Velocity distributions in glottal models

Velocity distributions within three models of the human larynx, namely, a rigid plexiglas model, an excised canine larynx, and a computational model are investigated with experimental and theoretical analyses. A plexiglas wind tunnel with interchangeable glottal constrictions was used as a two-dimensional steady-flow model to measure velocity and pressure for various glottal shapes. A canine excised larynx was used as a prototype pulsatile flow model to study pressure and velocity variations during phonation. Results of the plexiglas modelling indicated a parabolic laminar velocity profile upstream of the glottal constriction and turbulent and asymmetric velocity profiles downstream of the glottal constriction. The time-averaged velocities of the excised larynx had similarities with the plexiglas model results, and instabilities and asymmetries were also demonstrated by the computational method.     

Preoscillation charge distributions in a cylindrical magnetron

Based on notions concerning the nature of diffuse motion of electrons in a magnetron which were expounded in previous papers by the authors with application to a plane magnetron, a diffusion equation is derived for a cylindrical magnetron. By solving this equation it is clarified that at least for H > 1.5 H_cr the major part of the electron cloud is in a mode close to the static synchronous mode.Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Radiofizika, Vol. 15, No. 2, pp. 282–290, February, 1972.     

Velocity distributions in dissipative granular gases

Motivated by recent experiments reporting non-Gaussian velocity distributions in driven dilute granular materials, we study by numerical simulation the properties of 2D inelastic gases. We find theoretically that the form of the observed velocity distribution is governed primarily by the coefficient of restitution eta and q=N(H)/N(C), the ratio between the average number of heatings and the average number of collisions in the gas. The differences in distributions we find between uniform and boundary heating can then be understood as different limits of q, for q>1 and q less, similar 1, respectively.     

Stress anisotropy in circular planar magnetron sputter deposited molybdenum films and its annealing effect

As part of the program to develop a free-standing thin-film filter for soft X-ray optics application, stress anisotropy in the molybdenum films deposited by dc circular planar magnetron sputtering were studied by X-ray diffraction (XRD) as a function of sputtering argon gas pressure over a range of 0.8–1.5 Pa. Surface morphology of the films has been investigated by optical microscopy and scanning tunneling microscopy (STM). It is found that, for the film deposited at 0.8 Pa pressure, the stresses are more compressive in the tangential than in the radial direction; the highest compressive stress exists in the center area. The film deposited at 1.5 Pa pressure has the highest stress anisotropy, and the stresses are less tensile in the tangential than in the radial direction. Annealing in vacuum is more effective in reducing tensile stress and stress anisotropy in the tensile stressed film than in the compressively stressed film. Received: 14 September 2001 / Accepted: 21 January 2002 / Published online: 5 July 2002 RID="*" ID="*"Corresponding author. Fax: +86-21/6598-6323, E-mail: ygwu@mail.tongji.edu.cn     

磁控溅镀法制备Al掺杂ZnO薄膜的特性分析

以射频磁控溅镀法在柔性聚碳酸酯基板上成长Al掺杂ZnO薄膜,利用XRD、AES、霍尔效应测试仪及单色分光计测量分析Al靶功率对薄膜光电特性的影响. XRD分析表明所有薄膜的衍射峰皆以(002)面为主,Al靶功率为25 W时(002)面衍射峰强度最大,此时薄膜结晶性最佳; AES分析表明随着Al靶功率的增大,Al含量由0 at.%增至18.01 at.%,Zn含量则由72.51 at.%降至38.39 at.%,而O含量没有太大变化,这说明Al可以取代ZnO中Zn的位置;霍尔效应测量表明Al靶功率为25 W时电阻率最小,约为7.75×10~(-4)Ω·cm,而载子浓度及其迁移率则达到最大,分别约为9.35×10~(20) cm~(-3)与8.64 cm~2/(V·s);分光计测量表明薄膜在可见光区的平均透射率可约达90%以上,说明本研究制备的Al掺杂ZnO薄膜是具有高透射率的透明导电薄膜.     

Velocity and velocity-difference distributions in Burgers turbulence

We consider the one-dimensional Burgers equation randomly stirred at large scales by a Gaussian short-time correlated force. Using the method of dissipative anomalies, we obtain velocity and velocity-difference probability density functions and confirm the results with high-resolution numerical simulations.     

Nitrogen atom energy distributions in a hollow-cathode planar sputtering magnetron

Energy distributions of nitrogen atoms (N) in a hollow-cathode planar sputtering magnetron were obtained by use of optical emission spectroscopy. A characteristic line, N I 8216.3 A, well separated from molecular nitrogen emission bands, was identified. Jansson's nonlinear spectral deconvolution method, refined by minimization of chi(2)(w), was used to obtain the optimal deconvolved spectra. These showed nitrogen atom energies from 1 eV to beyond 500 eV. Based on comparisons with VFTRIM computer code results, it is proposed that the energetic N's are generated from N+2 ions after these ions are accelerated through the sheath and dissociatively reflect from the cathode.     

Surface free energy of non-stick coatings deposited using closed field unbalanced magnetron sputter ion plating

Semiconductor IC packaging molding dies require wear resistance, corrosion resistance and non-sticking (with a low surface free energy). The molding releasing capability and performance are directly associated with the surface free energy between the coating and product material. The serious sticking problem reduces productivity and reliability. Depositing TiN, TiMoS, ZrN, CrC, CrN, NiCr, NiCrN, CrTiAlN and CrNiTiAlN coatings using closed field unbalanced magnetron sputter ion plating, and characterizing their surface free energy are the main object in developing a non-stick coating system for semiconductor IC molding tools. The contact angle of water, diiodomethane and ethylene glycol on the coated surfaces were measured at temperature in 20 °C using a Dataphysics OCA-20 contact angle analyzer. The surface free energy of the coatings and their components (dispersion and polar) were calculated using the Owens-Wendt geometric mean approach. The surface roughness was investigated by atomic force microscopy (AFM). The adhesion force of these coatings was measured using direct tensile pull-off test apparatus. The experimental results showed that NiCrN, CrN and NiCrTiAlN coatings outperformed TiN, ZrN, NiCr, CiTiAlN, CrC and TiMoS coatings in terms of non-sticking, and thus have the potential as working layers for injection molding industrial equipment, especially in semiconductor IC packaging molding applications.     

Photocatalytic activity of dc magnetron sputter deposited amorphous TiO2 thin films

For photocatalytic thin film applications TiO₂ is one of the most important materials. The most studied TiO₂ crystal phase is anatase, though also rutile and brookite show good photoactivity. Usually anatase or a mixture of rutile and anatase is applied for powder or thin film catalysts. It has been claimed that amorphous films do not exhibit any or only a very low photocatalytic activity.We have deposited amorphous thin films by dc magnetron sputtering from sub-stoichiometric TiO_2−x targets. The coatings are transparent and show a photocatalytic activity half of that of a thin layer of spin-coated reference photocatalyst powder. Annealing the thin films to yield anatase crystallization more than doubles their photocatalytic activity. At the same film thickness these thin films show the same activity as a commercially available photocatalytic coating.The dependence of the photocatalytic activity on deposition parameters like gas pressure and sputter power is discussed. A decrease in film density, as deduced from the refractive index and the microstructure, resulted in an increase in photocatalytic activity. Film thickness has a marked influence on the photocatalytic activity, showing a strong increase up to 300-400 nm, followed by a much shallower slope.     

Velocity distributions and density fluctuations in a granular gas

Velocity distributions in a vibrated granular monolayer are investigated experimentally. Non-Gaussian velocity distributions are observed at low vibration amplitudes but cross over smoothly to Gaussian distributions as the amplitude is increased. Cross-correlations between fluctuations in density and temperature are present only when the velocity distributions are strongly non-Gaussian. Confining the expansion of the granular layer results in non-Gaussian velocity distributions that persist to high vibration amplitudes.     

Characteristics of Cu films prepared using a magnetron sputter type negative ion source (MSNIS)

Cu films have been deposited at room temperature using a magnetron sputter type negative ion source (MSNIS) at various conditions. By the principle of operation, the negative ion production probability is the function of the Cs flow rate in MSNIS. A set of films were deposited at different Cs flow rates and compared with normal-magnetron-sputtered films. The long-throw method was combined to MSNIS to increase the directionality and the negative ion arrival ratio. The film properties, such as resistivity, surface roughness, film structure, and step coverage on high aspect-ratio trench samples were obtained and analyzed using SEM, SIMS and AFM methods. The results showed that the resistivity of the film improved toward the theoretical values from 2.3 to 1.8 μΩ cm for the 100 nm thickness films. AFM scan of the film showed surface roughness was improved using MSNIS by ion bombarding effect. Depth profiling SIMS result showed Cs level resided in the film was less than 1 × 10¹⁹ at./cm³. As an application, Cu seed layer deposition on trench structure was investigated. Cross-sectional SEM was employed to see the step coverage of the film. The biasing effect was investigated. The different biasing conditions resulted as the clearly different coverage mode.     

Velocity distributions remotely measured with a single-sided NMR sensor

The pulsed field gradient nuclear magnetic resonance (PFG NMR) method has proved to be a powerful non-invasive technique to measure molecular displacement in various systems. It has been largely implemented with conventional NMR magnets where the volume for housing the flow setup is restricted. In this work we present the first approach to measure velocity distributions ex situ implementing a pulsed field gradient sequence on a single-sided NMR sensor. The open geometry of these sensors provides access to NMR measurements of a large number of applications previously excluded by the geometry of conventional closed magnets. Both, the distortions to the displacement encoding observed when implementing a PFG sequence in the presence of strongly inhomogeneous B0 and B1 fields, and the performance of the modifications proposed to eliminate these distortions are shown by means of numerical simulations. An alternating stimulated spin-echo PFG sequence implemented to remotely measure velocity distributions was combined with a multi-echo acquisition scheme to significantly increase the sensitivity of the method. The technique was implemented to measure the velocity propagator in a fluid undergoing laminar flow and good agreement with the theoretical result is observed.     

Depth resolution in sputter profiling

The dependence of depth resolution on sputter depth due to various parameters is theoretically estimated. Comparison with experimental work of different authors shows the validity of the proposed model.     

Velocity distributions of granular gases with drag and with long-range interactions

We study velocity statistics of electrostatically driven granular gases. For two different experiments, (i) nonmagnetic particles in a viscous fluid and (ii) magnetic particles in air, the velocity distribution is non-Maxwellian, and its high-energy tail is exponential, P(upsilon) approximately exp(-/upsilon/). This behavior is consistent with the kinetic theory of driven dissipative particles. For particles immersed in a fluid, viscous damping is responsible for the exponential tail, while for magnetic particles, long-range interactions cause the exponential tail. We conclude that velocity statistics of dissipative gases are sensitive to the fluid environment and to the form of the particle interaction.     

Velocity and metastable state population distributions of neodymium atoms produced by laser ablation

Laser-induced fluorescence spectroscopy has been employed to characterize the plume produced in nanosecond laser ablation of metallic neodymium. The kinetic-energy distributions of the neutral and ionized atoms in the plume under both vacuum and gas environments have been investigated. The population distribution of metastable levels in the ablated atoms was also derived. The results show that some metastable states are more heavily populated than predicted by a Boltzmann-type distribution. These investigations provide preliminary data for the design of a new type of resonance photo-ionization laser ion source as well as for high-resolution laser spectroscopy of refractory elements. PACS 52.38.Mf; 33.50.Dq; 42.62.Fi     

The depth resolution of sputter profiling

It is shown that the bulk radiation damage accompanying sputtering events sets ultimate limits to the depth resolution attainable in sputter profiling. These limits have been reached in a few cases but most published experimental resolutions are dominated either by instrumental effects or deterioration of depth resolution caused by surface-topography changes. The radiation-damage induced mixing is called “cascade mixing”. Guidelines for selection of projectile species and energies to minimize such mixing are given and numerical estimates for attainable depth resolutions are presented. Finally, the influence of cascade mixing is assessed relative to that of recoil implantation. Part of this paper was presented at the 3rd International Conference on Solid Surfaces, Vienna (September 1977)     

Auger electron spectroscopy investigation of sputter induced altered layers in SiC by low energy sputter depth profiling and factor analysis

The thickness of the altered layer created by ion bombardment of the 6H–SiC single crystal was determined by means of Auger electron spectroscopy (AES) depth profiling in conjunction with factor analysis. After pre-bombardment of the surface by argon ions with energies 1, 2 and 4 keV until the steady state, the depth profiles of the induced altered layers were recorded by sputtering with low energy argon ions of 300 eV. Since the position and shape of the carbon Auger peak depend on the perfection of the crystalline structure, they were used for depth profile evaluation by factor analysis. In this way the depth profiles of the damaged surface region could be estimated in dependence on the ion energy. As a result, the thickness of the altered layer of SiC bombarded with 1, 2 and 4 keV Ar ions using an incident angle of 80° as well as the corresponding argon implantation profile could be measured.     

Charge-referencing with Xe during XPS sputter profiles

The charge referencing of spectra in X-ray photoelectron spectroscopy (XPS or ESCA), especially while sputter profiling, is an important part of the determination of the oxidation state of species near the surface. When Xe is used as the sputter gas, the implanted Xe photopeak shifts in parallel with other surface species as the surface charge changes. However, the Xe Auger parameter does not change during these same experiments. These results show that the implanted Xe accurately reflects the static surface charge present on the other atoms of the surface. The Xe photoelectron energy may be used as the basis for charge-referencing the spectra of other elements as the surface is sputter profiled.     

Low temperature electronic transport in sputter deposited a-IGZO films

We report on the electrical properties of a-IGZO thin films prepared by reactive sputtering. Without oxygen injection, dc resistivity measured at room temperature is ρ_300K = 1.22 × 10⁻³ Ωm. The lowest resistivity ρ_300K = 4.86 × 10⁻⁵ Ωm is obtained at a certain oxygen supply into the deposition process. Hall effect measurements of these films reveal a metallic-like behavior from mobility and carrier concentration vs. temperature in the range 15–300 K whereas films deposited without oxygen or for the highest oxygen flows behave as semiconductors. These enhanced electrical properties are connected to the oxygen vacancies and the local coordination structure around the In³⁺ cations.