大功率1060nm双沟脊波导分布反馈激光器

研制了双沟型脊波导结构的1 060 nm分布反馈激光器.和普通脊波导激光器相比,该器件能提高在连续条件下的侧模稳定性.单模最大输出功率达到300 mW边模抑制比大于45 dB.采用该激光器进行泵浦周期性极化铌酸锂晶体倍频实验,得到的绿光功率为3 mW,该方案将成为低成本绿光光源实现方案.     

大功率1060nm双沟脊波导分布反馈激光器（英文）

研制了双沟型脊波导结构的1 060nm分布反馈激光器.和普通脊波导激光器相比,该器件能提高在连续条件下的侧模稳定性.单模最大输出功率达到300mW边模抑制比大于45dB.采用该激光器进行泵浦周期性极化铌酸锂晶体倍频实验,得到的绿光功率为3mW,该方案将成为低成本绿光光源实现方案.     

布拉格反射波导激光器的光谱特性（英文）

设计并制备了基于双边非1/4波长布拉格反射波导的边发射半导体激光器,中心腔采用低折射率材料,在垂直方向利用布拉格反射进行光限制,实现了超大光斑尺寸且稳定单横模工作。10μm条宽、未镀膜的脊型激光器在准连续和连续工作方式下的总的输出功率分别超过了170 mW和80 mW,且最高功率受热扰动限制。激光器远场图案在垂直方向为双瓣状,单瓣垂直方向和水平方向发散角分别低至7.85°和6.7°。激射谱半高全宽仅为0.052 nm,光谱包络存在周期性调制现象,模式间隔约为3.3 nm。电流增加到300 mA以上时,激光器出现模式跳变。     

侧向微结构宽脊波导分布反馈1.06μm半导体激光器

为了改善宽脊波导半导体激光器侧模特性和光谱特性,提出了一种具有侧向微结构脊波导和高阶脊表面光栅的分布反馈半导体激光器.该激光器在宽脊波导的两侧刻蚀微结构区,基于各阶侧模光场分布不同的特性,增大了谐振腔内基侧模与高阶侧模的损耗差,消除了远场光斑"多瓣"现象并且输出功率有所提升;同时,借助高阶脊表面光栅,器件的线宽得到了进...     

1.55-μm大功率高速直调半导体激光器阵列

提出一种基于AlGaInAs材料的1.55-μm波段的大功率、高速直调分布反馈(DFB)激光器阵列。采用具有良好温度特性和高微分增益的AlGaInAs材料作为量子阱和波导层以实现大功率与高带宽的输出;引入稀释波导结构来减小有源区内部损耗,同时降低远场发散角;采用悬浮光栅并优化耦合系数以实现大注入电流下的单模稳定工作。最终实现了1.5-μm波段5波长的大功率直调激光器阵列,阵列波长间隔约为5 nm,室温连续波(CW)工作时各通道输出光功率均大于100 mW,单通道最大输出光功率为160 mW,500 mA工作电流范围内边模抑制比大于55 dB,小信号调制带宽可达7 GHz,激光器最小线宽为520 kHz,相对强度噪声低于-145 dB/Hz。     

基于混合表面等离子体波导的纳米激光器的研究

设计了一种带有金属脊和低折射率介质夹层的新型混合表面等离子体波导结构，利用有限元法对该结构进行了数值仿真。COMSOL Multiphysics软件是一款基于有限元法模拟真实物理现象的仿真软件。在COMSOL Multiphysics软件平台上，构建该结构的三维模型，使用模态分析和频域分析模块，研究了其电场分布、归一化模式面积、传输长度、增益阈值、品质因数。结果表明：在工作波长为370 nm时，所设计波导的光场约束可达到较好的深亚波长水平，同时保持大的传输长度。提出的带有金属脊结构与平坦金属层结构相比，波导特性更好。将该结构应用于纳米激光器，由基模和纵模反映出，激光器内光场分布稳定且集中在极小的面积内。在波导特性良好的情况下，该激光器可保持较低的增益阈值和较高的谐振腔品质因数。综合考虑，选取最优尺寸为ｒ＝80 nm, d＝45 nm，此时有效模式面积为0.005 1λ2，传输长度为1 668 nm，增益阈值为1.46×10-6 m-1, 品质因子74.5。最后，在最优尺寸下，通过仿真得到了该结构的发射光谱，其发射波长为360 nm，输出电能比输入电能增强了3 100倍。该结构为小型化和集成化的纳米设备提供了技术支持，在生物医学和光通信等领域有广泛的应用前景。     

一种结合增益耦合分布反馈光栅的多模干涉波导半导体激光器的研制

半导体激光器是现代通讯领域的核心器件.研究和开发具有高稳定性、高功率、高光束质量、窄线宽的单模半导体激光器是目前半导体激光器研究领域的一个重要的研究方向.本文在窄脊型边发射半导体激光器的结构基础上,提出并研制了一种在980 nm波段附近的利用有源多模干涉波导结构作为激光器的主要增益区,利用增益耦合式分布反馈光栅对激光器的纵向模式进行调制的新型边发射半导体激光器芯片结构.通过对比实验可以看出,这种激光器相较于一般的分布反馈式半导体激光器,其具有更高的斜率效率和输出功率;而相较于一般的多模干涉波导激光器,这种激光器具有更高的光束质量和更好的稳定性.同时,由于在芯片设计和制造过程中采用了表面刻蚀形成的高阶分布反馈光栅,这种激光芯片的制造无需二次外延,只需要微米量级精度的i线光刻即可实现,是一种制备工艺较为简单、制造成本较低、利于商用量产的芯片结构.     

1310 nm高功率超辐射发光二极管的制备及性能研究

为优化1 310 nm超辐射发光二极管输出性能,提高器件输出功率,针对J型波导结构的1 310 nm超辐射发光二极管的波导结构参数及器件散热能力进行研究。结果表明波导刻蚀深度、弯曲角度和绝缘层厚度是影响器件实现高功率输出的重要因素。基于研究结果对超辐射发光二极管器件结构及工艺进行优化,制备出脊宽5μm、弯曲角度8°、刻蚀深度1.7μm、绝缘层厚300 nm的J型超辐射发光二极管。该器件在室温及500 mA连续注入电流条件下,直波导长度1.5 mm时实现10 nm宽的输出光谱,输出功率达到42.2 mW。     

增益波导垂直腔面发射激光器中的模式分析及实验研究

本文研究了增益波导垂直腔面发射激光器的横向及纵向模式特性。采用二维延伸抛物型复折射率波导结构从理论上分析了增益波导垂直腔面发射激光器中模式的横向电场分布、模式间隔、模式增益对远场分布图和光束发射角、耦合效率等.实验中在阈值电流之上既观测到稳定的基模工作,也观测到高阶非简并模工作等不同的光谱结构及远场分布,理论和实验基本吻合.     

带有锥形增益区14xxnm量子阱激光器的研制

利用MOCVD生长了14xxnm AlGaInAs/AlInAs/InP应变量子阱外延片.采用带有锥形增益区脊型波导结构和普通条形脊型波导结构在相同的实验条件下制作800 μm腔长激光器管芯,在相同的驱动电流下前者可以获得更高的输出光功率,而且P-Ⅰ曲线线性度较好、饱和电流高. 1200 μm腔长带有锥形增益区脊型波导结构管芯功率达到500 mW,饱和电流3 A以上,峰值波长1460 nm,远场发散角为39°×11°.     

The single-longitudinal-mode operation of a ridge waveguide laser based on two-dimensional photonic crystals

An electrically driven, single-longitudinal-mode GaAs based photonic crystal (PC) ridge waveguide (RWG) laser emitting at around 850 nm is demonstrated. The single-longitudinal-mode lasing characteristic is achieved by introducing the PC to the RWG laser. The triangle PC is etched on both sides of the ridge by photolithography and inductive coupled plasma (ICP) etching. The lasing spectra of the RWG lasers with and without the PC are studied, and the result shows that the PC purifies the longitudinal mode. The power per facet versus current and current-voltage characteristics have also been studied and compared.     

Five-hundred-milliwatts distributed-feedback diode laser emitting at 940 nm

A DFB laser emitting at a wavelength around 940 nm in a single longitudinal mode up to an output power of 500 mW with a side mode suppression ratio greater than 50 dB is presented. More than 4 nm tuning range was reached by varying the current between 100 and 800 mA. Up to a power of about 300 mW, the lateral far field revealed stable fundamental mode operation.     

Long-wavelength GaInAsSb/AlGaAsSb DFB lasers emitting near 2.6 μm

We have successfully fabricated and characterized room temperature continuous wave (cw) GaInAsSb/AlGaAsSb distributed feedback lasers emitting in the wavelength region between 2.499 and 2.573 μm. To the best of our knowledge, this is the longest emission wavelength realized with a GaSb-based DFB laser diode. The laser structure used for DFB processing was grown by solid source molecular beam epitaxy. A DFB concept requiring no subsequent overgrowth step was used by defining first-order Cr-Bragg gratings laterally patterned to a ridge waveguide. Threshold currents smaller than 60 mA and room temperature cw output powers up to 6.5 mW were obtained. The laser diodes show single mode emission with side mode suppression ratios (SMSR) of up to 32 dB.     

Wavelength Tuning in the Two-Section Distributed Bragg Reflector Laser Fabricatedby Quantum-Well Intermixing

The two-section tunable ridge waveguide distributed Bragg reflector (DBR) lasers fabricated by strained InxGa1-xAsyP1-y. The threshold current of the laser is 51mA. The tunable range of the laser is 3.2nm and the side mode suppression ratio (SMSR) is more 38dB.     

Optimization of 780?nm DFB diode lasers for high-power narrow linewidth emission

We demonstrate the realization of narrow linewidth, high-power ridge waveguide DFB diode lasers emitting near 780?nm. The effects of the coupling coefficient, the laser chip length, and the fabrication process onto the spectral linewidth are discussed. By optimizing both the cavity length and the coupling coefficient, we achieve an intrinsic spectral linewidth as small as 35?kHz at an output power of 270?mW.     

Variational analysis of Er:Ti:LiNbO3 waveguide lasers based on Gaussian/two-half Gaussian mode field distribution

Starting with two dimensional, scalar wave equation, a variational equation was established for the fundamental TE and TM modes guided in Ti:LiNbO₃ waveguides on the basis of assuming a symmetric Gaussian mode field function in the width direction and two-half Gaussian trial functions in the depth direction. The controllable waveguide fabrication parameters, including channel width, diffusion temperature, initial Ti-strip thickness and diffusion time, dependent of fundamental mode size, effective pump area, coupling efficiency between pump and laser modes, and the coupling loss between a Ti:LiNbO₃ waveguide and a fiber were numerically calculated for Z-cut Er:Ti:LiNbO₃ channel waveguide lasers at three possible emission wavelengths 1532,1563 and 1576 nm and two possible pump wavelengths 1480 and 980 nm. The calculated results were compared with those of Gaussian/Hermite–Gaussian mode field distribution in detail.     

A novel structure of visible semiconductor lasers

Terraced substrate inner current stripe lasers emitting in the range of 750–780 nm are developed with very simple fabrication processes. The lasers have good performance of cw room temperature, linear light-current output over 30 mW per facet and maintain stable fundamental transverse and longitudinal mode of 2–4 times current threshold. The current threshold of 25 mA under cw room temperature operation has been achieved.     

Coupling characteristics of laterally coupled gratings with slots

Laterally-coupled ridge-waveguide distributed feedback lasers fabricated without epitaxial regrowth steps have the advantages of process simplification and low cost. We present a laterally coupled grating with slots. The slots etched between the ridge and grating area are designed to suppress the lateral diffusion of carriers and to reduce the influence of the aspect-ratio-dependent-etching effect on the grating morphology in the etching process. Moreover, the grating height in this structure can be decreased to lower the aspect ratio significantly, which is advantageous over the conventional laterally coupled ridge waveguide gratings. The effects of five main structural parameters on the coupling characteristics of gratings are studied by MODE Solutions. It is found that varying the lateral width of the grating can be used as an effective way to tune the coupling strength; narrow slots (100 nm and 300 nm) and wide ridge (2 μm-4 μm) promote the stability of grating coupling coefficient and device performance. It is important to note that the grating bottom should be fabricated precisely. The comparative study of carrier distribution and mode field distribution shows that the introduction of narrow slots can strengthen the competitive advantage and stability of the fundamental mode.     

基于掩埋光栅一级分布反馈结构的太赫兹量子级联激光器

结合理论和实验研究了掩埋光栅一级分布反馈太赫兹量子级联激光器中的模式竞争和功率特性。理论计算得到掩埋光栅腐蚀深度与两个带边模式的波导损耗、光学限制因子、辐射损耗以及辐射效率的关系。理论计算表明,掩埋光栅分布反馈结构可以通过改变腐蚀深度,保证激光器稳定单模工作在高频带边模式的同时,调节激光器的阈值增益以及辐射效率。实验和测试结果表明,激光器辐射波长和掩埋光栅的周期成正比,激光器可以在整个动力学范围内稳定单模工作。单模激光器的波长范围可覆盖86.2~91.7μm的范围,边模抑制比可达25 dB,最大输出功率为9.1 mW。该工作有助于高性能单模太赫兹激光器及锁相耦合激光器阵列的研制。     

Metal-clad ridge waveguide structure InGaP/InGaAIP visible laser diodes

InGaP/InGaAIP visible-light laser diodes with a metal-clad ridge waveguide structure have been fabricated. Compressively strained SCH-MQW structures were grown by low-pressure MOCVD and the lasing wavelength was 690 nm. The threshold current was 28 mA at 25°C for a 400 m cavity and 5 m stripe width. CW operation was obtained as the cleaved device by employing thick gold layer as a heat spreader. The light-output power versus CW current was linear up to a maximum light output power of 38 mW. Stable operation of the fundamental transverse optical mode was maintained up to 30 mW. These results show that this metal-clad ridge waveguide structure provides sufficient current confinement even under high light output power operation.