The refractive index of homogeneous SiO<Subscript>2</Subscript> thin films

The effect of the through-thickness inhomogeneity of SiO₂ films on their refractive index is studied. The SiO₂ films, deposited by tetraethoxysilane pyrolysis on plane-parallel oriented crystalline quartz substrates and on silicon plates, were etched layer-by-layer in Pliskin’s solution. The refractive index and the geometric thickness of films were calculated from the measured ellipsometric angles after each etching. The determination errors of the refractive indices as functions of the film thickness, which result from the measurement errors of the polarization angles and substrate parameters, are numerically analyzed. For SiO₂ films thicker than 20nm, no effect of inhomogeneity is found. The refractive indices of thinner films were observed to depend on the thickness. The reasons for such dependences are discussed.     

石英晶体振荡法监控膜厚研究

给出了石英晶体振荡法监控膜厚的基本原理,在相同的工艺条件下分别用光电极值法和石英晶体振荡法监控膜厚,对制备的增透膜的反射光谱曲线进行了比较,并对石英晶体振荡法的监控结果做了误差分析.结果表明:石英晶体振荡法不仅膜厚监控精度高,而且能监控沉积速率,获得稳定的膜层折射率,从而有效地控制薄膜的光学性能.     

测量石英晶体光轴方向厚度的光谱分析法

基于石英晶体的旋光色散原理,提出了一种测量石英晶体光轴方向厚度的光谱分析方法。利用光学矩阵方法对测量原理进行了分析,指出通过测量由两个正交的偏光镜和待测石英晶体所组成的系统的透射曲线就可以精确计算出待测石英晶体的厚度。在实验的过程中进行了误差分析,分析表明选取长的测量波段、低的扫描速度、短的响应时间和小的狭缝宽度都有利于提高测量精度,并从理论上证明所得厚度的精度高于电子数显千分尺的测量精度。利用三种不同的方法对两块不同厚度的石英晶体进行了测量,测量结果表明利用提出的方法所得厚度的精度可以达到0.1μm,与理论分析的结果相一致。     

基于CCD的石英玻璃管壁厚在线检测系统研究

提出了一种用于石英玻璃管壁厚非接触测量的光电检测技术,研制了石英玻璃管壁厚在线检测系统。在确定检测总体方案的基础上,进行了石英玻璃管厚度检测原理、发射光学系统、CCD器件选择和数据处理系统的研究。根据几何光学中反射与折射定律,利用三角关系建立了石英玻璃管壁厚和光束宽度之间的关系。对实验结果进行了误差分析,验证了方案的可行性,系统测量精度优于±0．01mm。系统调试和实际测量结果表明,研制的系统满足在线非接触测量要求。     

融合拉曼散射光和荧光信号反演海面溢油厚度的算法研究

随着海洋溢油问题的日益严重,多种遥感技术被用于海面溢油监测,其中激光诱导荧光(LIF)技术是目前被认为最有效的海面溢油探测技术之一。Hoge等基于LIF技术提出了一种利用拉曼散射光评估薄油膜厚度的积分反演算法并广泛应用于海面溢油探测,针对该算法存在误差较大的问题,提出一种融合拉曼散射光和荧光信号评估海面溢油厚度的反演算法。首先利用拉曼散射光信号反演油膜厚度,然后利用该反演结果计算获取溢油油品的荧光特征光谱,最后利用荧光信号反演油膜厚度。文中推导了利用荧光信号反演油膜厚度的算法,给出了油品荧光特征光谱的逼近算法,并给出了利用荧光信号反演油膜厚度的误差分析。通过实验对该方法进行了验证,选用原油和柴油为实验油品,以波长405 nm的激光作为激发光源,采集波长范围为420～700 nm,采集了海水的背景荧光和拉曼散射光信号、实验油品2,5,10和20 μm等不同厚度油膜的光谱信号。将采集数据分为训练集和测试集,利用训练集数据采用梯度下降法获取油品的荧光特征光谱,利用测试集数据分别采用积分拉曼法和该方法反演油膜厚度。采用积分拉曼法,原油不同厚度油膜反演结果的平均误差分别为12.6%,4.6%,4.4%和2.3%,柴油不同厚度油膜反演结果的平均误差分别为14.0%,7.0%,4.2%和3.6%;采用本文方法,原油不同厚度油膜反演结果的平均误差分别为2.5%,2.2%,1.2%和1.1%,柴油不同厚度油膜反演结果的平均误差分别为3.0%,2.4%,2.7%和1.6%。实验结果表明,2 μm油膜反演结果的误差降低最多,原油和柴油2 μm油膜的反演结果误差分别由12.6%和14.0%降低为2.5%和3.0%,其他厚度油膜反演结果的误差也有较大程度的降低,油膜厚度反演结果的误差均小于3%,采用本文算法可以有效提高油膜厚度反演结果的精度。     

Measurement of water film thickness by laser-induced fluorescence and Raman imaging

We present two non-intrusive, laser-based imaging techniques for the quantitative measurement of water fluid film thickness. The diagnostics methods are based on laser-induced fluorescence (LIF) of the organic tracer ethyl acetoacetate added to the liquid in sub-percent (by mass) concentration levels, and on spontaneous Raman scattering of liquid water, respectively, both with excitation at 266 nm. Signal intensities were calibrated with measurements on liquid layers of known thickness in a range between 0 and 500 μm. Detection via an image doubler and appropriate filtering in both light paths enabled the simultaneous detection of two-dimensional liquid film thickness information from both methods. The thickness of water films on transparent quartz glass plates was determined with an accuracy of 9% for the tracer LIF and 15% for the Raman scattering technique, respectively. The combined LIF/Raman measurements also revealed a preferential evaporation of the current tracer during the time-resolved recording of film evaporation.     

Ellipsometric in situ measurements during deposition of amorphous CuxSn100−x films

Amorphous metallic films are produced by quench condensation onto a 4K cold Si substrate under ultra high vacuum conditions. During evaporation the film growth is recorded in situ ellipsometrically. At the same time the mass of the film is measured with quartz microbalances. It is shown that the dielectric constants are dependent on film thickness. Different film models for evaluating the ellipsometric measurements are used and tested. The influence of porosity and interface roughness is taken into account. The dependence of mass density on thickness is mainly understood in terms of island growth. The dependence of the dielectric constant on concentration is discussed with respect to the Faber-Ziman theory.Dedicated to Prof. Dr. G. von Minnigerode on the occasion of his 60th birthday     

一种最小化薄膜光学参数表征偏差的椭偏测量系统误差处理技术

基于对椭偏测量数据中难以消除的系统误差的作用机理分析,提出了一种新型的薄膜光学参数表征误差处理技术。建议选取薄膜椭偏角关于折射率和几何厚度的一阶偏导数,对大部分测量入射角满足符号相反或只有其中一个为零的条件的波段,剔除偏导数对全部测量入射角满足符号相同或同时为零的条件的奇点波长附近波段,作为反演表征用的椭偏测量数据采集区域,以最小化椭偏测量系统误差引起的薄膜光学参数反演表征值相对真实值的偏差大小。其本质是通过一阶偏导数筛选测量数据,来最小化椭偏测量系统误差对薄膜光学参数表征的误差传递作用。通过数值模拟实验,对比研究了该技术对不同测量入射角范围的适用性及实施技巧,以可复现的数值实验数据和合理的理论解释支持和验证了这种误差处理技术的可靠性,为薄膜在线表征和镀膜监控提供了一定的参考价值。     

Tunable diode laser absorption sensor for the simultaneous measurement of water film thickness,liquid- and vapor-phase temperature

A four-wavelength near-infrared (NIR) tunable diode laser sensor has been developed for the simultaneous measurement of liquid water film thickness, liquid-phase temperature and vapor-phase temperature above the film. This work is an important improvement of a three-wavelength concept previously introduced by Yang et al. (Appl. Phys. B 99:385, 2010), which measured the film thickness in environments with known temperature only. In the new sensor, an optimized combination of four wavelengths is chosen based on a sensitivity analysis with regard to the temperature dependence of the liquid water absorption cross section around 1.4 μm. The temperature of liquid water and the film thickness are calculated from absorbance ratios taken at three wavelength positions assessing the broad-band spectral signature of liquid water. The vapor-phase temperature is determined from the absorbance ratio of two lasers rapidly tuned across two narrow-band gas-phase water absorption transitions. The performance of the sensor was demonstrated in a calibration cell providing liquid layers of variable thickness and temperature with uncertainties smaller than 5% for thickness measurements and 1.5% for liquid-phase temperatures, respectively. Experiments are also presented for time-resolved thickness and temperature measurements of evaporating water films on a quartz plate.     

石英消偏器紫外-真空紫外消偏特性研究

在Lyot消偏器的基础上 ,设计研制了由两块楔角相同的楔形石英晶体构成的石英消偏器 ,用于降低光谱仪偏振响应度。根据矩阵光学理论 ,数值模拟计算了紫外 真空紫外波段石英消偏器消偏特性随其中心厚度以及入射光偏振状态、光谱带宽等的变化规律。利用氟化锂偏振器作为起偏器和检偏器 ,在 1mSeya Namioka单色仪上实验研究了石英消偏器在紫外 真空紫外波段的消偏特性 ,经过石英消偏器后 ,出射光的偏振度小于 1% ,可满足石英消偏器用于光谱辐射测量的工作要求。     

衬底对化学气相沉积法制备氧化硅纳米线的影响

通过化学气相沉积法在不同衬底上制备了大量的氧化硅纳米线.选用衬底为Si片、带有约100nm厚SiO2氧化层Si片和石英片.利用场发射扫描电子显微镜(SEM)和透射电镜(TEM，配备有能谱仪)对样品的表面形貌、结构和成分进行研究.结果表明：这些纳米线都为非晶态，但在不同衬底上生长的纳米线形貌、尺寸和化学成分不同.讨论了各种衬底对不同特征氧化硅纳米线生长的影响. 关键词： 化学气相沉积 纳米线 纳米颗粒     

A spectroscopic method for determining thickness of quartz wave plate

A spectroscopic method to determine thickness of quartz wave plate is presented. The method is based on chromatic polarization interferometry. With the polarization-resolved transmission spectrum (PRTS)curve, the phase retardation of quartz wave plate can be determined at a wide spectral range from 200 to2000 nm obviously. Through accurate judgment of extreme points of PRTS curve at long-wave band, the physical thickness of quartz wave plates can be obtained exactly. We give a measuring example and the error analysis. It is found that the measuring precision of thickness is mainly determined by the spectral resolution of spectrometer.     

Structural analysis of the fracture surface of a heterogeneous body (quartz sandstone)

The structure of surface layers of quartz sandstone with a thickness of ~1 μm before and after destruction by a compressive stress is studied by methods of infrared, photoluminescent, and Raman spectroscopy. Before destruction, this layer contained quartz grains cemented with montmorrillonite and kaolinite. The grains are covered with a thin water layer and have crystallographic defects: Si–O^–, self-trapped excitons, AlOH and LiOH compounds, [AlO₄]^– centers, etc. The destructed surface contains separate quartz grains with sizes of ~2 μm and a reduced defect concentration. It is assumed that the defects reduce the strength of quartz grains, which are destroyed in the first turn.     

Vibration analysis of a new polymer quartz piezoelectric crystal sensor for detecting characteristic materials of volatility liquid

We present a new polymer quartz piezoelectric crystal sensor that takes a quartz piezoelectric crystal as the basal material and a nanometer nonmetallic polymer thin film as the surface coating based on the principle of quartz crystal microbalance (QCM). The new sensor can be used to detect the characteristic materials of a volatile liquid. A mechanical model of the new sensor was built, whose structure was a thin circle plate composing of polytef/quartz piezoelectric/polytef. The mechanical model had a diameter of 8 mm and a thickness of 170 μ. The vibration state of the model was simulated by software ANSYS after the physical parameters and the boundary condition of the new sensor were set. According to the results of experiments, we set up a frequency range from 9.995850 MHz to 9.997225 MHz, 17 kinds of frequencies and modes of vibration were obtained within this range. We found a special frequency f_sp of 9.996358 MHz. When the resonant frequency of the new sensor’s mechanical model reached the special frequency, a special phenomenon occurred. In this case, the amplitude of the center point O on the mechanical model reached the maximum value. At the same time, the minimum absolute difference between the simulated frequency based on the ANSYS software and the experimental measured stable frequency was reached. The research showed that the design of the new polymer quartz piezoelectric crystal sensor perfectly conforms to the principle of QCM. A special frequency value f_sp was found and subsequently became one of the most important parameters in the new sensor design.     

Growth of crystalline quartz films with AT-cut plane by means of catalyst-enhanced vapor-phase epitaxy under atmospheric pressure

Crystalline quartz films with an AT-cut plane have been grown by catalyst-enhanced vapor-phase epitaxy, at atmospheric pressure, using two quartz buffer layers on a sapphire (110) substrate. In this method, the first quartz buffer layer was deposited on the sapphire (110) substrate at 773 K. After annealing at 823 K, the second buffer layer was deposited at 723 K. The crystal quartz epitaxial layer was then grown at 843 K. The X-ray full-width-at-half-maximum (FWHM) value of the crystalline quartz film obtained was smaller than that of crystalline quartz prepared using a hydrothermal process. The crystalline quality of the quartz films was dependent on the thickness of the buffer layers. Furthermore, it was found that angle control of the cut plane depended on the film thickness of the second buffer layer. The quartz films grown by vapor phase epitaxy show good oscillation characteristics at room temperature.     

大口径石英基底衍射透镜的高精度制备方法

针对传统接触式曝光过程中掩模版因自身重力产生形变从而引入不可忽视的线宽误差和位置误差的问题,提出了一种大口径石英基底衍射透镜的高精度制备方法.采用背面具有真空道的高平面度、高强度金属校正工装吸附在掩模版上,利用掩模版上下表面的压强差使其与工装高度贴合,确保掩模版的高平面度.待石英基底所有区域均与掩模版结构面紧密贴合后取下工装.完成接触式曝光和显影后,采用反应离子刻蚀技术对大口径石英基底进行刻蚀,最终得到高精度微纳米结构.经有限元分析,使用该校正工装后,掩模版的形变量由28.85μm减小为0.88μm.实验结果表明,采用该方法制备的口径430mm两台阶石英基底菲涅尔衍射透镜波像差优于1/25λ,平均衍射效率为38.24%,达到理论值的94.35%,具有良好的聚焦和光学成像效果.     

激光透射成像法测量石英管的外径与壁厚

为了同时同位测量石英管的外径和壁厚,建立了激光透射成像系统,对系统测量原理进行研究。基于几何光学和菲涅尔公式,分别导出平行光垂直照射石英管后的透射光线偏向角、相对光强与入射光线离轴距离之间的关系;通过数值计算,分析了偏向角、相对透射光强随入射光线离轴距离的变化特点;针对物方远心光路,分析了光阑对偏向角和相对光强的限制;基于CCD成像原理,通过引入标定系数和补偿因子,导出石英管外径与壁厚的计算公式。实验结果表明:外径绝对误差和相对误差的平均值分别为0.119mm和0.91%,壁厚绝对误差和相对误差的平均值分别为0.153mm和6%。     

石英波片偏光干涉谱的研究

根据石英晶体双折射率的色散特性,对石英波片的偏光干涉谱进行了理论分析和数值模拟,提出了一种石英波片延迟量和厚度的偏光干涉标定法。即由偏光干涉谱,可以得出石英波片在200~2000 nm宽光谱范围内的延迟量;通过对长波段的偏光干涉谱极值波长的精确判断,可以准确地计算出该石英波片的厚度。利用Lambda900紫外-可见-近红外分光光度计对一片石英波片的偏光干涉谱进行了测量。在波长精度为0.1 nm的情况下,测量的厚度精度为0.1μm。误差分析结果表明,通过提高光谱的最小分辨力及选择较长的光谱波段进行测量计算,可以有效地降低误差。     

K9和石英玻璃基片上Au膜真空紫外反射特性研究

采用离子束溅射法,分别在经过不同前期清洗方法处理过的K9及石英玻璃光学基片上,选择不同的镀膜参量,镀制了多种厚度的Au膜。对镀制的Au膜在真空紫外波段较宽波长范围内的反射率进行了连续测量。测试结果表明:辅助离子源的使用方式、Au膜厚度对反射镜的反射率有重大影响。基片材料、镀前基片表面清洗工艺等对反射率也有一定影响。采用镀前离子轰击,可显著提高Au膜反射率及膜与基底的粘合力;获得最高反射率时的最佳膜厚与基片材料、镀膜工艺密切相关。对经过离子清洗的石英基片,膜厚在30 nm左右反射率最高;比较而言,石英基片可获得更高的反射率;辅助离子源的使用还显著影响获得最高反射率时对应的最佳膜厚值,且对K9基片的影响更显著。     

基于激光拉曼光谱的水面油膜厚度测量方法研究

为了实现水体表面油膜厚度的快速非接触检测,基于激光拉曼光谱检测技术,搭建了水体表面油膜厚度拉曼光谱检测系统。以532 nm激光作为激发光源,以常见的柴油和汽油为例研究了不同油品的拉曼光谱特性,研究结果表明,油膜拉曼光谱响应特性与油品密切相关,相同油膜厚度情况下不同油品的拉曼光谱曲线有明显的差异,97#汽油在1 651 cm-1光谱强度要高于90#汽油。随着油膜厚度的增加,柴油316和1 451 cm-1光谱强度和汽油1 651 cm-1拉曼位移光谱强度增加,油拉曼光谱信号变强;根据油水界面拉曼光谱特征,设计了油膜厚度计算因子,实验证明随着油膜厚度增加,油膜厚度计算因子r_film呈下降趋势。可以将油膜厚度计算因子作为水体表面油膜厚度测量的一种依据。