氘离子分布均匀,而钛离子相对集中在轴线附近,导致轴线附近氘离子比例最低;轴向上,所有离子数量都以自然指数函数减少,而且相对幅度接近,所以氘离子比例几乎不变.本文研究结果不仅有助于理解真空弧放电等离子体膨胀过程,还可以指导金属氘化物电极真空弧离子源及其引出设计. 相似文献
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Hideto Tanoue Shinichiro Oke Hirofumi Takikawa Yushi Hasegawa Masao Kumagai Takeshi Ishikawa 《Applied Surface Science》2009,255(17):7780-7785
A new technique to etch a substrate as a pre-treatment prior to functional film deposition was developed using a filtered vacuum arc plasma. An Ar-dominated plasma beam was generated from filtered carbon arc plasma by introducing appropriate flow rate of Ar gas in a T-shape filtered arc deposition (T-FAD) system. The radiation spectra emitted from the filtered plasma beam in front of a substrate table were measured. The substrate was etched by the Ar-dominated plasma beam. The principal results are summarized as follows. At a high flow rate of Ar gas (50 ml/min), when the bias was applied to the substrate, the plasma was attracted toward the substrate table and the substrate was well etched without film formation on the substrate. Super hard alloy (WC), bearing steel (SUJ2), and Si wafer were etched by the Ar-dominated plasma beam. The etching rate was dependent on the kind of substrate. The roughness of the substrate increased, when the etching rate was high. A pulse bias etched the substrate without roughening the substrate surface excessively. 相似文献
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针对真空弧离子源,利用条纹相机将时间轴信息转换为空间轴信息的特点,结合光谱仪分光功能,建立了一套高时间分辨与光谱分辨能力的发射光谱诊断装置,其时间分辨率和光谱分辨率分别可达26 ps与0.1 nm。利用该诊断装置采集获得了单次脉冲内等离子体的时间演化特性;同时,基于局域热力学平衡等离子体的发射光谱理论,建立了一套谱线拟合的等离子体温度与密度计算模型。相比传统的Boltzmann斜率法与Stark展宽法需要寻找孤立的不受附近谱线叠加的干净线状光谱,建立的拟合光谱模型可以直接处理多条谱线因为展宽效应而叠加形成的光谱线型,计算得到等离子体中电子温度与电子密度。结果表明,在脉冲功率源的作用下,真空弧放电等离子体的电子温度与电子密度分别可达1 eV与3.51024 m-3。 相似文献
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真空弧离子源在真空镀膜、材料表面改性、真空大电流开关、加速器离子注入等领域有广泛应用,目前国内外对真空弧放电等离子体的研究主要针对纯金属或合金电极,对含氢电极的研究和公开报道较少.本文利用高时空分辨的四分幅图像诊断系统,结合氢和钛原子特征线单色器件,研究了含氢钛电极的真空弧微秒级脉冲放电等离子体的轴向和径向时空分布特性.研究表明:在真空击穿阶段,阳极区域发光更为明显,阳极电极解吸附释放的氢原子是引发击穿的主要放电介质;在真空弧阶段,阴极-绝缘-真空三结合点处产生圆锥状阴极斑,喷射出大量的等离子体以维持弧放电,同时电极内壁非阴极斑区域也有少量等离子体产生,等离子体中H原子的轴向和径向空间分布均比Ti原子均匀. 相似文献
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Tianping Zhang Lei Chang Xinyue Hu Runlong Wang Huijie Zhang Xianming Wu Xinfeng Sun Ning Hu 《等离子体物理论文集》2020,60(3):e201900163
To optimize thrust performance, the expression of space-charge-limited current for vacuum arc thruster is derived from Poisson's equation. The commonly used ring-type and coaxial-type vacuum arc thrusters are simplified to the equivalent current sheet in planar geometry and cylindrical capacitor, respectively, for this calculation. Both the spatial distribution and peak magnitude of space-charge-limited current are given explicitly, together with their dependences on gap distance, applied voltage, charge number, and ion mass. For typical experimental parameters of the vacuum arc thruster, it is shown that the maximum current density drops significantly when the gap distance becomes large and grows when the applied voltage increases; moreover, a cathode material of lower atomic weight yields a higher current density. The expressions of total current for these two types of vacuum arc thruster are also presented. This work, to our best knowledge, is the first application of space-charge-limited current to the vacuum arc thruster and practically very interesting for engineering design. 相似文献
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Properties of steady state ion sheath formed in front of a negatively biased metal plate under the influence of negative ions
have been investigated in collisionless argon/SF6 plasma. This experiment is carried out at a fixed discharge voltage and fixed filament heating power. In this experiment,
the decrement in plasma pre-sheath potential drop as well as positive ion drift velocity toward the plate is experimentally
recorded in the presence of negative ions. It is also found that the plasma positive ion density and plasma electron temperature
decrease in the presence of negative ions. These factors attribute to the decrease of ion current toward the plate. Hence
the usual ion sheath expands.
Article presented at the International Conference on the Frontiers of Plasma Physics and Technology, 9–14 December 2002, Bangalore,
India. 相似文献