TE0导模干涉刻写周期可调亚波长光栅理论研究

通过棱镜耦合激发非对称金属包覆介质波导结构中的TE₀导波模式, 利用两束TE₀模的干涉从理论上实现了周期可调的亚波长光栅刻写. 分析了TE₀模式的色散关系, 刻写亚波长光栅的周期与激发光源、棱镜折射率、光刻胶薄膜厚度及折射率之间的关系. 用有限元方法数值模拟了金属薄膜、光刻胶薄膜和空气多层结构中TE₀导模的干涉场分布. 研究发现, 激发光源波长越短, TE₀ 模干涉刻写的亚波长光栅周期越小; 光刻胶越厚, 刻写的亚波长光栅周期越小; 高折射率光刻胶有利于更小周期亚波长光栅的刻写. 相较于表面等离子体干涉光刻, 基于TE₀ 模的干涉可在厚光刻胶条件下通过改变激发光源、棱镜折射率、光刻胶材料折射率、特别是光刻胶薄膜的厚度等多种方式实现对亚波长光栅周期的有效调控.     

阶梯型纳米孔径的近场光学局域增强特性研究

提出一种高分辨力与高通光效率兼备的阶梯型纳米孔径设计方法 ,孔径的尺寸从膜层的入射表面向出射表面呈阶梯型逐渐减小 ,直到在膜层的出射表面形成一个亚波长的小孔。采用三维时域有限差分 (FDTD)方法对方形阶梯型纳米孔径及三角形阶梯型纳米孔径进行了数值模拟计算。结果表明 ,由于近场光学很强的局域场增强效应 ,其通光效率与输出光强极大值在具有相同近场光斑尺寸情况下 ,较普通的非阶梯型纳米孔径提高了两个数量级 ,甚至更高 ,有效地提高了输出光功率。采用四台阶三角形阶梯型纳米孔径 ,当光斑半峰全宽为 97nm× 74nm时 ,出射光强极大值达到 10 4 9.76 ,较入射光增强了 10 0 0倍 ,而通光效率大于 1,达到 1.6 7。这种阶梯型纳米孔径可以直接作为纳米孔径激光器的出射孔径提高其输出光功率 ,也可以作为独立的光学屏对入射光进行整形得到具有高输出功率的亚波长尺度光源 ,在纳米尺度光学成像、光谱探测、数据存储、光刻、光学操作等近场光学应用领域具有潜在的应用前景。     

Generation of sub-wavelength and super-resolution longitudinally polarized non-diffraction beam using lens axicon

It is well known that a light spot of sub-wavelength will diverge in all directions. In this letter, A method is presented for generating sub-wavelength (0.44λ) longitudinally polarized beam, which propagates without divergence over lengths of about 2λ in free space. This is achieved by a high numerical aperture (NA) lens axicon that utilizes spherical aberration to duplicate the performance of an axicon and to create an extended focal line.     

亚波长金属波导的光传播和干涉特性研究

利用时域有限差分方法研究了亚波长金属波导TE波的传播特性和基于异常透射现象的干涉特性.对各种参量对驻波特性的影响及两列波导间的耦合特性进行了分析.研究发现,TE波在波导中传播时存在截止宽度,如果波导宽度小于截止宽度,TE波在波导中不能传播;如果波导宽度大于截止宽度,TE波的传播距离将随波导宽度变大而突然增加.当波导宽度达到或大于半波长时,TE波可以在波导中正常传播.金属波导的截止宽度与金属的吸收系数成正比.此外,由于光在亚波长金属波导透射时的异常透射现象,在亚波长金属波导中产生了TE波的干涉现象,能形成驻波.     

An improved vector model for analyzing the diffraction field of sub-wavelength diffractive optical elements

An improved vector model to analyze the diffraction field of sub-wavelength diffractive optical elements is proposed. Based on the pioneer model put forward by Prof. M. Mansuripur, the Fresnel formula is further applied in our work to calculate the transmitted light field. A revised model is built, the updated vector diffraction formula is deduced and a computing example is given. Compared with Mansuripur's method, our method leads to results closer to those obtained by finite-difference time domain (FDTD), which is always considered as a more rigorous algorithm. Therefore, this paper provides the practical and fast algorithm for computing the diffraction light field of sub-wavelength diffractive optical elements.     

基于RCWA的太阳能电池抗反射膜分析研究

利用严格耦合波分析法（RCWA）分别计算了五种不同形貌的亚波长浮雕结构的太阳能电池抗反射膜性能,分别从占空比、光栅高度和周期等结构参数以及入射光角度进行模拟。研究结果表明：周期为200rim,高度为400nm,占空比为1的金字塔型浮雕结构的抗反射效果令人满意,且平均反射率低于1％;光波的入射角对光栅的反射率影响较大,光波在光栅法线的角度控制在40°以下合适。通过对亚波长浮雕结构的反射特性模拟和分析,为太阳能电池抗反射膜设计与制作提供理论支持。     

一种提高OLED基底出光效率的亚波长光栅设计

为了提高OLED出光效率,在OLED基底表面设计了二维连续表面亚波长光栅。利用等高台阶逼近的方法近似连续表面光栅结构,并结合等效介质理论和薄膜光学原理,设计光栅参数:刻蚀深度0.29 μm,周期大小0.165 μm,底边直径与周期的比值等于1,可以实现宽光谱、广角度的高透射率。利用时域有限差分方法仿真计算了该光栅对OLED基底出光效率的影响,结果表明,出光效率最高可提高30%。     

Enhanced and confined light transmission through a funnel-type aperture with a sub-wavelength outlet

Enhanced transmission through sub-wavelength hole arrays and a single sub-wavelength aperture with periodic corrugations surrounded have been investigated extensively. We report the similar phenomenon through a funnel-type aperture with a sub-wavelength outlet in a thick silver film, which was obtained numerically by using finite-difference time-domain method. Properties of the transmission spectrum can be modulated by geometric parameters of the funnel-type aperture. With periodic grooves or dielectric gratings on the output surface of the structure, beaming light emission can be obtained.     

Can the point source method be used for design of sub-wavelength surface plasmon devices?

Integrating optical components into electronic chips needs compressing the dimensions of optical components, which are now nearly thousand times larger than those of electronic components. Surface plasmon-based devices may offer a solution to this size-compatibility problem. Shi et al. introduced a new method, called point source method, to design sub-wavelength surface plasmon devices. To test the validity of this method, we calculated the light transmission through sub-wavelength structures by the finite-difference time-domain (FDTD) method and point source method. Comparing the two results, we found that the correct light distribution through slits can be obtained by the point source method only in the comparatively far zone and the slit widths have to be selected carefully. Phase distributions obtained by the two methods are not the same and the phase difference is not constant for slits with different widths.     

亚波长光栅调制的偏振稳定垂直腔面发射激光器研究

基于微光学技术设计得到了偏振稳定垂直腔面发射激光器结构, 将亚波长光栅结构集成在上分布布拉格反射镜表面, 光栅周期小于材料中光波长, 透射波和反射波中仅包含零级衍射, 避免了高级次衍射造成 的损耗. 集成光栅后不同偏振方向光阈值增益不同, 从而实现偏振控制. 实验结 果显示, 集成亚波长光栅结构后, 整个激射过程中偏振方向被固定在平行于光栅槽方向上, 获得偏振稳定激光输出, 正交偏振抑制比大于12 dB, 且阈值电流仅增大7.14%.     

A review on the fabrication and applications of sub-wavelength anti-reflective surfaces based on biomimetics

In order to improve the performance of optical and optoelectronic devices, reduced light reflection at wide incidence angles, broadband wavelength, and polarization-insensitivity are crucial. Inspired by nature, surfaces of sub-wavelength structures have been developed as effective anti-reflective (AR) surfaces, which present promising broadband and quasi-omnidirectional AR properties. This review summarizes fabrication methods and applications of sub-wavelength anti-reflective surfaces, including various conventional techniques. The applications of sub-wavelength structure-based AR surfaces in solar cells, light emitting diodes (LEDs), and other applications are highlighted.     

External-resonance-enhanced transmission of light through sub-wavelength holes

Using plasmonic resonances of metal films, enhanced transmission of light through sub-wavelength holes has been demonstrated. Here we show that external resonances can be employed as well: the transmission of 1.5-μm wavelength light through 600-nm holes is enhanced by a factor of 20 using a Fabry–Pérot arrangement. The maximal enhancement factor is determined by the limited reflectivity of metal surfaces. It seems promising to combine both effects—plasmonic resonances plus tailored photonic-crystal structures on top of the metal film—in order to realize efficient sub-wavelength light sources as they are required for, e.g., advanced spectroscopy and lithography.     

Revisiting the wire medium: an ideal resonant metalens

This article is the first one in a series of two dealing with the concept of a ‘resonant metalens’ we introduced recently. Here, we focus on the physics of a medium with finite dimensions consisting of a square lattice of parallel conducting wires arranged on a sub-wavelength scale. This medium supports electromagnetic fields that vary much faster than the operating wavelength. We show that such modes are dispersive due to the finiteness of the medium. Their dispersion relation is established in a simple way, a link with designer plasmons is made, and the canalization phenomenon is reinterpreted in the light of our model. We explain how to take advantage of this dispersion in order to code sub-wavelength wavefields in time. Finally, we show that the resonant nature of the medium ensures an efficient coupling of these modes with free space propagating waves and, thanks to the Purcell effect, with a source placed in the near field of the medium.     

Phase control algorithms for focusing light through turbid media

Light propagation in materials with microscopic inhomogeneities is affected by scattering. In scattering materials, such as powders, disordered metamaterials or biological tissue, multiple scattering on sub-wavelength particles makes light diffuse. Recently, we showed that it is possible to construct a wavefront that focuses through a solid, strongly scattering object. The focusing wavefront uniquely matches a certain configuration of the particles in the medium. To focus light through a turbid liquid or living tissue, it is necessary to dynamically adjust the wavefront as the particles in the medium move. Here we present three algorithms for constructing a wavefront that focuses through a scattering medium. We analyze the dynamic behavior of these algorithms and compare their sensitivity to measurement noise. The algorithms are compared both experimentally and using numerical simulations. The results are in good agreement with an intuitive model, which may be used to develop dynamic diffusion compensators with applications in, for example, light delivery in human tissue.     

基于亚波长光栅的VCSEL偏振控制研究

为了确定亚波长光栅在微电机械系统(MEMS)波长可调谐VCSEL不同位置(上DBR上表面、上DBR下表面以及内腔)中实现TE和TM偏振控制的光栅参数范围以及光栅在哪个位置时实现偏振控制最稳定,通过MATLAB建立MEMS波长可调VCSEL的模型,然后计算光栅在3种位置时上反射镜(包括空气隙和光栅)随光栅参数变化的反射率,以此来确定它们实现TE/TM稳定偏振的光栅参数范围(即高反射范围内的参数)。将各自的高反射所对应反射率减去相同光栅参数范围内TM/TE低反射对应的反射率,通过反射率差值确定光栅在哪种位置时MEMS波长可调谐VCSEL实现偏振是最稳定的。最后得出的结论是光栅在上DBR下表面几乎无法控制TM偏振,而将光栅放置于内腔中,无论是在TE偏振控制上还是TM偏振上都是最稳定的。在实现TE偏振稳定的参数范围内,TE的阈值增益比TM最小少10 cm~(-1);而在实现TM偏振稳定时,在TE偏振稳定的参数范围内,TE的阈值增益比TM最小少5 cm~(-1)。     

ZnS衬底表面亚波长增透结构的设计及制备

ZnS是长波红外窗口优选材料之一,而其表面反射率较高;为了减小表面反射,利用耦合波理论,对ZnS衬底表面的亚波长结构参数进行优化设计,得到了具有良好增透效果的最佳亚波长结构参数;并利用掩膜光刻、反应离子刻蚀技术在ZnS衬底表面制备出在8—12 μm波段范围内有明显增透效果的二维亚波长结构,这为ZnS衬底的增透提供了一种新的方法. 关键词： 耦合波理论 表面亚波长增透结构 反应离子刻蚀 硫化锌     

Enhancement of extraction efficiency by metallic photonic crystal embedding in light-emitting diode

The bandgap effect of photonic crystals (PCs) and the effect of grating diffraction can be used to improve the extraction efficiency of light from the light-emitting diode (LED). The transmission of light at certain wavelength through periodic sub-wavelength hole arrays in metal films is extraordinary, surface plasmon (SP) effects effectively. In this letter, silver metallic photonic crystals with square lattice of cylinder unit cells are fabricated in GaN layer of GaN-based blue LED. We use the finite-difference time-domain (FDTD) method to investigate the optical transmission, the results show that the light extraction efficiency is enhanced by more than four times. Then we use the surface plasmon dispersion relation to analyze the mechanism of antireflection.     

Rigorous transmittance analysis of a sub-wavelength Sb thin film lens

We quantitatively analysed the factors contributing to the optical transmission enhancement of a sub-wavelength Sb thin film lens, using the finite-difference time-domain (FDTD) method. The results show that the transmission enhancement of the dielectric with a Gaussian distributed refractive index loaded in a sub-wavelength circular hole is not only due to the high refractive index dielectric, but also due to the specific distributions of refractive index. It is the first study about the effects of the refractive index distribution on the transmission of a sub-wavelength aperture. This kind of lens has practical applications in the very small aperture lasers and for near-field optical storage and lithography. PACS 42.79.Ag; 42.25.Bs; 42.25.Fx     

Optical properties of sub-wavelength dielectric gratings and their application for surface-enhanced Raman scattering

We fabricated and measured the far-field optical properties of a sub-wavelength Si₃N₄ (silicon nitride) two dimensional grating. Frequency-dependent transmission measurements from a white-light source revealed that both transverse magnetic (TM) and transverse electric (TE) modes were excited on the grating. We determined the dispersion relations of the modes by tilting the sample with respect to the incoming light beam and measuring the frequency shift of the absorption features. By comparing to a simple model, we determined the effective refractive index for the TM and TE modes and the geometrical constants for the grating. This information enables gratings with desired optical properties to be designed and fabricated. The application of the sub-wavelength grating for surface-enhanced Raman scattering (SERS) is demonstrated.     

Near-field probing of photonic crystals

Photonic crystals form an exciting new class of optical materials that can greatly affect optical propagation and light emission. As the relevant length scale is smaller than the wavelength of light, sub-wavelength detection forms an important ingredient to obtain full insight in the physical properties of photonic crystal structures. Spatially resolved near-field measurements allow the observation of phenomena that remain hidden to diffraction-limited far-field investigations. Here, we present near-field investigations in both collection and illumination modes that highlight the power of local studies. We show how propagation losses are unambiguously determined and that light detected in far-field transmission can actually contain contributions from different, sometimes unexpected, local scattering phenomena. Simulations are used to support our findings. Furthermore, it is shown that local coupling of light to a thick three-dimensional photonic crystal is position-dependent and that the spatial distribution of the coupling efficiency itself is frequency-dependent.