硅基光子集成研究进展

报道了国际上关于硅基光子集成的最新研究进展和本课题组在该领域的研究成果,包括对一些光收发模块、III-V族/硅基激光器等集成器件的结构改进和工艺的探索,展示了兼容互补金属氧化物半导体工艺的硅基光子集成在信息技术领域中的巨大前景.可以预见,硅基光子集成已成为硅光子学的主要研究内容,硅光子学及硅基光子集成的发展目标是趋向更高速率、更低功耗及更大集成密度.     

功率分配比大范围可调的光功率分配器集成芯片

光功率分配器(OPS)是光子集成电路的基本元件之一,广泛应用于多种领域.功率分配比(PSR)可调的OPS可提高光子集成电路的灵活性,简化光子集成电路系统.提出了一种硅基PSR大范围可调的OPS集成芯片方案,通过将对称2×2多模干涉仪、波导光栅和狭缝结构等硅基器件结合在一起,并改变输入光信号的波长和微型热光调制器两端加载...     

基于阵列波导光栅的光纤布拉格光栅解调技术综述

基于阵列波导光栅的光子集成解调技术是硅光领域的研究热点和难点.相比传统解调方法,基于阵列波导光栅的光子集成解调技术因其解调精度高、解调速度快、封装体积小等优势,在光纤布拉格光栅的高速、高精度解调上具有明显优势.近年来,随着光子集成技术的发展,各科研院所和相关机构对阵列波导光栅的光子集成解调法进行了广泛深入的研究与优化.本文通过介绍阵列波导光栅工作原理及基于阵列波导光栅的光纤布拉格光栅波长解调原理,结合基于阵列波导光栅的光纤布拉格光栅解调仪在材料体系和系统性能两个方面的重要进展,归纳了基于阵列波导光栅的解调仪的典型应用场景,从新材料、系统集成和规模化三方面对光纤布拉格光栅解调系统的未来发展提出针对性建议,为基于阵列波导光栅的光子集成解调技术的研究发展提供参考.     

基于光子集成芯片的可穿戴光纤光栅解调研究

为了实现光纤光栅传感器在可穿戴系统中的应用,提出了一种基于硅基光子集成芯片的可穿戴光纤光栅传感解调系统。基于比利时iSiPP50G工艺的光子集成芯片由4×1长波长VCSEL阵列、1×8阵列波导光栅、2×2 MMI耦合器、4×1光纤光栅耦合器阵列、Ge-on-Si波导光电探测器、直波导和弯曲波导等组成。在完成对VCSEL光源金线键合和光子集成芯片光纤耦合封装的基础上,设计了手环式解调电路,对人体温度和心音信号进行了实时测量。实验结果表明:解调系统的动态波长检测范围为1 540 nm～1 560 nm,波长分辨率为0.08 pm,解调精度为5 pm,温度监测范围为35℃～42℃,误差为±0.1℃;可检测50 Hz～100 Hz频率范围内的心音信号,可识别出第一心音和第二心音,并计算出心动周期、心率、第一心音时限、第二心音时限和心力等特征参数。     

SOI基纳米光栅耦合器的结构改进与仿真验证

针对硅基光波导与单模光纤在光耦合过程中存在耦合效率低,对准难度大的问题,提出了一种新型基于绝缘体上硅(SOI)结构的纳米光栅耦合器。运用有限时域差分法探究了纳米光栅耦合器的结构特性,结合光纤准直器的准直原理,系统分析了纳米光栅耦合器的结构模型。研究了入射光波长、入射角度、光栅占空比等因素对光栅耦合效率的影响,得出了基本纳米光栅耦合器的最佳结构参数;在基本耦合光栅结构的基础上进行了改进,增加了后反射器、增透膜和底层介质膜,并运用Optiwave OptiFDTD 8.0软件优化了各部分结构的设计参数,得到了优化的耦合光栅结构。纳米光栅耦合器的耦合效率提高至59.37%,3dB带宽达到65nm。     

SOI基纳米光栅耦合器的结构改进与仿真验证

针对硅基光波导与单模光纤在光耦合过程中存在耦合效率低,对准难度大的问题,提出了一种新型基于绝缘体上硅（SOI）结构的纳米光栅耦合器。运用有限时域差分法探究了纳米光栅耦合器的结构特性,结合光纤准直器的准直原理,系统分析了纳米光栅耦合器的结构模型。研究了入射光波长、入射角度、光栅占空比等因素对光栅耦合效率的影响,得出了基本纳米光栅耦合器的最佳结构参数;在基本耦合光栅结构的基础上进行了改进,增加了后反射器、增透膜和底层介质膜,并运用Optiwave OptiFDTD 8.0软件优化了各部分结构的设计参数,得到了优化的耦合光栅结构。纳米光栅耦合器的耦合效率提高至59.37%,3 dB带宽达到65 nm。     

全固态光束控制器件结构设计与热分析研究

相比传统机械扫描,光学相控阵技术在扫描精度、扫描速度、转动惯量等方面具有优势,是实现大视场范围内多目标定位和三维成像的重要技术途径。随着微纳光子集成的发展,硅基光波导光学相控阵器件得到了广泛研究,并被视为全景光电成像和激光成像雷达的核心器件。介绍了硅基光波导光学相控阵的基本原理和数学模型,并设计了一个16元相控阵器件,对其温度场分布和热特性进行了分析。在此基础上,对光栅耦合器、MMI分束器、波导光栅天线等关键元件进了有限元分析和仿真,完成优化设计。基于该设计完成了器件的流片制备,并搭建了性能测试验证平台。利用该平台对器件的扫描精度（1.2°）、扫描范围（大于±30°）和扫描速度（20 kHz）分别进行了测试,验证了设计方法的可行性。     

石墨烯-硅基混合光子集成电路

近年来硅基光子学已经慢慢走向成熟,它被认为是未来取代电子集成电路,实现下一代更高性能的光子集成电路的关键技术.这得益于硅基光子器件与现代的互补金属氧化物半导体工艺相兼容,能够实现廉价的大规模集成.然而,由于受硅材料本身的光电特性所限,在硅基平台上实现高性能的有源器件仍然存在着巨大挑战.石墨烯-硅基混合光子集成电路的发展为解决这一问题提供了可行的方案.这得益于石墨烯作为一种兼具高载流子迁移率、高电光系数和宽带吸收等优点的二维光电材料,能够方便地与现有硅基器件相集成,并充分发挥自身的光电性能优势.本文结合我们课题组在该领域研究的一些最新成果,介绍了国际上在石墨烯-硅基混合光子集成电路上的一些重要研究进展,涵盖了光源、光波导、光调制器和光探测器四个重要组成部分.     

光子集成干涉探测系统关键器件和集成化设计方法研究

基于光波波动效应,采用光束传播法,设计了光程匹配波导、阵列波导光栅、相位调制器以及多模干涉耦合器等光子集成器件.在此基础上,对光子集成器件进行耦合特性分析与计算,设计了完整的光子集成芯片.通过对光子集成干涉系统各组成模块的分析、研究及优化,集成化设计了光子集成干涉探测系统电子样机.结果表明:设计的光子集成器件最小损耗为...     

T型结构微纳尺度偏振无关光栅耦合器

本刊讯采用光栅结构作为耦合器,有着耦合面积小、耦合效率高和耦合方式简单等优点,广泛应用于硅基集成光电子器件与光纤的垂直耦合。然而,微纳尺度的光栅和其他光学微纳器件一样,由于尺寸小使得器件对于TE、TM模式的有效折射率存在较大差异,器件性能与偏振密切相关。     

High efficiency grating couplers based on shared process with CMOS MOSFETs

Grating couplers are widely investigated as coupling interfaces between silicon-on-insulator waveguides and optical fibers.In this work,a high-efficiency and complementary metal-oxide-semiconductor(CMOS) process compatible grating coupler is proposed.The poly-Si layer used as a gate in the CMOS metal-oxide-semiconductor field effect transistor(MOSFET) is combined with a normal fully etched grating coupler,which greatly enhances its coupling efficiency.With optimal structure parameters,a coupling efficiency can reach as high as ～ 70% at a wavelength of 1550 nm as indicated by simulation.From the angle of fabrication,all masks and etching steps are shared between MOSFETs and grating couplers,thereby making the high performance grating couplers easily integrated with CMOS circuits.Fabrication errors such as alignment shift are also simulated,showing that the device is quite tolerant in fabrication.     

Apodized grating coupler using fully-etched nanostructures

A two-dimensional apodized grating coupler for interfacing between single-mode fiber and photonic circuit is demonstrated in order to bridge the mode gap between the grating coupler and optical fiber. The grating grooves of the grating couplers are realized by columns of fully etched nanostructures, which are utilized to digitally tailor the effective refractive index of each groove in order to obtain the Gaussian-like output diffractive mode and then enhance the coupling efficiency.Compared with that of the uniform grating coupler, the coupling efficiency of the apodized grating coupler is increased by 4.3% and 5.7%, respectively, for the nanoholes and nanorectangles as refractive index tunes layer.     

Hybrid photonics structures with grating and prism couplers based on ZnO waveguides

This paper presents the results of investigations concerning input-output systems of an electromagnetic wave in the visible and near visible spectrum for their application in structures of integrated optics. The input-output structures used in described planar optical waveguides are in a form of prism and grating couplers. The first part of the paper contains numerical analysis of grating couplers aiming at an optimization of their geometrical parameters, strictly — the depth of the grooves in the grating coupler. The second part presents the practical realization, as well as experimental tests of the planar optical waveguide with the hybrid input-output system. As the input system of the electromagnetic wave, a prism coupler was used, and in the case of the output system — a photonic structure with grating coupler was applied. The investigated planar wave guides with the input-output structures were made of a wide energy band gap semiconductor — zinc oxide (ZnO).     

玻璃基集成光量子芯片：从二维到三维

玻璃基集成光量子芯片已经应用于量子计算、量子模拟、量子通信、量子精密测量等光量子信息处理领域,显示出强大的功能。文章从量子计算和量子模拟两个方面介绍利用飞秒激光三维高精度直写技术在玻璃中制备集成光量子芯片的重要进展。量子计算芯片包括面向通用量子计算的单比特到多比特光量子逻辑门以及用于解决特定问题的芯片,可实现玻色采样、量子快速傅里叶变换、量子快速到达等功能。在量子模拟方面,玻璃基光量子芯片成为研究关联粒子量子行走动力学和拓扑量子光子学的极佳平台,揭示了一维、二维和合成维度的离散以及连续时间量子行走的演化规律,展示了光子拓扑绝缘体的鲁棒性拓扑模式对量子态传输的保护作用等。     

Photonic structures with grating couplers based on ZnO

The paper presents investigations concerning the design and realization of photonic structures with grating couplers. The first part of the paper deals with basic theoretical information on photonic structures with grating couplers and their application in optoelectronics. The further part presents the results of numerical investigations on photonic structures with grating couplers and shows the influence of geometrical parameters on the effectiveness of the input and output of optic power into and out of this photonic structure. The paper also provides the results of experimental investigations on a wideband gap semiconductor, viz. zinc oxide ZnO, as well as its application in planar waveguide structures and photonic structures with grating couplers.     

Grating couplers for thick SOI rib waveguides

The use of grating couplers in high index contrast waveguides like silicon on insulator (SOI) offers several advantages over other coupling approaches, including better alignment tolerances and allowing for wafer-scale testing. The grating couplers were developed for nanometric SOI waveguides (Si-wires), and recently also for micrometric rib waveguides. In this paper we review our work in fiber-to-chip grating couplers for thick SOI rib waveguides, where a coupling efficiency of ?2.2?dB was demonstrated experimentally. We also discuss the use of grating couplers to improve optical throughput (étendue) of a planar waveguide Fourier-Transform (FT) spectrometer implemented in thick rib waveguides.     

光子晶体理论应用于光纤布拉格光栅的研究

将光纤布拉格光栅近似为一维光子晶体，研究光栅的能带结构和光学传输特性。利用平面波展开法对光子晶体进行理论研究，将研究方法移植到光纤布拉格光栅上，并对其进行数值分析，得到光栅的传输特性。研究表明，光栅反射谱有多个反射峰，峰值中心频率是基频的整数倍，而且峰值处存在光子带隙，反射峰带宽对应光子带隙宽度，中心频率和带宽随光栅长度、高介电常量材料占空比、调制深度而变化。结果与传统的耦合模理论一致。     

Efficient omnidirectional couplers achieved by anisotropic photonic crystal waveguides

Photonic crystals (PCs) have many potential applications because of their ability to control light-wave propagation. We have investigated omnidirectional couplers in two-dimensional anisotropic PC structures. The anisotropic PC coupler composed of an anisotropic-dielectric cylinder in air is studied by solving Maxwell's equations using the plane wave expansion method and finite-difference time-domain method. The photonic band structures are found to exhibit absolute bandgaps for the square lattices. Numerical simulations show that the incident light-waves at both transverse electric and transverse magnetic modes have efficient coupling in anisotropic PC coupler with square lattices. The guided modes and coupling length are analyzed by considering various line defect anisotropic PC waveguides and interaction regions of couplers. Such a mechanism of omnidirectional coupling should open up a new application for designing components in photonic integrated circuits.     

Single etch grating couplers for mass fabrication with DUV lithography

Surface grating couplers enable efficient coupling of light between optical fibers and planar waveguide circuits. While traditional grating designs require two etch steps for efficient coupling to silicon-on-insulator waveguides, recently proposed subwavelength structured gratings can achieve the same coupling efficiencies with a single etch step, thereby significantly reducing fabrication complexity. Here we demonstrate that such couplers can be fabricated on a large scale with ultra-violet lithography, achieving a 5?dB coupling efficiency at 1,550?nm. Through both simulations and experiments we give physical insight on how pattern fidelity impacts the performance of these couplers, and propose strategies to deal with inevitable process variations.     

Directly laser-written integrated photonics devices including diffractive optical elements

Femtosecond laser-written integrated devices involving Fresnel Zone Plates (FZPs) and waveguide arrays are demonstrated as built-in optical couplers. These structures were fabricated in borosilicate glass using a direct laser writing technique. The optical properties of these integrated photonic structures were investigated using CW lasers and high-resolution CCDs. For a single FZP coupled to a single waveguide, the overall coupling efficiency was 9%. A multiplexed optical coupler composed of three FZP layers was demonstrated to couple three waveguides simultaneously in a waveguide array. Structures of this type can be used as platforms for multichannel waveguide coupling elements or as microfluidic sensors that require higher light collecting efficiency.