High Quality A1N with a Thin Interlayer Grown on a Sapphire Substrate by Plasma-Assisted Molecular Beam Epitaxy

We report an AIN epi-layer grown on sapphire by plasma-assisted molecular beam epitaxy with a thin interlayer structure. The effects of growth mode on threading dislocations （TDs） and surface morphology are studied. Then an interlayer structure grown under a V/Ⅲ ratio of 1 is adopted to improve the AIN crystalline quality. By optimizing the thickness of the interlayer, the TD density and surface roughness can be reduced simultaneously.     

High Quality AlN with a Thin Interlayer Grown on a Sapphire Substrate by Plasma-Assisted Molecular Beam Epitaxy

We report an AlN epi-layer grown on sapphire by plasma-assisted molecular beam epitaxy with a thin interlayer structure. The effects of growth mode on threading dislocations (TDs) and surface morphology are studied. Then an interlayer structure grown under a V/Ⅲ ratio of 1 is adopted to improve the AlN crystalline quality. By optimizing the thickness of the interlayer, the TD density and surface roughness can be reduced simultaneously.     

MBE生长ZnO薄膜的结构和光学特性的研究

用等离子体源辅助分子束外延(P-MBE)方法在蓝宝石(0001)面上生长出了高质量的ZnO薄膜,并对其结构和发光特性进行了研究。在XRD中只观察到ZnO薄膜的(0002)衍射峰,其半高宽(FWHM)值为0.18°;而在共振Raman散射光谱中观测到1LO(579 cm-1 )和2LO(1 152 cm-1 )两个峰位,这些结果表明ZnO薄膜具有单一c轴取向和高质量的纤维锌矿晶体结构。在吸收光谱中观测到自由激子吸收和激子-LO声子吸收峰,这表明在ZnO薄膜中激子稳定的存在于室温,并且两峰之间能量间隔为71.2 meV,与文献上报道的ZnO纵向光学声子能量(71 meV)相符。室温下在光致发光光谱(PL)中仅观测到位于376 nm处的自由激子发光峰,而没有观测到与缺陷相关的深能级发射峰,表明ZnO薄膜具有较高的质量和低的缺陷密度。     

Semimetal NaaBi Thin Film Grown on Double-Layer Graphene by Molecular Beam Epitaxy

Atomically fiat thin films of topological semimetal Na3Bi are grown on double-layer graphene formed on 6H SiC（0001） substrates by molecular beam epitaxy. By combined techniques of molecular beam epitaxy, scanning tunneling microscopy and angle resolved photoelectron spectroscopy, the growth conditions for NaaBi thin films on double-layer graphene are successfully established. The band structure of NaaBi grown on graphene is mapped along Г-M and Г-K; directions. Furthermore, the energy band of Na3Bi at higher energy is uncovered by doping Cs atoms on the surface.     

On the Statistics of Nucleation of 3D Coherent Islands in Heteroepitaxy from a Molecular Beam

Within the framework of the cell method, the statistics of nucleation on the vertex of a 2D island is analyzed considering the influence of elastic stresses on the bond energy of an atom in a disruption. It is shown that elastic stresses at high temperatures may decrease the nucleation time as the temperature increases and the growth rate decreases. The results obtained agree qualitatively with the experimental data on the formation of 3D coherent islands in heteroepitaxy of semiconductors in molecular-beam epitaxy systems.     

Interfaces in InAs/GaSb Superlattices Grown by Molecular Beam Epitaxy

Short period InAs（4ML）/GaSb（SML） superlattices （SLs） with InSb- and mixed-like （or Ga1-xInxAs1-ySby- like） interfaces （IFs） are grown by molecular-beam epitaxy （MBE） on （001） GaSh substrates at optimized growth temperature. Raman scattering reveals that two kinds of IFs can be formed by controlling shutter sequences. X-ray diffraction （XRD） and atomic force microscopy （AFM） demonstrate that SLs with mixed-like IFs are more sensitive to growth temperature than that with InSb-like IFs. The photoluminescence （PL） spectra of SLs with mixed-like IFs show a stronger intensity and narrower line width than with InSb-like IFs. It is concluded that InAs/GaSb SLs with mixed-like IFs have better crystalline and optical properties.     

InGaAsSb/InP的MBE生长及特性

研究了InP基InGaAsSb外延材料受生长温度和Ⅴ/Ⅲ比的影响。实验中利用高能电子衍射(RHHEED)监测获得了合适的生长温度和Ⅴ/Ⅲ比,采用扫描电子显微镜 (SEM)、X射线光电子能谱(XPS)、X射线双晶衍射(XRDCD)和光致发光(PL)谱等方法研究了InGaAsSb薄膜材料的表面形貌、结晶质量和发光特性。通过控制生长温度和Ⅴ/Ⅲ比,获得了X射线衍射峰半峰全宽较窄的高质量的外延材料。     

High Lattice Match Growth of InAsSb Based Materials by Molecular Beam Epitaxy

High lattice match growth of InAsSb based materials on GaSb substrates is demonstrated.The present results indicate that a stable substrate temperature and the optimal Sux ratios are of critical importance in achieving a homogeneous InAsSb based material composition throughout the growth period.The quality of these epilayers is assessed using a high-resolution x-ray diffraction and atomic force microscope.The mismatch between the GaSb substrate and InAsSb alloy achieves almost zero,and the rms surface roughness of InAsSb alloy achieves around 1.7? over an area of 28μm×28μm.At the same time,the mismatches between GaSb and InAs/InAs_(0.73)Sb_(0.27) superlattices(SLs) achieve approximately 100arcsec(75 periods) and zero(300 periods),with the surface rms roughnesses of InAs/InAs_(0.73)Sb_(0.27) SLs around 1.8? (75 periods) and 2.1 ?(300 periods)over an area of 20μm×20μm,respectively.After fabrication and characterization of the devices,the dynamic resistance of the n-barrier-n InAsSb photodetector near zero bias is of the order of 10~6 Ω·cm~2.At 77 K,the positive-intrinsic-negative photodetectors are demonstrated in InAsSb and InAs/InAsSb SL(75 periods) materials,exhibiting fifty-percent cutoff wavelengths of 3.8 μm and 5.1 μm,respectively.     

用等离子体辅助分子束外延生长氧化锌单晶薄膜

利用等离子体辅助分子束外延(P-MBE)方法,通过优化生长条件,在c平面蓝宝石(Al_2O_3)上生长出氧化锌(ZnO)单晶薄膜。使用反射式高能衍射仪(RHEED)原位监测到样品表面十分平整,X射线摇摆曲线(XRC)测得ZnO薄膜的<002>取向半峰全宽为0.20°,证实为ZnO单晶薄膜。室温下吸收谱(ABS)和光致发光(PL)谱显示了较强的激子吸收和发射,且无深能级(DL)发光。电学性能测量表明,生长的ZnO为n型半导体,室温下载流于浓度为7×10~(16) cm~(-3),与体单晶ZnO中的载流子浓度相当。     

Optimization of Metamorphic InGaAs Quantum Wells on GaAs Grown by Molecular Beam Epitaxy

We investigate the molecular beam epitaxy growth of metamorphic InxGal-xAs materials （x up to 0.5） on GaAs substrates systematically. Optimization of structure design and growth parameters is aimed at obtaining smooth surface and high optical qualdty. The optimized structures have an average surface roughness of 0.9-1.8 nm. It is also proven by PL measurements that the optical properties of high indium content （55%） InGaAs quantum wells are improved apparently by defect reduction technique and by introducing Sb as a surfactant. These provide us new ways for growing device quality metamorphic structures on GaAs substrates with long-wavelength emissions.     

Admittance Characteristics of nBn Structures Based on Hgcdte Grown by Molecular Beam Epitaxy

Russian Physics Journal - For the first time, the admittance of nBn structures based on HgCdTe grown by molecular beam epitaxy was experimentally investigated in a wide range of frequencies and...     

P-MBE制备氮掺杂p型ZnO中空穴的散射机制

利用等离子体辅助的分子束外延(P-MBE)技术,在蓝宝石衬底上制备了氮掺杂的p型ZnO薄膜。通过变温霍尔测量研究了空穴浓度和迁移率随温度的变化特性。对载流子浓度拟合的结果表明氮受主具有75meV的能级深度。通过对各种散射机制下迁移率的讨论,发现由晶粒及其晶界组成的这种结构极大地降低了p型ZnO中载流子的迁移率。     

射频等离子体辅助MBE生长GaN及Mg掺杂的光致发光

采用射频等离子体辅助分子束外延(RF plasma-assisted MBE)系统生长非故意掺杂GaN和p型GaN,并且通过室温和低温光致发光(PL)谱测试研究了材料的发光特性及与杂质态的关系,对于GaN外延层出现的黄带发光进行分析。结果表明,富Ga条件下生长的GaN材料特性要优于富N生长的材料;非故意掺杂的富Ga样品中出现的黄带发光(YL)与GaN中生成能最低的氮空位(V_N)缺陷有关;不同的Mg掺杂浓度对样品的PL特性有较大的影响;结合Hall效应测量结果,认为在Mg重掺杂的样品中出现的黄带发光,与GaN的自补偿效应以及重掺杂导致的晶体质量下降有关。     

分子束外延生长亚稳态ZnCdSe/MgSe低维量子阱结构及其光学性质

采用分子束外延技术在(001)取向的InP衬底上外延生长了亚稳态的ZnxCd1-xSe/MgSe低维量子阱结构,并通过光致发光和子带吸收方法,分析其能带结构。在单量子阱样品制备过程中,高能电子衍射强度振荡表明MgSe可以实现二维生长模式,衍射图样证明其为亚稳态闪锌矿结构。通过引入厚的ZnxCd1-xSe空间层,抑制了MgSe垒层的相变,并能进一步提高样品的结晶质量,得到高结晶质量的多量子阱结构。通过计算不同阱宽的能带与光致发光实验比较,证明了ZnxCd1-xSe/MgSe的导带带阶为1.2 eV,价带带阶为0.27 eV。为了进一步验证其能带结构,制备了电子掺杂的ZnxCd1-xSe/MgSe的多量子阱,观测到半高宽很窄的中红外吸收。利用发光谱确定的带阶计算了量子阱中子带的吸收波长,和实验结果非常吻合。设计了一种双量子阱结构,计算结果显示,通过利用量子阱中的耦合效应,可以实现1.55μm光通信波段的吸收。     

Epitaxial Properties of Co-Doped ZnO Thin Films Grown by Plasma Assisted Molecular Beam Epitaxy

High quality Co-doped ZnO thin films are grown on single crystalline Al2O3（0001） and ZnO（0001） substrates by oxygen plasma assisted molecular beam epitaxy at a relatively lower substrate temperature of 450℃. The epitaxial conditions are examined with in-situ reflection high energy electron diffraction （RHEED） and ex-situ high resolution x-ray diffraction （HRXRD）. The epitaxial thin films are single crystal at film thickness smaller than 500nm and nominal concentration of Co dopant up to 20%. It is indicated that the Co cation is incorporated into the ZnO matrix as Co^2＋ substituting Zn^2＋ ions. Atomic force microscopy shows smooth surfaces with rms roughness of 1.9 nm. Room-temperature magnetization measurements reveal that the Co-doped ZnO thin films are ferromagnetic with Curie temperatures Tc above room temperature.     

Photoemission Studies of the Electronic Structure of GaN Grown by Plasma Assisted Molecular Beam Epitaxy

Physics of the Solid State - The results of experimental studies of the electronic and photoemission properties of the GaN epitaxial layer grown by molecular beam epitaxy with plasma activation of...     

Determination of in-depth thermal strain distribution in Molecular Beam Epitaxy GaAs on Si

In-depth stress distribution GaAs layers grown by Molecular Beam Epitaxy (MBE) on Si (001) has been studied by X-ray diffraction, photoluminescence and Raman spectroscopy. In order to determine the stress state at different distances to the interface GaAs/Si, layers of different thickness were prepared by chemical etching of the grown samples. We observe a non-uniform residual strain distribution through the GaAs on Si epilayer. Residual strain of thermal origin is larger in the highly defective region ( 0.4 m) near the GaAs/Si interface where we have found a non-elastic relation between measured in-plane (a ) and in growth direction (a ) lattice parameters. However, thermal strain is partially relaxed by formation of 10⁷ cm^–2 dislocations in the region of better crystalline quality near the external surface.