Projection ablation of glass-based single and arrayed microstructures using excimer laser

Ablation of single and arrayed microstructures using an excimer laser is studied. The single feature microstructures are fabricated for evaluating the ablation mechanism, threshold fluence, and associated material removing (ablation) rate. The morphology changes during ablation are investigated with the focus on the formation of the ablation defects, debris or recast. The possibility of removing these defects is also evaluated and demonstrated. The present study concentrates on the borosilicate glass, although ablation of polyimide and silicon are performed and discussed for comparison. Polyimide and silicon are the most popular polymer or semiconductor material used in the electronics industry. The arrayed microstructures are ablated to demonstrate the fact that, by repetition of a simple-patterned mask associated with synchronized laser pulses and substrate movement, arrayed and more complex structures can be cost-effectively manufactured. The potential applications of these arrayed microstructures are discussed and illustrated. A low-cost replication technique that uses the arrayed microstructure presently machined as the forming mold for making electroforming nickel microneedles is specifically presented. Finally, the potential areas of using excimer laser in micromachining of glass-based structures for future research are also briefly covered.     

超短激光脉冲对宽带光学物质的微加工

通过讨论超快飞秒激光脉冲和长脉冲宽度的激光脉冲紧导致宽能隙透明电介质的损伤机理和比较超短激光脉冲与长激光脉冲对宽能隙透明电介质的损伤程度，得出超短激光脉冲是一种可对透明宽带电介质进行加工的有效工具的结论。当波长为800nm，脉冲宽度为150fs的激光脉冲紧聚焦到不同的宽能隙透明电介质（K9玻璃和ZK6玻璃）体内时，可制作不同光栅常数的光栅，并在波长为635nm的He-Ne连续激光的垂直照射下，对光栅的远场相对衍射效率和光栅的衍射效率进行了测量。     

LiNbO(3) platforms for optical fiber alignment

A technique for incorporating a groove into a LiNbO(3) substrate is described. Both V grooves for fiber alignment and vertical grooves for waveguide end-face formation can be fabricated with this technique. The proposed fabrication method is based on an excimer-laser ablation and a high-speed rotation saw cut for LiNbO(3) . The former process provides a variety of cross-sectional groove shapes by changing the ablation mask shape of LiNbO(3) , and the latter provides an optical-quality cutting face. The proposed fabrication method is simple and provides low-cost optical platforms not only for LiNbO(3) but also for glasses, polymers, and semiconductors.     

Creep deformation measurement using quartz optical fiber

This paper describes an optical system for high temperature creep strain measurement using quartz optical fiber, super long working distance microscope and digital image processing techniques. In this system one end of the quartz optical fibers is arrayed in a small area on the specimen surface and the other end is illuminated by a laser beam. The fiber ends on the specimen surface form the spot array. The small optical spots on the specimen are tracked by a CCD camera and the images are processed by digital image processing software. The diameter of each quartz fiber is 100 μm and the fibers can be arrayed in a small area. The local strains are determined by measuring the variety of relative distance between two spots. Experimental results of local creep strain on the welding joints of 15CrMo and HK40 at 850°C are obtained.     

Freely adjusted properties in Ge–S based chalcogenide glasses with iodine incorporation

In this study, we examined the function of halogen iodine acting as a glass network modifier in green chalcogenide glasses based on the Ge–S system. We obtained a series of Ge–S–I glasses and determined their glass-forming region. We then recorded the physical, thermal, and optical properties and studied the effect of halogen iodine on Ge–S–I glasses. Results show that these glasses have relatively wide optical transmission window for infrared (IR) applications. The softening temperature of Ge–S–I glasses varies from 210.54 °C to 321.63 °C, this temperature fits well with some kinds of high-temperature polymers, such as PES and PEI, the polymers serve as protective layers with high strength and flexibility, thus simplifying the fabrication processes of IR chalcogenide glass fiber. Finally, we performed a purification process to eliminate impurities and to improve optical spectra.     

Thermal character in organic polymers with nanojoule femtosecond laser ablation

Ablation experiments with femtosecond (fs) laser pulse (pulse duration 37 fs, wavelength 800 nm) on organic polymers have been performed in air. The ablation threshold is found to be only several nanojoules. The diameters of the dots ablated in the organic polymers are influenced by the laser fluence and the number of laser pulses. It is observed that heat is diffused in a threadlike manner in all directions around the central focus region.Explanations of the observed phenomena are presented. A one-dimensional waveguide is also ablated in the organic polymers.     

Holographic optics-based interferometer for real-time testing of phase objects

A simple and cost effective method for making holographic optics-based interferometer, which is suitable for performing optical test studies on phase (transparent) objects in real-time, has been described. The optical arrangement in the proposed method involves a very simple alignment procedure and inexpensive holographic recording material is used in the formation of holographic optical elements. Recording schemes for the formation of holographic optical elements and the related techniques for the realisation of the proposed interferometer along with typical experimental results have been presented.     

Optical transmission and reflection of aluminum film irradiated by nanosecond laser beam and experimental studying of phase-explosion

In this paper we present evidence for a phase explosion during the laser-induced ablation process by studying the optical reflectivity of the ablated plume. The ablation was produced by irradiating thin film aluminum coated on a quartz substrate with a single pulse laser beam in ambient air. The laser pulse was provided by the second harmonic of a Q-switched Nd:YAG laser with ∼10 ns pulse duration. The transmission of a low power He–Ne laser beam through the hot ablated material plume and its reflection (from the front surface, and rear surface of aluminum film) were also monitored during the duration of the ablation event. The results show that the front surface reflectivity is enhanced at an early time of ablation which is described as strong evidence for the creation of a phase explosion in this process.     

Ultrashort laser ablation of PMMA and intraocular lenses

The use of intraocular lenses (IOLs) is the most promising method to restore vision after cataract surgery. Several new materials, techniques, and patterns have been studied for forming and etching IOLs to improve their optical properties and reduce diffractive aberrations. This study is aimed at investigating the use of ultrashort laser pulses to ablate the surface of PMMA and intraocular lenses, and thus provide an alternative to conventional techniques. Ablation experiments were conducted using various polymer substrates (PMMA samples, hydrophobic acrylic IOL, yellow azo dye doped IOL, and hydrophilic acrylic IOL consist of 25% H₂O). The irradiation was performed using 100 fs pulses of 800 nm radiation from a regeneratively amplified Ti:sapphire laser system. We investigated the ablation efficiency and the phenomenology of the ablated patterns by probing the ablation depth using a profilometer. The surface modification was examined using a high resolution optical microscope (IOLs) or atomic force microscope—AFM (PMMA samples). It was found that different polymers exhibited different ablation characteristics, a result that we attribute to the differing optical properties of the materials. In particular, it was observed that the topography of the ablation tracks created on the hydrophilic intraocular lenses was smoother in comparison to those created on the PMMA and hydrophobic lens. The yellow doped hydrophobic intraocular lenses show higher ablation efficiency than undoped hydrophobic acrylic lenses.     

Photoetching of spherical microlenses on glasses using a femtosecond laser

We fabricated spherical microlenses on optical glasses by femtosecond laser direct writing (FLDW) in ambient air. To achieve good appearances of the microlenses, a meridian-arcs scanning method was used after a selective multilayer removal process with spiral scanning paths. A positive spherical microlens with diameter of 48 μm and height of 13.2 μm was fabricated on the surface of the glass substrate. The optical performances of the microlens were also tested. Compared to the conventional laser direct writing (LDW) technique, this work could provide an effective method for precise shape-controlled fabrication of three-dimensional (3D) microstructures with curved surfaces on difficult-to-cut materials for practical applications.     

Optical communication fiber waveguide fabrication: A review

Abstract

The current state of the art in optical communication fiber waveguide fabrication is reviewed. Details of the two main technologies—multi-component glasses and high-silica glasses—are described, followed by brief details of other fiber fabrication techniques. The relative advantages and disadvantages of the different fiber fabrication techniques are discussed in the summary.     

光纤传光束敛集率及其填充率的计算

采用二种方式推算了光纤采用六边形排列配用圆形端套光纤传光束的理论敛集率,其值为90.69%,这一值同光纤采用六边形排列配用长方形端套的传光束理论敛集率一致.而单根粗直径聚合物光纤和液芯光纤配用圆形端套制作的光纤传光束,其敛集率为100%,在可见光或紫外光范围内,选用单根粗直径聚合物光纤或液芯光纤传光束具有更多的优势.分析了皮层的厚度对光纤传光束或传像束填充率的影响,当光纤半径低于250 μm时,皮层厚度对细直径光纤传光束或传像束填充率影响明显,而当光纤半径大于等于500 μm,皮层厚度的影响相对较小.     

Morphology studies of the metal surfaces with enhanced absorption fabricated using interferometric femtosecond ablation

Recently, the enhancing of bulk metals optical absorption with focused femtosecond pulses was demonstrated. This absorption enhancement is caused by different nano- and micro-structures which are formed during laser ablation with ultrashort pulses. In this paper we study the evolution of the surface structures using interferometric ablation and compare it to normal fs-ablation. Previously we have shown that interferometric femtosecond ablation is an efficient method to fabricate absorbing metal surfaces. In this study we ablated large areas of hole-array structures with different pulse numbers in polished stainless steel and copper samples. The evolution of surface morphology and the depth of the holes for these structured surfaces are presented. In addition, the reflectance of laser generated surface structures are measured at the wavelength range of 200–2300 nm using a standard spectrophotometer.     

低损耗Ge-As-Se-Te硫系玻璃远红外光纤的性能分析

中、远红外光学领域的发展,离不开低损耗光波导材料的发展,因此近年来远红外低损耗光纤一直是光学领域的热点之一.本论文在国内首次报道了一种基于挤压法的低损耗远红外光纤制备技术,获得了具有完整结构的远红外光纤,其损耗为:0.46 d B/m@8.7μm,1.31 d B/m@10.6μm,整体低于1 dB/m@7.2—10.3μm.在实验过程中,首先采用传统的熔融淬冷法和蒸馏纯化工艺制备了Ge-As-Se-Te玻璃样品.利用X射线衍射仪和热膨胀仪等测试了玻璃的结构和物理性质,分析了Ge对玻璃热学性质的影响;利用分光光度计、红外光谱仪等研究了玻璃的光谱性质;综合比较了还原剂铝、镁的除氧效果.最后采用挤压法制备了芯包结构光纤.实验结果表明:镁的除氧效果佳,新型挤压制备工艺和有效提纯技术共同推进了硫系光纤损耗的降低,所获得的Ge-As-Se-Te光纤具有远红外广谱应用的潜能(其透光波长接近12μm).     

ESR和NMR在茂金属催化剂和聚烯烃研究中的应用

随着高分子科学和催化技术的发展，了解聚合物和催化剂的微结构信息尤为重要. 主要介绍了ESR和NMR在茂金属催化剂和聚烯烃领域中的最新应用，研究成果表明ESR和NMR是研究聚合物和催化剂微观信息的有效工具.     

Fabrication of high-aspect-ratio microstructures using excimer laser

An excimer laser micromachining system is developed to study the ablation of high-aspect-ratio microstructures. The study examines the ablation efficiency, specifically, the impact of changing major laser operating parameters on the resulting microstructural shapes and morphology. The study focuses on glass, although results on silicon and aluminum are also included for comparison. In ablating grooved structures, the ablation depth has been observed to be linearly proportional to the operating parameters, such as the pulse number and fluence. The results specifically indicate that ablation at low fluence and high repetition rates tends to form a V-shaped cross-section or profile, while a U-shaped profile can be obtained at high fluence and low repetition rate. The ablation rate or ablated volume has then been quantified based on the ablation depth measured and the ablated profile observed. The threshold fluence has also been obtained by extrapolating experimental data of ablation rate. The extrapolation accuracy has been established by the good agreement between the extrapolated value and the one predicted by Beer's law. Moreover, a one-dimensional analytical solution has been adopted to predict the ablated volume so as to compare with the experimental data. The reasonable agreement between the two indicates that a simple analytical solution can be used for guiding or controlling further laser operations in ablating glass structures. Finally, the experimental results have shown that increasing the repetition rate favors the morphology of ablated surfaces, though the effect of repetition rate on ablation depth is insignificant.     

Alignment error of arrayed beams in optical fiber array device

The alignment error of arrayed beams in optical fiber array devices is caused by structural errors of the optical fibers themselves such as error in cladding surface diameter, core offset, and the noncircularity of the cladding surface. In this study, the relations among them are analytically clarified. Moreover, by probability evaluation, the allowable structure errors for suppressing the alignment error below a certain level are calculated. The predicted yield rate below an alignment error of 0.4 μm for five beams is compared with the result of real fabrication.     

Excimer laser patterned dielectric masks for the fabrication of diffractive optical elements by laser ablation

Masks for laser processing are generated by laser ablation patterning of dielectric layer systems. The application of these masks for the rapid fabrication of diffractive optical elements (DOEs) is presented. The diffractive optical elements are designed as phase-only elements, assuming an illumination with a plane wave. A continuous phase function is calculated using an iterative Fourier transform algorithm (IFTA). This continuous phase function is reduced to two or four levels by an iterative Fourier quantisation algorithm (IFQA) that is able to include focal power. The fabrication of the DOE is performed in a two-step process. First, a binary amplitude mask (or a set of masks for multi-level DOEs) is made by structured ablation of a highly reflective dielectric coating (HR 248 nm) from a fused silica substrate. This is accomplished by using an ArF excimer laser emitting at 193 nm, a wavelength that is sufficiently absorbed in the HfO₂/SiO₂-dielectric layer system, leading to precisely ablated mask structures. In the second step, this mask is used in a 4:1 projection configuration to generate a surface profile in a polymer substrate by ablation at 248 nm. The depth modulation can be defined by adjusting laser fluence and pulse number. Examples of DOEs ablated in polycarbonate are shown and their performance is characterised.     

Optical communication fiber waveguide fabrication: A review

The current state of the art in optical communication fiber waveguide fabrication is reviewed. Details of the two main technologies—multi-component glasses and high-silica glasses—are described, followed by brief details of other fiber fabrication techniques. The relative advantages and disadvantages of the different fiber fabrication techniques are discussed in the summary.