一种InP双异质结双极晶体管小信号物理模型及其提取方法

研究了InP双异质结双极晶体管（DHBT）的能带结构对集电极电容的影响,解决了传统方法不能准确提取InP DHBT集电极电容的问题.考虑了基极-发射极和集电极-发射极引线间的交叠电容,并从物理上区分了InP DHBT的本征电阻、外部电阻与寄生电阻,建立了一个基于物理的InP基DHBT小信号模型.同时提出了一套直接提取模型参数的方法,该方法无需引入数学优化,具有清晰的物理意义.提取的结果在很宽的偏置范围内准确地拟合了器件特性,验证了模型的准确性与提取方法的有效性. 关键词： InP双异质结双极晶体管 集电极电容 小信号模型 参数提取     

InP/In0.53Ga0.47As/InP双异质结双极型晶体管的仿真与分析

运用Silvaco-TCAD软件构建了InP/In_(0.53)Ga_(0.47)As/InP双异质结双极型晶体管模型,研究了掺杂浓度、厚度以及温度对器件特性的影响.结果表明:双异质结双极型晶体管DHBT的开启电压能达到约0.4V,当浓度达到4×10^(19) cm^(-3)的时候,电流增益可以达到一个最佳状态,其峰值能达到约125左右,且浓度对截止频率以及最高振荡频率没有太大的影响;当增大基区厚度时,电流增益会减小,改变厚度能够使DHBT输出特性得以提升,并且提高基区电流的注入;双异质结双极型晶体管具有很好的温度稳定性.     

一种基于能带工程设计的CaAsSb/InP异质结双极晶体三极管

异质结晶体三极管（HBT）的性能与其材料体系密不可分，利用能带工程可以大大优化器件的结构，提高器件性能，文章从分析HBT的能带结构及设计要求入手，介绍了一种利用能带工程设计的基于GaAsSb/InP材料体系的新型HBT器件的结构及其性能，分析了该器件与其它材料体系器件相比所具有的优异特性，说明了对HBT的各区材料，其带边的相对位置所起的重要作用，最后，文章还报道了近期的实验情况，说明了GaAsSb/InP体系HBT的实际性能与理论预言一致。     

超结硅锗碳异质结双极晶体管机理研究与特性分析优化

提出一种超结硅锗碳异质结双极晶体管(SiGeC HBT)新结构.详细分析了新结构中SiGeC基区和超结结构的引入对器件性能的影响,并对其电流输运机制进行研究.基于SiGeC/Si异质结技术,新结构器件的高频特性优良;同时超结结构的存在,在集电区内部水平方向和垂直方向都建立了电场,二维方向上的电场分布相互作用大大提高了新结构器件的耐压能力.结果表明:超结SiGeC HBT与普通结构SiGeC HBT相比,击穿电压提高了48.8%;更重要的是SiGeC HBT器件中超结结构的引入,不会改变器件高电流增益、高频率特性的优点;新结构器件与相同结构参数的Si双极晶体管相比,电流增益提高了10.7倍,截止频率和最高震荡频率也得到了大幅度改善,很好地实现了高电流增益、高频率特性和高击穿电压三者之间的折中.对超结区域的柱区层数和宽度进行优化设计,随着柱区层数的增多,击穿电压显著增大,电流增益有所提高,截止频率和最高震荡频率减低,但幅度很小.综合考虑认为超结区域采用pnpn四层结构是合理的.     

重离子导致的锗硅异质结双极晶体管单粒子效应电荷收集三维数值模拟

针对国产锗硅异质结双极晶体管(SiGe HBTs), 采用半导体器件模拟工具, 建立SiGe HBT单粒子效应三维损伤模型, 研究影响SiGe HBT单粒子效应电荷收集的关键因素. 分析比较重离子在不同位置入射器件时, 各电极的电流变化和感生电荷收集情况, 确定SiGe HBT电荷收集的敏感区域. 结果表明, 集电极/衬底结内及附近区域为集电极和衬底收集电荷的敏感区域, 浅槽隔离内的区域为基极收集电荷的敏感区域, 发射极收集的电荷可以忽略. 此项工作的开展为下一步采用设计加固的方法提高器件的抗辐射性能打下了良好的基础. 关键词： 锗硅异质结双极晶体管 单粒子效应 电荷收集 三维数值仿真     

沟槽型发射极SiGe异质结双极晶体管新结构研究

提出了一种沟槽型发射极SiGe异质结双极晶体管新结构.详细分析了新结构中沟槽型发射极的引入对器件性能的影响,并对其机理进行研究.新型发射极结构通过改变发射极电流路径使电阻分区并联,在不增大结电容的前提下,有效减小发射极电阻,提高器件的频率特性.结果表明,新结构器件的截止频率和最大振荡频率分别增加至100.2 GHz和134.4 GHz,更重要的是沟槽型发射极结构的引入,在提高器件频率特性的同时,不会降低器件的电流增益,也不会增加结电容,很好实现了频率特性、电流增益和结电容之间的折中.对沟槽型发射极进行优化设计,改变侧墙高度和侧墙宽度.沟槽型发射极电阻不受侧墙高度改变的影响,频率性能不变;侧墙宽度增加,频率性能降低.     

InAlAs/GaSbAs/InP DHBT与InP/GaSbAs/InP DHBT性能比较分析

双异质结双极晶体管(DHBT)的性能与发射区-基区(E-B) 异质结和基区-集电区(B-C)异质结的能带突变类型关系密切, 本文基于热场发射-扩散模型, 对两类不同能带结构类型的新型DHBT的性能做了比较分析. 结论表明: 与作为当今研究热点的E-B和B-C异质结构均为全交错II型能带结构的InP/GaSbAs/InP DHBT的性能相比, E-B异质结采用传统I型、B-C异质结采用交错II型的一类新型能带结构的InAlAs/GaSbAs/InP DHBT虽然在开启电压上更高, 但具有更好的电流驱动能力、直流增益和高频性能.     

深能级对AlGaInP/GaAs异质结双极晶体管性能的影响

用深能级瞬态光谱和光致发光(PL)方法研究了AlGaInP/GaAs异质结双极晶体管(HBT)发射区AlGaInP中的深能级.得到了两个深能级,分别为E_c-E_t1＝0.42eV和E_c-E_t2＝0.59eV,其复合截面为σ_n1＝6.27×10^-17cm²和σ_n2＝6.49×10^-20cm². 关键词：     

三维数值仿真研究锗硅异质结双极晶体管总剂量效应

为探索锗硅异质结双极晶体管(SiGe HBT)总剂量效应的损伤机理,采用半导体器件三维模拟工具(TCAD),建立电离辐照总剂量效应损伤模型,分析比较电离辐射在SiGe HBT不同氧化层结构的不同位置引入陷阱电荷缺陷后,器件正向Gummel特性和反向Gummel特性的退化特征,获得SiGe HBT总剂量效应损伤规律,并与⁶⁰Coγ辐照实验进行对比.结果表明:总剂量辐照在SiGe HBT器件中引入的氧化物陷阱正电荷主要在pn结附近的Si/SiO₂界面处产生影响,引起pn结耗尽区的变化,带来载流子复合增加,最终导致基极电流增大、增益下降;其中EB Spacer氧化层中产生的陷阱电荷主要影响正向Gummel特性,而LOCOS隔离氧化层中的陷阱电荷则是造成反向Gummel特性退化的主要因素.通过数值模拟分析获得的SiGe HBT总剂量效应损伤规律与不同偏置下⁶⁰Coγ辐照实验的结论符合得较好.     

Physical modeling based on hydrodynamic simulation for the design of InGaAs/InP double heterojunction bipolar transistors

A physical model for scaling and optimizing InGaAs/InP double heterojunction bipolar transistors(DHBTs) based on hydrodynamic simulation is developed.The model is based on the hydrodynamic equation,which can accurately describe non-equilibrium conditions such as quasi-ballistic transport in the thin base and the velocity overshoot effect in the depleted collector.In addition,the model accounts for several physical effects such as bandgap narrowing,variable effective mass,and doping-dependent mobility at high fields.Good agreement between the measured and simulated values of cutoff frequency,f t,and maximum oscillation frequency,f max,are achieved for lateral and vertical device scalings.It is shown that the model in this paper is appropriate for downscaling and designing InGaAs/InP DHBTs.     

MOCVD自催化法在Si(100)衬底上生长InP/InGaAs核壳结构纳米线

采用自催化法,利用金属有机化学气相沉积技术,在Si(100)衬底上成功制备了InP/InGaAs核壳结构纳米线。通过扫描电子显微镜观察纳米线形貌,在核壳结构纳米线的顶端催化剂转化成了颗粒状晶体。利用X射线衍射和透射电子显微镜研究了InP纳米线上生长InGaAs外壳的过程,并应用X射线能量色散能谱仪对纳米线顶端进行了轴向和径向的线扫描,得到了纳米线上元素组分分布。催化剂的转化发生在制备InGaAs壳之前的升温过程中,且形成的晶体中含有合金成分。InGaAs壳的组分调整可以通过改变生长过程中生长源气体的流量来实现。     

Photon-counting laser ranging with InGaAs/InP avalanche photodiode in the passively quenched and 1-GHz sinusoidally gated

We experimentally studied photon-counting laser ranging at 1550 nm using InGaAs/InP avalanche photodiode based single-photon detectors (SPDs). The SPDs operated in the passive quenching and 1-GHz sinusoidal gating Geiger modes, corresponding to continuous and quasi-continuous photon-counting ranging, respectively. Despite that the passively quenched SPD provided relatively high effective detection efficiency, quasi-continuous photon-counting ranging excelled the continuous one with fast acquisition speed and improved depth resolution due to the short deadtime and low timing jitter of the SPD in 1-GHz sinusoidally gated mode.     

Impact of gate offset in gate recess on DC and RF performance of InAlAs/InGaAs InP-based HEMTs

A set of 100-nm gate-length InP-based high electron mobility transistors (HEMTs) were designed and fabricated with different gate offsets in gate recess. A novel technology was proposed for independent definition of gate recess and T-shaped gate by electron beam lithography. DC and RF measurement was conducted. With the gate offset varying from drain side to source side, the maximum drain current (I_ds,max) and transconductance (g_m,max) increased. In the meantime, f_T decreased while f_max increased, and the highest f_max of 1096 GHz was obtained. It can be explained by the increase of gate-source capacitance and the decrease of gate-drain capacitance and source resistance. Output conductance was also suppressed by gate offset toward source side. This provides simple and flexible device parameter selection for HEMTs of different usages.     

The influence of confining wall profile on quantum interference effects in etched Ga0.25In0.75As/InP billiards

We present measurements of the potential profile of etched GaInAs/InP billiards and show that their energy gradients are an order of magnitude steeper than those of surface-gated GaAs/AlGaAs billiards. Previously observed in GaAs/AlGaAs billiards, fractal conductance fluctuations are predicted to be critically sensitive to the billiard profile. Here we show that, despite the increase in energy gradient, the fractal conductance fluctuations persist in the harder GaInAs/InP billiards.     

The influence of electronic transport across interface junction between Si substrate and the root of ZnO micro-prism on field emission performance

ZnO micro-prisms are prepared on the p-type and n-type Si substrates, separately. The $I$--$V$ curves analysed by AFM show that the interface junctions between the ZnO micro-prisms and the p-type substrate and between the ZnO micro-prisms and the n-type Si substrate exhibit p--n junction behaviour and ohmic contact behaviour, respectively. The formation of the p--n heterojunction and ohmic contact is ascribed to the intrinsic n-type conduction of ZnO material. Better field emission performance (lower onset voltage and larger emission current) is observed from an individual ZnO micro-prism grown on the n-type Si substrate. It is suggested that the n-Si/n-ZnO interfacial ohmic contact benefits the electron emission; while the p-Si/n-ZnO interface heterojunction deteriorates the electron emission.     

The effect of electrolytes on the surface potential at the rutile/aqueous interface

The method for evaluation of surface potential from the electrode potential of single crystal electrodes is refined. The effect of NaCl and LiCl concentrations on the dependency of the surface potential of TiO₂ on pH was examined. The point of zero potential was shifted to lower pH values in the presence of NaCl and to higher pH values in the presence of LiCl. The interpretation of the data based on the Surface Complexation Model suggested that at 0 0 1 crystal plane of rutile, sodium ions as counterions have more pronounced affinity for association with negatively charged surface groups with respect to the lithium ions.     

Effects of rapid thermal annealing on the energy levels of InAs/InP self-assembled quantum dots

We have studied the effects of thermal annealing on the electrical properties of InAs/InP self-assembled quantum dots (QDs) using deep level transient spectroscopy (DLTS). It was found from the DLTS measurements that the activation energy of the QD signal varied from 0.47 to 0.60 eV and the emission cross section changed from 1.01×10⁻¹⁵ to 9.63×10⁻¹⁴ cm² when the annealing temperature increased up to 700 °C. As a result of the thermal annealing process at the temperature ranging from 500 to 600 °C, the higher activation energy and the larger emission cross section of the QD related signal were observed for the annealed samples compared to those for the as-grown sample. On the basis of the capture barrier height for the QDs structure being lowered from 0.24 to 0.06 eV at the annealing temperature of 700 °C, thermal damage was considered as the reason. The appropriate annealing process can provide a clue for the engineering of the energy levels in the self-assembled QD structures.     

The effect of electric field strength on electroplex emission at the interface of NPB/PBD organic light-emitting diodes

Organic light-emitting diode (OLED) based on two kinds of blue emission materials N,N′-bis(1-naphthyl)-N,N′-diphenyl-l,l′-diphenyl-4,4′-diamine (NPB) and 2-(4-biphenylyl)-5(4-tert-butyl-phenyl)-1,3,4-oxadiazole (PBD) was fabricated. There is only one emission peak in photoluminescence (PL) spectrum which originates from NPB exciton emission. And the electroluminescence (EL) emission peaks have an apparent red-shift with the increase of driving voltage. The red-shift emission from exciplex emission could be ruled out. Thus, by the method of Gaussian fitting it should be ascribed to the overlap of exciton emission and electroplex emission which occurs at the interface between NPB and PBD. The formation of the electroplex emission under high electric field is analyzed.     

Effects of interface roughness on photoluminescence full width at half maximum in GaN/AIGaN quantum wells

Low temperature photoluminescence （PL） measurements have been performed for a set of GaN/AlxGal xN quantum wells （QWs）. The experimental results show that the optical full width at half maximum （FWHM） increases relatively rapidly with increasing A1 composition in the AlxGal xN barrier, and increases only slightly with increasing GaN well width. A model considering the interface roughness is used to interpret the experimental results. In the model, the FWHM＇s broadening caused by the interface roughness is calculated based on the triangle potential well approximation. We find that the calculated results accord with the experimental results well.