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1.
B. L. Williams H. G. Robinson C. R. Helms N. Zhu 《Journal of Electronic Materials》1997,26(6):600-605
Junction formation by ion implantation is a critical step in producing high quality infrared focal plane arrays in mercury
cadmium telluride (MCT). We have analyzed the structural properties of MCT implanted with B at doses of 1014 and 1015 cm−2 using double and triple crystal x-ray diffraction (DCD and TCD) to monitor the disorder and strain of the implanted region
as a function of processing conditions. TCD (333) reflections show that a distinct tensile peak is produced by the high dose
implant while the low dose implant shows only a low angle shoulder on the substrate peak. A preliminary association of the
low angle shoulder with point defects has been made since no extended defects have been observed in the low dose range. For
the high dose implant, extended defect formation has been reported and may be responsible for the tensile peak. After annealing,
the low angle shoulder on the low dose implant has disappeared, while the high dose implant exhibits an increase in the tensile
strain from 6.5 × 10−4 to 9.3 × 10−4 after 24 h of annealing and then decreases in tensile strain to 7.3 × 10−4 after 48 h of annealing. It is believed the changes in strain are associated with the Oswald ripening and dissolution of
extended defects, which has been observed during annealing of ion implanted Si. 相似文献
2.
Junction formation and stability in ion implanted mercury cadmium telluride critically depend on the ability to generate Hg
interstitials. The creation of Hg interstitials is found to strongly depend on the preferred lattice position of the element
implanted. Elements that substitute onto the cation sublattice create significantly more Hg interstitials than elements that
sit interstitially or on the anion sublattice. Recoils from implant damage also contribute to Hg interstitial formation in
heavier mass implants (Z ≥ of mass Zn), but appear to have negligible influence on interstitial generation in implants of
lighter ions. The combination of implanting ions of large mass and high solubility on the cation sublattice produces strong
Hg interstitial sources. Implants with these ions can form deep junctions even in heavily doped substrates. Junction stability
is also improved with the stronger interstitial source. 相似文献
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4.
C. Lee R. Gopalakrishnan K. Nyunt A. Wong R. C. -E. Tan J. W. -L. Ong 《Microelectronics Reliability》1999,39(1):97
An investigation of O2, Ar and Ar/H2 plasma cleaning was carried out on plastic ball grid array (PBGA) substrates to study its effects on surface cleanliness, wire bondability and molding compound/solder mask adhesion. Optimization of the plasma cleaning process parameters was achieved using the contact angle method and verified by auger electron spectroscopy (AES), X-ray photoelectron spectroscopy (XPS) and wedge pull tests. It was found that both the wedge bond quality and moisture sensitivity of a 225 I/O PBGA package were improved after plasma cleaning. Furthermore, atomic force microscopy (AFM) characterization and XPS analysis revealed that the solder mask has undergone plasma-induced surface modification. Cross-contamination of Au and F traces on the solder mask that has occurred during plasma cleaning was identified by XPS. This study has demonstrated the benefits and consequences of plasma cleaning for a PBGA package. 相似文献