高速850 nm垂直腔面发射激光器的优化设计与外延生长

利用传输矩阵理论和TFCalc薄膜设计软件分析了分布布拉格反射镜和垂直腔面发射激光器(VCSEL)的反射率谱特性,对比了从谐振腔入射与从表面入射时反射率谱的差异,为白光反射谱表征VCSEL外延片提供了依据.利用Crosslight软件模拟了InGaAs/AlGaAs应变量子阱的增益谱随温度的变化特性及VCSEL器件内部温度分布,设计了增益-腔模调谐的VCSEL.采用金属有机物化学气相淀积设备外延生长了顶发射VCSEL,制作了氧化孔径为7.5μm的氧化限制型VCSEL器件,测试了器件的直流特性、光谱特性和眼图特性;6 mA,2.5 V偏置条件下输出光功率达5 mW,4级脉冲幅度调制传输速率达50 Gbit/s.     

亚毫安阈值的1.3μm垂直腔面发射激光器

设计并研制了室温连续工作的单模13 μm垂直腔面发射激光器（VCSEL）,阈值电流为051 mA,最高连续工作温度达到82℃,斜率效率为029 W/A.采用InAsP/InGaAsP应变补偿多量子阱作为有源增益区,由晶片直接键合技术融合InP基谐振腔和GaAs基GaAs/Al（Ga）As分布布拉格下反射腔镜,并由电子束蒸发法沉积SiO₂/TiO₂介质薄膜上反射腔镜形成13 μm VCSEL结构.讨论并分析了谐振腔模式与量子阱增益峰相对位置对器件性能的影响. 关键词： 垂直腔面发射激光器 晶片直接键合 应变补偿多量子阱     

940 nm垂直腔面发射激光器单管器件的设计与制备

计算了InGaAs/AlGaAs量子阱的激射波长与阱垒厚度的关系,并通过Rsoft软件计算了不同温度下的材料增益特性.计算并分析了渐变层厚度对分布布拉格反射镜(distributed Bragg reflectors,DBRs)势垒尖峰及反射谱的影响,通过传输矩阵理论得到P-DBR和N-DBR的反射谱和相位谱.模拟了垂直腔面发射激光器(vertical surface emitting lasers,VCSEL)结构整体的光场分布,驻波波峰与量子阱位置符合,基于有限元分析模拟了氧化层对电流限制的影响.通过计算光子晶体垂直腔面发射激光器(photonic crystal vertical cavity surface emitting lasers,PC-VCSEL)中不同的模式分布及其品质因子Q,证明该结构可以有效地实现基横模输出.通过光刻、刻蚀、沉积、剥离等半导体工艺成功制备出氧化孔径为22μm的VCSEL和PC-VCSEL,VCSEL的阈值电流为5.2 mA,斜率效率0.67 mW/mA,在不同电流光谱测试中均是明显的多横模输出;PC-VCSEL的阈值电流为6.5 mA,基横模输出...     

新型光泵浦垂直外腔面发射半导体激光器

用量子阱技术生长的半导体材料作激光增益介质,AlGaAs/GaAs对做布喇格反射镜,并以简单的平凹腔做谐振腔,半导体激光器作泵浦源,制作出了光泵垂直外腔面发射半导体激光器.在抽运功率1.5 W时,得到了中心波长1005 nm、最大输出功率40 mW的激光,光－光转换效率2.7%.     

894nm高温垂直腔面发射激光器及其芯片级铯原子钟系统的应用

报道了自行研制的894 nm高温垂直腔面发射激光器(VCSEL)以及基于此类器件的芯片级铯原子钟系统的应用实验结果.根据芯片级铯原子钟对VCSEL在特定高温环境下产生894.6 nm线偏振激光的要求,对器件的量子阱增益及腔模位置等材料结构参数进行了优化,确定增益-腔模失谐量为-15 nm,使器件的基本性能在高温环境下保持稳定.研制的VCSEL器件指标为:20—90?C温度范围内阈值电流保持在0.20—0.23 m A,0.5 m A工作电流下输出功率0.1 mW;85.6?C温度环境下激光波长894.6 nm,偏振选择比59.8:1;采用所研制的VCSEL与铯原子作用,获得了芯片级铯原子钟实施激光频率稳频的吸收谱线和实施微波频率稳频的相干布居囚禁谱线.     

光电耦合对InGaN/GaN量子阱光学性能的影响

围绕高性能GaN基垂直腔面发射激光器(VCSELs),设计了两种具有不同光电耦合强度的InGaN/GaN量子阱(QWs)样品,研究了它们的光学性质。样品A在腔模的两个波腹处各放置两个InGaN耦合量子阱,而样品B在腔模的一个波腹处放置5个InGaN耦合量子阱。计算表明样品A具有较大的相对光限制因子1.79,而样品B为1.47。光学测试发现样品A有着更高的内量子效率(IQE)和更高的辐射复合效率。使用两种样品制作了光泵VCSEL结构,在光激发下实现激射,其中基于样品A的VCSEL有着更低的激射阈值。结果表明有源区结构会显著影响量子阱与光场的耦合作用、外延片的内量子效率、辐射复合寿命和VCSEL激射阈值,同时也说明样品A的有源区结构更有利于制作低阈值的VCSEL器件。     

1.3μm GaAs基量子点垂直腔面发射激光器结构设计与分析

结合垂直腔面发射激光器（VCSEL）原理以及量子点增益特点，计算了不同结构VCSEL的腔内损耗和量子点的模式增益.分析了激光器阈值特性以及氧化限制层对光损耗的影响.设计了含 氧化限制层的13μm量子点VCSEL结构. 关键词： 量子点 垂直腔面发射激光器 增益     

AlInGaAs垂直谐振腔顶面发射半导体激光器横向温度效应的解析热模型及其表征

依据增益导波垂直谐振腔顶面发射半导体激光器热区特点与室温连续波运行条件建立了一个优化的全解析热模型，对AlInGaAs/AlGaAs垂直谐振腔激光器的横向温度效应进行了详细的解析计算分析，其完全的解析表达展示了更加清晰的横向热场物理图像，对于器件内部热场变化规律的理论预期与实验结果完全符合. 该解析模型及其结果对于研究热稳态下的垂直谐振腔激光器热动力学特性，优化器件结构和控制激光器的阈值电流与功率温度饱和效应，特别是二维面阵器件中的横向热叠加效应提供了一个有用的工具. 关键词： 半导体面发射激光器 热效应 解析计算模型.     

1.3μm量子点垂直腔面发射激光器高频响应的优化设计

结合垂直腔面发射激光器(VCSEL)原理以及量子点增益特点，计算了有源层p掺杂结构的量子点VCSEL的材料增益和3 dB带宽，发现p掺杂结构可以大大提高频率特性.结合VCSEL激射条件和阈值特性，分析了对VCSEL结构的要求；分析了分布参数对频率特性的影响，对其外部封装提出了要求.设计了高频率响应的含氧化限制层的1.3 μm量子点VCSEL结构. 关键词： 量子点 垂直腔面发射激光器 微分增益 3 dB带宽     

垂直腔面发射激光器的饱和效应对慢光延时影响的研究

通过理论和实验研究了1550 nm量子阱垂直腔面发射激光器(QW-VCSEL) 的饱和效应对2.5 Gbps二进制伪随机序列(PRBS)慢光延时的影响. 利用Fabry-Perot腔边界条件结合光场分布, 推导出VCSEL中信号相位和延时表达式, 并结合速率方程, 建立信号功率与延时之间的联系. 实验研究了在VCSEL逐渐达到饱和状态过程中PRBS信号的延时时间和眼图的变化情况. 理论和实验结果表明, 由于受饱和效应的影响, 大功率信号在VCSEL中传输得到更好的信号质量, 但以牺牲延迟时间为代价. 为了获得较大的时延, 一方面需要控制信号功率, 其次还需要调节信号波长以追踪由于饱和效应导致的VCSEL峰值增益波长的变化轨迹. 关键词： 慢光延时 垂直腔面发射激光器 饱和效应     

A low-threshold and high-power oxide-confined 850-nm AlInGaAs strained quantum-well vertical-cavity surface-emitting laser

A low-threshold and high-power oxide-confined 850-nm AlInGaAs strained quantum-well (QW) vertical-cavity surface-emitting laser (VCSEL) based on an intra-cavity contacted structure is fabricated. A threshold current of 1.5 mA for a 22 μm oxide aperture device is achieved, which corresponds to a threshold current density of 0.395 kA/cm². The peak output optical power reaches 17.5 mW at an injection current of 30 mA at room temperature under pulsed operation. While under continuous-wave (CW) operation, the maximum power attains 10.5 mW. Such a device demonstrates a high characteristic temperature of 327 K within a temperature range from -12℃ to 96℃ and good reliability under a lifetime test. There is almost no decrease of the optical power when the device operates at a current of 5 mA at room temperature under the CW injection current.     

1.55-μm InGaAs/InGaAlAs MQW vertical-cavity surface-emitting lasers with InGaAlAs/InP distributed Bragg reflectors

High-performance InGaAs/InGaAlAs multiple-quantum-well vertical-cavity surface-emitting lasers (VCSELs) with InGaAlAs/InP distributed Bragg reflectors are proposed for operation at the wavelength of 1.55 μm. The lasers have good heat diffusion characteristic, large index contrast in DBRs, and weak temperature sensitivity. They could be fabricated either by metal-organic chemical vapor deposition (MOCVD) or by molecular beam epitaxy (MBE) growth. The laser light-current characteristics indicate that a suitable reflectivity of the DBR on the light output side in a laser makes its output power increase greatly and its lasing threshold current reduce significantly, and that a small VCSEL could output the power around its maximum for the output mirror at the reflectivity varying in a broader range than a large VCSEL does.     

Room temperature continuous wave low threshold current 850 nm ion implanted vertical cavity surface emitting laser using tungsten wires as mask

Vertical cavity surface emitting laser (VCSEL) emitting at 850 nm plays more important role in local fiber communication. Most of the VCSEL products emitting at 850 nm are fabricated by ion implanting. Their threshold current is about 4–6 mA. Using tungsten wires as mask, we developed the parameter of implantation and fabricated 850 nm VCSEL under room temperature CW (continuous wave) operation. The threshold current was 1.4 mA, which was lower than that of most similar devices reported before. The resistance of the device was 206 Ω. The light power was 0.92 mW at 6.74 mA under room temperature CW operation, while the light power did not achieve obvious saturation. The most remarkable advantage was that the fabrication method was simple and the optimization was available to implanting parameter.     

Threshold characteristics of bottom-emitting long wavelength VCSELs with photonic-crystal within the top mirror

We present self-consistent modeling of InP-based 1300-nm AlInGaAs photonic-crystal vertical-cavity surface-emitting diode laser. We investigate the influence of photonic-crystal parameters on threshold characteristics. We show that a shallow photonic crystal can significantly deteriorate the VCSEL threshold current. The significant reduction of threshold current can be assured by the photonic-crystal etched through the whole top DBR mirror.     

1.55-μm InGaAs/InGaAlAs MQW vertical-cavity surface-emitting lasers with InGaAlAs/InP distributed Bragg reflectors

High-performance InGaAs/InGaAlAs multiple-quantum-well vertical-cavity surface-emitting lasers (VCSELs) with InGaAlAs/InP distributed Bragg reflectors are proposed for operation at the wavelength of . The lasers have good heat diffusion characteristic, large index contrast in DBRs, and weak temperature sensitivity. They could be fabricated either by metal-organic chemical vapor deposition (MOCVD) or by molecular beam epitaxy (MBE) growth. The laser light-current characteristics indicate that a suitable reflectivity of the DBR on the light output side in a laser makes its output power increase greatly and its lasing threshold current reduce significantly, and that a small VCSEL could output the power around its maximum for the output mirror at the reflectivity varying in a broader range than a large VCSEL does.     

Improvement in Light Output of Thin-Film Vertical-Cavity Surface-Emitting Lasers Transferred onto A1N Substrates

Thin-film 850-nm vertical-cavity surface-emitting lasers (VCSELs) were improved in light output power by designing both the reflectivity of the distributed Bragg reflector on the light-emitting side and also the degree of de-tuning between the photoluminescence peak and the etalon wavelength. Thin-film VCSELs, which were fabricated on A1N substrates by a functional layer transfer technique, are attractive components for the hybrid integration of optoelectronic devices. Their maximum output power was 2.8 mW and their slope efficiency was 0.40 W/A for the 15μm diameter VCSEL devices that we studied. Uniform spontaneous emission over the entire mesa area, and a single transverse laser mode up to 1.3 times the threshold current were confirmed by observing the near-field images.     

Tunable single-mode fiber-VCSEL using an intracavity polymer microlens

We report a tunable, single-mode vertical cavity surface-emitting laser (VCSEL) format suitable for array operation, power scaling, fiber coupling, and operation in isolated environments such as those required by atom optics. The devices are fiber VCSELs, consisting of a semiconductor gain and mirror structure separated from a mirror-coated optical fiber by an air (or vacuum) gap. The gain structure has polymer microlenses fabricated on its surface, of characteristics suitable to focus the oscillating mode on both cavity mirrors, ensuring stable fundamental mode emission and high fiber coupling efficiency. We demonstrate such devices in continuous-wave operation at 1.03 microm at room temperature, with a single-mode tuning range of 13 nm, laser threshold as low as 2.5 mW, and a maximum fiber-coupled output power of 10 mW.     

Low power penalty tunable slow light using vertical-cavity surface-emitting laser amplifier

A tunable slow light of 2.5-Gb/s pseudo-random binary sequence signal using a 1550-nm vertical-cavity surface-emitting laser (VCSEL) is experimentally demonstrated. The influences of the bias current and the gain saturation on the slow light are investigated. With bias current increasing, tunable optical group delay up to 98 ps is obtained at room temperature. Demonstration of the time delay between 16 and 24 ps by signal intensity change is reported. Under an appropriate bias current, by tuning the input signal to track the peak gain wavelength of the VCSEL, slow light of a power penalty as low as 1 dB is achieved. With such a low power penalty, the VCSEL has a great potential application as a compact optical buffer.