Lithographical laser ablation using femtosecond laser

Lithographical laser ablation was demonstrated using a femtosecond laser with a lithographical optical system. In this method, a femtosecond laser beam passes through a mask and the pattern is imaged on a film by a coherent optical system. As a result, the film is lithographically ablated, and a micron-sized pattern can be generated in a single shot. The resolution of generation was 13 m, and the narrowest width of a generated line was about 4 m. Moreover, the system was applied to transmission gratings as masks, and nano-sized periodic structures such as nano-sized hole matrices and nano-meshes were generated in a single shot. PACS 52.38.Mf; 42.25.Hz; 42.82.Cr; 81.16.-c     

Superresolved femtosecond laser ablation

The determinist behavior of the femtosecond ablation process allows morphing features well under the diffraction limit by utilizing the thresholding effect, down to the nanometer scale. Because there are a vast range of applications where scaling down the size of the features is a major concern, we investigate the use of superresolving pupil plane filters. As is well known, these filters redistribute the focused optical intensity for a narrower bright spot and, as a trade-off, increase the sidelobes. However, this drawback can be rendered insignificant if all the outer optical power is kept under the determinist threshold value. Two types of pure absorbing binary filter have been tried, giving credence to a size reduction of the ablations in fused silica.     

Synthesis of cubic ruthenium nitride by reactive pulsed laser ablation

The recent synthesis of platinum nitride opens the possibility of novel platinum-group metal nitrides to exist. In this work we report the synthesis of ruthenium nitride by reactive pulsed laser ablation. Several plausible structures have been evaluated by ab initio calculations using the full potential linearized augmented plane wave method, in order to investigate the ruthenium nitride structural and electronic properties. In fact, the predicted symmetry of stoichiometric RuN matches the experimental diffraction data. RuN crystallizes with NaCl-type structure at room temperature with cell-parameter somewhat larger than predicted by calculations. However we found a marginal chemical strength in these nitrides. The material is destroyed by mild acid and basic solutions. Under annealing RuN decomposes abruptly for temperatures beyond 100 °C. Since the thermal stability correlates directly with the mechanical properties our finding cast doubts than the latter transition metal nitrides can be ultra-hard materials at ambient conditions.     

Single-shot ablation threshold of chromium using UV femtosecond laser pulses

Single-shot ablation threshold for thin chromium film was studied using 266 nm, femtosecond laser pulses. Chromium is a useful material in the nanotechnology industry and information on ablation threshold using UV femtosecond pulses would help in precise micromachining of the material. The ablation threshold was determined by measuring the ablation crater diameters as a function of incident laser pulse energy. Absorption of 266 nm light on the chromium film was also measured under our experimental conditions, and the absorbed energy single-shot ablation threshold fluence was \(46 \pm 5\)  mJ/cm². The experimental ablation threshold fluence value was compared to time-dependent heat flow calculations based on the two temperature model for ultrafast laser pulses. The model predicts a value of 31.6 mJ/cm² which is qualitatively consistent with the experimentally obtained value, given the simplicity of the model.     

Tooth ablation using a CPA-free thin disk femtosecond laser system

Caries – the most frequent cause for dental surgery – still is mainly treated with conventional mechanical drills, although lasers have meanwhile been successfully applied to various clinical disciplines. Since ultrashort laser pulses with sufficient pulse energies have only been available at low repetition rates (< 1 kHz) in recent decades, solely continuous wave radiation or pulse durations longer than thermal diffusion processes were applied with the result of severe thermal damage and pain. In this report we present results on dental tissue ablation obtained with a novel thin disk Yb:KYW regenerative amplifier system that does not require chirped pulse amplification (CPA). We show that femtosecond laser pulses provide us with todays optimal tool to treat dental decay in an acceptable time, in an excellent quality, and with unsurpassed caries selectivity. The superior quality is a result of the non-thermal laser-tooth interaction. All our results are based on environmental scanning electron microscopy. PACS 42.62.–b; 06.60.Jn; 82.80.–d     

Micromachining of a thin film by laser ablation using femtosecond laser with masks

A gold thin film was machined by laser ablation using a femtosecond laser with mask patterns in the shape of lines and numbers. The patterns were successfully transferred with proper focusing and laser fluence. The optimal femtosecond laser fluence to keep the line width was about 5.2 mJ/cm² on the mask, and 99 mJ/cm² on the film. The processing resolution was 13 μm, and the narrowest line width was about 4 μm.     

Polarization-dependent ablation of silicon using tightly focused femtosecond laser vortex pulses

We demonstrate experimentally that, in a tight focusing geometry, circularly polarized femtosecond laser vortex pulses ablate material differently depending on the handedness of light. This effect offers an additional degree of freedom to control the shape and size of laser-machined structures on a subwavelength scale.     

Phase transitions in femtosecond laser ablation

In this study we simulate an interaction of femtosecond laser pulses (100 fs, 800 nm, 0.1-10 J/cm²) with metal targets of Al, Au, Cu, and Ni. For analysis of laser-induced phase transitions, melting and shock waves propagation as well as material decomposition we use an Eulerian hydrocode in conjunction with a thermodynamically complete two-temperature equation of state with stable and metastable phases. Isochoric heating, material evaporation from the free surface of the target and fast propagation of the melting and shock waves are observed. On rarefaction the liquid phase becomes metastable and its lifetime is estimated using the theory of homogeneous nucleation. Mechanical spallation of the target material at high strain rates is also possible as a result of void growth and confluence. In our simulation several ablation mechanisms are taken into account but the main issue of the material is found to originate from the metastable liquid state. It can be decomposed either into a liquid-gas mixture in the vicinity of the critical point, or into droplets at high strain rates and negative pressure. The simulation results are in agreement with available experimental findings.     

Synthesis of nanocrystalline material by sputtering and laser ablation at low temperatures

Physical vapor deposition techniques such as sputtering and laser ablation – which are very commonly used in thin film technology – appear to hold much promise for the synthesis of nanocrystalline thin films as well as loosely aggregated nanoparticles. We present a systematic study of the process parameters that facilitate the growth of nanocrystalline metals and oxides. The systems studied include TiO₂, ZnO, γ-Al₂O₃, Cu₂O, Ag and Cu. The mean particle size and crystallographic orientation are influenced mainly by the sputtering power, the substrate temperature and the nature, pressure and flow rate of the sputtering gas. In general, nanocrystalline thin films were formed at or close to 300 K, while loosely adhering nanoparticles were deposited at lower temperatures. Received: 31 October 2000 / Accepted: 9 January 2001 / Published online: 26 April 2001     

XeCl laser ablation of yttria stabilized zirconia

XeCl laser ablation of yttria stabilized zirconia (YSZ) in air and in vacuum (1.3×10^–4 Pa) is studied by means of etch depth measurements, scanning electron microscopy, and X-ray photoelectron spectroscopy of ablated surfaces. Results on ablation rate, surface morphology, and surface chemical composition are discussed in terms of the influence of ambient atmosphere on the ablation process, rapid melting and solidification of ablated surfaces, and preferential removal of oxygen atoms from the YSZ surface.     

Dynamics of mid-infrared femtosecond laser resonant ablation

Resonant ablation is beneficial to avoiding uncontrollable subsurface damages in the laser ablation of polymers. In this paper the dynamics of mid-infrared laser resonant ablation of polylactic acid and toluene was calculated by using fluid dynamic equations. The merits and drawbacks of mid-infrared femtosecond laser resonant ablation of high molecular weight polymers have been discussed.     

Nanocomposites based on globular photonic crystals grown by laser ablation using femtosecond laser pulses

The prepared samples were characterized by reflection and transmission spectra of broadband visible-range radiation, and the volume fraction of substances introduced into pores of artificial opals is estimated. It is found that the introduction of solid-state nanoparticles with negative real part of the permittivity into opal pores results in a decrease in the effective refractive index and a short-wavelength shift in the spectral position of the stop band in artificial opal.     

Neutrals ejection in intense femtosecond laser ablation

Time-resolved shadowgraphs and holograms of intense femtosecond laser ablation of aluminum are reported. The different bending trends of interference fringes are found in the ablations of aluminum and other materials at probe wavelengths of 400 and 800 nm, for the first time to our knowledge, which could be attributed to the ejection of massive neutral droplets induced by critical-point phase separation during the second material ejection.     

Metal absorptivity in femtosecond pulsed laser ablation

In this paper, the effect of the absorptivity of metal on femtosecond pulsed laser ablation is investigated. The formulas for the absorptivity depending on target temperature are derived from Maxwell Equations and the Lambert-Beer’s law. Based on this, a new two-temperature model is proposed to describe the femtosecond pulsed laser ablation with metal. Then, using Au as an example, a finite difference method is employed to simulate the space-dependent and time-dependent absorptivity and the target temperature. The temperature evolution of our model is compared with the result obtained form the heat conduction model taking the absorptivity as constant. It is shown that the absorptivity plays an important role in the femtosecond pulsed laser ablation. The results of this paper are helpful in choosing the best technical parameters in femtosecond pulsed laser ablation.      

Adaptive control of femtosecond laser ablation plasma emission

The influence of temporal pulse shaping on plasma plume generated by ultrafast laser irradiation of aluminum is investigated. Time resolved plasma emission spectroscopy is coupled with a temporal shaping procedure in a closed loop. The ionic emission is enhanced relative to the neutral one via an adaptive optimization strategy. The plasma emission efficiency in case of optimized and ultrashort temporal shapes of the laser pulses are compared, evidencing an enhancement of the ionization degree of the plasma plume. Simplified temporal shapes of the femtosecond laser pulses are extracted from the optimized shape and their corresponding effect on laser induced plasma emission is discussed.     

Surface ablation of lithium tantalate by femtosecond laser

We report measurements of the laser induced breakdown threshold in lithium tantalate with different number of pulses delivered from a chirped pulse amplification Ti: sapphire system. The threshold fluences were determined from the relation between the diameter D² of the ablated area and the laser fluence F₀. The threshold of lithium tantalite under single-shot is found to be 1.84 J/cm², and the avalanche rate was determined to be 1.01 cm²/J by calculation. We found that avalanche dominates the ablation process, while photoionization serves as a free electron provider.     

Applications of femtosecond Bessel beams to laser ablation

We demonstrate the fabrication of graphene-carbon nanotubes (CNTs) composite-based flexible transparent conductive films (GC-TCFs) and their improved durability on repetitive strain. The graphene and CNTs are synthesized using thermal chemical vapor deposition. To fabricate GC-TCFs, the graphenes are transferred and the CNTs are successively spray-deposited on polymer substrates, respectively. The change of electrical property of the TCFs is investigated as the response of repetitive strain loading and unloading. The sheet resistance of the GC-TCFs is much lower than CNT-based TCFs, owing to the lower contact resistance. In addition, when the cyclic strain is applied on the GC-TCFs, the films show improved durability in electrical property compared to graphene-based TCFs. Finally, the coated CNTs act as one dimensional conductive path across the cracks, which prevent electrical degradation during the repetitive strain application.     

Light absorption engineering of hydrogenated nanocrystalline silicon by femtosecond laser

The light absorption coefficient of hydrogenated nanocrystalline silicon has been engineered to have a Gaussian distribution by means of absorption modification using a femtosecond laser. The absorption-modified sample exhibits a significant absorption enhancement of up to ～700%, and the strong absorption does not depend on the incident light. We propose a model responsible for this interesting behavior. In addition, we present an optical limiter constructed through this absorption engineering method.     

Metal thin film ablation with femtosecond pulsed laser

Micromachining thin metal films coated on glass are widely used to repair semiconductor masks and to fabricate optoelectrical and MEMS devices. The interaction of lasers and materials must be understood in order to achieve efficient micromachining. This work investigates the morphology of thin metal films after machining with femtosecond laser ablation using about 1 μm diameter laser beam. The effect of the film thickness on the results is analyzed by comparing experimental images with data obtained using a two-temperature heat transfer model. The experiment was conducted using a high numerical aperture objective lens and a temporal pulse width of 220 fs on 200- and 500-nm-thick chromium films. The resulting surface morphology after machining was due to the thermal incubation effect, low thermal diffusivity of the glass substrate, and thermodynamic flow of the metal induced by volumetric evaporation. A Fraunhofer diffraction pattern was found in the 500-nm-thick film, and a ripple parallel to the direction of the laser light was observed after a few multiple laser shots. These results are useful for applications requiring micro- or nano-sized machining.