芯片级硅基光谱仪研究进展

光谱仪作为光谱分析不可或缺的工具,在生物传感、食药检测、医疗、环境监测等领域有着广泛的用途。传统的光谱仪体积大、功耗高、价格昂贵和难以二次开发,应用范围受到了极大地限制。随着微型加工工艺的发展,微型化的光谱仪逐渐出现。相较于传统的大型光谱仪,微型光谱仪不仅成本低、体积小、功耗低,而且便于二次开发,扩展了光谱仪的应用范围。但是,微型光谱仪通常是基于分立的光学器件,通过将光学器件的小型化而实现的,集成度和灵活性不高。随着对便携性的要求越来越高,光谱仪的进一步小型化和集成化已成趋势,出现了芯片级的光谱仪。芯片级光谱仪具有明显的尺寸、重量和功耗的优势,将对光谱仪在无人设备、智能平台等新兴领域中的应用产生重要影响。在芯片级光谱仪的实现过程中,硅基光子技术因其成熟的加工工艺和良好的集成性能,为光谱仪的芯片化提供了一种集成化、低成本的解决方案,国内外研究人员针对芯片级硅基光谱仪展开了大量的研究,取得了丰富的成果。文章分析了硅基片上光谱仪的工作原理,将目前的芯片级硅基光谱仪分成了色散型和傅里叶变换型两大类进行介绍,分析了这两类光谱仪的主要特点和典型实现方式。文中给出了刻蚀衍射光栅、波导阵列光栅、多模波导等色散型硅基片上光谱仪和空间外差、驻波式、热调、数字以及基于微机电系统的傅里叶变换型硅基片上光谱仪的最新研究进展,分析了各种光谱仪的性能特点和适用范围。在此基础上,展示了本组的最新研究成果,通过创造性地将基于马赫曾德尔干涉仪的空间外差傅里叶变换型光谱仪结构和波导阵列光栅的色散型光谱仪结构相结合,可同时实现较大的光谱范围和较高的光谱分辨率,为硅基片上光谱仪的应用打下了较好的基础。最后,论述了硅基片上光谱仪的发展趋势与应用前景,为芯片级硅基光谱仪的研究提供了参考。     

高分辨率傅里叶变换光谱技术在短波段光学中的应用及进展

讨论了傅里叶变换光谱技术向短波段光学扩展的必要性和主要技术难点,分别介绍了几种应用于紫外、真空紫外及软Ｘ射线波段的傅里叶变换光谱仪结构性能与原理,并进一步阐述了高分辨率傅里叶变换光谱仪在短波段光学中的应用     

傅里叶变换光谱仪中的主要技术环节

本文总结了在研制傅里叶交换光谱仪(FTS)或成象傅里叶变换光谱仪(IFTS)时应当考虑的主要技术环节,包括仪器函数、光谱分辨率、扩展光源、动镜运动误差、噪音等效功率、信噪比等,并给出相应计算公式.     

Repeatable intensity calibration of an X-ray photoelectron spectrometer

Ten years ago, NPL developed an infrastructure for calibrating the intensity response functions of electron spectrometers for Auger electron and for X-ray photoelectron spectroscopies. Two software systems were developed: one for Auger electron spectrometers or for Auger electron and X-ray photoelectron spectrometers combined, and one for X-ray photoelectron spectrometers on their own; the latter being applied if no suitable electron gun is available. The system for Auger electron and X-ray photoelectron spectrometers combined has been used regularly to calibrate the Metrology Spectrometer II at NPL and experience shows that this gives an instrumental intensity consistency of 0.4% over 10 years. Evaluations have not previously been reported at this level. The system for Auger electron and X-ray photoelectron spectrometers combined is used here in preference to the system solely for X-ray photoelectron spectrometers since it is more robust to the sample condition and can be used over a wider energy range. These issues, and how observed variations in the instrument intensity response may arise, are explained.     

傅变光谱仪数据处理中相位误差非线性的分析及对Mertz相位修正方法的讨论

傅里叶变换成像光谱仪在遥感应用中是一种很重要的科学仪器,在傅里叶变换光谱仪信号处理中存在相位误差的问题,文章阐述了相位误差产生的原因,分析了由零点采样偏移带来的相位误差的非线性,说明了产生这种非线性的原因是干涉图为有限长的离散序列,从一个新的角度通过数学推导的结果给出了这种非线性的解释和表达。接着由相位误差的非线性讨论了Mertz相位修正方法中的相位插值可能存在的误差,分析了已有的研究中的较好的处理方法,并提出了一种改进这种误差的补零变换的方法。使用通过标准光谱库中的源光谱数据仿真的干涉数据,对方法进行了比较和验证,说明了补零变换法可以改善相位插值的误差以及在一些情况下的相位突变,得到质量更好的复原光谱。     

空间调制干涉光谱成像仪线性度测试

根据线性度分析方法,结合空间调制干涉光谱成像仪的成像原理,建立了线性度测试系统.采用太阳模拟器作为光源,通过减光片得到8个亮度等级的辐射输出,用待测仪器与光谱辐射度计分别对其进行采集,比对得到待测仪器线性度为0.81%,不确定度为2.7%.结果表明：该线性度测试方法精度较高,此方法同样适用于同类干涉光谱成像仪的线性度测试.     

空间调制干涉光谱成像仪线性度测试

根据线性度分析方法,结合空间调制干涉光谱成像仪的成像原理,建立了线性度测试系统.采用太阳模拟器作为光源,通过减光片得到8个亮度等级的辐射输出,用待测仪器与光谱辐射度计分别对其进行采集,比对得到待测仪器线性度为0.81%,不确定度为2.7%.结果表明:该线性度测试方法精度较高,此方法同样适用于同类干涉光谱成像仪的线性度测试.     

工作在亚毫米波段的付里叶变换谱仪

本文介绍了我们研制成功的工作在亚毫米波段的付里叶变换谱仪。工作波长为33μm至500μm,分弁率为1cm^-1。本仪器的主要特点是:1,采用微型机控制的数据采集和数据处理;2,动镜采用液压驱动,激光控制取样;3,整个干涉仪置于真空之中,以防水蒸汽的吸收。     

真空紫外分波前傅里叶变换光谱技术进展

本文分析了真空紫外分波前傅里叶变换光谱技术原理、特点及其必要性,介绍了几种采用真空紫外分波前傅里叶变换光谱技术的光谱仪的代表性结构、性能和应用,探讨了国内真空紫外分波前傅里叶变换光谱技术的未来发展,为获得高分辨率真空紫外光谱提供了另一途径。     

Data acquisition and instrument control system for neutron spectrometers

A personal computer (PC)-based data acquisition and instrument control system has been developed for neutron spectrometers in Dhruva reactor hall and Guide Tube laboratory. Efforts have been made to make the system versatile so that it can be used for controlling various neutron spectrometers using single end-on detector in step scan mode. Commercially available PC add-on cards have been used for input-output and timer-counter operations. An interface card and DC motor driver card have been developed indigenously. Software for the system has been written in Visual C++ language using MS Windows operating system. This data acquisition and instrument control system is successfully controlling four spectrometers at Dhruva reactor.     

Applications of near-infrared spectroscopy to process analysis using fourier transform spectrometer

The applications of near-IR spectroscopy to process analysis using a Fourier transform spectrometer are described. In recent years, process analysis based on near-IR spectroscopy has received keen interest from a growing number of industries. Some configurations of Fourier transform near infrared (FT-NIR) interferometers used for process analysis are introduced as special optical systems for the realization of stable and reproducible performance. Moreover, the applications of NIR spectroscopy to process analysis using FT-NIR spectrometers are overviewed and two examples of applications are described in more detail. Furthermore, process analytical technology (PAT) for the pharmaceutical industry is introduced as a future trend of the application of FT-NIR spectroscopy, and a dual-wavelength system that can combine NIR and IR spectra is discussed as a newly proposed PAT tool for understanding processes.     

靶丸内混合气体的质谱法测量技术

 叙述了四极质谱(QMS)的结构和气体分析质谱(GAM)的定量分析工作原理。四极质谱具有快速扫描响应,较高的响应灵敏度的特点,在经过标准气体校准后,加上独特的气体进样系统,可用于惯性约束聚变(ICF)靶丸内混合气体组分含量及总量的定量分析。同时,在经过坐标尺度放大等手段,可以对混合气体中质量数极为接近的氘(4.028 2)和氦(4.002 6)在高分辨模式下进行基线分离。用四极质谱对各种靶丸结构、不同混合气体种类的气体进行了定量组分分析,为ICF实验用靶提供了同批次实验数据。     

空间调制干涉光谱成像仪定标技术研究

根据光谱成像仪对定标内容的要求,结合空间调制干涉光谱成像仪的原理和特点,介绍一种空间调制干涉光谱成像仪实验室与飞行定标方法,利用此方法可以满足空间调制型干涉光谱成像仪的定标要求.     

基于双尺度相关运算的拉曼谱峰识别方法

拉曼谱峰识别是拉曼定性分析中的关键技术之一, 针对现有拉曼谱峰识别方法中存在的缺陷和不足提出了一种双尺度相关拉曼光谱谱峰识别方法,即采用两个尺度下的相关系数与局部信噪比相结合来实现拉曼谱峰识别。利用MATLAB对所提算法与传统的连续小波变换法进行了对比分析,并通过实测拉曼光谱进行验证。分析结果：双尺度相关法识别一幅拉曼谱的平均时间为0.51 s,连续小波变换法为0.71 s;当谱峰信噪比≥6时(现代拉曼光谱仪器均可达到较高的信噪比),双尺度相关法的谱峰识别准确率高于99%,连续小波变换法的谱峰识别准确率小于84%,且双尺度相关法谱峰位置识别误差的均值与标准差均要小于连续小波变换法。通过仿真对比分析和实验验证表明：双尺度相关法具有无需人工干预,无需做去噪及去背景等预处理操作,识别速度快,识别准确率高等特点,是一种切实可行的拉曼谱峰识别方法。     

Fabry-Perot etalons as prefilters for astronomical far-infrared fourier transform spectroscopy

We show that a Fourier transform spectrometer (FTS) can be made competitive in sensitivity (system noise equivalent power) with scanning single detector spectrometers (SSDS) such as scanning Fabry-Perot spectrometers or grating instruments for work on specific lines in FIR astronomy by prefiltering the radiation so that the broadband background on the detector(s) of the FTS is reduced. Fabry-Perot etalons made with electroformed metal mesh reflectors are suitable prefilters. A Fabry-Perot prefiltered FTS has a capability for simultaneous observation of lines at substantially different wavelengths in the same beam on the sky. The lines are passed by different orders of the Fabry-Perot, and their separation and resolution is accomplished by the FTS. We discuss the sensitivity comparison between the prefiltered FTS and an SSDS, identify several suitable pairs of astrophysically interesting lines, discuss some of the technical aspects of building very compact etalons designed for use at LHe temperatures, report new measurements of properties of commercially available metal mesh, and describe the performance of etalons built for line pairs near 50 μm.     

New Developments and Applications of Handheld Raman,Mid-Infrared,and Near-Infrared Spectrometers

Abstract: Recently, miniaturization of Raman, mid-infrared (IR), and near-infrared (NIR) spectrometers has made substantial progress. Though mid-infrared systems are based exclusively on attenuated total reflection (ATR) measurements, near-infrared spectrometers operate in the diffuse reflection or transmission mode. The reduction in size, however, must not be accompanied by deterioration in measurement performance, and portable instrumentation will only have a real impact on quality and process control if Raman, IR, and NIR spectra of comparable quality to laboratory spectrometers can be obtained.

In the present communication, a short overview on the building principles of novel handheld systems will be provided and the results of qualitative and quantitative analyses of selected liquid and solid sample systems obtained with these Raman, Fourier transform infrared (FTIR), and NIR spectrometers will be evaluated in terms of their comparability with laboratory instruments and their suitability for on-site and field measurements.     

Specification of spectral line shape and multiplex dispersion by self-imaging and moiré technique

Due to finite width of a spectral line, the visibility of the moiré fringes formed by a grating and the self-image of another similar grating reduces by the increase of the self-image order. This effect is exploited to specify the spectral line shape by evaluating the Fourier transform of a function related to the visibility. Even, by using in-expensive optics, the technique can provide the spectral line shapes of rather broad widths—of the order of nanometer and more—by precisions that are comparable by those obtained by expensive Fourier transform spectrometers.Besides, it is shown that by comparing the line shapes obtained with and without a dispersive medium between the gratings, one can specify the dispersion function of the medium in the wavelength range covered by the spectrum.     

Fourier transform spectrometer instrument lineshape (ILS) retrieval by Fourier deconvolution

This work presents a Fourier deconvolution (FD) technique for retrieving the instrument lineshape (ILS) function of high-resolution Fourier transform infrared (FTIR) spectrometers. The ILS retrieved by FD is compared with the results obtained using the LINEFIT technique of Hase. The effect of a non-ideal ILS function on quantitative analysis of HBr is explored and improvements in the results of quantitative analyses are demonstrated.     

临边成像光谱仪的发展现状与进展

介绍了临边观测模式的探测原理及其特点,给出了美国、欧洲等发达国家关于临边成像光谱仪的研究状况,并列出了各临边成像光谱仪的核心设计方案及具体的技术指标。最后,介绍了国内唯一一例临边成像光谱仪的开展情况,包括设计方案到技术指标。通过对比分析国内外临边成像光谱仪的研究进展,为我国进一步提高临边成像光谱仪的性能及技术指标提供了理论基础。     

空间调制干涉光谱成像仪光谱辐射度定标方法研究

空间调制干涉光谱成像仪不同于其他类型光谱成像仪,其像面上得到一维空间信息和一维光谱信息。由于其原理特殊,定标方法尚不成熟。介绍了一种用于空间调制干涉光谱成像仪光谱辐射度定标的方法,即干涉光谱成像仪和光谱辐射度计同时采集目标辐射强度,复原采集干涉图得到的光谱图,与光谱辐射度计采集绝对光谱进行比对,得到定标系数,并分析了该方法达到的精度。结果表明：该方法可以满足空间调制干涉光谱成像仪光谱辐射度定标的要求,定标精度达到5．74％。