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集成光学波导光栅研究进展 总被引:1,自引:0,他引:1
报道了20世纪80年代以来,研究组在集成光学波导光栅研究领域的主要工作及研究成果。其中包括集成光学波导光栅的制备研究;若干非线性波导光栅器件研究;高效体相位全息布拉格光栅-光导板的耦合互连;单片集成波导光栅波分复用等。这些研究工作为光通信、光计算、光传感和光学信息处理等应用领域提供小型化、低功耗、超快速全光型器件奠定了技术基础。 相似文献
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硅基锗薄膜的异质外延生长及其在光电子器件中的应用 总被引:1,自引:0,他引:1
准直接带隙的锗,其禁带宽度小,吸收系数大,迁移率高,更重要的是,它能与硅微电子工艺兼容,在硅基光电集成中得到了广泛的研究和应用.文章综述了硅基锗薄膜的异质外延生长及其在光电子器件(特别是长波长光电探测器和激光器)应用上的进展;介绍了在硅衬底上异质外延生长锗薄膜的缓冲层技术,如组分变化的SiGe缓冲层技术、选区外延技术和低温技术;讨论了硅基锗薄膜光电探测器的性能与结构的关系以及发展趋势;分析了张应变和n型掺杂对锗光电性质的影响;展望了硅基锗薄膜单片集成和电抽运激光器的前景. 相似文献
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集成光子芯片是将激光光源、低损耗波导、调制器、探测器等多类光电器件结合在一起,实现功能化集成,在高速光通讯、量子信息处理、光学传感等领域有具有重要的应用。然而由于不同的光电器件基于不同材料体系,实现多材料体系的光电器件集成极其困难。传统的异质集成和单片集成方法难以同时解决定位精度不足、低拓展性、高损耗、低带宽等一系列问题。基于飞秒激光的双光子聚合技术具有高精度和高穿透的优势,可以实现多材料体系的片上微纳光学元件增材制造,具有极高的加工自由度。本文对片上光学元件的激光增材制造这一领域进行综述,探讨了光子引线键合和微空间光路元件两种技术路径,总结了现有技术的发展现状,并对未来的发展前景进行了展望。 相似文献
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研究分子束外延(MBE)生长的应变In0.2Ga0.8AsGaAs折射率梯度变化异质结单量子阱激光二极管的快速热处理(RTA)效应.结果表明,RTA移除了InGaAsGaAs界面非辐射中心,提高77K光致发光效率和有源层电子发射.同时Al和Ga原子互扩散,也增加了AlGaAs波导层DX中心浓度.RTA处理后样品电流冲击老化实验证明DX中心浓度呈现出相应的增加.这表明DX中心可能是激光二极管性能退化的原因之一.
关键词:
量子阱
快速热处理
电子发射
DX中心 相似文献
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基于器件模拟仿真,设计了一种PNP型1.5μm波长多量子阱InGaAsP-InP异质结晶体管激光器材料外延结构,并采用金属有机化学气相沉积外延生长.其中基区采用N型Si掺杂.因为扩散系数小,比较P型Zn搀杂具有较高的稳定性,因而较NPN结构外延材料容易获得高质量的光学有源区.由于N型欧姆接触比P型容易获得,基区搀杂浓度可以相对较低,有利于减小基区光损耗和载流子复合,从而获得较低的阈值电流和较高的输出光功率.所获得的外延材料呈现较高光-荧光谱峰值和65.1nm较低半峰宽.测试结果显示了较高的外延片光学质量. 相似文献
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基于器件模拟仿真,设计了一种PNP型1.5 μm 波长多量子阱InGaAsP-InP异质结晶体管激光器材料外延结构,并采用金属有机化学气相沉积外延生长.其中基区采用N型Si掺杂.因为扩散系数小,比较P型Zn搀杂具有较高的稳定性,因而较NPN结构外延材料容易获得高质量的光学有源区.由于N型欧姆接触比P型容易获得,基区搀杂浓度可以相对较低,有利于减小基区光损耗和载流子复合,从而获得较低的阈值电流和较高的输出光功率.所获得的外延材料呈现较高光-荧光谱峰值和65.1 nm较低半峰宽.测试结果显示了较高的外延片光学质量. 相似文献
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本文从工业生产角度对GaAlAs单异质结红光二极管的芯片制作技术作了细致研究.设计出能同时生长多枚外延片的新结构生长舟,选择了合适的管芯参数与生长条件,制定出稳定重复的工艺流程.用本项技术制出的单异质结管芯,发光波长为660nm,平均亮度达到4.5mcd/20mA,最高亮度达6.2mcd. 相似文献
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为提高InP基光探测器的吸收效率和工作速度,设计了一种渐变耦合脊波导单载流子传输异质结光敏晶体管探测器。采用有效折射率法和光束传播法,分析渐变耦合脊波导的光传输模式,优化后波导宽度和波导长度分别为2.6μm和250μm,可实现单模传输和高的光吸收效率。由于渐变耦合脊波导单载流子传输异质结光敏晶体管光传输方向与载流子运动方向垂直,分别优化光敏晶体管的吸收效率和速度,器件输出光电流和特征频率均得到改善。渐变耦合脊波导单载流子传输异质结光敏晶体管的响应度为33.83A/W,饱和输出光电流为90mA,最高特征频率达到87GHz,其饱和输出电流和特征频率相比于台面单载流子传输异质结光敏晶体管分别提高了20%和24%。但渐变耦合脊波导单载流子传输异质结光敏晶体管吸收体积大,获得饱和电流时的光功率也比较大,因此渐变耦合脊波导单载流子传输异质结光敏晶体管的响应度略小于台面的单载流子传输异质结光敏晶体管的响应度。 相似文献
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《中国光学快报(英文版)》2017,(8)
We use the selective area growth(SAG) technique to monolithically integrate In P-based 4-channel arrayed waveguide gratings(AWGs) with uni-traveling carrier photodiode arrays at the O-band. Two kinds of channel spacing demultiplexers of 20 nm and 800 GHz are adopted for potential 100 Gbps coarse wavelength division multiplexing and local area network wavelength division multiplexing systems, with an evanescent coupling plan to facilitate the SAG technique into device fabrication. The monolithic chips in both channel spacings exhibit uniform bandwidths over 25 GHz and a photodiode responsivity of 0.81 A/W for each channel, in agreement with the simulated quantum efficiency of 80%. Cross talk levels are below-20 d B for both channel spacing chips. 相似文献
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Design and fabrication of multi-channel photodetector array monolithic with arrayed waveguide grating
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We have provided optical simulations of the evanescently coupled waveguide photodiodes integrated with a 13-channels AWGs. The photodiode could exhibit high internal efficiency by appropriate choice of layers geometry and refractive index. Aseamless joint structure has been designed and fabricated for integrating the output waveguides of AWGs with the evanescently coupled waveguide photodiode array. The highest simulation quantum efficiency could achieve 92% when the matching layer thickness of the PD is 120 nm and the insertion length is 2 μm. The fabricated PD with 320-nm-thick matching layer and 2-μm-length insertion matching layer present a responsivity of 0.87 A/W. 相似文献
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Tao Liu Yongqing Huang Huijuan Niu Jiarui Fei Xiaokai Ma Gang Wu Kai Liu Xiaofeng Duan Xiaomin Ren 《Optical and Quantum Electronics》2018,50(7):284
In this paper, the bias-free operational uni-traveling-carrier photodiode (UTC-PD) for terahertz wave generation is designed via physics-based simulation. The physics-based model is established at first and then the reliability of the simulation is demonstrated by comparison to previously reported experimental results. The epitaxial layers of the UTC-PD are analyzed and investigated to improve its bandwidth and output-power simultaneously. By optimizing the spacers and the collector, and using a combination of optimal graded-doping profile and graded-bandgap material for the absorber, the 3-dB bandwidth and the peaked output-power of the UTC-PD are improved by 36.5% and 2.262 dB, respectively. The 3-dB bandwidth of the optimized bias-free operational UTC-PD with mesa diameter of 8, 6, 5, 4 and 3-μm can achieve 106, 137.67, 158.3, 183 and 211 GHz, respectively. 相似文献
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Optical matching layer structures in evanescent coupling photodiodes at a wavelength of 1.55μm: physics,design and simulation
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We have studied the optical matching layers (OMLs) and external
quantum efficiency in the evanescent coupling photodiodes (ECPDs)
integrating a diluted waveguide as a fibre-to-waveguide coupler, by
using the semi-vectorial beam propagation method (BPM). The physical
basis of OML has been identified, thereby a general designing rule
of OML is developed in such a kind of photodiode. In addition, the
external quantum efficiency and the polarization sensitivity versus
the absorption and coupling length are analysed. With an optical
matching layer, the absorption medium with a length of 30μm
could absorb 90% of the incident light at 1.55μm
wavelength, thus the total absorption increases more than 7 times
over that of the photodiode without any optical matching layer. 相似文献
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Biddut Banik Josip Vukusic Hans Hjelmgren Jan Stake 《International Journal of Infrared and Millimeter Waves》2008,29(10):914-923
We present a method to optimize the epitaxial layer structure of an InGaAs/InP uni-traveling-carrier photo-diode (UTC-PD)
for continuous THz-wave generation. The design approach used is general in that it can be applied for any target frequency
while this study focuses on 340 GHz. The photodiode epitaxy is modeled and optimized using a TCAD software implementing the
hydrodynamic semiconductor equations. This physical device model was found to be in good agreement with reported experimental
results. It is shown that the UTC-PD can generate ~1 mW at 340 GHz by choosing the optimum absorption layer and collection
layer thicknesses. 相似文献
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Andreas Wieczorek Hua Yang Brendan Roycroft Frank H. Peters Brian Corbett 《Optical and Quantum Electronics》2013,45(4):365-371
Polarization insensitive optical coupling of a large spot size input waveguide to a small spot size photodiode is achieved by the introduction of a transition waveguide. The coupling efficiency to the photodetector and the related absorption efficiency of the photodiode depend mainly on the refractive indices of the different InGaAsP layers. Waveguide alignments, waveguide widths and the n-contact etch depth do not influence the absorption efficiency relative to a 1-dB tolerance. 相似文献
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随着AWG型器件在光通信系统中的大规模应用,对低成本AWG芯片的需求越来越多。在各种降成本方案中,减小AWG芯片的尺寸是最有效的方法之一。本文介绍了一种新型小尺寸低折射率差硅基二氧化硅阵列波导光栅(AWG)的设计。在该AWG中,输入波导/输出波导与平板波导连接的部分制作成两侧为空气槽的高折射率差波导,所以在与输出平板波导连接处的相邻输出波导间距较小,这样可以在设计上缩短平板波导的长度、减少阵列波导的数量,实现较小的AWG芯片尺寸。该AWG的其它部分,如输入/输出波导与光纤耦合的部分、阵列波导光栅等均采用常规的低折射率波导工艺,所以就同时具有与常规的低折射率波导AWG相同的优点:如低耦合损耗、较好的串扰以及光学特性等。根据这个原理,设计了一种40通道100 GHz频率间隔的低折射率差硅基二氧化硅AWG,其芯片尺寸只有23.88 mm?10.5 mm,是传统相同材料制作的AWG尺寸的1/6。 相似文献
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A back-illuminated mesa-structure InGaAs/InP charge-compensated uni-traveling-carrier(UTC) photodiode(PD) is fabricated,and its saturation characteristics are investigated.The responsivity of the 40-μmdiameter PD is as high as 0.83 A/W,and the direct current(DC) saturation current is up to 275 mA.The 1-dB compression point at the 3-dB cutoff frequency of 9 GHz is measured to be 100 mA,corresponding to an output radio frequency(RF) power of up to 20.1 dBm.According to the calculated electric field distributions in the depleted region under both DC and alternating current(AC) conditions,the saturation of the UTC-PD is caused by complete field screening at high optical injection levels. 相似文献
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采用双层耦合量子点的分子束外延生长技术生长了InAs/GaAs量子点样品,把量子点的发光波长成功地拓展到1.3 μm.采用光刻的工艺制备了直径为3 μm的柱状微腔,提高了量子点荧光的提取效率.在低温5 K下,测量得到量子点激子的荧光寿命约为1 ns;单量子点荧光二阶关联函数为0.015,显示单量子点荧光具有非常好的单光子特性;利用迈克耳孙干涉装置测量得到单光子的相干时间为22 ps,对应的谱线半高全宽度为30 μeV,且荧光谱线的线型为非均匀展宽的高斯线型. 相似文献