径向双折射滤波器的超分辨性能研究

超分辨技术因其可以超越经典的衍射极限而为人们所熟知．并且．在光存储和共焦扫描成像系统中有着广泛的应用。把由两个偏振器和一个圆对称的双折射元件组成的径向双折射滤波器引入超分辨技术,借助琼斯算法推导出其光瞳函数的表达式。由分析得出通过改变径向双折射滤波器中偏振器的偏振方向和双折射元件的主轴之间的夹角,即可实现光学系统的横向超分辨或轴向超分辨。同时对评价该器件超分辨性能的参量第一零点比、斯特尔比和旁瓣强度抑制比做了详细的讨论。该滤波器用于超分辨技术的优点在于其制作不涉及相位的变化而比较简单,且费用比较低。缺点是旁瓣能量过高,但可以通过采用共焦系统来抑制。     

电控径向滤波器的横向超分辨与轴向焦移

提出一种光瞳滤波器来同时实现横向超分辨和轴向焦移效应的电控制.该光瞳滤波器由两偏光镜及包含有径向双折射元件的任意偏振态的电控旋光器组成.利用径向双折射元件对光偏振态的空间调制作用,结合旋光器对任意偏振态光的旋光作用,与两个偏光镜结合,实现了空间偏振态的重新分布.利用庞加莱球及琼斯理论进行了分析,结果表明,借助这种电致位相延迟来实现的偏振态调制效应,可同时实现横向超分辨与轴向焦移效应.对能够同时获得横向超分辨与轴向焦移的情况进行了分析,得到了系统各组成参量及电光调制范围.     

电控径向双折射滤波器的横向超分辨与轴向扩展焦深

提出利用电控径向双折射光瞳滤波器实现横向超分辨性能参量的调制与轴向扩展焦深。该光瞳滤波器由两个平行偏光镜,一个电光晶体与一个径向对称双折射晶体组成。分析了电光晶体与径向双折射元件对光偏振态的空间调制作用,通过控制电光晶体的相位延迟实现径向中心处初始偏振态的控制,与径向双折射元件横向偏振态调制结合,实现了庞加莱球上偏振态演变路径与阶段的控制,从而对焦点附近偏振态进行空间调制以实现光强的重新分布。研究结果表明,外加电场调制可以实现横向上超分辨性能的调控以及轴向上焦深的扩展,并可得到相应的电光相位延迟范围。     

改进型基于径向双折射晶体的超分辨滤波器

改进了现有的基于径向双折射晶体的横向超分辨滤波器.通过调整偏振器的偏振方向和晶体光轴之间的夹角,改进的滤波器可以实现更广的超分辨可调范围,并且在相同的条件下,相对于现有的连续振幅型超分辨光瞳滤波器,超分辨性能和焦深都有较大提高.改进的超分辨滤波器,为实际应用提供了更多方便.     

Differential confocal technology based on radial birefringent pupil filtering principle

In order to improve the spatial resolution of a confocal system, a radial birefringent pupil filter (RBPF) is introduced into a differential confocal system. RBPF consists of two polarizers with a birefringent element between them, and its pupil function is deduced from Jones matrix. The thickness and curvature radius of RBPF are optimized independently, using the first zero coordinate ratio. The pupil function is modulated by RBPF to enhance the half-width of the response function, and lateral resolution is improved when response curve is changed with the position of RBPF as well as the polarization; then axial super-resolution of the system can be guaranteed using differential confocal detection mechanism. In comparison with conventional pupil filtering technology, RBPF features high lateral resolution and can be easily produced; moreover, it also has a simple structure. Together with its low cost, RBPF provides a new way for the improvement of super-resolution of confocal system. It is indicated from theoretical analysis and preliminary experiments that the lateral resolution can be significantly improved and the measurement error is reduced by 76 nm when measuring a standard grating of period 3 μm; the axial resolution up to 3 nm has been achieved using the optimized pupil filter. In addition to its application for measurement of a small irregular surface in a limited space, the whole differential confocal system proposed can be fitted onto a coordinate measuring machine for non-contact measurement of dimensions and surface roughness.     

Influences of phase shift on superresolution performances of annular filters

This paper investigates the influences of phase shift on superresolution performances of annular filters. Firstly, it investigates the influence of phase shift on axial superresolution. It proves theoretically that axial superresolution can not be obtained by two-zone phase filter with phase shift π, and it gets the phase shift with which axial superresolution can be brought by two-zone phase filter. Secondly, it studies the influence of phase shift on transverse superresolution. It finds that the three-zone phase filter with arbitrary phase shift has an almost equal optimal transverse gain to that of commonly used three-zone phase filter, but can produce a much higher axial superresolution gain. Thirdly, it investigates the influence of phase shift on three-dimensional superresolution. Three-dimensional superresolution capability and design margin of three-zone complex filter with arbitrary phase shift are obtained, which presents the theoretical basis for three-dimensional superresolution design. Finally, it investigates the influence of phase shift on focal shift. To obtain desired focal shifts, it designs a series of three-zone phase filters with different phase shifts. A spatial light modulator (SLM) is used to implement the designed filters. By regulating the voltage imposed on the SLM, an accurate focal shift control is obtained.     

复振幅光瞳滤波器的三维超分辨性能研究

超分辨技术中现有的纯振幅型或纯相位型光瞳滤波器,大部分只能实现轴向或横向超分辨而不能实现三维超分辨,三维超分辨在三维成像系统中有着重要的作用。因此为提高成像系统中的三维分辨能力,设计了一种复振幅光瞳滤波器,并对其三维超分辨性能进行了研究。详细分析了该光瞳滤波器的第一区半径和透射率对施特雷尔比、轴向和横向超分辨因子以及旁瓣能量的影响。通过一系列的模拟证明,借助于复振幅光瞳滤波器可以实现三维超分辨。该滤波器的优点是容易实现三维超分辨,且有比较高的施特雷尔比,缺点是三维超分辨的实现总是伴随着旁瓣能量的增加,但可以采用共焦扫描成像系统来加以抑制。     

Narrow-band high-transmittance birefringent filter and its application in wide color gamut display

We propose a narrow-band birefringent filter and its application in wide color gamut. The birefringent filter consists of five phase retarders and two polarizers, and it has both narrow band and high transmittance. In the experiment, we fabricate the birefringent filter using quartz phase retarders and polarizers, and apply it in serval different displays. The color gamuts of displays are enhanced more than 30%NTSC(National Television System Committee), and the widest color gamuts that have been obtained are 126%NTSC in liquid crystal displays and 138%NTSC in organic light-emitting devices. Moreover,the deep blue light in spectrum of display can be reduced using the birefringent filter. The birefringent filter can be an efficient element to achieve wide color gamut display.     

Design and application of three-zone annular filters

We design three-zone annular filters to be applied to optical storage system. The designed filters extend the depth of focus and realize transverse superresolution simultaneously, which will improve the performance of optical storage system greatly. And we propose two feasible schemes to improve imaging resolution of three-dimensional imaging system. One scheme depends on a complex filter formed by cascading of a three-zone phase filter and a three-zone amplitude filter. The complex filter converge the optimized transverse superresolution and the optimized axial superresolution of two different filters onto a single filter. It can improve the three-dimensional imaging performances greatly. Another scheme depends on a single three-zone complex filter. We propose a three-zone complex filter with phase shift 0.8π, which presents bigger design margin, better imaging quality and stronger three-dimensional superresolution capability.     

可调谐位相型光瞳滤波器的横向光学超分辨和轴向扩展焦深

为克服传统光瞳滤波器的缺点,实现系统光学超分辨性能的可调谐性,设计了一种新型可调谐的位相型光瞳滤波器.该光瞳滤波器包括两个λ/4波片和置于其间的λ/2波片,其中λ/2波片分为两个可作相对旋转的区域.研究结果表明,通过旋转λ/2波片的任意一区域不仅可以实现系统横向光学超分辨能力的可调性,而且可以在横向分辨能力提高的同时实现光学系统轴向焦深的扩展以及轴向焦移. 关键词： 光学超分辨 位相型光瞳滤波器 可调谐     

可调谐位相型光瞳滤波器的横向光学超分辨和轴向扩展焦深

为克服传统光瞳滤波器的缺点，实现系统光学超分辨性能的可调谐性，设计了一种新型可调谐的位相型光瞳滤波器.该光瞳滤波器包括两个λ/4波片和置于其间的λ/2波片，其中λ/2波片分为两个可作相对旋转的区域.研究结果表明，通过旋转λ/2波片的任意一区域不仅可以实现系统横向光学超分辨能力的可调性，而且可以在横向分辨能力提高的同时实现光学系统轴向焦深的扩展以及轴向焦移.     

三区位相型三维超分辨光瞳滤波器的优化设计

用Matlab优化工具箱,采用非线性规划,对三区位相型(π-0-π型)光瞳滤波器进行了优化设计。结果显示,所设计的滤波器较好地实现了横向和轴向的三维超分辨,且轴向超分辨能力优于横向。该滤波器结构简单,容易实现。     

Simple expressions for performance parameters of complex filters, with applications to super-Gaussian phase filters

To study the three-dimensional (3-D) behavior produced by complex filters, we have extended the expressions for the axial and the transverse gain to the case in which the best image plane is not near the paraxial focus. Super-Gaussian phase filters are proposed to control the 3-D image response of an optical system. Super-Gaussian phase filters depend on several parameters that modify the shape of the phase filter, producing tunable control of the 3-D response of the optical system. The filters are capable of producing a wide range of optical effects: transverse superresolution with high depth of focus, 3-D superresolution, and transverse apodization with different axial responses.     

三维超分辨光瞳滤波器的优化设计

利用matlab优化工具箱,采用非线性规划,对三区振幅型(透过率为1-0-1)和三区位相型(相位角为π-0-π)光瞳滤波器进行三维超分辨优化设计,建立了优化模型,经计算机多次迭代运算,改变斯特尔比s值,给出了优化结果.结果显示:所设计的滤波器较好地实现了横向和轴向三维超分辨,且轴向超分辨能力优于横向;相同斯特尔比下,位相型三维超分辨能力优于振幅型,并且这两种滤波器结构简单,容易实现.     

改善轴向分辨率的光瞳滤波器

给出了一种新型滤波器,它即能提高系统的轴向分辨率又不影响其横向分辨率。利用这种滤波器不可以控制远场旁瓣强度的最大值与主瓣强度最大值之比（Ｍ）,从而获得较好的超分辨效果,还根据扩展结果分析了光瞳滤波器的中间区对轴向分辨率的影响。     

用于高数值孔径物镜的可调光瞳滤波器

根据矢量衍射理论，提出了一种用于提高高数值孔径显微物镜纵向分辨率的可调二元环形光瞳滤波器，通过改变滤波器的环半径获得不同的纵向分辨率，并利用共焦显微术点扩散函数的乘积性大大地降低了旁瓣相对主瓣的比值。模拟结果表明，这种新型滤波器不仅可以提高高数值孔径物镜的纵向分辨率，同时基本上不影响横向分辨率。     

Evaluation of polychromatic image quality of a birefringent lens by means of optical transfer function

Polychromatic or white-light optical transfer function (OTF) is put forward as a criterion to evaluate the performance of a uniaxial birefringent lens sandwiched between two linear polarizers. The optic axis of the birefringent crystal is perpendicular to the lens axis. The results show that the same system may be adapted for both enhanced resolution and apodization just by rotating any of the polarizers included in the system even under broadband illumination. The proposed system may also be exploited for image processing applications under polychromatic input illumination.     

非对称三区光瞳滤波器实现一维横向超分辨

基于严格的光学成像矢量衍射理论,以4倍缩小倍率的成像系统和x线偏振光照明为例,得到经光瞳滤波器调制的大数值孔径光学系统焦区横向场表达式.通过详细研究非对称三区复振幅型光瞳滤波器的内外环归一化半径、各环相位分布和第一层透过率t对y方向分辨率增益比Gty,斯特尔比Sy和第一旁瓣与主瓣相对强度Iry的影响.设计了一种非对称三区相位型光瞳滤波器,实现Gty=0.8345,Sy=0.4087,Iry=0.4923,使得y方向分辨率比没有加光瞳滤波器时提高了将近20%.     

Imaging characteristics of a birefringent lens under broadband illumination

This paper reports the imaging characteristics of an optical system consisting of a lens made of a uniaxial birefringent crystal sandwiched between two linear polarizers under polychromatic input illumination. The optic axis of the birefringent crystal is perpendicular to the lens axis and for an initial investigation, the spectral profile of the input beam is considered to be uniform for all wavelengths. The study reveals that if the variation of the birefringence parameters of the device with the wavelength is less, a larger bandwidth may be used without considerably deviating from the imaging characteristics under strictly monochromatic illumination. The nonlinear variation of birefringence with wavelength results in an asymmetric axial irradiance distribution. This obviates an optimal operating wavelength as well as a proper choice of the lens material. It is found that no appreciable change in image quality under diffraction-limited condition results for an input beam having 632 nm operating wavelength and 60 nm bandwidth. Therefore, it may be feasible to use this system with a white light source in conjunction with a wavelength-selective filter.     

利用变迹术和相干门相结合实现光学相干层析成像术轴向超分辨

光学相十层析成像（光学相干层析成像术）的轴向分辨力由光源带宽和探测光束的聚焦条件共同决定。提高光学相干层析成像术轴向分辨力的方法主要基于带宽光源技术。提出了一种将变迹术与光学相十层析成像术相干门有机结合的方法来提高其轴向分辨力。通过适当形式的光瞳滤波器．使光学相干层析成像术系统轴向响应的主瓣宽度缩小到相干门之内,而其旁瓣则处于相干门之外．不对相干成像产生有效贡献。这样．就能在光源带宽不变的条件下,有效提高光学相十层析成像术的轴向分辨力,避免了采用宽带光源所带来的费用昂贵和系统复杂等缺陷。