甚高频激发容性耦合氩等离子体的电子能量分布函数的演变

甚高频激发的容性耦合等离子体由于离子通量和能量的相对独立可控而受到人们的关注. 本文采用朗缪尔探针诊断技术测量了40.68 MHz激发的容性耦合Ar等离子体的特性(如电子能量概率分布、电子温度和密度等)随宏观参量的演变情况. 实验结果表明, 电子能量概率分布随着气压的增加从双麦克斯韦分布逐步转变为单麦克斯韦分布并最终演变为Druyvesteyn分布, 而射频激发功率的增加促进了低能电子布居数的增强; 在从等离子体放电中心移向边界的过程中, 低能电子的布居数显著下降, 而高能电子的布居则有所上升; 放电极板间距的变化直接导致了等离子体中电子加热模式的转变. 另外, 我们也对等离子体中的高低能电子密度和温度的分配情况进行了讨论.     

Investigation of anode and cathode jets influence on electric arc properties with current up to 500 kA

A number of phenomena connected with the formation of electrode jets in discharges in hydrogen at a current of 10/sup 5/-10/sup 6/ A, a current growth rate of 10/sup 10/ A/s, an initial pressure 0.1-4.0 MPa, and a discharge gap length of 5-40 mm were studied. After the secondary breakdown, the jets are observed through a discharge semitransparent channel, widening with velocity (4-7) /spl middot/ 10/sup 2/ m/s. Shockwave formation was detected at the interaction of jets with the surrounding gas and the opposite electrode. Plasma vapor pressure of metal near the end of the tungsten cathode 70 /spl mu/s after initiation of a discharge was 180 MPa. Thus, magnitude of brightness temperature was 59 /spl middot/ 10/sup 3/ K, with an average charge of ions-m~=3.1, and a concentration of metal vapors n=5.3/spl middot/10/sup 19/ cm/sup -3/. While those at the end of the anode 90 /spl mu/s after initiation of discharge: m~=2.6, n=7.4/spl middot/10/sup 19/ cm/sup -3/. Probable reasons of high-voltage drops near the electrodes (the summarized magnitude of which is /spl sim/1 kV) are discussed on the basis of experimental data. For the first time, the shadow method registered symmetric ejection of material from the all-cathode surface the maximum discharge current was observed.     

同轴电极结构下真空放电等离子体生成及传播特性

采用放电电流为100~300 A、持续时间为13 s的单脉冲电源,设计了两种同轴电极结构作为放电阳极,分别为筒状电极、喷嘴状电极。利用MAXWELL 3D电场仿真软件对两种电极结构下的电场分布进行了仿真分析,并采用探针法对放电生成的等离子体的参数进行了测量,分析讨论了同轴电极结构对真空放电等离子体生成特性的影响。选取喷嘴状电极结构作为阳极,分别测量了采用铅、铝、铜三种材质的阴极时生成的等离子体的扩散速度及能量。实验与仿真结果表明:当阳极为喷嘴状电极时阴极尖端的电场强度较大,测得放电电流较大,击穿电压较低,等离子体密度也较大;采用铝材质阴极时生成的等离子体扩散速度最快,采用铅材质阴极时生成的等离子体的离子动能最大。     

Very slowly decaying afterglow plasma in cryogenic helium gas

A late afterglow period of cryogenic plasma with density less than 10/sup 8/ cm/sup -3/ in 4.2-K helium gas is measured, where the plasma is lost mainly through ambipolar diffusion. We fabricate a large stainless-steel cylindrical discharge vessel of 16.6 cm in diameter and 8.2 cm in length. The vessel is a TE/sub 011/ mode cavity with resonant frequency 2.85 GHz and Q-value larger than 3000. The diffusion length of the cavity, 2.1 cm, is much larger than those previously reported on cryogenic plasmas. A high-voltage pulse of 15 kV, 600 A with duration 2.5 /spl mu/ s is applied between tungsten needle electrodes to produce a plasma repeatedly. Gas pressure is varied from 0.08 to 1.1 torr. Temporal changes in plasma density and electron-atom momentum transfer collision frequency are measured by an improved method of microwave interferometer including the cavity. The plasma decay with time constant on the order of 1 s is observed. We can see very slowly fading fluorescent light with our naked eyes. The decay time is increased, if gas temperature is cooled below 4.2 K.     

Comparative measurements on thermal plasma jet characteristics inatmospheric and low pressure plasma sprayings

The ion and electron temperatures and plasma flow velocities are measured and compared between atmospheric and low pressure plasma spraying systems. The measurements of ion temperature for two systems are carried out by an optical emission spectroscopy which uses the relative emissivities of isolated Ar I emission lines. The electron density and temperature are measured by a Langmuir probe rotating across the plasma jets. The ion saturation currents collected by a Mach probe at two orientations, perpendicular and parallel to the plasma jet, determine the flow velocity. The spatial distributions of electron density, plasma flow velocity, and the associated shock activity in thermal plasma jets are discussed in conjunction with their direct dependency upon the ambient pressures as well as the torch powers. Measurements on temperatures and velocity profiles of thermal plasma jets reveal the general features of the LPPS jet characteristics, i.e., higher velocity flow with lower temperature, longer heating zone of expanded flame, and more extended accelerating zone compared with those of the APS jets. The shock activity clearly exists in the form of standing shock waves in the plasma jet of LPPS in view of flow compression and abrupt velocity drop which are appeared in the results of measurements on the variations of electron density and flow velocity along the plasma jet. In the center of the plasma jet of APS, the electron density is high enough to reach the LTE criterion, and the difference between ion and electron temperatures becomes insignificant as the torch input power increases     

短管螺旋波放电中等离子体参数测量和模式转化研究

对长度为45 cm的短放电管螺旋波放电等离子体进行了Langmuir探针、原子发射光谱以及集成电荷耦合检测器(ICCD)检测诊断,研究螺旋波等离子体的放电特性.Langmuir探针数据显示电子密度在射频功率增加过程中出现两次大幅增长,由此确认了放电模式的转换及螺旋波放电模式的出现.发射光谱测量结果与Langmuir探针测量的电子密度数据一致,发现Ar原子和Ar离子的谱线强度与放电模式变化有着密切相关性.而通过对不同放电模式的ICCD测量,获得射频功率吸收因放电模式转变而变化的方式,认为放电模式转换时电子行为和能量传递方式也发生着变化.     

HL-2A等离子体边缘的快速单探针测量

介绍了对HL-2A装置中平面边缘等离子体的单探针测量。单探针是安装在可径向移动、并可绕轴旋 转360o的传动杆上的。在1MHz的快速采样频率下,测量了主等离子体边缘的温度、密度、悬浮电位、空间电位、极 向等离子体流速的径向分布。测量的结果表明,利用单探针测量的主等离子体边缘参数与朗缪尔四探针测量结果 基本一致。     

大面积表面波等离子体的特性研究

介绍一种矩形反应腔体结构的表面波等离子体源，通过对垫层介质及天线结构的优化设计，产生了大面积均匀的等离子体.采用静电探针测量了等离子体参数(密度，电子温度)在不同运行条件(气压，功率)下的空间分布；采用扩散模型，数值模拟了等离子体密度在垂直方向上的空间分布，并比较好地解释了实验测量结果. 关键词： 表面波等离子体 狭缝天线 数值模拟 探针测量     

Modeling plasma equipment using neural networks

Equipment plasma has been modeled semi-empirically using neural networks in conjunction with statistical experimental design. A 3³ factorial design was employed to characterize the plasma, in which the variables that were varied include a source power, pressure, and Ar flow rate. As a test data for model validation, 16 experiments were additionally conducted. A total of six plasma attributes were modeled, which include electron density, electron temperature, and plasma potential as well as their spatial uniformities. A planar, inductively coupled plasma was generated in a multipole plasma etch equipment and Langmuir probe was utilized for data collection. Root mean-squared prediction errors measured on the test data are 0.323 (10 ¹¹/cm³), 0.267 (eV) and 1.141 (V) for electron density, electron temperature, and plasma potential, respectively. Comparisons with a statistical response surface model (RSM) revealed that neural network models are more accurate by an improvement of more than 25% in prediction performance. A similar level of prediction accuracy was also achieved in modeling spatial uniformity data. Consequently, neural networks demonstrated much better prediction capabilities over RSM in modeling complex equipment plasma     

Experimental Study of Planar Langmuir Probe Characteristics in Electron Current-Carrying Magnetized Plasma

Experimental study of planar Langmuir probe characteristics in a magnetized plasma with an electron current along the direction of the magnetic field shows that the usual procedure for determination of the electron temperature and plasma density, which is applicable in a current-free magnetized plasma, gives erroneous results for these plasma parameters. When this procedure is applied on the characteristics measured at two opposite orientations of the probe collecting surface with respect to the direction of the electron drift, different values of the electron temperature are obtained. These virtual electron temperatures and corresponding plasma densities calculated from the measured ion saturation currents are higher and/or smaller than the exact local electron temperature and plasma density. Calculation of particular averages of these quantities is proposed as a possible way to obtain correct results for the local electron temperature and plasma density. These averages are used in the approximate evaluation of the electron drift velocity from the electron saturation currents measured at the two orientations of the probe collecting surface.     

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The electron densities in the atmospheric pressure helium plasma were calculated by means of electron drift velocity and the jet velocity respectively. The electron velocity and jet velocity can be calculated by means of helium plasma jet current measured by a dielectric probe and plasma discharge current signal measured by voltage probes. The results show that the estimated electron densities of the helium plasma jet calculated from electron drift velocity and the jet velocity are in the order of 10 ¹¹ cm ^-3 and they increase with applied voltage. There is a little fluctuation in the value of the electron density along the jet axis of the plasma. This result is the same as the measured electron density in atmospheric pressure helium non-thermal plasma jet by using a Rogowski coil and a Langmuir probe. This is in one order lower than the electron density measured by microwave antenna.     

非对称磁镜场电子回旋共振氧等离子体刻蚀化学气相沉积金刚石膜

分别应用郎缪尔双探针和离子灵敏探针对非对称磁镜场电子回旋共振氧等离子体的电子参数、空间分布和离子参数进行了测量,分析了气压对等离子体参数及空间分布的影响。利用该等离子体在优化的气压条件下对化学气相沉积金刚石膜进行了刻蚀,并研究了刻蚀机理。结果表明:电子温度为5~10 eV,离子温度为1 eV左右,而等离子体数密度在1010cm-3数量级。随气压的升高,电子和离子温度降低,而电子数密度先增大后减小。在低气压下等离子体数密度空间分布更均匀,优化的刻蚀气压为0.1 Pa。刻蚀过程中,离子的回旋运动特性得到了加强,有利于平行于金刚石膜表面的刻蚀,有效地保护了金刚石膜的晶界和缺陷。     

利用介质阻挡探针法测量大气压氦等离子体射流电子密度

分别利用电子的漂移速度和等离子体的传播速度计算了大气压下氦等离子体射流的电子密度。     

Adiabatic electron thermal pressure fluctuations in tokamak plasmas

Electron thermal pressure fluctuations measured in the edge plasma of the Texas Experimental Tokamak Upgrade are a fundamental component of plasma turbulence on both sides of the velocity shear layer. The ratio of specific heats, estimated from fluctuations in electron temperature and electron number density measured simultaneously at the same electrode, indicates that observed fluctuations are adiabatic. The observations are made by means of a novel Langmuir probe technique, the time domain triple-probe method, which concurrently measures multiple plasma properties at each of two electrodes with the temporal and the spatial resolution required to estimate thermodynamic properties in a turbulent plasma.     

Spatial variation behaviors of argon inductively coupled plasma during discharge mode transition

A Langmuir probe and an ICCD are employed to study the discharge mode transition in Ar inductively coupled plasma. Electron density and plasma emission intensity are measured during the E (capacitive discharge) to H (inductive discharge) mode transitions at different pressures. It is found that plasma exists with a low electron density and a weak emission intensity in the E mode, while it has a high electron density and a strong emission intensity in the H mode. Meanwhile, the plasma emission intensity spatial (2D image) profile is symmetrical in the H mode, but the 2D image is an asymmetric profile in the E mode. Moreover, the electron density and emission intensity jump up discontinuously at high pressure, but increase almost continuously at the E to H mode transition under low pressure.     

Analyses of edge plasma characteristics in HL-2A

The edge plasma characteristics are studied by both a movable array of Mach/Reynolds stress/Langmuir 10-probes in the boundary region and the fixed flush probe arrays on the 4 divertor neutralization plates at the same toroidal cross-section in the HL-2A tokamak. The dependence of the Reynolds stress on poloidal flow in the edge plasma is analysed. The result indicates that the sheared poloidal flow in tokamak plasma can be induced by the radial gradient of Reynolds stress. In the divertor experiments of HL-2A, the profiles of the electron temperature, density and floating potential on divertor plates are measured by the flush probe arrays. The edge electron temperature in divertor configuration is higher than that in limiter configuration. The temperature asymmetry between outer and inner target plates is observed. The result of magnetic surface reconstructed from 18 Mirnov coils signals is presented. Both the particle recycling and the impurity flux in the bulk plasma during divertor discharges are discussed. Neutral gas pressure in divertor chamber, measured by fast ionization gauge during divertor discharge, is given.     

利用离子声波朗道阻尼测量氧化物阴极放电中的离子温度

作为等离子体重要参数之一, 特别是在低温等离子体中离子温度的测量一直较为困难. 在磁化线性等离子体装置氧化物阴极脉冲放电条件下, 利用栅网激发离子声波, 通过测量波幅在朗道阻尼作用下随空间的演化, 利用阻尼长度是离子温度和电子温度的函数, 计算得到离子温度为0.3 eV. 测量值与国外类似装置利用光谱诊断所得结果基本相同.     

Langmuir Probe Measurement of the Electron Temperature in the Plasma Plume Formed by Pulsed Laser Deposition of Bi-Sr-Ca-Cu-O

The electron temperature of the plasma formed during pulsed laser deposition of Bi-Sr-Ca-Cu-O target was measured using Langmuir probe. The main parameters of the experiment were as follows: The distance of the probe from the target was in the range of (4-6) mm, the basic working pressure was 2×10^–3 Pa and the planar pulse energy density of laser beam was approximately 8 J/cm². The obtained values of electron temperature were in the range of (1.0-2.5) eV. Presented results are discussed from the point of view of different theories of plasma splitting.     

Effect of Parallel-Plate Geometry on Mode Transition Behavior in Argon Microplasmas: Two-Dimensional Simulation

A two-dimensional self-consistent fluid model is employed to investigate radio-frequency process parameters on the plasma properties in Ar microdischarges. The neutral gas density and temperature balance equations are taken into account. We mainly investigate the effect of the electrode gap on the spatial distribution of the electron density and electron temperature profiles, due to a mode transition from the regime(secondary electrons emission is responsible for the significant ionization) to the regime(sheath oscillations and bulk electrons are responsible for sustaining discharge) induced by a sudden decrease of electron density and electron temperature.The pressure, radio-frequency sources frequency and voltage effects on the electron density are also elaborately investigated.     

Langmuir探针诊断低压氢等离子体电子密度与温度

为研究实验参数对螺旋波诱导的低压氢等离子体状态的影响,用Langmuir探针对等离子体伏安特性曲线进行了原位诊断,采用双曲正切函数的指数变换模型拟合曲线,根据Druyvesteyn方法得到状态参数电子密度、有效电子温度和电子能量几率函数,分析了它们随实验参数的变化规律。结果表明:射频输入功率、气压和约束磁场对等离子体状态有较大影响。随着射频射入功率增大,放电模式发生转变,电子密度跳跃增长;随着气压增大,电子密度先增大后减小,1.5 Pa为最佳电离气压,随约束磁场的增强呈线性增长;有效电子温度随功率和气压的增大而下降,随约束磁场的增强线性降低,电子能量几率函数曲线峰位和高能部分都向低能移动,与有效电子温度变化规律吻合。