Suspended penetration wetting state of droplets on microstructured surfaces

When a water droplet on a micropillar-structured hydrophobic surface is submitted to gradually increased pressure, the CassieBaxter wetting state transforms into the Wenzel wetting state once the pressure exceeds a critical value. It has been assumed that the reverse transition(Wenzel-to-Cassie-Baxter wetting state) cannot happen spontaneously after the pressure has been removed.In this paper, we report a new wetting-state transition. When external pressure is exerted on a droplet in the Cassie-Baxter wetting state on textured surfaces with high micropillars to trigger the breakdown of this wetting state, the droplet penetrates the micropillars but does not touch the base of the surface to trigger the occurrence of the Wenzel wetting state. We have named this state the suspended penetration wetting state. Spontaneous recovery from the suspended penetration wetting state to the initial Cassie-Baxter wetting state is achieved when the pressure is removed. Based on the experimental results, we built models to establish the penetration depth that the suspended penetration wetting state could achieve and to understand the energy barrier that influences the equilibrium position of the liquid surface. These results deepen our understanding of wetting states on rough surfaces subjected to external disturbances and shed new light on the design of superhydrophobic materials with a robust wetting stability.     

微纳复合结构表面稳定润湿状态及转型过程的热力学分析

自然界中的微纳复合结构超疏水表面由于其独特的润湿性质引起了人们的广泛关注, 大量实验研究表明了仿生人工微纳复合结构表面润湿性能的优越性, 然而液滴在微纳复合结构表面的润湿状态和转型过程的理论研究还并不完善. 本文首先用热力学方法分析了液滴在微纳复合结构表面可能存在的所有状态(四种稳定润湿状态和五种亚稳态到稳定态转型中的过渡态), 推导出了相应的能量表达式及表观接触角方程; 基于最小能量原理, 确定液滴在微纳复合结构表面的稳定状态, 较以往模型相比, 能够更好的预测已有的实验结果; 其次研究了微纳结构尺寸对稳定润湿状态和亚稳态到稳定态转型过程的影响; 最后提出了微纳复合结构表面设计原则, 即确定“超疏水稳定区”尺寸范围, 为超疏水表面的制备提供理论依据.     

微纳加工技术在微纳电子器件领域的应用

微纳加工技术推动着集成电路不断缩小器件尺寸和提高集成度,光学光刻技术依然是目前的主流微纳加工技术,同时有多种替代技术如电子束直写、极紫外光刻和投影电子束技术,文章介绍了自上而下的微纳加工技术的进展及其在微纳器件研制的重要作用.     

微纳加工技术在微纳电子器件领域的应用

微纳加工技术推动着集成电路不断缩小器件尺寸和提高集成度，光学光刻技术依然是目前的主流微纳加工技术，同时有多种替代技术如电子束直写、极紫外光刻和投影电子束技术，文章介绍了自上而下的微纳加工技术的进展及其在微纳器件研制的重要作用。     

Superhydrophobic surfaces via controlling the morphology of ZnO micro/nano complex structure

ZnO micro/nano complex structure films, including reticulate papillary nodes, petal-like and flake-hole, have been self-assembled by a hydrothermal technique at different temperatures without metal catalysts. The wettability of the above film surfaces was modified with a simple coating of heptadecafluorodecyltrimethoxy-silane in toluene. After modifying, the surface of ZnO film grown at 50~${^\circ}$C was converted from superhydrophilic with a water contact angle lower than 5$^{\circ}$ to superhydrophobic with a water contact angle of 165$^{\circ}$. Additionally, the surface of reticulate papillary nodes ZnO film grown at 100~${^\circ}$C had excellent superhydrophobicity, with a water contact angle of 173$^{\circ}$ and a sliding angle lower than 2$^{\circ}$. Furthermore, the water contact angle on the surface of petal-like and flake-hole ZnO films grown at 150~${^\circ}$C and 200~${^\circ}$C were found to be 140$^{\circ}$ and 120$^{\circ}$, respectively. The wettability for the samples was found to depend strongly on the surface morphology which results from the growth temperature.     

Complete wetting characteristics of micro/nano dual-scale surface by plasma etching to give nanohoneycomb structure

A variety of flat superhydrophilic surfaces have been fabricated for biological and industrial applications. We report here the preparation of a simple and inexpensive non-polar curved superhydrophilic surface. This surface has dual-scale surface roughness, on both micro- and nanoscales. Curved surfaces with a near-zero water contact angle and ‘complete wetting’ are demonstrated. By using a conventional plasma etching process, which creates microscale irregularity on an aluminum surface, followed by an anodization process which further modifies the plasma etched surface by creating nanoscale structures, we generate a surface having irregularities on two-scales. This surface displays a semi-permanent superhydrophilic property (if the surface has no damage by the exterior failure), having a near-zero contact angle with water drops. We further report a simple and inexpensive curved (i.e., non-planar) superhydrophilic structure with a near-zero contact angle. The dual-scale character of the surface increases the capillary force effect and reduces the energy barriers of the nanostructures.     

Rapid deceleration-driven wetting transition during pendant drop deposition on superhydrophobic surfaces

A hitherto unknown mechanism for wetting transition is reported. When a pendant drop settles upon deposition, there is a virtual "collision" where its center of gravity undergoes rapid deceleration. This induces a high water hammer-type pressure that causes wetting transition. A new phase diagram shows that both large and small droplets can transition to wetted states due to the new deceleration driven and the previously known Laplace mechanisms, respectively. It is explained how the attainment of a nonwetted Cassie-Baxter state is more restrictive than previously known.     

Controlling the reversible wetting capability of smart photochromic-polymer surfaces by micro patterning

We demonstrate the wetting behavior control of polymer surfaces doped with photochromic molecules by modifying the surface patterning features introduced by soft molding lithography. Such surfaces enhance their hydrophilicity upon UV irradiation due to conversion of the non-polar spiropyran dopant molecules to their polar merocyanine isomers. The process is reversed upon visible light irradiation. By changing the topological parameters of the introduced pattern, one achieves surface tuning from hydrophobic to hydrophilic situations. The difference for the contact angles between UV- and green-irradiated surfaces may become significantly higher than for the flat surfaces, for the specific patterning parameters analyzed. PACS 42.62.-b; 68.08.Bc; 83.50.Uv; 42.70.Jk; 42.70.Gi     

Experimental and theoretical evaluation of wettability on micro/nano hierarchically engineered surfaces based on robust micro-post-arrayed- and highly ordered nano-rippled-structures

This paper reports a simple approach for demonstrating a micro/nano hierarchical surface, ensuring both geometrical regularity and mechanical stability, for improving the hydrophobicity. The proposed dual-scale hierarchical surfaces were realized simply by combining the highly self-ordered ripple-like nano patterns with the robust micro-post arrays, based on the cost-effective nonlithographic chemical oxidation process and well-established microfabrication technologies. The wettability of the proposed nano-scale mono- and micro/nano dual-roughened surfaces was evaluated by measuring the apparent contact angles (ACAs), and analyzed theoretically with analytic models based on the Wenzel, Cassie, and combined wetting theories. Through experimental and theoretical observations, it was found that the proposed micro/nano hierarchical structures can improve the wetting property and the superhydrophobic robustness of high- and low-density micro-post arrayed surfaces, respectively.     

Anisotropically microstructured and micro/nanostructured polypropylene surfaces

Anisotropically microstructured and hierarchically micro/nanostructured surfaces were fabricated on polypropylene by injection moulding. Microstructured mould inserts were obtained by structuring electropolished aluminium foils with a micro-working robot, and hierarchically structured mould inserts by anodizing the microstructured aluminium foils. On both types of inserts, the microstructures were anisotropic, consisting of alternating smooth and microstructured zones. Anisotropy, and other properties of microstructures, can be controlled by adjusting the parameters of the micro-working robot. The mould inserts were used to prepare micro- and hierarchically structured polypropylene discs by injection moulding. Replication accuracy at both structure levels can be controlled through the moulding conditions. The behaviour of water on the structures was characterized by measuring the contact and sliding angles parallel and perpendicular to the microstructured zones. Surfaces with microstructures alone were highly hydrophobic, where water droplets adopted the Wenzel state and had clearly different parallel and perpendicular contact angles. Surfaces with dual structures had contact angles near 170° and sliding angles near 0°, and again the angles in parallel and perpendicular directions differed. Superhydrophobic, anisotropic Cassie-Baxter state was achieved.     

Performance analysis of a thermosize micro/nano heat engine

In a recent paper [A. Sisman, I. Muller, Phys. Lett. A 320 (2004) 360] the thermodynamic properties of ideal gases confined in a narrow box were examined theoretically. The so-called “thermosize effects” similar to thermoelectric effects, such as Seebeck-like thermosize effect, Peltier-like thermosize effect and Thomson-like thermosize effect, were analyzed. Like the thermoelectric generator, based on the thermosize effects we have established a model of micro/nano scaled ideal gas heat engine cycle which includes two isothermal and two isobaric processes. The expressions of power output and efficiency of this cycle in the two cases of reversible and irreversible heat exchange are derived and the optimal performance characteristics of the heat engine is discussed by some numerical example. The results obtained here will provide theoretical guidance for the design of micro/nano scaled device.     

多铁性纳米点结构及微纳器件应用

在当前电子技术微型化和高度集成化的趋势下,多铁性纳米材料的研究正逐渐成为一个重要主题。这方面的研究还处在起步阶段,在材料的制备工艺和表征手段方面还面临诸多挑战。文章简要介绍了多铁性纳米点的制备工艺(包括离子刻蚀、自组构、多孔氧化铝模板方法等)和以多功能扫描探针为代表的表征手段,还介绍了纳米点带来的新颖的物理现象及其在微纳器件应用等方面的研究进展。     

Study of Zinc Oxide nano/micro rods grown on ITO and glass substrates

Highly oriented multilinked ZnO nano and micro rods were deposited using aqueous solution growth technique on ITO and glass substrates. Their study provides a basic understanding of effect of the base material on the growth of nanorods. An equimolar aqueous solution of Zinc nitrate and hexamine (HMT) was used for the preparation of ZnO nanorods arrays. ZnO was deposited on ITO and glass substrates after establishing the optimal pH and concentration, which yield the best substrate coverage for precursor solution. To achieve uniform growth and high density of ZnO nanorods, the prepared solution was heated at certain constant temperature. The experimental results have been obtained by using Scanning Electron Microscope (SEM), X-ray diffractometer (XRD) and Fluorescence Spectroscope which shows highly oriented nanorods perpendicular to the surface of substrates and a comparative study of ITO and glass grown nanorod arrays shows that the structural chemistry of the substrate clearly affects the growth nanostructures. The high variation in optical properties can be attributed by the heating temperatures and limited presence of reactants available for the controlled growth on substrates. It is also observed confined and decreased particle size with enhanced nucleation on ITO substrate as compared to glass. Due to the physical limitations in the growth, this kinetically controlled nucleation would be responsible for producing the highly uniform, dense and perpendicularly oriented nanorods.     

Highly-efficient optical power combiners based on evanescently-coupled micro/nano optical fibers

Novel highly-efficient power combiners based on evanescently-coupled micro/nano optical fibers are proposed and experimentally demonstrated. Experimental results show that the maximum power combing efficiency can be >90%. The combining efficiency is overlap length dependent. As long as the overlap length is long enough (～7 mm), a stable high combining efficiency can always be achieved. The presented optical power combiners with the advantages of easy fabrication, low-loss, low-cost, and wavelength insensitivity can find potential applications in micro/nano photonic devices, optical communications and optical interconnects.     

A study of fused silica micro/nano patterning by focused-ion-beam

A dual-beam scanning electron microscopy (SEM)/focused-ion-beam (FIB) system was used to pattern fused silica substrates coated with a 15 nm thin Cr layer. The dimensions of fabricated features together with their surface morphology and profiles were investigated by SEM and atomic force microscopy (AFM). The study demonstrated that with the increase of the ion beam fluence the sputtering rate of the fused silica decreased non-linearly. Also, it was found that initially the sputtering rate increased with the increase of the beam current, after reaching a maximum value, it started decreasing when further beam current increment was performed. Compared with unprocessed areas, the surface finish of the features fabricated by FIB exhibited a significant improvement, and the ion fluence influence on the surface roughness of trenches with low aspect ratios could be considered as negligible. Using a fine beam probe, nano-gratings in the form of grooves with a width down to 54 nm and an aspect ratio higher than three were fabricated. The study showed that FIB machining could be an alternative technology to e-beam lithography for producing fused silica templates for UV nanoimprinting.     

Dynamic modeling of manipulation of micro/nanoparticles on rough surfaces

In this paper, the dynamic behavior of spherical micro/nanoparticles, while being pushed on rough substrates, is studied by means of an Atomic Force Microscope (AFM). For this purpose, first, the contact adhesion force, and the areas and penetration depths of rough surfaces are derived based on the Johnson-Kendall-Roberts (JKR) theory, the Schwarz method, and the Rumpf/Rabinovich models. Then, the dynamic model of particle manipulation on rough substrates is revised using the specified contact theory for rough surfaces. And finally, the pushing of spherical particles with 50, 100, 200, 500, and 10000 nm radii is simulated. The results show that the critical force and the critical time of manipulation decrease when the particles are pushed on the rough surfaces as compared to the smooth ones. It is also observed that the critical force for a rough substrate containing asperities of low height and large radius approaches a comparable critical force magnitude to the smooth substrate, as is expected. Also, when the asperity radius in the substrate is within the range of 0.5 < r < 5 nm, the critical force of pushing decreases; however, as the asperity radius becomes larger than 5 nm, the critical force begins to increase again. Furthermore, the critical values are generally more sensitive to the changes of the asperity radius than the height. It is also found that the difference between the critical values based on the Rumpf and Rabinovich models is negligible. However, the estimation of particles’ dynamic behavior using the Rumpf model could be wrong for the rough substrates with small radius asperities, which is considerable in the manipulation and assembly practices. Moreover, the dynamic behavior of particles of small radius (r < 500 nm) change during the pushing process on rough surfaces, and the rolling behavior could be possible on the surfaces that have small radius asperities. The probability of this occurrence is increased in the pushing of larger particles on rougher substrates.     

三维微纳米制造技术在癌症生物物理研究中的应用

癌症致命的主要原因是癌细胞在临床上的转移性. 癌细胞的侵袭和转移是一个非常复杂的三维过程, 但现有的癌症研究在活体上有诸多观测和操作上的困难. 而体外实验又通常在培养皿中进行, 其二维的生长环境已完全不能满足对癌细胞空间转移性的深入研究, 故在活体外构建出癌细胞侵袭和转移的三维物理模型具有十分重要的意义. 然而如何在体外尽可能真实地模拟体内癌细胞的生长微环境一直是困扰科学家的难题. 本文系统介绍了三维微纳米制造的几种主流技术, 探讨了它们在癌症生物物理研究中的应用和发展. 在此基础上为了在未来实现对体外三维模型的制造、观测和精确操作, 文章还创新性地提出了一种结合紫外线固化生物型水凝胶的三维成型技术、光片三维成像技术以及微纳米探针控制技术的一体化研究平台. 这些先进的技术和理念, 势必会逐步升级现有传统的癌症研究手段, 为未来理解和治疗癌症揭开全新的篇章.     

Numerical investigation on thermal properties at Cu-Al interface in micro/nano manufacturing

A hybrid model by integrating TTM (two-temperature model) and MD (molecular dynamics) is proposed to investigate the properties on interface of dissimilar materials under thermal flux conditions. This model can describe the electron phonon coupling and phonon scattering at the interface of different metals easily. By comparing the Cu-Cu interface and Cu-Al interface, the atoms of the Cu-Cu interface at different sides tend to move together; while, the atoms displacements of Cu and Al are opposite along the interface, which may cause stress and voids at the interface. Moreover, the propagation mechanisms of nanocracks and the corresponding change of temperature distribution and thermal flux are investigated. The results show that the interfaces of dissimilar materials are prone to crack initiations, leading to delaminations because of the high temperature. All these are useful for understanding the deformation and failure of the interfaces structures. It implies a potential method for design and analysis of interface structure in micro/nano manufacturing.     

Wetting mode transition of nanoliter scale water droplets during evaporation on superhydrophobic surfaces with random roughness structure

During evaporation, shape changes of nanoliter-scale (80-100 nL) water droplets were evaluated on two superhydrophobic surfaces with different random roughness (nm-coating, μm-coating). The square of the contact radius and the square of the droplet height decreased linearly with evaporation time. However, trend changes were observed at around 170 s (nm-coating) and around 150 s (μm-coating) suggesting a wetting mode transition. The calculated droplet radii for the wetting mode transition from the average roughness distance and the average roughness height of these surface structures were approximately equal to the experimental values at these trend changes. A certain level of correlation between the roughness size and droplet radius at the wetting mode transition was confirmed on surfaces with random roughness.