Effect of cathode surface state on the characteristics of pulsed hollow-cathode glow discharges

A study is made of the effect of pulse repetition rate (0.1−10³ s⁻¹) and average discharge current (0–1 A) on the breakdown delay time and burning voltage of low-pressure glow discharges (p<0.1 Pa) in an electrode system of the reverse magnetron type with a large cathode surface area (≈10³ cm²). It is shown that increasing the repetition rate leads to a many-fold reduction in the statistical spread in the delay time and in the discharge formation time, while the average discharge current has a significant effect on the burning voltage. The mechanism for the observed phenomena is interpreted qualitatively in terms of the presence of thin dielectric films on the cathode surface. Zh. Tekh. Fiz. 69, 20–24 (May 1999)     

Radiation of pulsed and glow discharges in CCl4

The radiation of a pulsed-periodic discharge in CCl₄ has been investigated. Its spectrum is found to differ considerably from the spectrum of the glow discharge. It is found that ‖60% of the energy from the 215–650 nm region falls in the UV spectrum. Moscow Physicotechnical Institute, 9, Institutskii Per., Dolgoprudnyi, 141701, Moscow Region, Russia. Translated from Zhurnal Prikladnoi Spektroskopii, Vol. 65, No. 2, pp. 302–305, March–April, 1998.     

脉冲放电产生螺旋流注的等离子体特性研究

通过脉冲放电方式产生三维螺旋形的等离子体放电通道,在高速摄像机拍摄下观察到放电通道中的发光电离体以流注形式沿螺旋轨迹快速传播.建立电磁模型解释螺旋放电的形成机制,对造成对称性破缺及影响其手性性质的极向电场进行分析.研究表明,螺旋放电产生的放电通道存在两种不同的手性特征,而脉冲重复频率等放电参数及边界条件对螺旋流注的传播特性存在影响.脉冲电源驱动的电磁场在介质管内所形成的波模是极向电场形成的一个重要来源,当极向电场与轴向电场强度相近时则形成螺旋流注放电.     

Electrical characteristics of parallel-plate RF discharges in argon

Electrical characteristics were measured in a parallel-plate, capacitively coupled (E-type), low-pressure, symmetrical RF discharge driven at 13.56 MHz. The discharge voltage, current, and phase shift between them were measured over a very wide range of discharge parameters (gas pressures between 3 mtorr and 3 torr with discharge power between 20 mW and 100 W). From these measurements the discharge impedance components, the power dissipated in the plasma and in the sheaths, the sheath width, and the ion current to the RF electrodes were found over a wide range of discharge conditions. Some of the general relationships between the various measured and determined parameters are discussed. The experimental results can be used as a database for straightforward comparison with existing RF discharge models and numerical simulations     

Particle simulations of radio-frequency glow discharges

Particle-in-cell (PIC) simulations are used to study the structure of radio-frequency (RF) glow discharges in helium between parallel-plate electrodes. The authors have examined a range of conditions and report on a variety of observed phenomena. Comparisons to experiment and analytical models are made, when possible. The differences between discharges in which secondary electrons play a key role in sustaining the discharge and those in which secondary electrons are unimportant are examined in three cases which illustrate the importance of the discharge-sustaining mechanisms. Electron-energy distributions are found to be, in general, non-Maxwellian, with shapes that depend in complex ways on discharge conditions. In the absence of secondary electron emission, electron heating in the sheath regions of the discharge is enhanced at higher voltages compared to ohmic heating in the bulk of the plasma. Fast electrons accelerated by the advancing sheath can carry a substantial fraction of the conduction current in the bulk of the discharge, reducing the effective bulk ohmic heating of electrons. Ion-energy distributions at electrode surfaces have been predicted and are compared to experimental measurements     

The characteristics of pulsed hollow cathode discharges used forpseudospark switch triggering

The complex interaction between the trigger discharge and the main switch discharge in high-power gas discharge switches influences both the switching characteristics, and the switch and trigger lifetime. Any attempts to improve either of these parameters has to take into account the pressure and geometry dependence of a particular trigger geometry. Yet, although not very intensely investigated in detail for this particular purpose, pulsed hollow cathode discharges are commonly used for low-pressure gas discharge triggering as in pseudospark switches. Measurements of the electron current flowing to the cathode backplane of a pseudospark switch from the pulsed hollow cathode trigger discharge show that maximum current densities are peaked around the symmetry axis of the trigger electrode, an effect which is more pronounced at low pressures. Delayed (and slowed-down) increase of the current density at larger radii leads to increasing delay and jitter, provided the trigger coupling holes in the cathode backplane are located off-axis. The electron current density increases with decreasing diameter of the trigger electrode, and with increasing pressure of the working gas. In addition, it is shown that a preionization (keep-alive) current in the trigger electrode region shows a distinct influence on the trigger current distribution, proving that there exists an optimum keep-alive current depending on the geometry and gas pressure     

Electrical characteristics of argon radio frequency glow dischargesin an asymmetric cell

Measurements of the current and voltage at both electrodes of a parallel-plate, capacitively coupled RF discharge cell (the Gaseous Electronics Conference Reference Cell) were combined with measurements of the voltage on a wire inserted into the glow region between the electrodes, for argon discharges at pressures of 1.3-133 Pa and peak-to-peak applied voltages ⩽400 V. Together, these measurements determined the RF voltage, current, impedance, and power of each sheath of the plasma. Simple power laws were found to describe changes in sheath impedances observed as voltage and pressure were varied. An equivalent circuit model for the electrical behavior of the discharge was obtained. The equivalent circuit model can be used to relate the electrical data to plasma properties such as electron densities, ion currents, and sheath widths. The results differ from models previously proposed for asymmetric RF discharges, and the implications of this disagreement are discussed     

Cathode etching rate in abnormal glow discharges

The cathode etching rate in an abnormal glow discharge was calculated taking into account sputtering both by ions and energetic neutrals originating in cathode dark space due to the charge exchange collisions. The advantage of the model proposed is the evaluation of energetic neutral scattering by the sputtering gas.     

Self-organized filaments in dielectric barrier glow discharges

The filamentation of a plasma created by a dielectric barrier discharge in conditions of low pd products (i.e., Townsend breakdown and not streamer breakdown) is investigated both experimentally and with a two-dimensional numerical discharge model. Complex stationary and dynamical domains and filaments are observed experimentally. Some of the properties of these systems are reproduced by the model     

Characteristics of anodic glow pulsed plasma

Using the triple Langmuir probe, the characteristics of the glowing plasma adjacent to a constricted anode is obtained. The glow discharge is generated by applying a train of high voltage pulses between the constricted anode and cylindrical cathode with a pulse frequency of 2 kHz at 50% duty cycle. The axial plasma characteristics along the central line of the anode shows crest and trough resembling a double layer. The bulk plasma showed uniform electron density outside the glow. The visual images show an enhancement in the volume of the glow consistent with the discharge current. The mechanism behind the particular double layer characteristics around the anode is being explained in detail.     

缩比间隙中辉光放电相似性的初步研究

为了研究缩比实验在气体放电中的有效性, 对缩比间隙中的低气压氩气放电进行了数值模拟. 根据气体放电相似性的猜想, 如果间隙气压p和间隙距离d的乘积为常量, 即p₁d₁=p₂d₂, 并且约化电场E/p 在两个间隙中的空间分布相同, 那么这两个放电间隙的放电特性存在相似性. 数值模拟中设置三个缩比间隙: 气隙A的长度为30 mm, 气压为1 Torr (1 Torr=133.322 Pa); 气隙B的长度为15 mm, 气压为2 Torr; 气隙C的长度为10 mm, 气压为3 Torr. 仿真结果表明, 三个间隙均为辉光放电, 并存在明显的阴极位降区. 间隙A, B, C 的阴极位降区的厚度d_C分别为2.71, 1.35和0.87 mm, 相对应的pd值几乎相同, 即pd_C≈2.70 Torr·mm. 这与氩气辉光放电Paschen曲线最低点(pd≈2.86 Torr·mm)相近. 缩比间隙的放电参数的特性(如工作电压、电场、电流密度、电子密度和离子密度的沿“空间”px的分布)的数值计算结果与放电相似性猜想所预计的结果一致. 所以, 可以认为放电相似性猜想适用于低气压氩气缩比间隙的辉光放电. 关键词： 放电相似性 辉光放电 缩比间隙     

Spatial distribution of electron characteristic in argon rf glow discharges

The spatial distributions of the electron density and the mean electron energy of argon radio frequency (rf) glow discharge plasma in a plasma-enhanced chemical vapour deposition (PECVD) system have been investigated using an established movable Langmuir probe. The results indicate that in the axial direction the electron density tends to peak at midway between the two electrodes while the axial variation trend of mean electron energy is different from that of the electron density, the mean electron energy is high near the electrodes. And the mean electron energy near the cathode is much higher than that near the anode. This article focuses on the radial distribution of electron density and mean electron energy. A proposed theoretical model distribution agrees well with the experimental one: the electron density and the mean electron energy both increase from the centre of the glow to the edge of electrodes. This is useful for better understanding the discharge mechanism and searching for a better deposition condition to improve thin film quality.     

Light emission during cathode sheath formation in preionizedhigh-pressure glow discharges

The cathode sheath formation in a transient spatially small X-ray preionized high-pressure glow discharge with parameters typical for neon buffered XeCl lasers is investigated experimentally. Pictures of the light emission are taken with high temporal (≈1 ns) and spatial (≈25 μm) resolution using a gated CCD-camera as well as a streak camera. Quantitative data on the spatial and temporal development of the sheath structure are given. The most prominent feature is an extremely fast formation of a thin and very bright cathode sheath at a time which could be time correlated with an accuracy of ±0.2 ns with the discharge current. The results can be used to check numerical model calculations of the sheath formation     

Analysis of dusty plasma in the positive column of glow discharges

The radial distributions of ions,electrons and dust particles in the positive colum of glow discharges are investigated in a tripled-pole diffusion model.The dust particles are mainly trapped in the region around the column axis where the electrostatic potential is the highest.The presence of the dust particles results in the ion density increasing and the electron density decreasiung in the dust-trapped region.The dust-trapped region is wider for a higher dust temperature or a smaller particulate redius.The ions and electrons in the dust-free region away from the column axis are in ambipolar diffusion.     

实验研究大气压多脉冲辉光放电的模式和机理

采用稍不平行电极进行大气压He气介质阻挡多脉冲辉光放电实验,通过增强电子耦合器件相机短时曝光照片,研究大气压多脉冲辉光放电在不同时刻的放电模式.通过气隙放电电流、表面电荷计算,理论分析了表面电荷、空间电荷、外加电压与气隙电场强度的关系,研究大气压辉光放电形成多脉冲的机理.实验结果表明,放电首先在间隙稍窄的电极左端开始;在第一个脉冲电流峰值,电极右端也开始放电;第一个电流脉冲经历了Townsend放电到辉光放电的过程;电流脉冲之间的时间内,间隙一直维持着微弱的辉光放电;随后的每个电流脉冲均是辉光放电.理论分析表明,大气压辉光放电的多个电流脉冲是表面电荷、空间电荷与外加电压共同演化的结果;除放电伊始出现Townsend放电外,同一半周期内的放电电流脉冲中不会再出现Townsend放电. 关键词： 介质阻挡放电 增强电子耦合器件 大气压辉光放电 多脉冲     

Full-dimensional Monte Carlo simulation of glow discharges with superposed magnetic fields

A Monte Carlo simulation code is described that is suitable for modelling low-pressure glow discharges that possess cylindrical symmetry, but are of otherwise completely variable geometry. In this single-particle simulation in 3 space and 3 velocity dimensions, an entire discharge including the cathode fall can be modelled with or without magnetic fields of arbitrary shape. Electric and magnetic fields are given externally and are not adjusted self-consistently. Collision processes are modelled in great detail, and cathode sputtering phenomena are also included in the simulation. This simulation code is applied to hollow cathode discharges with and without superimposed magnetic fields and to a Penning discharge. Exemplary results are shown that include density profiles of cathode-sputtered atoms, energy distribution functions of electrons and cathode sputtering effects for a Penning discharge. Comparisons to results from experiment and other simulations are given.