Three-dimensional integration of microoptical components buried inside photosensitive glass by femtosecond laser direct writing

We report the three-dimensional (3D) integration of microoptical components such as microlenses, micromirrors and optical waveguides in a single glass chip by femtosecond (fs) laser direct writing. First, two types of microoptical lenses were fabricated inside photosensitive Foturan glass by forming hollow microstructures using fs laser direct writing followed by thermal treatment, successive wet etching and additional annealing. One type of lens is the cylindrical microlens with a curvature radius R of 1.0 mm, and the other is the plano-convex microlens with radius R of 0.75 mm. Subsequently, by the continuous procedure of hollow microstructure fabrication, a micromirror was integrated with the plano-convex microlens in the single glass chip. Further integration of waveguides was performed by internal refractive index modification using fs laser direct writing after the hollow structure fabrication of the microlens and the micromirror. A demonstration of the laser beam transmission in the integrated optical microdevice shows that the 3D integration of waveguides with a micromirror and a microoptical lens in a single glass chip is highly effective for light beam guiding and focusing. PACS 42.62.-b; 81.05.Kf; 42.82.Cr; 82.50.Pt; 42.79.Gn     

Three-dimensional microfluidic structure embedded in photostructurable glass by femtosecond laser for lab-on-chip applications

A new technology for rapid prototyping of lab-on-chip devices is described. Direct write of a near-infrared femtosecond laser forms three-dimensional (3D) latent images inside photostructurable glass. Modified regions are developed by a post-annealing and then preferentially etched away in dilute hydrofluoric acid solution with an etching selectivity of 40–50 times, resulting in the formation of true 3D hollow microstructures inside the glass. Microfluidic structures with microcells and microchannels embedded in the glass are fabricated by this technique. PACS 42.62.-b; 47.85.Np; 81.05.Kf     

Microfluidic laser embedded in glass by three-dimensional femtosecond laser microprocessing

Microfluidic dye lasers three-dimensionally embedded in glass have been fabricated for what is believed to be the first time by integrating micro-optical and microfluidic components by use of a femtosecond laser. By pumping the microfluidic laser, in which the microfluidic chamber was filled with the laser dye Rhodamine 6G dissolved in ethanol, with a frequency-doubled Nd:yttrium aluminum garnet laser, lasing action was confirmed by analysis of the emission spectra at different pump powers. In addition, by arranging two microfluidic chambers serially in the glass, we built a microfluidic twin laser that produces an array of two simultaneous laser emissions with one pump laser.     

3-D microstructuring inside photosensitive glass by femtosecond laser excitation

We show that a femtosecond laser enables us to produce true three-dimensional (3-D) microstructures embedded in a photosensitive glass, which has superior properties of transparency, hardness and chemical and thermal resistances. The photosensitivity arises from the cerium in the glass. After exposure to a focused laser beam, latent images are written. Modified regions are developed by a post-baking process and then preferentially etched away in a 10% dilute solution of hydrofluoric acid at room temperature. We have measured the critical dose for modification of the photosensitive glass, and fabricated 3-D microstructures with microcells and hollow microchannels embedded in the glass based on the critical dose. Received: 12 August 2002 / Accepted: 13 August 2002 / Published online: 4 December 2002 RID="*" ID="*"Corresponding author. Fax: +81-48/468-4682, E-mail: mmasudaw@postman.riken.go.jp     

Three-dimensional photonic devices fabricated in glass by use of a femtosecond laser oscillator

Three-dimensional photonic waveguide devices are fabricated in glass by use of femtosecond pulses from an extended-cavity laser oscillator. Three-dimensional devices, including a symmetric three-waveguide directional coupler and a three-dimensional microring resonator, are fabricated and tested. Waveguides can be fabricated at depths of approximately 1 mm inside a glass substrate, thus demonstrating the capability of achieving dramatic increases in device density. These results demonstrate the potential to fabricate new classes of devices that are not possible in two dimensions.     

Optical waveguide fabrication and integration with a micro-mirror inside photosensitive glass by femtosecond laser direct writing

Photosensitive glass is a potentially important material for micro-fluidic devices that can be integrated with micro-optical components for biochemical analysis. Here, we demonstrate the fabrication of optical waveguides inside glass by femtosecond laser direct writing. The influence of the laser parameters on the waveguide properties is investigated, and it is revealed that the waveguide mode can be well controlled. The single mode is achieved at a low writing energy, while the multimode is achieved with increasing energy. In spite of a longitudinally elongated elliptical shape of the cross-sectional profile, the far-field pattern of the single-mode waveguide shows an almost symmetric profile. The measured propagation loss and the coupling loss are evaluated to be ∼0.6 dB/cm and ∼1.6 dB at a wavelength of 632.8 nm, respectively, under the conditions of 1.0–2.0 μJ pulse energy and 200–500 μm/s scan speed. The increased optical loss is associated with a higher waveguide mode at higher writing energy. Furthermore, the integration of waveguides and a micromirror made of a hollow microplate inside the glass is demonstrated to bend the laser beam at an angle of 90° in a small chip. The bending loss is estimated to be smaller than 0.3 dB. PACS 42.62.-b; 42.82.Cr; 82.50.Pt; 42.79.Gn; 42.81.Qb     

Three-dimensional direct femtosecond laser writing of second-order nonlinearities in glass

We demonstrate that direct femtosecond laser writing in silver-containing zinc and gallium phosphate glass enables generation of three-dimensional (3D) optical second-order nonlinear microstructures having an χ(2) value about 2.5 times that of quartz. The proposed physical model involves photo-reduction, photo-dissociation, and migration of silver species within the glass matrix. 3D laser-written second-order nonlinear structures could become a new class of nonlinear optical components.     

Three‐dimensional femtosecond laser micromachining of photosensitive glass for biomicrochips

Internal modification of transparent materials such as glass can be carried out using multiphoton absorption induced by a femtosecond (fs) laser. The fs‐laser modification followed by thermal treatment and successive chemical wet etching in a hydrofluoric (HF) acid solution forms three‐dimensional (3D) hollow microstructures embedded in photosensitive glass. This technique is a powerful method for directly fabricating 3D microfluidic structures inside a photosensitive glass microchip. We used fabricated microchips, referred to as a nanoaquarium, for dynamic observations of living microorganisms. In addition, the present technique can also be used to form microoptical components such as micromirrors and microlenses inside the photosensitive glass, since the fabricated structures have optically flat surfaces. The integration of microfluidics and microoptical components in a single glass chip yields biophotonic microchips, in other words, optofluidics, which provide high sensitivity in absorption and fluorescence measurements of small volumes of liquid samples.     

Fabrication of 3D microoptical lenses in photosensitive glass using femtosecond laser micromachining

We describe the fabrication of microoptical cylindrical and hemispherical lenses vertically embedded in a photosensitive Foturan glass by femtosecond (fs) laser three-dimensional (3D) micromachining. The process is mainly composed of four steps: (1) fs laser scanning in the photosensitive glass to form curved surfaces (spherical and/or cylindrical); (2) postannealing of the sample for modification of the exposed areas; (3) chemical etching of the sample for selective removal of the modified areas; and (4) a second postannealing for smoothening the surfaces of the tiny lenses. We examine the focusing ability of the microoptical lenses using a He-Ne laser beam, showing the great potential of using these microoptical lenses in lab-on-a-chip applications. PACS 42.62.-b; 81.05.Kf; 82.50.Pt     

Direct fabrication of freely movable microplate inside photosensitive glass by femtosecond laser for lab-on-chip application

We demonstrate the fabrication of complicated three-dimensional (3D) microstructures embedded in a photosensitive glass by a high-order multiphoton process using a femtosecond (fs) laser. Direct writing of the fs laser followed by a post baking process and preferential etching in a dilute hydrofluoric (HF) acid solution results in a microplate that can freely move in hollow structures embedded in the glass. The fabricated structure functions as a microvalve that can control the flow direction of fluids in the microreactor. PACS 42.62.-b; 81.05.Kf; 82.50.Pt     

Generation of bubbles in glass by a femtosecond laser

Permanent microscale bubbles with varied size and number density are induced in borosilicate glasses by adjusting the focusing depth (FD) of a tightly focused femtosecond laser. With continuously increasing of the focusing depth, the average size of generated bubbles experiences an increase-decrease process. However, the number density of generated bubbles experiences an opposite changing process compared to the change of the size. The possible mechanism for the bubble generation and changing with the focusing depth has been discussed.     

Three-dimensional micromachining of glass using femtosecond laser for lab-on-a-chip device manufacture

Three-dimensional (3D) micromachining of photosensitive glass is demonstrated by photochemical reaction using femtosecond (fs) laser for lab-on-a-chip application. True 3D hollow microstructures embedded in the glass are fabricated by fs laser direct writing followed by heat treatment and successive wet etching. The modification mechanism of the photosensitive glass by the fs laser and advantage of this process are discussed. Various microcomponents for the lab-on-a-chip devices such as microfluidics, microvalves, microoptics, microlasers, etc. are fabricated by using this technique and their performance is examined . PACS 42.62.-b; 82.50.Pt; 87.80.Mj     

Control of the cross-sectional shape of a hollow microchannel embedded in photostructurable glass by use of a femtosecond laser

Theoretical and experimental investigations have been made of the three-dimensional microchannel fabrication of photostructurable glass by use of a femtosecond (fs) laser. Generally, a microchannel fabricated inside glass by the scanning focal spot of a fs laser perpendicular to the direction of laser propagation assumes an elliptical shape with a cross section of large aspect ratio. We demonstrate that one can greatly reduce the aspect ratio merely by inserting a slit, which is oriented parallel to the laser's scanning direction, before the focusing lens. Computer simulations show that a more symmetrical pattern is obtained in the vicinity of the focal point with the help of such a slit, owing essentially to a diffraction effect.     

The photosensitive effect of Ce on the precipitation of Ag nanoparticles induced by femtosecond laser in silicate glass

This paper studies the photosensitive effect of cerium oxide on the precipitation of Ag nanoparticles after femtosecond laser irradiating into silicate glass and successive annealing. Spectroscopy analysis and diffraction efficiency measurements show that the introduction of cerium oxide may increase the concentration of Ag atoms in the femtosecond laser-irradiated regions resulting from the photoreduction reaction Ce³⁺ + Ag⁺ \to Ce³⁺ + Ag⁰ via multiphoton excitation. These results promote the aggregation of Ag nanoparticles during the annealing process. It is also found that different concentrations of cerium oxide may influence the Ag nanoparticle precipitation in the corresponding glass.     

Micromachining soda-lime glass by femtosecond laser pulses

The physical process of forming a modified region in soda-lime glass was investigated using 1 kHz intense femtosecond laser pulses from a Ti: sapphire laser at 775 nm. Through the modifications induced by the femtosecond laser radiation using selective chemical etching techniques, we fabricated reproducible and defined microstructures and further studied their morphologies and etching properties. Moreover, a possible physical mechanism for the femtosecond laser modification in soda-lime glass was proposed.     

Self-guided glass drilling by femtosecond laser pulses

Straight through-holes of high aspect ratio have been fabricated in glass by femtosecond laser pulses, utilizing unique characteristics of ultrafast lasers such as volumetric multi-photon absorption and nonlinear self-focusing. In this study, interestingly, the drilling process was initiated and progressed in a self-regulated manner, while the laser focus was fixed through the specimen at the neighborhood of the rear surface that was in contact with liquid during the entire drilling process. The deposition of laser energy along the nonlinearly extended focal range and the guided drilling along the pre-defined region are explained based on time-resolved optical transmission and emission measurements.     

Optically encoded second-harmonic generation in germanosilicate glass by a femtosecond laser

Second-harmonic generation in germanosilicate glasses was encoded by coherent superposition of the 810-nm fundamental and the 405-nm second-harmonic light of a femtosecond laser. The difference spectra between the absorption spectra of the glasses before and after preparation were measured. An evident correlation between the induced second-order nonlinearity and the creation of a Ge electron center was observed, suggesting that a band-to-band transition by multiphoton absorption is probably responsible for the photoinduced second-harmonic generation.     

Three-dimensional memory effect in fluorescent photosensitive glass activated by europium and cerium

The persistent extinction of fluorescence emission of Eu(3+) in glasses activated with europium and cerium is reported for the first time to the authors' knowledge. The glass samples containing Eu(3+) and Ce(3+) were initially colorless and transparent and exhibited intense emission peaks at 592 and 612 nm assigned to the (5)D(0)-(7)F(1, 2) transitions of Eu(3+). The complete extinction of the Eu(3+)-ion emission was obtained as an effect of multipulse excimer-UV-laser (lambda = 248 nm, tau(FWHM) >/= 20 ns) irradiation of the glass samples. Fluorescence microscopy, M?ssbauer spectrometry, and electron spin resonance were applied for investigation of the modifications induced by the laser treatment. As a decisive proof of the extinction of fluorescence we succeeded in recording three-dimensional fluorescent photographic patterns within the activated samples.     

Three-dimensional microfluidic channel with arbitrary length and configuration fabricated inside glass by femtosecond laser direct writing

We demonstrate, for the first time to the best of our knowledge, fabrication of three-dimensional microfluidic channels with arbitrary lengths and configurations inside glass by femtosecond laser direct writing. The main fabrication process includes two steps: (1) direct formation of hollow microchannels in a porous glass substrate immersed in water by femtosecond laser ablation and (2) postannealing of the glass substrate at ～1150°C by which the porous glass can be consolidated. We show that a square-wavelike channel with a total length of ～1.4 cm and a diameter of ～64 μm can be easily produced ～250 μm beneath the glass surface.     

Three-dimensional photoprecipitation of oriented LiNbO3-like crystals in silica-based glass with femtosecond laser irradiation

We demonstrate crystals (LiNbO(3)-like) that were space-selectively nucleated and grown in the bulk of silica-based glass by femtosecond laser irradiation at a high repetition rate (typ. 300 kHz). Oriented crystals with their polar axis mostly aligned with or perpendicular to the laser scanning direction have been fabricated by manipulation of the temperature gradient in adjusting the laser parameters. The mechanism for the orientation of femtosecond laser-induced crystallization is briefly discussed.