平行平板光学参数的快速高精度测量方法

提出一种基于特征多项式的波长移相干涉测量方法。首先,将该方法与两步绝对测量法结合,对多表面干涉技术进行理论研究;然后,以特征图和特征多项式理论为基础设计出一种加权多步波长移相算法,用于对平板的表面面形、光学厚度变化以及光学均匀性信息进行提取计算,并通过移相算法的评价函数及其傅里叶表达式展示了算法对误差的抗扰度;最后,将该算法与OPL算法进行对比。结果表明,所提方法在不同厚度平行平板光学均匀性的测量上具有速度快、精度高的优势。     

光学玻璃光学均匀性高精度测量技术

高质量的透射光学系统对光学材料的光学均匀性要求非常高 ,材料局部折射率 10 -6 量级的变化就可能破坏整个系统的性能。详细介绍了三种用于测量光学玻璃光学均匀性的干涉法 ,研制了一台高精度光学玻璃材料光学均匀性测量仪。实验结果表明 :40mm左右厚的光学玻璃材料的光学均匀性检测精度可达 1× 10 -6 。     

光学投影式三维轮廓测量技术综述

主要用于散射物体的宏观轮廓测量的光学投影式轮廓测量技术可以分为两大类：直接三角法和相位测量法。直接三角法包括激光逐点扫描法、光切法和新近出现的二元编码图样投影法。相位测量法以测量投影到物体上的变形栅像的相位为基础，包括莫尔法、移相法、傅氏变换法等等。本文以基于相位测量和光栅投影法为重点综述了光学投影式轮廓测量技术的几种典型方法，讨论了它们的优缺点，并分析了研究热点和发展方向。     

利用Mach-Zehnder干涉仪测量晶体的折射率与光学均匀性

本文介绍了利用Ｍａｃｈ－Ｚｅｈｎｄｅｒ干涉仪测量平板状透明介质折射率的方法，给出了测量公式，分析了各种测量误差以及可能达到的测量精度。通过对纯质ＬｉＮｂＯ３晶体片的折射率ｎｅ的测量，证实了该方法的可行性，并表明其特别适合于高折射率的各向异性晶体片折射率的测量。     

变倾角移相法测量反射棱镜的光学平行差

为解决棱镜等效展开为玻璃平板后因腔长固定导致的移相困难问题,提出一种变倾角移相测量反射棱镜光学平行差的方法。通过改变光束在反射棱镜入射端面上的倾角在干涉图中引入移相量,实现干涉图中的相位提取。采用最小二乘法拟合相位计算反射棱镜的光学平行差。在实验中,测试了一块弦长为56.5mm的等腰直角棱镜,得到直角偏差Δ_(90°)为-2.1435″、锐角偏差δ_(45°)为-4.6216″、直角边对应棱差γ_C为0.3554″,而Zygo GPI干涉仪仅可得到棱镜直角偏差,与本文方法的测量值偏差在0.15″以内。所提方法移相光路设计简便,并可实现小尺寸反射棱镜的测量。     

石英玻璃光学均匀性测量范围扩展技术的研究

论述了用激光干涉仪测量石英玻璃光学均匀性时测量范围扩展的问题。通过理论研究和实际测量,完成了用180mm孔径干涉仪测量300mm孔径石英玻璃光学均匀性这一目标,为实现用300mm孔径干涉仪测量直径500mm石英玻璃的光学均匀性测量问题奠定了理论与实践的基础。实验通过建立光学均匀性测量范围扩展的数学模型,采用最小二乘法误差消除方法,每步波面分别计算,最后四步合成。创新性地设计了移动测量载物调整装置,实现了高精度多维调整。采用8个子孔径就3块圆形玻璃进行了测试,就拼接测量结果与直接全口径测量结果进行了对标,其拼接波面的均匀性绝对误差平均值分别为0.13×10-5、0.14×10-5、0.03×10-6。     

积分球辐射光源照度均匀性研究

针对CCD等焦面阵列光电器件常被置于积分球辐射光源出口平面进行测试的误区,研究了积分球辐射光源照度分布的均匀性,得到了合理使用积分球光源测试光电器件的依据。基于数值解析方法和蒙特卡罗方法,建立了理想积分球辐射光源照度均匀性数学模型和非理想积分球辐射光源照度均匀性仿真模型,分析了与积分球光源出口不同距离处光电器件受光面上照度分布情况,并实验测试了两套积分球辐射光源照度分布情况,得到了与积分球辐射光源不同距离处光电器件受光面上照度均匀性分布规律。研究表明:当光电器件受光面直径小于积分球光源出口直径一半、光电器件和积分球出口之间的距离与积分球出口直径的比值在3至5之间时,可在光电器件受光面上获得均匀性优于99%的照度场。     

利用激光谐振腔测量透明介质薄板的光学均匀性

提出了一种利用激光谐振腔测量透明介质薄板光学均匀性的新方法.该方法将对折射率微差的测量转化为对激光谐振频率的变化进行测量.两种样品的实验对比结果表明,该方法可以实现10－5量级以上灵敏度的光学均匀性测量.最后分析了实验结果的误差及适用的灵敏度测量范围.     

移相器微位移旋转误差的分析及测试

以压电陶瓷(PZT)微位移器为主要研究对象, 引入一种处理静态干涉图的新方法--虚光栅移相叠栅条纹法,设计实验对一台实际使用的移相器微位移旋转误差进行测试研究,对其引起的波面旋转情况进行了定量的计算分析,并给出测试结果.用虚光栅移相叠栅条纹法处理实验中加有载频的干涉图时,不需要使用任何移相器件,可以进行动态位相的检测,整个移相过程用计算机进行控制,避免了引入额外的移相误差.     

光折变晶体钛酸秘的折射率和光学均匀性的测量

本文报导光折变晶体钛酸铋的折射率和光学均匀性的测量结果。     

Measurement for Scattering Media by Synthesis of Optical Coherence Function with Super-Structure Grating Distributed Bragg Reflector Laser Diode

The application of the technique of synthesis of optical coherence function for detection in scattering media is investigated. By modulating the optical frequency, the technique synthesizes the coherence function into a delta-function-like peak at an arbitrary location, and thus can select interferometrically the information at that location. The location is adjustable by the modulation parameter or additional phase modulation. A multi-section super-structure grating distributed Bragg reflector laser diode (SSG-DBR-LD) of THz-order tunable range is employed to enhance the spatial resolution for suppressing the multiple scattering from locations other than that detected. In a preliminary experimental demonstration, a reflectometry of 550 μm spatial resolution was achieved and was used to detect scattering media.     

Simultaneous Measurement of Refractive Index and Thickness of Transparent Plates by Low Coherence Interferometry

We demonstrate a novel low coherence Michelson interferometer which can provide simultaneous measurement of the refractive index and thickness of transparent plates used as a measured object. Unlike the existing low coherence interferometers reported so far, either an object or a focusing lens aligned on the signal arm is scanned repeatedly by a precise translation stage in synchronization with movement of a reflection mirror on the reference arm. The so-called object or lens scanning method gives us two measured quantities a movement distance of the stage between two light focusing states on the front and rear planes of an object and the corresponding optical path difference. These two measured quantities, result in desirable values of the index and thickness of the object with a short calculation. The measurement accuracy of ≤0.1% is expected for a thickness of more than 1 mm. In the experiment using the object scanning method, the accuracy of 0.3% or less was successfully attained for nearly 1-mm thick plates of fused quartz, sapphire, LiTaO₃ and slide glass.     

Simultaneous Measurement of Refractive Index and Thickness by Low Coherence Interferometry Considering Chromatic Dispersion of Index

Low coherence interferometry can provide simultaneous measurement of refractive index n and thickness t of a transparent plate, as reported recently by some research groups. Precise measurement of n and t is impossible unless chromatic dispersion of index is taken into account. We then proposed and demonstrated a unique technique for simultaneous measurement of phase index n_p, group index n_g and thickness t using a special sample holder. This paper describes a novel technique for simultaneous measurement of n_p, n_g and t using an approximate expression of the chromatic dispersion in terms of n_p. The approximate expression of chromatic dispersion does not require use of the special sample holder, and n_p, n_g and t are determined from two measurable quantities with an accuracy of 0.3% or less, for the sample thickness was around 1 mm. In addition, it is possible to shorten the measurement time compared with the above method.