铜掺杂多孔硅的光致荧光猝灭

采用浸泡镀敷的方法在多孔硅表面形成了一铜镀层,通过对掺铜前后多孔硅的光致发光(PL)谱和傅里叶变换红外(FTIR)吸收光谱的研究,讨论了铜在多孔硅表面的吸附对其光致发光的影响。实验表明,掺铜对多孔硅的光致发光具有明显的猝灭效应,并使多孔硅的发光峰位蓝移。由于多孔硅表面铜的吸附使硅-氢键明显减少,而铜原子和硅的悬挂键成键会形成新的非辐射复合中心,从而使多孔硅的光致发光强度衰减。且浸泡溶液的浓度越高,这种猝灭效应越明显。而多孔硅发光峰位的蓝移,则是由于在发生金属淀积的同时伴随着多孔硅表面Si的氧化过程(纳米Si氧化为SiO2)的缘故。     

多孔硅——一种新形态的硅材料

多孔硅（ｐｏｒｏｕｓ　Ｓｉｌｉｃｏｎ）是指通过对氢氟酸溶液中的晶体硅片进行阳极氧化，在硅衬底上形成的多孔态的硅材料．本文介绍了多孔硅的形成规律和结构形貌，并对其光学性质和形成机制仆行了简要的评介，最后以多孔硅在大规模集成电路中的应用为主讨论了它的技术应用．     

n型有序多孔硅基氧化钨室温气敏性能研究

利用电化学腐蚀方法制备了n型有序多孔硅, 并以此为基底用直流磁控溅射法在其表面溅射不同厚度的氧化钨薄膜. 利用X射线和扫描电子显微镜表征了材料的成分和结构, 结果表明, 多孔硅的孔呈柱形有序分布, 溅射10 min的WO₃薄膜是多晶结构, 比较松散地覆盖在整个多孔硅的表面. 分别测试了多孔硅和多孔硅基氧化钨在室温条件下对二氧化氮的气敏性能, 结果表明, 相对于多孔硅, 多孔硅基氧化钨薄膜对二氧化氮的气敏性能显著提高. 对多孔硅基氧化钨复合结构的气敏机理分析认为, 多孔硅和氧化钨薄膜复合形成的异质结对良好的气敏性能起到主要作用, 氧化钨薄膜表面出现了反型层引起了气敏响应时电阻的异常变化. 关键词： 有序多孔硅 氧化钨薄膜 二氧化氮 室温气敏性能     

金刚石膜/多孔硅复合材料的性能表征

提出了一种新颖的多孔硅表面钝化技术,即采用微波等离子体辅助的化学气相沉积（MPCVD）方法在多孔硅上沉积金刚石薄膜。采用原子力显微镜（AFM）、扫描电子显微镜（SEM）、X射线衍射仪（XRD）、拉曼光 谱仪和荧光分光度计对多孔硅及金刚石膜的表面形貌、结构和发光特性进行了表征。结果表明采用微波等离子体化学气相沉积法可在多孔硅基片上形成均匀、致密、性能稳定且对可见光具有全透性的金刚石膜。金刚石膜与多孔硅的复合,大大稳定了多孔硅的发光波长和强度,同时增强了多孔硅的机械强度。     

二氧化硫监测的光纤传感方法研究

提出一种用于监测二氧化硫的光纤传感方法,该方法以光化学氧化的n型多孔硅作为传感材料和蓝光发光二激管作为激发光源,通过微型光纤光谱仪测量二氧化硫气氛中多孔硅的光致发光猝灭程度,从而获取二氧化硫含量信息;依据半导体电化学和固体光谱学理论分别讨论n型多孔硅形成和二氧化硫传感的基本原理,采用红外光谱仪研究光化学氧化的n型多孔硅化学组成,并进一步开展二氧化硫光纤传感实验,证明光化学氧化的n型多孔硅在传感过程中稳定性高、可逆性好,其光致发光峰强度随二氧化硫浓度增加而减小,多孔硅荧光峰强度对二氧化硫浓度的线性响应范围为10×10－6～10 000×10－6,检测限为10×10－6;可形成一种便携、全固态的二氧化硫光纤传感器.     

少子寿命和表面形貌与多孔硅发光性能的关系

研究了不同时间腐蚀的多孔硅的光致发光性能与多孔硅的表面形貌和少子寿命之间的关系。结果表明,多孔硅的发光来自与氧空位有关的缺陷,而多孔硅表面的氢原子能够钝化多孔硅表面的非辐射中心从而提高多孔硅的发光效率。多孔硅的空隙度随腐蚀时间的延长而增大,这也导致了多孔硅的少子寿命的降低,从而造成多孔硅的光致发光效率随多孔硅空隙度的增大以及少子寿命的降低而提高。另外,原子力显微照片表明长时间的腐蚀使多孔硅表面层被化学腐蚀,从而降低了多孔硅表面的粗糙度。     

阴极还原和酸处理对多孔硅稳定性和发光特性的改善

采用两种简单的多孔硅后处理方法,即阴极还原和酸处理来提高多孔硅的发光特性。结果表明,对多孔硅进行阴极还原处理,能明显改善多孔硅的稳定性;对多孔硅进行酸处理,能有效提高多孔硅的发光强度。结合阴极还原和酸处理两实验技术的特点,对所制备的多孔硅先进行阴极还原处理,再进行酸处理,结果表明该方法能较好地提高多孔硅的发光效率和发光稳定性。     

金属/多孔硅/单晶硅(M/PS/Si)微结构的电学特性

采用双槽电化学腐蚀法制备多孔硅层,然后在多孔硅表面沉积形成金属电极,制备出M/PS/Si微结构.利用SEM分析多孔硅的表面形貌,通过测试其I-V特性分析M/PS/Si微结构的电学特性.结果表明:由Pt做电极形成的M/PS/Si结构,表现出非整流特性.M/PS/Si结构的I-V曲线由线性区和非线性区组成,多孔硅孔隙率越高的M/PS/Si结构的I-V特性曲线线性区越宽.由Cu做电极形成的M/PS/Si结构,表现出整流特性.其整流比随多孔硅孔隙率增加而减小. 关键词： M/PS/Si微结构 孔隙率 I-V特性')" href="#">I-V特性 欧姆接触     

多孔硅光致发光峰半峰全宽的压缩

硅发光对于在单一硅片上实现光电集成是至关重要的.目前已有的使硅产生发光的方法有:掺杂深能级杂质、掺稀土离子、多孔硅、纳米硅以及Si/SiO₂超晶格.声空化所引发的特殊的物理、化学环境为制备光致发光多孔硅薄膜提供了一条重要的途径.实验表明,声化学处理对于改善多孔硅的微结构,提高发光效率和发光稳定性都是一项非常有效的技术.超声波加强阳极电化学腐蚀制备发光多孔硅薄膜,比目前通用的常规方法制备的样品显示出更优良的性质.这种超声波的化学效应源于声空化,即腐蚀液中气泡的形成、生长和急剧崩溃.在多孔硅的腐蚀过程中,由于超声波的作用增加了孔中氢气泡的逸出比率和塌缩,有利于孔沿垂直方向的腐蚀,使多孔硅光致发光峰的半峰全宽压缩到了3.8nm.     

发光多孔硅表面微结构及其晶格畸变的实验研究

用电化学方法制备了不发光多孔硅和发光多孔硅,用X射线双晶衍射对两类多孔硅表面进行了微结构分析和晶体质量表征,实验表明两类多孔硅的微结构间存在着很大差别。不发光多孔硅表面对X射线的双晶衍射摇摆曲线可解叠成两个峰,它们分别来自样品多孔层和单晶硅衬底,而发光多孔硅对X射线的双晶衍射摇摆曲线呈高斯对称分布,不可解叠。发光多孔硅比不发光多孔硅表面晶体质量差,且电化学腐蚀越严重,表面晶体质量下降也越严重。     

The effect of Al and B on the luminescent property of porous silicon

In this paper, we studied the PL property and the surface morphology of porous silicon prepared from N-type single silicon wafers coated with and without Al film. By introducing the Al film on the surface of silicon wafer before etching, the morphology of porous silicon exhibits obvious discrimination compared with that of the conventional porous silicon, which can be explained by the formation mechanism of the samples, and the emission property of two-type porous silicon also showed the clear difference, which may be attributed to the discrepancy in the structural configuration of the samples. Furthermore, it was found that the blue emission decreased and the green emission was almost completely quenched after boron-particle deposition, which is attributed to the structural change or annihilation of the emission defects during annealing process.     

Characterization of thermal, optical and carrier transport properties of porous silicon using the photoacoustic technique

In this work, the porous silicon layer was prepared by the electrochemical anodization etching process on n-type and p-type silicon wafers. The formation of the porous layer has been identified by photoluminescence and SEM measurements. The optical absorption, energy gap, carrier transport and thermal properties of n-type and p-type porous silicon layers were investigated by analyzing the experimental data from photoacoustic measurements. The values of thermal diffusivity, energy gap and carrier transport properties have been found to be porosity-dependent. The energy band gap of n-type and p-type porous silicon layers was higher than the energy band gap obtained for silicon substrate (1.11 eV). In the range of porosity (50-76%) of the studies, our results found that the optical band-gap energy of p-type porous silicon (1.80-2.00 eV) was higher than that of the n-type porous silicon layer (1.70-1.86 eV). The thermal diffusivity value of the n-type porous layer was found to be higher than that of the p-type and both were observed to increase linearly with increasing layer porosity.     

Thermodynamics of a phase transition of silicon nanoparticles at the annealing and carbonization of porous silicon

The formation of SiC nanocrystals of the cubic modification in the process of high-temperature carbonization of porous silicon has been analyzed. A thermodynamic model has been proposed to describe the experimental data obtained by atomic-force microscopy, Raman scattering, spectral analysis, Auger spectroscopy, and X-ray diffraction spectroscopy. It has been shown that the surface energy of silicon nanoparticles and quantum filaments is released in the process of annealing and carbonization. The Monte Carlo simulation has shown that the released energy makes it possible to overcome the nucleation barrier and to form SiC nanocrystals. The processes of laser annealing and electron irradiation of carbonized porous silicon have been analyzed.     

Stable ultraviolet photoluminescence emission in n-type porous silicon

This very paper is focusing on the investigation of porous silicon preparation with n-type silicon wafer by means of electrochemical anodization in the dark and, particularly, on its stable ultraviolet photoluminescence emission. A lateral electrical potential was applied, for this purpose, on silicon wafers, driving the electrons away and letting holes appear on the surface of the silicon wafer to enhance the electrochemical etching process. Characterizations have been made with scanning electronic microscope, fluorescence spectrophotometer and Fourier transform infrared spectroscope. An ultraviolet photoluminescence emission of 370 nm is found in the as-prepared n-type porous silicon, which seems to be well associated with the formation of oxygen-related species (twofold coordinated silicon defect) during the anodic oxidation. The result characterized by photo-bleaching performance indicates that the ultraviolet photoluminescence emission is so stable—only 7% reduction within 3600 s. Meanwhile the morphology of as-prepared n-type porous silicon is investigated.     

Instability of the photoluminescence of porous silicon

Results of studies of the photoluminescence of porous silicon with different prehistories have revealed the mechanism and nature of the instability of the luminescence properties of freshly prepared samples. It was established that the initial quenching and subsequent rise of the photoluminescence is attributable to the intermediate formation of silicon monoxide (photoluminescence degradation) and subsequent additional oxidation to form SiO₂ (photoluminescence rise). Ultraviolet laser irradiation accelerates this process by a factor of 200–250 compared with passive storage of the samples in air. Plasma-chemical treatment in an oxygen environment merely results in a subsequent rise in the photoluminescence as a result of the formation of monoxide on the porous silicon surface. A kinetic model is proposed for this process. Zh. Tekh. Fiz. 69, 135–137 (June 1999)     

Porous silicon layers prepared by electrochemical etching for application in silicon thin film solar cells

In this paper, multilayer structures of porous silicon were fabricated by using electrochemical etching and characterized for its optical properties and surface morphology. Samples of monolayer of porous silicon were grown to study the characteristics of porous layer formation with respect to applied current density, etching time and hydrofluoric acid concentrations. Photoluminescence peaks of red emission at wavelength 695 and 650 nm were observed from multilayer porous silicon structures. By atomic force microscopy measurement, hillocks like surface were clearly observed within the host material, which confirmed the formation of pores.     

多孔硅纵向分辨拉曼及光致发光研究

运用高灵敏度的共焦显微拉曼系统研究了多孔硅在纵向的拉曼效应和光致发光的性质。研究结果表明多孔硅在形成的初期和后期的反应机制不相同。反应初期,外表面的颗粒尺寸比内表面的大,而经过长时间刻蚀而获得的多孔硅,其外表面颗粒尺寸比内表面的小。我们认为反应的初期主要受表面不均匀电场的影响,而随着表面多孔层的增厚和颗粒的细化,刻蚀反应逐渐变成受传质过程和量子尺寸约束的控制。     

(单晶硅/电解液)界面对多孔硅形成初期阶段的影响

测量了在多孔硅形成初期阶段的电流I-电压V曲线,计算了硅表面原子吸附不同元素时电荷的转移量.指出在(单晶硅/电解液)界面处存在一电偶层,它影响着多孔硅材料的形成和性质.讨论了制备中氢氟酸(HF)浓度、电流密度和光照等因素对材料形成的影响. 关键词：